• The Transactions of the Korean Institute of Electrical Engineers C
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• v.52 no.12
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• pp.579-585
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• 2003

Recently the utilization of the ozone dissolved de-ionized water(DI-O3 water) in semiconductor wet cleaning process to replace the conventional RCA methods has been studied. In this paper, we propose the water-electrode type ozone generator which has the ozone gas characteristics of the high concentration and high purity to produce the high concentration DI-O3 water for the silicon wafer surface cleaning process. The ozone generator has the dual dielectric tube structure of silent discharge type and the water is both used to electrode and cooling water. We investigate the performance of the proposed ozone generator which has the design goal of the concentration of 7[wt%] and ozone generation quantity of 6[g/hr] at flow rate of 1[$\ell$/min). The experiment results show that the water electrode type ozone generator has the characteristics of 8.48[wt%] of concentration, 8.08[g/hr] of generation quantity and 76.2[g/kWh] of yield and it's possible to use the proposed ozone generator for the DI-O3 water cleaning process of silicon wafer surface.

• Journal of the Korean Institute of Illuminating and Electrical Installation Engineers
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• v.14 no.2
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• pp.68-74
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• 2000

In this paper the concentration, yield and generation quantity of the ozone by the superposition discharge according to the coaxial electrodes geometry is described. In order to improve the ozone generation, a new type of ozonizer is proposed, where a silent discharge and a surface discharge are generated in the separated discharge spaces at the same time. To investigate the ozone generation dependency on electrode geometry, a few discharge tubes with different geometry were fabricated. In our experiment, the 60[Hz] one phase voltage is applied to the discharge tube which has three electrodes. And three kinds of discharges, two silent discharges and a surface discharge are superposed in the same space of the ozonizer. As a result, the followings are obvious. When two kinds of discharges are superposed under the condition using 3 electrode-3gap discharge tube, the maximum ozone efficiency is obtained.

• The Transactions of the Korean Institute of Electrical Engineers
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• v.36 no.9
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• pp.651-654
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• 1987

There are a number of small scale application fields of ozone, such as food conservation and/or storage in refrigerators, containers and storage rooms, deodorization in the production and living areas, protection against biohazards, bleaching of fabrics, etc. For these applications, miniaturization, ozone controllability and costdown of the ozonizer are the most essential points, whereas power efficiency is the most imporant factor in the case of a large scale ozonizer used in various industrial applications. It has been developed a novel sawtooth-to-cylinder type micro-ozonizer meeting above the three points by using a negative pulse corona discharge. As a result of the observations of pulse coronas affecting ozone generation, it is found that the maximum ozone concentration is generated at the pulse streamer coronas in both positive and negative case. The ozone concentration (20ppm/2l/min) generated by the negative pulse corona is about 2 times higher than that of the positive pulse corona, and could be controllable linearly by adjusting the dc input voltage of the [supply-inth ] cinventional small scale ozonizers. As a result, the present ozonizer is also very good to be used as a micro-ozonizer.

• Proceedings of the KIEE Conference
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• 2002.11a
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• pp.170-172
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• 2002

Thin, Boron-doped conducting diamond films are expected to be excellent electrodes for industrial electrolysis. Boron-doped diamond(BDD) were used as anode for generating ozone gas by electrolysis of acid solution. In this work, we have studied ozone generating system using BDD electrode. In order to determine the ozone generation properties of diamond electrode, experimental conditions, electrolyte concentration, temperature, flow rate and reaction time were varied diversely. As a result, we could confirm that ozone gas was generated successfully and the performance of diamond electrode was stable for electrolyte while $PbO_2$ electrode was disintegrated. Actually we are found that ozone amount increased by lowering the temperature of electrolyte.

• Proceedings of the KIEE Conference
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• 1999.07e
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• pp.2259-2261
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• 1999

In this paper, an ozonizer, which can generate individual and superposed silent discharge, using three-phase voltage has been designed and manufactured. The ozonizer consists of 3 electrodes(Central Electrode, Internal Electrode and External Electrode) and 2 gaps(gap between Central Electrode and Internal Electrode, gap between Internal Electrode and External Electrode). Ozone is generated according to voltage supplying method to each electrode by individual silent discharge and three-phase superposed discharge. The characteristics of ozone generation were investigated with variation of discharge power and the quantity of supplied gas($O_2$). In case of individual silent discharge, the maximum values of ozone concentration, ozone generation and ozone yield were obtained between internal electrode and external electrode, and its values were 2300[ppm], 570[mg/h] and 745[g/kWh] respectively. Each maximum values was 5039[ppm], 1773[mg/h] and 851[g/kWh] respectively, when three-phase superposed silent discharge was employed. Therefore, characteristics of ozone generation with three-phase voltage are improved compared with single-phase voltage because silent discharge is generated continuously.

