• 대한기계학회논문집A
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• 제41권6호
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• pp.553-560
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• 2017

최근 신체 생물학적 인터페이스와 인체 유사 로봇 공학(Human-like robotics) 분야에서 요구하는 임의적인 형상 제작이 가능하다는 이유로 3D 프린팅 기술에 대한 그 관심이 높아지고 있다. 본 연구의 주된 고려사항은 PDMS로 제작한 탄성 중합체로 지지되는 3D 패키징 생물학적 센서(bio-sensor)의 제작이다. 3D 프린팅 공정을 이용한 PDMS 성형 몰드의 제작은 신체의 표면에 따라 달라지는 임의적인 형상에 적합한 bio-sensor의 제작 뿐만 아니라 고형화 과정 중 균일한 두께분포의 PDMS 성형이 가능하다는 점에서 기존 공정과는 차별화된 중요성을 갖는다. 이와 관련하여 본 연구에서는 몰드를 이용한 PDMS의 제작 과정 중 이형과정 에서의 유연성과 PDMS의 고형화 과정에서 제작 공정의 특성을 만족시키기 위한 PDMS 성형 몰드의 설계에 있어 여러 소재의 부분 별 선택적 배열과 관련한 유한요소해석과 실제 몰드 제작을 통한 실험을 진행하였다.

• 한국산학기술학회논문지
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• 제5권3호
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• pp.223-226
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• 2004

나노 패턴을 갖는 미세 구조물을 낮은 비용으로 생산하기 위해서는 플라스틱 재료를 이용하는 것이 필수적이고, 대량생산이 가능한 가공방법으로 사출성형 공정기술이 유망하다. 본 연구에서는 e-beam 리소그라피로 제작된 석영원판 내의 100-500nm크기의 선과 점 형상을 간단한 thermal embossing 공정을 이용하여 액상 PDMS를 고형화 시킨 후에 원판과 분리시켜 PDMS 몰드를 제작하였다. 실험결과, 원판에 있는 나노 크기의 다양한 패턴들은 PDMS 몰드에 균일하게 전사되었고, 이 몰드는 사출성형용 스탬퍼 제작에 유용하게 이용될 수 있을 것으로 사료된다.

• 한국생산제조학회지
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• 제24권1호
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• pp.38-42
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• 2015

Polydimethylsiloxane (PDMS) is a widely used material for replicating micro-structures because of its transparency, deformability, and easy fabrication. At the nanoscale, however, it is hard to fill a nanohole template with uncured PDMS. This paper introduces several simple methods by changing the surface energy of a nanohole template and PDMS elastomer for replicating 100nm-scale structures. In the case of template, pristine anodic aluminum oxide (AAO), hydrophobically treated AAO, and hydrophillically treated AAO are used. For the surface energy change of the PDMS elastomer, a hydrophilic additive and dilution solvent are added in the PDMS prepolymer. During the molding process, a simple casting method is used for all combinations of the treated template and modified PDMS. The nanostructured PDMS surface was investigated with a scanning electron microscope after the molding process for verification.

• 한국재료학회:학술대회논문집
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• 한국재료학회 2007년도 춘계학술발표대회 및 제12회 신소재 심포지엄
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• pp.38.1-38.1
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• 2007

• 한국소성가공학회:학술대회논문집
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• 한국소성가공학회 2004년도 추계학술대회논문집
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• pp.40-43
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• 2004

Stamps for microcontact processing are fabricated by casting elastomer such as PDMS on a master with a negative of the desired pattern. After curing, the PDMS stamp is peeled away from the master and exposed to a solution of ink and then dried. Transfer of the ink from the PDMS stamp to the substrate occurs during a brief contact between stamp and substrate. Generally, negative-tone masters, which are used for making positive-tone PDMS stamps, are fabricated by using photolithographic technique. The shortcomings of photolithography are a relative high-cost process and require extensive processing time and heavy capital investment to build and maintain the fabrication facilities. The goal of this study is to fabricate a negative-tone master by using Nano-indenter based patterning technique. Various sizes of V-grooves and U-groove were fabricated by using the combination of nanoscratch and HF isotropic etching technique. An achieved negative-tone structure was used as a master in the PDMS replica molding process to fabricate a positive-tone PDMS stamp.

