• KIPS Transactions on Software and Data Engineering
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• v.12 no.3
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• pp.141-148
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• 2023

Accurate overlay metrology is essential to achieve high yields of semiconductor products. Overlay metrology performance is greatly affected by overlay target design and measurement method. Therefore, in order to improve the performance of the overlay target, measurement methods applicable to various targets are required. In this study, we propose a new algorithm that can measure image-based overlay. The proposed measurement algorithm can estimate the sub-pixel position by using a motion vector. The motion vector may estimate the position of the sub-pixel unit by applying a quadratic equation model through polynomial expansion using pixels in the selected region. The measurement method using the motion vector can calculate the stacking error in all directions at once, unlike the existing correlation coefficient-based measurement method that calculates the stacking error on the X-axis and the Y-axis, respectively. Therefore, more accurate overlay measurement is possible by reflecting the relationship between the X-axis and the Y-axis. However, since the amount of computation is increased compared to the existing correlation coefficient-based algorithm, more computation time may be required. The purpose of this study is not to present an algorithm improved over the existing method, but to suggest a direction for a new measurement method. Through the experimental results, it was confirmed that measurement results similar to those of the existing method could be obtained.

• Journal of the Korean Society of Fisheries and Ocean Technology
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• v.44 no.3
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• pp.229-238
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• 2008

This paper describes on the consolidation of AIS and ARPA radar positions by comparing the AIS and ARPA radar information for the tracked ship targets using a PC-based ECDIS in Busan harbor, Korea. The information of AIS and ARPA radar target was acquired independently, and the tracking parameters such as ship's position, COG, SOG, gyro heading, rate of turn, CPA, TCPA, ship s name and MMSI etc. were displayed automatically on the chart of a PC-based ECDIS with radar overlay and ARPA tracking. The ARPA tracking information obtained from the observed radar images of the target ship was compared with the AIS information received from the same vessel to investigate the difference in the position and movement behavior between AIS and ARPA tracked target ships. For the ARPA radar and AIS targets to be consolidated, the differences in range, speed, course, bearing and distance between their targets were estimated to obtain a clear standards for the consolidation of ARPA radar and AIS targets. The average differences between their ranges, their speeds and their courses were 2.06% of the average range, -0.11 knots with the averaged SOG of 11.62 knots, and $0.02^{\circ}$ with the averaged COG of $37.2^{\circ}$, respectively. The average differences between their bearings and between their positions were $-1.29^{\circ}$ and 68.8m, respectively. From these results, we concluded that if the ROT, COG, SOG, and HDG informations are correct, the AIS system can be improved the prediction of a target ship's path and the OOW(Officer of Watch) s ability to anticipate a traffic situation more accurately.

• Journal of Internet Computing and Services
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• v.7 no.4
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• pp.45-55
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• 2006

This paper proposes a virtual target overlay technique for a realistic training simulation which projects a virtual target on ground-based CCD images according to an appointed scenario. This method creates a realistic 3D model for instructors by using high resolution GeoTIFF (Geographic Tag Image File Format) satellite images and DTED(Digital Terrain Elevation Data), and it extracts road areas from the given CCD images for both instructors and trainees, Since there is much difference in observation position, resolution, and scale between satellite Images and ground-based sensor images, feature-based matching faces difficulty, Hence, we propose a moving synchronization technique that projects the targets on sensor images according to the moving paths marked on 3D satellite images. Experimental results show the effectiveness of the proposed algorithm with satellite and sensor images of Daejoen.

• International Journal of Ocean System Engineering
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• v.1 no.1
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• pp.52-59
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• 2011

A prototype radar display unit was implemented using inexpensive off-the-shelf components, including a nonlinear estimation algorithm for the target tracking in a clutter environment. Two custom designed boards; an analog signal processing board and a DSP board, can be plugged into an expansion slot of a personal computer (PC) to form a maritime radar display unit. Our system provided all the functionality specified in the International Maritime Organization (IMO) resolution A422(XI). The analog signal processing board was used for A/D conversion as well as rain and sea clutter suppression. The main functions of the DSP board were scan conversion and video overlay operations. A host PC was used to run the tracking algorithm of targets in clutter, using the discrete-time Bayes optimal (nonlinear, and non-Gaussian) estimation method, and the graphic user interface (GUI) software for Automatic Radar Plotting Aid (ARPA). The proposed tracking method recursively found the entire probability density function of the target position and velocity by converting into linear convolution operations.