• Current Optics and Photonics
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• v.5 no.1
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• pp.77-77
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• 2021

• Journal of the Korean Society for Precision Engineering
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• v.17 no.1
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• pp.129-137
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• 2000

In this paper, a new method of noncontact measurement has been developed for a 3 dimensional topography in semiconductor wafer, implementing a new optical probe based on the precision defocus measurement. The developed technique consists of the new optical probe, precision stages, and the measurement/control system. The basic principle of the technique is to use the reflected slit beam from the specimen surface, and to measure the deviation of the specimen surface. The defocusing distance can be measured by the reflected slit beam, where the defocused image is measured by the proposed optical probe, giving very high resolution. The distance measuring formula has been proposed for the developed probe, using the laws of geometric optics. The precision calibration technique has been applied, giving about 10 nanometer resolution and 72 nanometer of four sigma uncertainty. In order to quantitize the micro pattern in the specimen surface, some efficient analysis algorithms have been developed to analyse the 3D topography pattern and some parameters of the surface. The developed system has been successfully applied to measure the wafer surface, demonstrating the line scanning feature and excellent 3 dimensional measurement capability.

• Journal of the Korean Society for Precision Engineering
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• v.22 no.4
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• pp.13-18
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• 2005

• Korean Journal of Optics and Photonics
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• v.8 no.1
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• pp.26-30
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• 1997

A wide dynamic range heterodyne interferometer scheme using intermode beat between a stabilized, dual frequency He-Ne laser beam has been applied for a measurement of optical thickness of an optical medium. Resolution of the optical thickness measurement is about $\pm$ 1.74 ${\mu}{\textrm}{m}$. Using this technique, we are able to determine the optical thickness of an organic dye film. We also obtain a map of the optical thickness variations over a surface of the film

• Journal of the Korean Society for Precision Engineering
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• v.26 no.4
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• pp.107-113
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• 2009

In this paper, we studied of measurement the vibration of natural frequency using optical fiber sensor. The boring bar for measurement of vibration in use optical fiber sensor has the advantage of direct measure for the frequency than accelerometer. Because it deal with output value on electrical signal of optical fiber in physical disturbance when it measures the frequency of vibration. The optical fiber sensor measured the vibration of boring bar by the gap in sensing jig while optical fiber just kept contact with boring bar. A prototype system was composed of jig part with gap and optical system part. In this paper, we found out the possibility to measurement of vibration by the gap in use optical fiber.

• Journal of the Korean Institute of Illuminating and Electrical Installation Engineers
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• v.23 no.7
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• pp.75-80
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• 2009

In this study, a Web server was constructed using LabVIEW's DataSocket, which makes possible acquisition, analysis, and saving in real time. The output value of the optical current sensor at the web server PC was measured and the output value was displayed using the Web browser of the client PC. DataSocket by LabVIEW makes the construction of a Web server easier than other languages and is compatible with other application programs. An optical current sensor was composed using a 1310 [nm] laser diode, and 9/125 [${\mu}m$] standard single mode optical fiber and was created to be a close type sensor. Data measurement using Web servers has the advantage of monitoring electric power systems at a great distance and can fuse IT technology and electric power systems. Also, this measurement uses inexpensive mounting and programming when compared to existing measurement equipment allowing the construction of a measurement system in any situation or surrounding.

• Journal of the Optical Society of Korea
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• v.18 no.1
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• pp.15-22
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• 2014

We present a novel bandwidth measurement scheme for multimode optical fibers. Amplified spontaneous emission (ASE) radiation was utilized for a source of intrinsically modulated light with a wide modulation bandwidth. In our measurement scheme, the continuous-wave (CW) ASE light that passed through a multimode fiber (MMF) under test was analyzed by the fourth-order power with a high-speed photodetector and an electric spectrum analyzer. The modulation transfer function of the multimode fiber could be directly measured with the photoelectric spectra in the modulation frequency domain. The measurement result of our method was experimentally compared to that of the conventional measurement scheme based on the impulse response measurement. It has been found that our scheme provides a stable measurement means of MMF characterization that is suitable for the field testing due to the simplicity of the system.

• Journal of Advanced Marine Engineering and Technology
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• v.37 no.7
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• pp.778-783
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• 2013

Measurement of liquid level in storage and processing vessels, tanks, wells, reservoirs and hoppers is commonly needed. The several different ways to measure the liquid level of oil or water tank have been provided such as an electrostatic capacity, a supersonic waves and an optical science etc. In the study, we have constructed the stable and efficient measurement system to measure the level of liquid at real-time and to get accurate measurement of the maximum and minimum level of the tank. For this purpose, we suggest double sensing methods by adopting both capacitive and optical sensing. The experimental results, presented in this paper, illustrate the effectiveness of the proposed method under different sensing methods.

• Proceedings of the KIEE Conference
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• 1998.07b
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• pp.766-768
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• 1998

Optical Temperature Distribution measurement System (OTDS) is completely different from conventional electric point sensor in that it uses the optical fiber itself as the sensor. This new concept in temperature measuring system requires only one fiber to be laid. The use of optical fiber also gives the advantage of small diameter, light weight, explosion resistance, and electromagnetic noise resistance. The OTDS is a sensor which is capable of making a precise measurement over a wide range of areas using only a single optical fiber. Since current temperature sensors, such as the thermocouple, are only used to measure temperaturea of point, they are almost impractical for measuring a wider range because of the extremely high cost. In comparision with current sensors, the optical fiber distributed temperature sensor can make much quicker and more precise measurements at a comparatively low cost.

• Transactions of the Korean Society of Mechanical Engineers
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• v.16 no.6
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• pp.1030-1035
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• 1992

This paper presents a non-contact type displacement sensor designed based on optical triangulation method. The optical principles of the sensor are described in detail with aids of paraxial geometric optics. A prototype sensor is designed and fabricated by using modern optoelectronic hardware. Its measuring performances are evaluated and discussed through a series of calibration processes.