• 한국정보통신학회:학술대회논문집
• /
• 한국해양정보통신학회 2009년도 추계학술대회
• /
• pp.410-413
• /
• 2009

웨이퍼 Pre-Alignment는 반도체 공정에서 장비에 웨이퍼를 놓기 전에 웨이퍼의 중심 및 방향을 정확하게 정렬할 필요가 있는데, 이를 위해서 일정한 수준 이하로 중심과 방향을 찾아 Alignment 하는 방법을 말한다. 본 논문에서는 웨이퍼를 Alignment 하기 위해 기존의 Mechanical한 방법이 아닌 Area 카메라를 통한 비접촉식 방법을 이용하였다. 이 방법은 웨이퍼를 45도씩 8번씩, 한 바퀴를 회전하여 이미지를 획득한 뒤, 이미지의 웨이퍼의 에지값 들을 이용하여 Least Square Circle Fitting을 이용하여 웨이퍼의 중심과 방향을 정확하게 측정하여 Alignment를 한다.

• 제어로봇시스템학회:학술대회논문집
• /
• 제어로봇시스템학회 1997년도 한국자동제어학술회의논문집; 한국전력공사 서울연수원; 17-18 Oct. 1997
• /
• pp.44-47
• /
• 1997

Building a reliable mobile robot - one that can navigate without failures for long periods of time - requires that the uncertainty which results from control and sensing is bounded. This paper proposes a new mobile robot localization method using artificial landmarks. For a mobile robot localization, the proposed method uses a camera calibration(only extrinsic parameters). We use the FANUC arc mate to estimate the posture error, and the result shows that the position error is less than 1 cm and the orientation error less than 1 degrees.

• 제어로봇시스템학회:학술대회논문집
• /
• 제어로봇시스템학회 1988년도 한국자동제어학술회의논문집(국내학술편); 한국전력공사연수원, 서울; 21-22 Oct. 1988
• /
• pp.492-496
• /
• 1988

Usually the first three joint variables (major link) and the next three joint variables (minor link) are used to determine the position and the orientation, respectively, of 6 degrees-of-freedom robot manipulators. In this paper, the Jacobians of 20 major links and 6 minor links are calculated to find the positional maneuverability matrices and orientational maneuverability matrices. Then the kinematic characteristics of the major and minor links are examined. Also we gave the measures of maneuverability and the controllability of the links for the figure of merits of robot manipulator design.

• Journal of Biosystems Engineering
• /
• 제2권2호
• /
• pp.37-45
• /
• 1977

Solar energy is a potential source of power that offers much promise being used for low-temperature applications like drying farm crops, space heating, and water heating for domestic uses. Already much of it are being used for those purpose in foreign countries. However, very little research has been done to determine the possibility of using the solar energy in Korea. This study was conducted to develop the general prediction equation of the total radiation on a horizontal surface in Daejeon area based on 5 years 91972, Jun.1-1976. Dec.31) meteorological data (bright sunshine hours, average total horizontal radiation), and to obtain experimentally the thermal efficiency of solar air and water collectors, which will be used as a basic data of designing flat-plate solar collector system.In addition to the thermal efficiency of the collectorsthe relationship among those factors affecting it such as weather condition, orientation factor, and tilted angle of collector was analyzed. The results of this study were as follows. 1. The general predicted equation of the total radiation on a horizontal surface in Daejeon area based on bright sunshine hours was developed as $H_{av} =(1.546\frac{n}{N}-0.582)H_o$. Predicting the total radiation on a horizontal surface by the above equation was thought to be possible because to values of 0.882 was smaller than any t values at above 0.05 level on the basis of two tailed test of the difference between the calculated and the recorded values. 2.It was observed that optimum tilt angle of the collector in the summer and the autumn drying season was 13 degrees and 51 degrees respectively, these values could be obtained by adding or substracting approximately 25 degrees from the latitude of this area $(36.3^{\circ}N)$ .The relationship between orientation factor and declination of sun at suitable tilt angle of 33 degrees $(s=0.9\O)$ was shown at Fig.4. 3.The thermal efficiency of solar wdter collector was shown 13.4-51. 6% on Aug. 15 (the minimum radiation recorded) and 43.8 ~537% Aug.20 (the maximum radiation recorded), and 13.8~ 46.6 and 44.3~ 49.7 were shown on each corresponding day. 4.The thermal efficiency of the collectors according to the weather condition was shown a big difference of about 10% between the day of the maximum radiation recorded and the minimum, but the differen of efficiency between the air and the water collector was at most 2 ~ 3%. 5. Even if the efficiency of the solar water collector was a little higher than the solar air collector, for drying farm products, the solar air collector was thought to be more effective because the air heated by collector could be directly used for drying them.