• 한국정밀공학회지
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• 제24권4호
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• pp.153-158
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• 2007

Recently nano imprint lithography to fabricate photonic crystal on polymer is preferred because of its simplicity and short process time and ease of precise manufacturing. But, the technique requires the precise mold as an imprinting tool for good replication. These molds are made of the silicon, nickel and quartz. But this is not desirable due to complex fabrication process, high cost. So, we describe a simple, precise and low cost method of fabricating PDMS stamp to make the photonic crystals. In order to fabricate the PDMS mold, we make the original pattern with designed hole array by finding the optimal electron beam writing condition. And then, we have tried to fabricate PDMS mold by the replica molding with ultrasonic vibration and pressure system. We have used the cleaning process to solve the detaching problem on the interface. Using these methods, we acquired the PDMS mold for photonic crystals with characteristics of a good replication. And the accuracy of replication shows below 1% in 440nm at diameter and in 610nm at lattice constant by dimensional analysis by SEM and AFM.

• 대한기계학회논문집A
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• 제38권8호
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• pp.823-829
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• 2014

본 연구에서는 계면활성제를 첨가한 사각 PDMS(polydimethylsiloxane) 마이크로 채널에서의 모세관 흐름에 의한 충전 길이를 예측하기 위한 모델들을 제안하였다. 일반적으로 PDMS 의 소수성 특성 때문에 모세관 힘만을 이용한 PDMS 마이크로 채널에서의 물의 이동에는 어려움이 따르게 된다. 따라서 본 연구에서는 계면활성제를 첨가하여 친수성을 가지는 PDMS 표면을 제작하고, 이 표면에서의 물의 접촉각 변화 측정 및 단순 모델을 수립하였다. 또한 친수성 PDMS 마이크로 채널에서의 모세관 힘에 따른 충전 길이를 예측하기 위해서 Washburn 방정식을 바탕으로 한 단순 모델을 수립하였다. 그 결과 유체의 충전 길이는 접촉각의 초기변화속도의 영향을 받는 것을 확인할 수 있었다. 이를 바탕으로 대표적인 세가지 경우에 대한 모델을 제안하였으며, 이들은 MIMIC(MIcroMolding In Capillaries)과 같은 마이크로 유체 기반의 생산공정의 설계와 개발에 유용하게 적용될 수 있을 것이다.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2005년도 춘계학술대회 논문집
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• pp.1493-1496
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• 2005

In this paper, we describe a simple, precise and low cost method of fabricating PDMS stamp for UV embossing. It is important to improve the replication quality of stamp because the accuracy of fabricated structure is related to that of the stamp in UV embossing. The PDMS stamp has been fabricated by the replica molding technology with ultrasonic vibration to eliminate micro-air bubbles during the fabrication process of PDMS stamp. Also, this fabrication to use ultrasonic vibration promotes PDMS solution to fill into micro channel and edge parts. We report the fabrication of an optical core using UV embossing with fabricated PDMS stamp. This fabricated core is $7\;\mu{m}\;at\;depth,\;6\;\mu{m}\;at\;width.\;This\;measured\;value\;has\;the\;difference\;below\;1\;\mu{m}$compared to the original stamp. The surface roughness of core is about 14 nm root mean square. This is satisfactory value to use low-loss optical waveguide. Our successful demonstration of precise replica technology presents an alternative approach for the stamp of UV embossing.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2007년도 추계학술대회 논문집
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• pp.99-100
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• 2007

Transferring patterns from mold to PDMS stamp is very useful technology in micro-fabrication, complex and three-dimensional structures. First experimentation, mold's patterns wens transferred to PDMS stamp. Comparing with PDMS stamp and Mold, patterns were transferred about 97.9%. Second experimentation, PDMS stamps were made several times by only one mold, scale and distance of transferred patterns were uniform about 89.3%. We proved that transferring patterns from mold to PDMS stamp is accurate. The uniformity of stamps is the same after mold was used several times. Transferring patterns from mold to PDMS stamp has uniformity and accuracy, it will be useful technology.

• 대한기계학회논문집A
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• 제32권9호
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• pp.720-727
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• 2008

Microfluidic single chip integrating thermopneumatic micropump and micro check valve are developed. The micropump and micorvalve are made of biocompatible materials, glass and PDMS, so as to be applicable to the biochip. By using the passive-type check valve, backward flow and fluid leakage are blocked and flow control is stable and precise. The chip is composed of three PDMS layers and a glass substrate. In the chip, flow channel and pump chamber were made on the PDMS layers by the replica molding technique and pump heater was made on the glass substrate by Cr/Au deposition. Diameter of the pump chamber is 7 mm and the width and depth of the channel are 200 and $180{\mu}m$, respectively. The PDMS layers chip and the heater deposited glass chip are combined by a jig and a clamp for pumping operation, and they are separable so that PDMS chip is used as a disposable but the heater chip is able to be used repeatedly. Pumping performance was simulated by CFD software and investigated experimentally. The performance was the best when the duty ratio of the applied voltage to the heater was 33%.