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Fluctuation in Plasma Nanofabrication

  • Shiratani, Masaharu
    • Proceedings of the Korean Vacuum Society Conference
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    • 2016.02a
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    • pp.96-96
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    • 2016
  • Nanotechnology mostly employs nano-materials and nano-structures with distinctive properties based on their size, structure, and composition. It is quite difficult to produce nano-materials and nano-structures with identical sizes, structures, and compositions in large quantities, because of spatiotemporal fluctuation of production processes. In other words, fluctuation is the bottleneck in nanotechnology. We propose three strategies to suppress such fluctuations: employing 1) difference between linear and nonlinear phenomena, 2) difference in time constants, and 3) nucleation as a bottleneck phenomenon. We are also developing nano- and micro-scale guided assembly using plasmas as a plasma nanofabrication.1-5) We manipulate nano- and micro-objects using electrostatic, electromagnetic, ion drag, neutral drag, and optical forces. The accuracy of positioning the objects depends on fluctuation of position and energy of an object in plasmas. Here we evaluate such fluctuations and discuss the mechanism behind them. We conducted in-situ evaluation of local plasma potential fluctuation using tracking analysis of fine particles (=objects) in plasmas. Experiments were carried out with a radio frequency low-pressure plasma reactor, where we set two quartz windows at the top and bottom of the reactor. Ar plasmas were generated at 200 Pa by applying 13.56MHz, 450V peak-to-peak voltage. The injected fine particles were monodisperse methyl methacrylate-polymer spheres of $10{\mu}m$ in diameter. Fine particles were injected into the reactor and were suspended around the plasma/sheath boundary near the powered electrode. We observed binary collision of fine particles with a high-speed camera. The frame rate was 1000-10000 fps. Time evolution of their distance from the center of mass was measured by tracking analysis of the two particles. Kinetic energy during the collision was obtained from the result. Potential energy formed between the two particles was deduced by assuming the potential energy plus the kinetic energy is constant. The interaction potential is fluctuated during the collision. Maximum amplitude of the fluctuation is 25eV, and the average is 8eV. The fluctuation can be caused by neutral molecule collisions, ion collisions, and fluctuation of electrostatic force. Among theses possible causes, fluctuation of electrostatic force may be main one, because the fine particle has a large negative charge of -17000e and the corresponding electrostatic force is large compared to other forces.

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Transfer-free growth of graphene by Ni-C co-deposition

  • An, Sehoon;Lee, Geun-Hyuk;Song, Inseol;Jang, Seong Woo;Lim, Sang-Ho;Han, Seunghee
    • Proceedings of the Korean Vacuum Society Conference
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    • 2015.08a
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    • pp.109.2-109.2
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    • 2015
  • Graphene, as a single layer of $sp^2$-bonded carbon atoms packed into a 2D honeycomb crystal lattice, has attracted much attention due to its outstanding properties such as high carrier mobility, chemical stability, and optical transparency. In order to synthesize high quality graphene, transition metals, such as nickel and copper, have been widely employed as catalysts, which need transfer to desired substrates for various applications. However, the transfer steps inevitably induce defects, impurities, wrinkles, and cracks of graphene. Here, we report a facile transfer-free graphene synthesis method through nickel and carbon co-deposited layer, which does not require separately deposited catalytic nickel and carbon source layers. The 100 nm NiC layer was deposited on the top of $SiO_2/Si$ substrates by nickel and carbon co-deposition. When the sample was annealed at $1000^{\circ}C$, the carbon atoms diffused through the NiC layer and deposited on both sides of the layer to form graphene upon cooling. The remained NiC layer was removed by using nickel etchant, and graphene was then directly obtained on $SiO_2/Si$ without any transfer process. Raman spectroscopy was carried out to confirm the quality of resulted graphene layer. Raman spectra revealed that the resulted graphene was at high quality with low degree of $sp^3$-type structural defects. Furthermore, the Raman analysis results also demonstrated that gas flow ratio (Ar : $CH_4$) during the NiC deposition and annealing temperature significantly influence not only the number of graphene layers but also structural defects. This facile non-transfer process would consequently facilitate the future graphene research and industrial applications.

