• 연구논문집
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• s.33
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• pp.99-109
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• 2003

Recently the utilization of the ozone dissolved de-ionized water(DIW-$O_3$) in semiconductor wet cleaning process and photoresist stripping process to replace the conventional sulfuric acid and hydro peroxide mixture(SPM) method has been studied. In this paper, we propose the water-electrode type ozone generator which has the characteristics of the high concentration and purity to produce the high concentration DIW-$O_3$ for the photoresist strip process in the semiconductor fabrication. The proposed ozone generator has the dual dielectric tube structure of silent discharge type and the water is both used to electrode and cooling water. Through this study, we obtained the results of the 10.3 wt% of ozone gas concentration at the oxygen gas of 0.5 [liter/min.] and the DIW-$O_3$ concentration of 79.5 ppm.. Through the photoresist stripping test using the produced DIW-$O_3$, we confirmed that the photoresist coated on the silicon wafer was removed effectively in the 12 minutes.

• Proceedings of the KIEE Conference
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• 1995.07c
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• pp.1407-1409
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• 1995

This paper describes ozone concenteration($O_{3con}$), ozone generation($O_{3g}$) and ozone yield($O_{3Y}$) of lamp type ozonizer which be performed a role of lighting source and ozonizer. OLamp is consist of two of low pressure mercury lamps. The important conclusions obtained from this paper are as follows, The more quality of supplied gas(Q) decrease, the higher $O_{3con}$ rise. The more quality of supplied gas(Q) increase, the higher $O_{3g}$ some rise. When supplied oxygen 10[l/min] obtained 4,010[mg/kwh] $O_{3Y}$. The Echerichia coli which is reacted on ozone can be sterilized about 95[%].

• The Plant Pathology Journal
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• v.34 no.4
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• pp.335-340
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• 2018

To investigate the difference in the disinfectant efficiency of ozone microbubbles ($O_3MB$) and ozone millibubbles ($O_3MMB$), the morphological change of the treated Fusarium oxysporum f. sp. melonis spores was observed with scanning and transmission electron microscopies (SEM and TEM). The disinfectant efficiency of $O_3MB$ on F. oxysporum f. sp. melonis spores was greater than that of $O_3MMB$. On observation with SEM, it was revealed that morphological change of F. oxysporum f. sp. melonis spores was caused by $O_3MB$ and $O_3MMB$, and damage to the spore surfaces by $O_3MB$ occurred sooner than that by $O_3MMB$. On observation with TEM, it was furthermore confirmed that F. oxysporum f. sp. melonis spores treated with $O_3MB$ induced wavy deformation of cell membrane and the intracellular change different from that with $O_3MMB$. Therefore, the greater disinfection efficiency of $O_3MB$ was suggested to be caused due to the function of the MB in addition to the oxidative power of $O_3$.

• Journal of Environmental Health Sciences
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• v.23 no.3
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• pp.121-129
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• 1997

This study was performed to delineate the removal phenol in solutions using of ozone, ozone/$H_2O_2$ and ozone/GAC. The disinfection by-product of phenol by ozonation, hydroquinone, was analyzed and it's control process was investigated. The followings are the conclusions that were derived from this study. 1. The removal efficiency of phenol by ozonation was 58.37%, 48.34%, 42.15%, and 35.41% which the initial concentration of phenol was 5 mg/l, 10 mg/l, 15 mg/l, and 20 mg/l, respectively. 2. The removal efficiency of phenol by ozonation was 42.95% at pH 4.0 and 69.39% at pH 10, respectively. The removal efficiencies were gradually increased, as pH values were increased. 3. With the ozone/$H_2O_2$ combined system, the removal efficiency of phenol was 72.87%. It showed a more complete degradation of phenol with ozone/$H_2O_2$ compared with ozone alone. 4. When ozonation was followed by filtration on GAC, phenol was completely removed. 5. Oxidation, if carried to completion, truly destroys the organic compounds, converting them to carbon dioxide. Unless reaction completely processed, disinfection by-products would be produced. To remove them, ozone/GAC treatment was used. The results showed that disinfection by-product of phenol by ozonation, hydroquinone, was completely removed. These results suggested that ozone/GAC should also be an appropriate way to remove phenol and its by-product.

• The Transactions of the Korean Institute of Electrical Engineers C
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• v.52 no.12
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• pp.579-585
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• 2003

Recently the utilization of the ozone dissolved de-ionized water(DI-O3 water) in semiconductor wet cleaning process to replace the conventional RCA methods has been studied. In this paper, we propose the water-electrode type ozone generator which has the ozone gas characteristics of the high concentration and high purity to produce the high concentration DI-O3 water for the silicon wafer surface cleaning process. The ozone generator has the dual dielectric tube structure of silent discharge type and the water is both used to electrode and cooling water. We investigate the performance of the proposed ozone generator which has the design goal of the concentration of 7[wt%] and ozone generation quantity of 6[g/hr] at flow rate of 1[$\ell$/min). The experiment results show that the water electrode type ozone generator has the characteristics of 8.48[wt%] of concentration, 8.08[g/hr] of generation quantity and 76.2[g/kWh] of yield and it's possible to use the proposed ozone generator for the DI-O3 water cleaning process of silicon wafer surface.

