• 폴리머
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• 제30권5호
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• pp.407-411
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• 2006

액상의 고분자 전구체 polyvinylsilazane (PVS) 혹은 allylhydridopolycarbosilane(AHPCS)를 실리콘 기판 위에 스핀 코팅한 다음, DVD 마스터로부터 제조된 polydimethylsiloxane(PDMS) 몰드를 이용한 자외선 나노임프린트법으로 나노 크기의 고분자 패턴을 제조하였다. 나아가 질소 분위기하에서 $800^{\circ}C$ 열처리함으로써 각각 SiCN, SiC 세라믹 패턴도 제조하였다. 가교된 고분자와 세라믹 패턴의 폭과 넓이를 원자힘현미경(AFM)과 주사전자현미경(SEM)으로 관측한 결과 PVS와 AHPCS의 패턴 높이는 각각 38.5%와 24.1%, 패턴 폭은 18.8%와 16.7%의 수축률을 나타내었다. 즉 전구체의 세라믹 수율이 높을수록 세라믹 패턴 수축률은 낮아졌고, 패턴과 기판과의 접착에 의한 수축억제로 이방성 수축현상도 관찰되었다. 본 연구결과는 새로운 세라믹 MEMS 소자제작공정으로서 나노임프린트법의 가능성과 수축률 제어 연구가 필요함을 제시하고 있다.

• Design & Manufacturing
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• 제16권3호
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• pp.58-65
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• 2022

Micro-fluidic chip has been fabricated by lithography process on silicon or glass wafer, casting using PDMS, injection molding of thermoplastics or 3D printing, etc. Among these processes, 3D printing can fabricate micro-fluidic chip directly from the design without master or template for fluidic channel fabricated previously. Due to this direct printing, 3D printing provides very fast and economical method for prototyping micro-fluidic chip comparing to conventional fabrication process such as lithography, PDMS casting or injection molding. Although 3D printing is now used more extensively due to this fast and cheap process done automatically by single printing machine, there are some issues on accuracy or surface characteristics, etc. The accuracy of the shape and size of the micro-channel is limited by the resolution of the printing and printing direction or layering direction in case of SLM type of 3D printing using UV curable resin. In this study, the printing direction and thickness of each printing layer are investigated to see the effect on the size, shape and surface of the micro-channel. A set of micro-channels with different size was designed and arrayed orthogonal. Micro-fluidic chips are 3D printed in different directions to the micro-channel, orthogonal, parallel, or skewed. The shape of the cross-section of the micro-channel and the surface of the micro-channel are photographed using optical microscopy. From a series of experiments, an optimal printing direction and process conditions are investigated for 3D printing of micro-fluidic chip.

• 한국생산제조학회지
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• 제23권1호
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• pp.64-68
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• 2014

This paper introduces the use of a crown-shaped (CR) lens to effectively diffuse the light from a light-emitting diode (LED) without any loss in the light intensity, in contrast to polymer-bulb-type diffusers. The diffusion lens was designed based on the Snell's law, which describes the physical path of a ray passing through the boundary between different media. CR lenses were fabricated by polydimethylsiloxane (PDMS) casting and UV-embossing processes, which used a pre-designed metal mold and UV-curable resin, respectively. Through experiments and optical evaluations, it was verified that the newly proposed CR lens not only decreased the vertical light strength and glare effect from an LED light source but also improved the diffusion characteristics while maintaining the quality of the LED's light intensity.

• 대한기계학회논문집A
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• 제28권9호
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• pp.1429-1434
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• 2004

Immunoassay is one of the important analytical methods for clinical diagnoses and biochemical studies, but needs a long time, troublesome procedures and expensive reagents. In this study, therefore, we propose the micro filter chip with microbeads for immunoassay, which has pillar structures. The advantage of the proposed micro filter chip is to use simple fabrication process and cheap materials. The mold was made by the photolithography technique with Si wafer and negative photoresist SU-8. The replica was made of PDMS, bonded on the pyrex glass. The micro filter chip consists of inlet channel, filter chamber and outlet channel. HBV (Hepatitius B virus) monoclonal antibody (Ag1) labeled with biotin were immobilized onto streptavidin coated beads of 30∼50 $\mu$m size. Fluorescein isothiocyanate (FITC)-labeled HBV monoclonal antibody (Ag8) was used to detect HBsAg (Hebatitis B virus surface Antigen), and fluorescence intensity was monitored by epi-fluorescence microscope. In this study, the immune response of less than 30 min was obtained with with the use of 100 $m\ell$ of sample.