• 한국자동차공학회논문집
• /
• 제2권6호
• /
• pp.94-101
• /
• 1994

About vibration model of Six-degrees-of-freedom(DOF), in mass load, examined results for knowing dynamic interference and response variation is as follows; In case of putting mass load upon the object, experimented results on two-degrees-of-freedom of the translation-1 direction and the rotation-1 direction at open-loop-control system, about 0.19 arcsed in input of the translation-$0.1{\mu}m$ and $0.022{\mu}m$ on input of the rotation-0.5 arcsec, the justicse of motion equation is acknowledged as confirming the appearance of the interference-$0.022{\mu}m$. In establishing calculation of transformation matrix by using analogue circuit, as simulating results that used incomplete differentiation, interference is $1.7{\times}10^{-3}$ arcsec on input of the translation-$0.1{\mu}m$ and $1.4{\times}10^{4}{\mu}m$ on input of the rotation-0.5 arcsec in open-loop-control system. Also it is $4.2{\times}10^{-4}$ arcsec on input of the translation-$0.1{\mu}m$ and $5.6{\times}10^{-5}{\mu}m$ on input of the rotation-0.5 arcesc in closed-loop-control system. As closed-loop-control system is better than open-loop-control system, equivalent accordance is confirmed on original response. Finally, fundamental validity of this theory is acknowledged.

• 지질공학
• /
• 제13권3호
• /
• pp.321-334
• /
• 2003

본 연구는 암반에서 불연속면 방향의 효율적인 측정 방안에 관한 것이다. 불연속면의 방향성은 주향/경사, 경사방향/경사(세 자리 숫자/두 자리 숫자) 그리고 경사방향을 우측에 두고 바라보는 방향을 주향방향으로 결정하는 방법의 세 가지 방법으로 표현한다. 일반적으로 불연속면의 주향/경사는 클리노미터에 의해 측정이 되며, 경사방향』경사는 실바콤파스(type15)에 의해 측정된다. 주향/경사는 지질조사시에 측정이 되는데, 경사방향/경사는 공학적 목적으로 측정이 되며, 통계처리에 유용하다 클리노미터에 의해 불연속면의 경사방향 측정과 주향/경사를 경사방향/경사로의 전환 시, 측정자에 따라 오류를 유발할 가능성이 있다. 본 연구에서는 불연속면 방향성을 두 가지 방법 (주향/경사. 경사방향/경사)으로 효과적으로 측정하기 위하여 클리노미터에 회전방위판과 주향 및 경사방향 표시 화살표를 부착하여 측정하는 방법을 고안하였다. 이 새로운 측정법은 주향뿐만 아니라 경사방향을 정확하게 측정할 수 있는 효과적인 측정법이다. 또한 이 측정법은 주향/경사 및 경사방향/경사의 동시 측정이 가능하다. 암반사면에서 불연속면의 방향 측정 시, 현행 측정법과 새로운 측정법을 비교한 결과. 새로운 측정법이 오류를 분명히 감소시킴을 알 수 있었다 따라서 새로운 측정법은 도로 설계 시 광역적인 지표지질조사에서 많은 불연속면의 방향성을 측정할 경우와 측정 경험이 부족한 조사자에게 유용한 방법이라고 생각된다.

