• Title/Summary/Keyword: Overlap error

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Scattering Bar Optical Proximity Correction to Suppress Overlap Error and Side-lobe in Semiconductor Lithography Process (Overlap Margin 확보 및 Side-lobe 억제를 위한 Scattering Bar Optical Proximity Correction)

  • 이흥주
    • Journal of the Korea Academia-Industrial cooperation Society
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    • v.4 no.1
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    • pp.22-26
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    • 2003
  • Overlap Errors and side-lobes have been simultaneously solved by the rule-based correction using the rules extracted from test patterns. Lithography process parameters affecting attPSM lithography process have been determined by the fitting method to the real process data. The correction using scattering bars has been compared to the Cr shield method. The optimal insertion rule of the scattering bal's has made it possible to suppress the side-lobes and to enhance DOF at the same time. Therefore, in this paper, the solution to both side-lobe and overlap Error has been proposed using rule-based confection. Compared to the existing Cr shield method, the proposed rule-based correction with scattering bars can reduce the process complexity and time for mask production.

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Effect of Spool-Sleeve Geometry on Static Pressure Characteristics of Servo Valves (서보밸브 스풀-슬리브 형상공차가 압력 정특성에 미치는 영향 연구)

  • Kim, Sung Dong;Son, Sung Hoe;Ham, Young Bog
    • Journal of Drive and Control
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    • v.13 no.1
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    • pp.34-42
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    • 2016
  • This study studied how the clearance, overlap and mismatch errors of spool-sleeve affect the static pressure characteristics of a servo valve. A computer simulation model was established as a direct acting servo valve and a series of simulations was conducted for various values of clearance, overlap and mismatch errors. Pressure gain decreased as the clearance increased. The overlap also affects the pressure gain and was similar to the effect of clearance. Asymmetry of the pressure plot got worse and worse as the mismatch error increased.

Overlap-Based Chirp Spread Spectrum Transmission Scheme for Maritime Multipath Environment (해양 다중 경로 환경에 알맞은 오버랩 기반 처프 확산 대역 전송 기법)

  • Chae, Keunhong;Lee, Seong Ro;Yoon, Seokho
    • The Journal of Korean Institute of Communications and Information Sciences
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    • v.39C no.11
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    • pp.1124-1131
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    • 2014
  • The chirp spread spectrum (CSS) technique that transmits data signal by using a chirp signal is often used for maritime wireless communication systems such as sound detection radar systems for submarines. However, maritime multipath environment could reduce the data rate of the CSS system. To tackle the problem, an overlap-based CSS transmission scheme is proposed and analyzed in this paper: Based on the approximated Gaussian Q function, we derive a closed form expression of the bit error rate (BER) of the proposed overlap-based CSS system and investigate the mathematical relationship between the number of overlaps and the intersymbol interference (ISI).

A Closed-Form BER Expression for Overlap-Based CSS System Design (오버랩 기반 CSS 시스템 설계를 위한 닫힌꼴 비트 오류율 표현)

  • Yoon, Tae-Ung;Lee, Young-Yoon;Lee, Myung-Soo;Song, Iick-Ho;Yoon, Seok-Ho
    • The Journal of Korean Institute of Communications and Information Sciences
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    • v.34 no.4C
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    • pp.469-475
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    • 2009
  • Overlap is one of the techniques for increasing bit rate in chirp spread spectrum (CSS). More overlaps can offer higher data throughput; however, they may cause more intersymbol interference (ISI) at the same time, resulting in serious bit error rate (BER) performance degradation. Thus, the number of overlaps should be decided according to the required BER performance. In this paper, we derive a closed form expression for BER of the overlap-based CSS system, exploiting the approximated Gaussian Q function. The derived BER expression includes the number of overlaps as a parameter, and thus, would be very useful in determining the number of overlaps for a specified BER. The numerical results demonstrate that the BER derived in a closed form closely agrees with the simulated BER.

Analysis of Intersymbol Interference due to Overlap m Overlap-Based DM-BPSK CSS Systems (오버랩 기반 DM-BPSK CSS 시스템에서 오버랩 횟수에 따른 심볼 간 간섭 분석)

  • Kim, Jun-Hwan;Lee, Young-Po;Song, Iick-Ho;Yoon, Seok-Ho
    • The Journal of Korean Institute of Communications and Information Sciences
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    • v.36 no.2C
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    • pp.99-104
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    • 2011
  • The chirp spread spectrum (CSS) technique spreads the data signal over a frequency bandwidth wider than minimum required bandwidth. By using time overlapping, the bit rate in CSS can be increased. However, for reliable transmission of data signal, the intersymbol interference (ISI) due to overlap should be analyzed. In this paper, the relation between the degree of overlap and ISI is analyzed in direct modulation binary phase shift keying CSS systems. In some cases, the overlap does not incur ISI at all and the ISI fluctuates or monotonically increases as the number of overlaps changes. It is also shown that the simulation results closely agree with the analytic results.