• Journal of Environmental Science International
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• v.22 no.7
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• pp.905-913
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• 2013

We compared the applicability and economical efficiency of peroxone process with those of ozone process in the existing water treatment plant on downstream of Nakdong River. After comparing the peroxone process for removing geosmin with the ozone process in lab scale test, peroxone process showed much higher removal efficiency than the ozone process at the same ozone dosage. Proper range of $H_2O_2/O_3$ ratio were 0.5~1.0 and the half-life of geosmin was about 5.5~6.8 min when the $H_2O_2/O_3$ ratio was set to 0.5 during 1~2 mg/L of ozone dosage. Peroxone process could reduce the ozone dosage about 50 to maximum 30% for the same geosmin removal efficiency compared to the ozone process in the pilot scale test. In case of 1,4-dioxane treatment, peroxone process could have 3~4 times higher efficiency than ozone process at the same ozone dosage. The results of estimating the economical efficiency of ozone and peroxone process for treating geosmin and 1,4-dioxane by using pilot scale test, in case of the removal target was set to 85% for these two materials, the cost of peroxane process could be reduced about 1.5 times compared to ozone process, and in the same production cost peroxone process could have 2~3 times higher removal efficiency than ozone process. The removal efficiency by peroxone process showed a large difference depending on the physicochemical characteristics of target materials and raw water, therefore detailed examination should be carried out before appling peroxone process.

• Journal of Korean Society of Water and Wastewater
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• v.18 no.1
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• pp.59-65
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• 2004

The change of the microbial community structure in excess sludge of different sewage treatment plants by ozone treatment was investigated by quinone profiles. The resulting ozone dosage ranged from 0.1 to $0.4gO_3/gTS$. In terms of overall sludge reduction, more than 50% reduction of the total sludge mass could be achieved by ozone treatment at $0.4gO_3/gTS$. Quinone concentration and type in sludge of different treatment plants were remarkably decreases with increasing ozone dose. Ubiquinones(UQs)-8, -10 and MK-8 were still remained in the ozonized sludge at $0.4gO_3/gTS$. The results of this study showed that the remaining microorganisms belong to UQs-8, -10 and MK-8 were difficult to destruct cell membrane or wall by ozonation. Fecal Streptococci and Salmonella were not detected at ozone dose of $0.2gO_3/gTS$, but Fecal Coliform was not detected at ozone dose of $0.4gO_3/gTS$.

• Journal of Environmental Health Sciences
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• v.19 no.4
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• pp.44-50
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• 1993

This paper has concentrated on estimating the improvement of sludge dewaterability for the application of ozone in sewage treatment plant sludge. The experiment for the study was conducted by batch reactor, contacting ozone (5.0 g O$_3$/hr/l) to waste sludge and measured the Specific Resistance to Filtrate (SRF) varying pH, pressure and reaction time of ozone. And then checked the dissolved solids concentration of flitrate. The results of experiment were as follows: 1. When the total solids concentration of excess sludge was 9, 000 mg/l, the optimum injection rate of ozone was 5.0 g O$_3$/hr/l, and then pressure was 50 cm Hg for the measuring SRF. 2. In the range of pH 3~5, the effect of ozone injection was excellent, but it was unsatisfactory in the range of pH 9~11. Therefore, the ozone injection by acidifying pH level was effective in improving the dewaterability of sludge. 3. It was estimated that the dissolved solids concentration of flitrate was increased in proportion to the injection rate of ozone.

• Journal of Korean Society of Water and Wastewater
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• v.25 no.4
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• pp.605-610
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• 2011

The objectives of this study are to investigate a bromate behaviour in the processes of advanced water treatment system (AWTS: preozonation, coagulator-settler, rapid sand filter, postozonation, biological activated carbon (BAC) beds) and to investigate the effects of ozonation, pH and ammonia nitrogen on bromate (${BrO^-}_3$) formation. As a result, $BrO_3$ was not detected in the processes of the AWTS without ozonation, while it was detected in a preozonated and postozonated water. For $BrO_3$ formation during June to November, the $BrO_3$ concentration of <9.4${\mu}g/L$ was observed in postozonated water, while it was reduced to about 46% by BAC beds. When applied ozone dosage and ozone contact time for influent with $Br^-$ of <0.3mg/L were 0.5-2.0mg/L.min and 10 min., $BrO_3$ concentration increased with increasing ozone dosage. Longer contact time and lower ozone level also was needed to inhibit the formation of $BrO_3$. At ozone dosage of 1.4 mg/L.min, the formation rate of $BrO_3$ increased with increase of pH value. When $NH_4-N$ concentration increased from 0.1mg/L to 0.4mg/L, $BrO_3$ concentration decreased to about 38%. These results revealed that $BrO_3$ concentration increased with increasing Br level, ozone dosage, and pH value, while it decreased with increase of $NH_4-N$ concentration.

• Transactions of the Korean hydrogen and new energy society
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• v.32 no.4
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• pp.256-262
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• 2021

A carbon felt electrode was prepared using ozone and ammonia sequential treatment and applied as an electrode for a vanadium redox flow battery (VRFB). The physical and electrochemical analyses demonstrate that the oxygen groups facilitate nitrogen doping in the carbon felt. Carbon felt (J5O3+NH3), which was subjected to ammonia heat treatment after ozone treatment, showed higher oxygen and nitrogen contents than carbon felt (J5NH3+O3), which was subjected to ammonia heat treatment first and then ozone treatment. From the charging/discharging of VRFB, the J5O3+NH3 carbon felt electrode showed 14.4 Ah/L discharge capacity at a current density of 150 mA /cm², which was 15% and 33% higher than that of J5NH3+O3 and non-activated carbon felt (J5), respectively. These results show that ozone and ammonia sequential treatment is an effective carbon felt activation method to increase the performance of the vanadium redox flow battery.