• 대한전기학회:학술대회논문집
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• 대한전기학회 2008년도 제39회 하계학술대회
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• pp.1476-1477
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• 2008

This paper reports on a flexible flap valve actuated by electromagnetic force under a constant pressure source. The flexible flap valve consists of the three main components: a flexible flap with a steel disk embedded in PDMS, an electromagnetic actuator and two glass plates with inlet and outlet. Sealing lip structures for improving the valve characteristics are added on the outlet of the bottom glass substrate. The flap valve is fabricated by the spin-coating process, the EDM process, SU-8 mold process and oxygen plasma treatment. The dimension of an assembled flap valve is $12mm{\times}20mm{\times}28mm$. The stroke volume of the flap valve is measured for various pressures and open times. When the input voltage of 30 V is applied for 0.33 s, the minimum stroke volume of the flap valve is 70 ${\mu}L$ at 50 kPa.

• 대한전기학회:학술대회논문집
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• 대한전기학회 2008년도 제39회 하계학술대회
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• pp.1484-1485
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• 2008

The control of the number and dimension of nanowires is essential for dielectrophoretic(DEP) nanoscale assembly process. However, it is difficult to control the number of nanowires assembled between the electrodes. We have developed a nanowire diluter device, which consists of a glass substrate with gold electrodes and a PDMS layer with microchannel. The diluter device is fabricated by the conventional and soft lithographies using a SU-8 mold. Nickel nanowires (30${\mu}m$-long) are fabricated by a template-directed electrodeposition process using nanoporous alumina templates. A solution containing nanowires is injected into an inlet whereby pulsed voltages are applied to 16 pairs of electrodes in this experiment. The nanowires are trapped or released depending on the pulsed electric field from inlet to outlet (the channel). Therefore, the number of nanowires can be decreased correspondingly if the fixed frequency at each electrode is decreased from electrode to electrode.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2010년도 제39회 하계학술대회 초록집
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• pp.287-287
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• 2010

We report a new direct patterning method, called liquid bridge-mediated nanotransfer molding (LB-nTM), for the formation of two- or three-dimensional structures with feature sizes between tens of nanometers and tens of micron over large areas. LB-nTM is based on the direct transfer of various materials from a mold to a substrate via a liquid bridge between them. This procedure can be adopted for automated direct printing machines that generate patterns of functional materials with a wide range of feature sizes on diverse substrates. Arrays of TIPS-PEN TFTs were fabricated on 4" polyethersulfone (PES) substrates by LB-nTM using PDMS molds. An inverted staggered structure was employed in the TFT device fabrication. A 150 nm-thick indium-tin oxide (ITO) gate electrode and a 200 nm-thick SiO2dielectric layer were formed on a PES substrate by sputter deposition. An array of TIPS-PEN patterns (thickness: 60 nm) as active channel layers was fabricated on the substrate by LB-nTM. The nominal channel length of the TIPS-PEN TFT was 10 mm, while the channel width was 135 mm. Finally, the source and drain electrodes of 200 nm-thick Ag were defined on the substrate by LB-nTM. The TIPS-PEN TFTs can endure strenuous bending and are also transparent in the visible range, and therefore potentially useful for flexible and invisible electronics.

