• 한국전기전자재료학회논문지
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• 제21권10호
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• pp.938-942
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• 2008

Electrical and optical properties of semitransparent Ag and Al layer were studied, which are used for the electrodes in top-emission organic light-emitting diodes. Sheet resistance and transmittance of visible light through a thin layer were measured and analyzed. Several thin metal layers of Ag and Al were deposited onto a glass substrate up to a thickness of 50 nm using a thermal evaporation. Sheet resistance measurements show that a layer thickness is needed more than 15 nm and 20 nm for Ag and Al, respectively, when a proper sheet resistance is assumed to be less than $50{\Omega}/sq$. From the measurements of transmittance of visible light through a thin-metal layer, metallic behavior was observed when the layer thickness is over 25 nm for both films. Thus, from a study of sheet resistance and transmittance of visible light, a minimum proper thickness of semitransparent metal layer is 20 nm and 25 nm for Ag and Al, respectively.

• 한국광학회:학술대회논문집
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• 한국광학회 2001년도 제12회 정기총회 및 01년도 동계학술발표회
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• pp.78-79
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• 2001

노광 후 지연(Post Exposure Delay： PED) 효과는 그림 1과 같이 노광 후 지연 시간에 따른 감광제의 Profile에 thinning, T-top, foot, undercut 를 보여주는 현상으로 화학 증폭형 감광제(Chemically Amplified Resist, CAR) 개발에 있어 PED의 안정성은 중요한 요소이다(1). 따라서 노광후 지연 효과에 대한 모델링은 연구와 개발을 위한 시뮬레이션 tool에 있어 매우 의미 있는 일이다. T-top 이나 undercut 를 형성하는 Surface inhibition layer(SIL) 은 노광 후 지연시 발생되는 environmental base contamination, acid evaporation 이 주요 원인이며 다른 원인으로는 감광제 속에서 acid migration, spin coating 동안에 photoacid generator (PAG)의 고갈, internal basic impurities 이며 그 외에 nonbsic atmospheric contamination, high power laser source의 영향 등이 있다. (중략)

• 한국정보디스플레이학회:학술대회논문집
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• 한국정보디스플레이학회 2006년도 6th International Meeting on Information Display
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• pp.229-232
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• 2006

General discussions of the optical structures and rigorous electromagnetic modeling of OLEDs will be first given, and then their applications in analyses and designs of various advanced OLED structures, e.g.microcavity OLEDs, tandem OLEDs and top-emitting OLEDs etc., will be reported.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2004년도 제27회 학술발표회 초록집
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• pp.65-65
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• 2004

• 한국전기전자재료학회논문지
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• 제19권1호
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• pp.87-90
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• 2006

In case of preparation of ITO thin film for using top electrode of Top-emitting Organic Light Emitting Diodes(TOLEDs), the ITO thin film should be prepared at room temperature and low oxygen gas flow condition in order to reduced the damage of organic layer due to the bombardment of highly energetic particles such as negative oxygen ions which accrued from the plasma. In this study, the ITO thin film with high optical transmittance and low resistivity prepared as a function of oxygen gas (0 ${\~}$ 0.8 sccm) and Ar gas was fixed at 20 sccm by the Facing Targets Sputtering (FTS) method. The electrical and optical properties of ITO thin films were measured by Hall effect measurement, UV/VIS spectrometer, respectively In the results, we obtained the ITO thin film with lowest resistivity($3{\times}10^{-4} {\Omega}{\cdot} cm$) at oxygen gas flow 0.2 sccm and optical transmittance over $80\%$ at oxygen gas flow over 0.2 sccm.

• Journal of the Optical Society of Korea
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• 제19권3호
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• pp.265-271
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• 2015

We propose a reactive mesogen (RM) lens array to obtain good focusing behavior along with a short focal plane, where the focusing behavior is switchable according to the polarization state of incident light. Polarization-dependent focusing behavior is obtained using a planoconvex RM microlens array on a planoconcave isotropic lens template. Even though the sagitta of our RM lens is high, to obtain the short focal length, the RM layer can be aligned well by introducing a top-down alignment effect, using a nanogrooved template. The optical noise due to the $moir{\acute{e}}$ effect generated by the nanogrooves on the surface of the planoconvex RM layer can be removed simply by overcoating a thin RM layer, which is self-aligned by the geometric surface effect, without an additional alignment process. We demonstrate a hexagonal-packed RM lens array that has a very high fill factor and symmetric phase profile, for an ideal lens.

• 한국결정성장학회지
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• 제18권4호
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• pp.160-164
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• 2008

절연성 및 전도성 12CaO ${\cdot}7Al_2O_3$ (Cl2A7)이 도핑된 ITO 박막을 유리기판 위에 radio frequency(rt) magnetron 스퍼터링 방법으로 절연성 및 전도성 Cl2A7 타겟 칩의 개수를 변화시키면서 증착하였다. 이러한 박막들의 구조적, 전기적, 광학적 특성을 살펴보았다. Cl2A7 타겟 칩의 개수가 증가함에 따라 박막의 캐리어 농도는 감소하고, 비저항은 증가하였다. 박막의 광 투과도는 가시광 영역에서는 80% 이상의 값으로 나타났다. Grain의 크기의 변화는 결정성과 표면 거칠기에 크게 영향을 미친다는 것이 확인되었다.

• Journal of the Optical Society of Korea
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• 제17권1호
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• pp.1-4
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• 2013

For the conventionally polished fused silica substrate, an around 100 nm depth redeposition polishing layer was formed on the top of surface. Polishing compounds, densely embedded in the redeposition polishing layer were the dominant factor that limited the laser induced damage threshold (LIDT) of transmission elements in nanosecond laser systems. Chemical etching, super-precise polishing and ion beam etching were employed in different ways to eliminate these absorbers from the substrate. After that, Antireflection (AR) coatings were deposited on these substrates in the same batch and then tested by 1064 nm nano-pulse laser. It was found that among these techniques only the ion beam etching method, which can effectively remove the polishing compound and did not induce extra absorbers during the disposal process, can successfully improve the LIDT of AR coatings.

• Current Optics and Photonics
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• 제1권2호
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• pp.101-106
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• 2017

Optical structures of a tapered ultra-thin light guide film (LGF) were optimized by optical simulation for increasing coupling efficiency between light sources and the LGF. A serration pattern on the entrance side surface could provide a comparable coupling efficiency to that of the conventional LGF where a linear, asymmetric prism array was formed on the taper surface. Several micro-patterns were applied to the top and/or bottom surface of the LGF for achieving better luminance property, and it was found that an optimized micro-pyramid pattern exhibited the highest average luminance together with satisfactory luminance uniformity.

• JSTS:Journal of Semiconductor Technology and Science
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• 제7권3호
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• pp.183-195
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• 2007

MEMS technology is proven to be an enabling technology to realize many components for optical networking applications. Due to its widespread applications, VOA has been one of the most attractive MEMS based key devices in optical communication market. Micromachined shutters and refractive mirrors on top of silicon substrate or on the device layer of SOI (Silicon-on-insulator) substrate are the approaches trapped tremendous research activities, because such approaches enable easier alignment and assembly works. These groups of devices are known as the planar VOAs, or two-dimensional (2-D) VOAs. In this review article, we conduct the comprehensively literature survey with respect to MEMS based planar VOA devices. Apparently MEMS VOA technology is still evolving into a mature technology. MEMS VOA technology is not only the cornerstone to support the future optical communication technology, but the best example for understanding the evolution of optical MEMS technology.