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The effect of the processing parameters on the growth of GaN thick films by a sublimation technique (승화법에 의한 GaN 후막성장시 공정변수의 영향)

  • 노정현;박용주;이태경;심광보
    • Journal of the Korean Crystal Growth and Crystal Technology
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    • v.13 no.5
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    • pp.235-240
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    • 2003
  • The development of large area GaN substrates is one of important issues in expanding of GaN-based applications. In order to investigate the possibility, GaN thick films were grown by a sublimation technique, using MOCVD-GaN films grown on a sapphire as a seed-crystal substrate and a commercial GaN powder as a source material. The pressure in chamber under the fixed flow rate of $N_2$ gas and $NH_3$ gas was kept at 1 atmosphere and the effects of the various processing parameters such as the distance between source material and seed crystal, the temperature of top- and bottom heater and the growth time during the growth of GaN thick film were investigated. The growth feature and microstructure of the GaN thick films were observed by SEM and XRD. The optical bandgap properties and the defects were evaluated by the PL measurement. By these results, the growth conditions such as the distance between the GaN source and the seed substrate, the growth temperature and the growth time were determined for the satisfied growth of GaN thick films.

Patterning of ITO on Touch Screen Panels using a beam shaped femtosecond laser (빔 쉐이핑된 펨토초 레이저를 이용한 터치스크린 패널의 ITO 박막 패터닝)

  • Kim, Myung-Ju;Kim, Yong-Hyun;Yoon, Ji-Wook;Choi, Won-Seok;Cho, Sung-Hak;Choi, Jiyeon
    • Laser Solutions
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    • v.16 no.4
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    • pp.1-6
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    • 2013
  • Femtosecond laser patterning of ITO on a touch screen panel with a shaped fs laser beam was investigated. A quasi flat-top beam was formed using a variable mask and a planoconvex lens. The spatial profile of the original Gaussian beam and the shaped beam were monitored by a CCD beam profiler. The laser patterned ITO film was examined using an optical microscope, Scanning Electron Microscope (SEM) with Energy Dispersive X-ray Spectroscopy (EDS), and Atomic Force Microscope (AFM). It turned out that the quality of the ITO pattern fabricated by a shaped beam is superior to that of the pattern without beam shaping in terms of debris generation, height of the craters, and homogeneity of the bottom. Optimum processing window was determined at the laser irradiance exhibiting 100% removal of Sn. The removal rate of In was measured to be 83%.

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Alignment of Microbeads Using Spinning Helical Minichannel Cartridge (회전하는 나선형 미니채널 카트리지를 이용한 미세입자 정렬)

  • Kim, Subin;Prasad, Bibin;Kim, Jung Kyung
    • Journal of the Korean Society of Visualization
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    • v.14 no.3
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    • pp.38-45
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    • 2016
  • Separation of particles based on different sizes, detection of pathogenic bacteria and isolation of leukocytes from whole blood are typical applications of spiral or helical microchannels. The present study focuses on developing a CD4+ T-cell counting device for monitoring HIV/AIDS patients with the aid of a helical minichannel used for a sample cartridge. For the experiment, $10{\mu}m$ sized microbeads were used for visualization with a fluorescence imaging system. Alignment of microbeads was investigated in a stationary and spinning sample cartridge filled with glycerol-water mixtures of different densities. The helical minichannel was spun using a DC motor controlled by an Arduino board with a Bluetooth shield. It was found that when the sample cartridge was made stationary, no bead alignment was achieved for a medium with density (0% and 20% glycerol) lower than that of the beads, but when it was spun at 2000-3000 rpm for 1-4 min, an alignment was obtained at the top of the channel facilitating optical detection and enumeration of those microbeads. Since an alignment of microbeads was achieved for a medium with density as that of blood plasma, the same approach can be applied for aligning and counting CD4+ T-lymphocytes in whole blood samples collected from patients.