Correction Simulation for Metal Patterns on Attenuated Phase-shifting Lithography

  • Lee, Hoong-Joo;Lee, Jun-Ha
    • Transactions on Electrical and Electronic Materials
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    • v.5 no.3
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    • pp.104-108
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    • 2004
  • Problems of overlap errors and side-lobe printing by the design rule reduction in the lithography process using attenuated phase-shifting masks(attPSM) have been serious. Overlap errors and side-lobes can be simultaneously solved by the rule-based correction using scattering bars with the rules extracted from test patterns. Process parameters affecting the attPSM lithography simulation have been determined by the fitting method to the process data. Overlap errors have been solved applying the correction rules to the metal patterns overlapped with contact/via. Moreover, the optimal insertion rule of the scattering bars has made it possible to suppress the side-lobes and to get additional pattern fidelity at the same time.

Overlap and Add Sinusoidal Synthesis Method of Speech Signal using Amplitude-weighted Phase Error Function (정현파 크기로 가중치 된 위상 오류 함수를 사용한 음성의 중첩합산 정현파 합성 방법)

  • Park, Jong-Bae;Kim, Gyu-Jin;Hyeok, Jeong-Gyu;Kim, Jong-Hark;Lee, In-Sung
    • The Journal of Korean Institute of Communications and Information Sciences
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    • v.32 no.12C
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    • pp.1149-1155
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    • 2007
  • In this paper, we propose a new overlap and add speech synthesis method which demonstrates improved continuity performance. The proposed method uses a weighted phase error function and minimizes the wave discontinuity of the synthesis signal, rather than the phase discontinuity, to estimate the mid-point phase. Experimental results show that the proposed method improves the continuity between the synthesized signals relative to the existing method.

Extended Information Overlap Measure Algorithm for Neighbor Vehicle Localization

  • Punithan, Xavier;Seo, Seung-Woo
    • IEIE Transactions on Smart Processing and Computing
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    • v.2 no.4
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    • pp.208-215
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    • 2013
  • Early iterations of the existing Global Positioning System (GPS)-based or radio lateration technique-based vehicle localization algorithms suffer from flip ambiguities, forged relative location information and location information exchange overhead, which affect the subsequent iterations. This, in turn, results in an erroneous neighbor-vehicle map. This paper proposes an extended information overlap measure (EIOM) algorithm to reduce the flip error rates by exchanging the neighbor-vehicle presence features in binary information. This algorithm shifts and associates three pieces of information in the Moore neighborhood format: 1) feature information of the neighboring vehicles from a vision-based environment sensor system; 2) cardinal locations of the neighboring vehicles in its Moore neighborhood; and 3) identification information (MAC/IP addresses). Simulations were conducted for multi-lane highway scenarios to compare the proposed algorithm with the existing algorithm. The results showed that the flip error rates were reduced by up to 50%.

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A Study on the 3-Dimensional Analysis by Bundle Adjustment in Close Range Photogrammetry (근접사진측량의 번들조정에 의한 삼차원 위치해석에 관한 연구)

  • 백은기;목찬상
    • Journal of the Korean Society of Surveying, Geodesy, Photogrammetry and Cartography
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    • v.6 no.2
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    • pp.10-18
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    • 1988
  • In the three-dimensional analysis and deformation analysis of large structures, efficient is the use of the multiple method of close range photogrammetry which approaches the object distance. This study analyzes the influence of errors according to the overlap, the control points, and the object distance, to solve the problems which are raised in the multiple method. A wall-board, 7 meters by 3 meters, was used as a test field on which a total of 225 unknown points were equally disposed. The photographs with changing the overlap and object distance were taken by P-31 camera system. a total of 143 negatives are used in this study for computing 3-dimensional coordinates and its standard errors, and bundle adjustment of strips and blocks developed with on-line system is applied. In case of decreasing the number of control points, simulation error increases but actual error decreases and increases again. Due to the changed of object distances Z error represents largely compared to X, Y error, but good results in Z can be obtained by increasing the redundancy. And simulation error or actual error shows best results at the endlap of about 70%. To sum up this study, approprate arrangement of control points and overlap is meaningful, and multiple method by short object distance will be widely used to precision and deformation analysis of critical structures.

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Localized evaluation of actuator tracking for real-time hybrid simulation using frequency-domain indices

  • Xu, Weijie;Guo, Tong;Chen, Cheng
    • Structural Engineering and Mechanics
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    • v.62 no.5
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    • pp.631-642
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    • 2017
  • Accurate actuator tracking plays an important role in real-time hybrid simulation (RTHS) to ensure accurate and reliable experimental results. Frequency-domain evaluation index (FEI) interprets actuator tracking into amplitude and phase errors thus providing a promising tool for quantitative assessment of real-time hybrid simulation results. Previous applications of FEI successfully evaluated actuator tracking over the entire duration of the tests. In this study, FEI with moving window technique is explored to provide post-experiment localized actuator tracking assessment. Both moving window with and without overlap are investigated through computational simulations. The challenge is discussed for Fourier Transform to satisfy both time domain and frequency resolution for selected length of moving window. The required data window length for accuracy is shown to depend on the natural frequency and structural nonlinearity as well as the ground motion input for both moving windows with and without overlap. Moving window without overlap shows better computational efficiency and has potential for future online evaluation. Moving window with overlap however requires much more computational efforts and is more suitable for post-experiment evaluation. Existing RTHS data from Network Earthquake Engineering Simulation (NEES) is utilized to further demonstrate the effectiveness of the proposed approaches. It is demonstrated that with proper window size, FEI with moving window techniques enable accurate localized evaluation of actuator tracking for real-time hybrid simulation.