• Journal of the Korean Institute of Illuminating and Electrical Installation Engineers
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• v.28 no.5
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• pp.76-81
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• 2014

The ozone generation is commonly made with silent discharge method using quartz glass dielectric. In this paper, using $Al_2O_3$ dielectric to instead of the traditional quartz glass dielectric to improve the system efficiency is presented. The dielectric was manufactured as tube shape (Internal diameter${\times}$ Outside diameter: $11{\times}15mm$) using 99% $Al_2O_3$ ceramic. The characteristics of dielectric discharge and ozone generation were studied of experiments with variation of discharge power, discharge electrode space and rate of flow for supplied gas ($O_2$/Air). As the experimental results, in the same discharge space, the ozone concentration continuously increased with input power increasing, and ozone yield increased until saturation happened. Also, the expended power increased with discharge space extended due to discharge power increased. In additional, the ozone concentration of oxygen ozone was higher than air that was observed when using oxygen ozone in proposed experiments.

• Journal of Korean Society of Environmental Engineers
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• v.39 no.10
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• pp.549-555
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• 2017

The purpose of this study is to investigate how ozone-dissolution-tank structure affects micro-ozone-bubble distribution, energy consumption and water treatment efficiency. The partition walls inside the ozone-dissolution-tank generate pressure changes, shear forces, and swirling flows, which change the size of the bubble diameter. The size of the bubble diameter differs by 10.5% depending on the partition walls. Changes in ozone-bubble diameter are related to energy consumption. As the ozone-bubble becomes smaller, the bubble generation energy increases, but the ozone production energy decreases as the dissolution efficiency increases. Therefore, an ozone-dissolution-tank should be determined by means of an optimal condition producing a micro-ozone-bubble with a minimum sum of bubble generation energy and ozone production energy. The energy consumed to inject the same amount of ozone into the effluent differs by 2.5% depending on the partition walls. However, considering the water treatment efficiency, the conditions for selecting the ozone-dissolution-tank are variable. This is because the free radicals that increase as the ozone-bubble gets smaller are very efficient for water treatment. Even at the same ozone injection concentration, the water treatment efficiency differs by 10.4% according to the partition walls. Therefore, we have studied ozone-dissolution-tank structure which produces reasonable ozone-bubble considering water treatment efficiency and energy efficiency.

• The Transactions of The Korean Institute of Electrical Engineers
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• v.56 no.5
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• pp.933-937
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• 2007

A point plate type nonthermal plasma reactor, with a grounded cylindrical third electrode which closely- encompasses the needle point, have been investigated with an emphasis on the role of the third electrode. It was found that the point plate airgap, with the grounded third electrode, had a switching characteristic on its I V characteristics for negative and positive discharges, which is very different from that of a conventional point plate airgap without a third electrode. The corona discharge and ozone generation characteristics of the plasma reactor with the grounded cylindrical third electrode, such as the corona onset voltage. the breakdown voltage. the corona current. and the amount of output ozone, were influenced significantly by the height of the third electrode. and these characteristics can be controlled by adjusting the height of the third electrode.

• Journal of the Korean Institute of Illuminating and Electrical Installation Engineers
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• v.14 no.2
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• pp.59-67
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• 2000

In this paper, an ozonizer, which can supply individual and superposed silent discharge using three-phase voltage has been designed and manufactured. The ozonizer consists of 3 electrodes(Central Electrode, Internal Electrode and External Electrode and External electrode) and 2 gaps (gap between Central Electrode and Internal Electrode, gap between Internal Electrode and External Electrode). Ozone is generated according to voltage supplying method to each electrode by individual silent discharge and three-phase superposed discharge. The characteristics of ozone generation were investigated with variation of discharge power and the flow rate of supplied gas (O2). In case of individual silent discharge, the maximum values of ozone concentration, ozone generation and ozone yield were obtained between internal electrode and external electrode, and its values were 2300[ppm], 570[mg/h] and 745[g/kWh] respectively. Each maximum value was 5039[ppm], 1773[mg/h] and 851[g/kWh] respectively, when three-phase superposed silent discharge was employed. Therefore, characteristics of ozone generation with three-phase voltage are improved compared with single-phase voltage because silent discharge is generated continuously.

• The Transactions of the Korean Institute of Electrical Engineers C
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• v.49 no.8
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• pp.468-476
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• 2000

Nowadays, ozone is mainly utilized for water treatment and home equipments. Although the demand for ozone is increasing, the ozone yield of silent discharge type ozonizer is low. Therefore, it is expected to improve the energy efficiency and ozone yield of an ozonizer. In this paper, a new ozone generation system is proposed. The 60[Hz] three-phase voltage is applied to three-phase superposed discharge type ozonizer(3PSDO) which has three electrodes(central, internal and external electrodes). There is no discharge pause time when three-phase voltage is applied due to 120-degree phase difference of applied voltage. The synergy effect of the three-phase superposed discharge type ozonizer is investigated by comparing with the three sort of single-phase discharge type ozonizer(1PDO). So, three-phase superposed discharge type ozonizer is able to obtain high ozone yield, and optimize discharge space, because this can increase the discharge power at low applied voltage.