• 소성∙가공
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• 제12권7호
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• pp.640-646
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• 2003

The nanoprobe based on lithography, mainly represented by SPM based technologies, has been recognized as potential application to fabricate the surface nanostructures because of its operational versatility and simplicity. The objective of the work is to suggest new mastless pattern fabrication technique using the combination of machining by nanoindenter and KOH wet etching. The scratch option of the nanoindenter is a very promising method for obtaining nanometer scale features on a large size specimen because it has a very wide working area and load range. Sample line patterns were machined on a silicon surface, which has a native oxide on it, by constant load scratch (CLS) of the Nanoindenter with a Berkovich diamond tip, and they were etched in KOH solutions to investigate chemical characteristics of the machined silicon surface. After the etching process, the convex structure was made because of masking effect of the affected layer generated by nano-scratch. On the basis of this fact, some line patterns with convex structures were fabricated. Achieved patterns can be used as a mold that will be used for mass production processes such as nanoimprint or PDMS molding process. All morphological data of scratch traces were scanned using atomic force microscope (AFM).

• Design & Manufacturing
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• 제15권2호
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• pp.11-16
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• 2021

Recently, three-dimensional (3D) cell culture systems, which are superior to conventional two-dimensional (2D) vascular systems that mimic the in vivo environment, are being actively studied to reproduce drug responses and cell differentiation in organisms. Conventional two-dimensional cell culture methods (scaffold-based and non-scaffold-based) have a limited cell growth rate because the culture cannot supply the culture medium as consistently as microvessels. To solve this problem, we would like to propose a 3D culture system with an environment similar to living cells by continuously supplying the culture medium to the bottom of the 3D cell support. The 3D culture system is a structure in which microvascular structures are combined under a scaffold (agar, collagen, etc.) where cells can settle and grow. First, we have manufactured molds for the formation of four types of microvessel-mimicking chips: width / height ①100 ㎛ / 100 ㎛, ②100 ㎛ / 50 ㎛, ③ 150 ㎛ / 100 ㎛, and ④ 200 ㎛ / 100 ㎛. By injection molding, four types of microfluidic chips were made with GPPS (general purpose polystyrene), and a 100㎛-thick PDMS (polydimethylsiloxane) film was attached to the top of each microfluidic chip. As a result of observing the flow of the culture medium in the microchannel, it was confirmed that when the aspect ratio (height/width) of the microchannel is 1.5 or more, the fluid flows from the inlet to the outlet without a backflow phenomenon. In addition, the culture efficiency experiments of colorectal cancer cells (SW490) were performed in a 3D culture system in which PDMS films with different pore diameters (1/25/45 ㎛) were combined on a microfluidic chip. As a result, it was found that the cell growth rate increased up to 1.3 times and the cell death rate decreased by 71% as a result of the 3D culture system having a hole membrane with a diameter of 10 ㎛ or more compared to the conventional commercial. Based on the results of this study, it is possible to expand and build various 3D cell culture systems that can maximize cell culture efficiency by cell type by adjusting the shape of the microchannel, the size of the film hole, and the flow rate of the inlet.

• 한국전자파학회논문지
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• 제29권4호
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• pp.247-255
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• 2018

본 논문에서는 complementary split ring resonator(CSRR)을 이용하여 마이크로파 대역에서 비침습적으로 포도당 수용액과 염화나트륨 수용액을 구별하였다. 개방형 동축 프로브로 측정한 두 수용액의 전기적 특성을 기반으로 구별이 유리한 주파수에서 동작하는 CSRR을 설계, 제작하였다. 그리고 공진기의 전기장이 강하게 형성되는 부분에 수용액을 집중시키기 위해 PDMS mold를 제작하였고, 라미네이트 필름으로 수용액과 공진기의 접촉을 방지하였다. 두 수용액의 농도는 인체 혈당 농도 범위인 400 mg/dL까지 100 mg/dL 단위로 나누었고, $50{\mu}L$의 수용액으로 실험하였다. 공진 주파수에서 포도당 수용액과 염화나트륨 수용액의 투과계수($S_{21}$)를 측정한 결과, 100 mg/dL 농도 변화 대비 각각 -0.06 dB, 0.14 dB 변하는 것을 확인하였고, 상반된 경향을 통해 두 수용액의 농도에 따른 $S_{21}$의 변화를 선택적으로 구별하였다.