THE SPECTRAL SHAPE MATCHING METHOD FOR THE ATMOSPHERIC CORRECTION OF LANDSAT IMAGERY IN SAEMANGEUM COASTAL AREA

  • Min Jee-Eun;Ryu Joo-Hyung;Shanmugam P.;Ahn Yu-Hwan;Lee Kyu-Sung
    • Proceedings of the KSRS Conference
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    • 2005.10a
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    • pp.671-674
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    • 2005
  • Atmospheric correction over the ocean part is more important than that over the land because the signal from the ocean is very small about one tenth of that reflected from land. In this study, the Spectral Shape Matching Method (SSMM) developed by Ahn and Shanmugam (2004) is evaluated using Landsat imagery acquired over the highly turbid Saemangeum Coastal Area. The result of SSMM is compared with COST model developed by Chavez (1991 and 1997). In principle, SSMM is simple and easy to implement on any satellite imagery, relying on both field and image properties. To assess the potential use of these methods, several field campaigns were conducted in the Saemangeum coastal area corresponding with Landsat-7 satellite's overpass on 29 May 2005. In-situ data collected from the coastal waters of Saemangeum using optical instruments (ASD field spectroradiometer) consists of ChI, Ap, SS, aooM, F(d). In order to perform SSMM, we use the in-situ water-leaving radiance spectra from clear oceanic waters to estimate the the path radiance from total signal recorded at the top of the atmosphere (TOA), due to the reason that the shape of clear water-leaving radiance spectra is nearly stable than turbid water-leaving radiance spectra. The retrieved water-leaving radiance after subtraction of path signal from TOA signal in this way is compared with that estimated by COST model. The result shows that SSMM enabled retrieval of water-leaving radiance spectra that are consistent with in-situ data obtained from Saemangeum coastal waters. The COST model yielded significantly high errors in these areas.

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Low-Temperature Processed Thin Film Barrier Films for Applications in Organic Electronics (유기전자소자 적용을 위한 저온 공정용 배리어 박막 연구)

  • Kim, Junmo;An, Myungchan;Jang, Youngchan;Bae, Hyeong Woo;Lee, Wonho;Lee, Donggu
    • Journal of Sensor Science and Technology
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    • v.28 no.6
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    • pp.402-406
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    • 2019
  • Recently, semiconducting organic materials have been spotlighted as next-generation electronic materials based on their tunable electrical and optical properties, low-cost process, and flexibility. However, typical organic semiconductor materials are vulnerable to moisture and oxygen. Therefore, an encapsulation layer is essential for application of electronic devices. In this study, SiNx thin films deposited at process temperatures below 150 ℃ by plasma-enhanced chemical vapor deposition (PECVD) were characterized for application as an encapsulation layer on organic devices. A single structured SiNx thin film was optimized as an organic light-emitting diode (OLED) encapsulation layer at process temperature of 80 ℃. The optimized SiNx film exhibited excellent water vapor transmission rate (WVTR) of less than 5 × 10-5 g/㎡·day and transmittance of over 87.3% on the visible region with thickness of 1 ㎛. Application of the SiNx thin film on the top-emitting OLED showed that the PECVD process did not degrade the electrical properties of the device, and the OLED with SiNx exhibited improved operating lifetime

The Characteristics of Lacquer Coating of Mother-of-Pearl Turtle Shell Lacquerware (나전대모칠기에 나타나는 칠도막의 특성)

  • Lee, Seon Joo;Okada, Fumio
    • Journal of Conservation Science
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    • v.32 no.2
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    • pp.109-121
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    • 2016
  • Mother-of-pearl turtle shell lacquerware refers to a decoration made of a mother-of-pearl, a turtle shell and metal wires. This lacquerware features bright color tone as it is produced by sprinkling metal powder over its entire surface. This study aimed to find out its material properties and characteristics by using an optical microscopy and conducting a SEM-EDS analysis on the cross section of lacquer coating. As a result, it was found that charcoal powder and soil powder were mixed for undercoating. Then a mixture of cinnabar lacquer and monoclinic arsenic sulfide mineral ($As_2S_3$) was coated on the undercoating and brass powder was sprinkled on top of it. Especially, a little amount of pigment was found on the lacquer layer, which is distinguished from the colors used for conventional lacquer patterns. In addition, it was also found that the cinnabar lacquer and monoclinic arsenic sulfide mineral were mixed together.