• 한국펄프종이공학회:학술대회논문집
• /
• 한국펄프종이공학회 2006년도 PAN PACIFIC CONFERENCE vol.1
• /
• pp.147-152
• /
• 2006

Restoration of historical documents and arts has become important to inherit cultural properties. Most of historical documents were recorded on paper. Therefore, restoration of ancient papers is demanded and techniques for this purpose must be developed and sophisticated. In our study, several nondestructive methods for analyzing ancient paper have been developed. Image analysis using fast Fourier transform with suitable modifications was applied to optical micrographs of traditionally-handmade Korean and Japanese papers. This analysis determines the angle and anisotropy of fiber orientation of paper surfaces. Fiber orientation of traditionally-handmade Korean and Japanese papers was found to show their own characteristics in accordance with the motion of a papermaking screen made of bamboo splints. Consequently, the information on fiber orientation was found to be possible to distinguish the flow-sheet forming typical of Japanese paper and still-sheet forming typical of Korean paper. Moreover, the anisotropy was always higher for the screen side than for the top side, thus meaning that surface fiber orientation is possible to distinguish the two sides of paper of which papermaking history is unknown. An application of this technique to actual historical documents evidenced that wrapping papers were used as envelops with a lateral side up, namely, after rotating 90 degrees. A variety of cultural habits in writing letters was revealed by discrimination of the two sides.

• 대한기계학회논문집A
• /
• 제20권2호
• /
• pp.414-430
• /
• 1996

In this paper, a new kinematic structure of a parallel manipulator with six Cartesian degrees of freedom is proposed. It consists of a platform which is connected to a fixed base by means of 3-PPSP(parameters P, S denote the prismatic, spherical joints) subchains. Each subchain has a link which is concected to a passive prismatic joint at the one end and a passive spherical joint at the other. The spherical joint is then attached to perpendicularly arranged prismatic actuators which are fixed at the base. The spherical joint is then attached to perpendicularly arranged prismatic actuators which are fixed at the base. This arrangement provides a basis to control all six Cartesian degrees of motion of the platform in space. Due to its efficient architecture, the colsed-form solutions of the inverse and forward kinematics can be obtained. As a consequence, this new kinematic structure can be servo controlled using simple inverse kinematics becaese forward kinematics allows for measuring the platform's position and orientation in Cartesian space. Furthermore, the proposed structure provides an effective functional workspace. Series of simulations are performed to verify the results of the kinematics analyses.

• 대한전기학회:학술대회논문집
• /
• 대한전기학회 1999년도 추계학술대회 논문집 학회본부 B
• /
• pp.670-673
• /
• 1999

In this paper, we present a robust motion controller based on Adaptive-Fuzzy technique is proposed that multifunctional vehicle(MVR) for two DOF mobile robot can perform detailed inspection of physical conditions of sewage pipes as well as can effectively repair the damaged portions of the inner walls. The main difficulties in controlling this multifunctional robot vehicles lie in the fact that vehicles usually have three degrees of freedom in position and orientation in spite of having only two degrees of freedom for motion control in tracking mode. Decomposition of error between the reference posture and the current posture makes control of speed and steering possible. The Gyro compass part and Inclonometer of the robot is configured in order to realize position of robot. The proposed Adaptive-Fuzzy motion controller has two main characteristics: The one guarantees that the MVR follows the reference trajectory; the other one compensates the dynamics of the MVR. Simulation results are provided to validate the proposed controller. Experiments have been used to verify the effectiveness and robustness of the motion controller.

• Structural Engineering and Mechanics
• /
• 제3권2호
• /
• pp.121-133
• /
• 1995

It is well known that two-dimensional simplified third-order theories satisfy the layer interface continuity of transverse shear strains, thus these theories violate the continuity of transverse shear stresses when two consecutive layers differ either in fibre orientation or material. The third-order theories considered herein involve four/or five dependent unknowns in the displacement field and satisfy the condition of vanishing of transverse shear stresses at the bounding planes of the plate. The objective of this investigation is to examine (i) the flexural response prediction accuracy of these third-order theories compared to exact elasticity solution (ii) the effect of layer interface continuity conditions on the flexural response. To investigate the effect of layer interface continuity conditions, three-dimensional elasticity solutions are developed by enforcing the continuity of different combinations of transverse stresses and/or strains at the layer interfaces. Three dimensional twenty node solid finite element (having three translational displacements as degrees of freedom) without the imposition of any of the conditions on the transverse stresses and strains is also employed for the flexural analysis of the laminated plates for the purposes of comparison with the above theories. These shear deformation theories and elasticity approaches in terms of accuracy, adequacy and applicability are examined through extensive numerical examples.