Prediction of SiNx Thin Film Properties dependent on PECVD Process Parameter Using Neural Network Modeling (신경망을 이용한 PECVD 공정변수에 따른 SiNx 박막의 특성 예측)
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- Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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- 2010.06a
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- pp.206-206
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- 2010