Analysis of Pigments in the Buseoksa Josadang Murals in Yeongju

  • Song, You Na;Lee, Han Hyoung;Baek, Na Yeon;Jung, Cham Hee;Park, Min Jeong;Chung, Yong Jae
    • Journal of Conservation Science
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    • v.36 no.1
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    • pp.47-59
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    • 2020
  • Scientific analysis was conducted to identify the paint pigments used in the Buseoksa Josadang murals. optical microscopy(OM), X-ray fluorescence(XRF), XRF mapping, scanning electron microscopy-energy dispersive X-ray spectroscopy(SEM-EDS), and Raman spectroscopy were performed to examine the pigments. The results confirmed that the Josadang murals consist of two paint layers wherein the pigments were distinct for most colors. It was estimated that celadonite, white clay, red ochre, cinnabar and minium, synthetic green pigment containing tin and zinc paratacamite, or botallackite were used in the upper layer. In addition, bone white, celadonite, red ochre, azurite, cinnabar or vermilion, and gold were identified in the lower layer. In addition, as Zn and Sn were detected in the green pigments extracted from the top layer of the paint, it is believed that Josadang murals were repainted over the original paint layer at some point after the 17th century. In addition, white pigments containing calcium phosphate were found in all the colors in the bottom layer, which is the original paint layer. These results are significant because this is the first time that white pigments are found in Korean traditional paintings. Additionally, the information revealed about the pigments in this study will serve as areference for the pigments used in the Goryeo period.

A Case Study of Concrete Pavement Deterioration by Alkali-Silica Reaction in Korea

  • Hong, Seung-Ho;Han, Seung-Hwan;Yun, Kyong-Ku
    • International Journal of Concrete Structures and Materials
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    • v.1 no.1
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    • pp.75-81
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    • 2007
  • The concrete pavement of the Seohae Highway in Korea has suffered from serious distress, only four to seven years after construction. Deterioration due to Alkali-Silica Reaction (ASR) has seldom been reported per se in Korea, because the aggregate used for the cement concrete has been considered safe against alkali-silica reaction so far. The purpose of this study is to examine the deterioration caused by an alkali-silica reaction of concrete pavement in Korea. The investigation methods included visual inspection and Automatic Road Analyzer (ARAN) analysis of surface cracks, coring for internal cracks, stereo microscopic analysis, scanning electronic microscope (SEM) analysis, and electron dispersive X-ray spectrometer (EDX) analysis. The results are presented as follows: the crack pattern of the concrete pavement in Korea was longitudinal cracking, map cracking or D-cracking. Local areas of damage were noticed four to five years after construction. The cracks started from edges or joints and spread out to slabs. The most intensive cracking was observed at the intersection of the transverse and longitudinal joints. Where cracking was the most intense, pieces of concrete and aggregate had spalled away from top surface and joint interface area. The progress of deterioration was very fast. The reaction product of alkali-silica gel was clearly identified by its generally colorless, white, or very pale yellow hue seen through a stereo optical microscopy. The typical locations of the reaction product were at the interface between aggregate and cement paste in a shape of a rim, within aggregate particles in the cracks, and in the large void in the cement paste. Most of the white products were found at interface or internal aggregates. SEM and EDX analysis confirmed that the white gel was a typical reaction product of ASR. The ASR gel in Korea mainly consisted of Silicate (Si) and Potassium (K) from the cement. The crack in the concrete pavement was caused by ASR. It seems that Korea is no longer safe from alkali-silica reaction.