• Journal of the Korean Society of Manufacturing Process Engineers
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• v.5 no.2
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• pp.22-26
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• 2006

This paper addresses the development of a laser interferometer to measure micro displacement for a micro system. The laser interferometer is able to measure micro displacement during a few micro seconds with non-contact. In order to employ the interferometer, the displacement calibration experiment should be required. For the experiment, a laser probe installed on the optical table with optical devices and a micro stage. The velocity decoding board is also added to calculate doppler shift frequency directly. The output signal is processed by LabView. Finally experiments are found out the relation between displacement and output signal.

• Journal of the Korean Society for Nondestructive Testing
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• v.25 no.5
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• pp.350-355
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• 2005

The probes of fiber optic OTDR (Optical Time Domain Reflectometry) sensor was developed to measure displacements of social infrastructures. This probe was simply constructed with two conventional optical fiber connectors, and a fiber bending part, which transforms displacement to optical loss. When the displacement was affected on the bending loss part, the reflected light intensity of one optical connector was changed. The displacement was determined from this reflected light intensity change of the connector. fiber optic OTDR displacement sensor was developed as the multiplexed type of one fiber line with 5 sensor probes. Multiplexing operation was tested by these 5 sensor probes.

• Korean Journal of Optics and Photonics
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• v.15 no.5
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• pp.415-422
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• 2004

We propose and present a new multiplexed bend loss type single-mode fiber-optic sensor system for displacement measurement in order to measure the displacement of several mm of civil engineering structures such as bridges and buildings. We make a bend loss type fiber-optic sensor for measuring displacements using the signal difference between two reflection signals due to various bend losses generating at a pair of optical connectors by using the optical time domain reflectometer. And we fabricate a multiplexed bend loss type fiber-optic sensor detecting linear displacements of 4 measuring positions of an object by setting these new 4 fiber-optic sensors on a single mode fiber simultaneously. We find that the multiplexed fiber-optics displacement sensor has linearity of 0.9942, maximum displacement of 6 mm, and accuracy of 6% for 4 measuring points.

• Journal of the Korean Society for Precision Engineering
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• v.16 no.2 s.95
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• pp.74-81
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• 1999

The integrated chip of optical micro-encoder was fabricated and the feasibility as displacement measurement device was confirmed. The geometry of micro-encoder was designed to utilize the optical interference effect on the second order of diffracted beams. The hybrid-type micro-encoder consisted with light emitting diode, photodiode, polyimide wave-guide and micro-lens provides stable micro-encoding results for high speed displacements. The measurement shows the resolution of displacement of 1.00 +/- 0.02 ${\mu}m$ for the grating with scale pitch of 2.0${\mu}m$.

• Proceedings of the KSME Conference
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• 2001.06a
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• pp.108-113
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• 2001

Recently, the mechanical structures applied to many industrial products, especially in electronic products, appear to be miniaturized and complicated. This trend makes it difficult to analyze the stress distribution of those mechanical structures and generates new challenges for precise measurement of strain. Therefore, generally most of those cases largely depend on the finite element analysis. But the development of optical metrology which has the capability of non-contact, full-field and precise measurement makes it possible to solve these measuring problems. Among the optical measurement techniques, the electronic speckle pattern interferometry (ESPI) has been developed and considered as one of the most useful tools for measuring displacement and deformation. But the shortage of recognition and difficulties of measurement have limited its industrial applications in spite of its excellent capabilities. Therefore in this study, in order to enhance the industrial application of ESPI, the measurement of in-plane displacement of mechanical structure with ESPI, which is applied to washing machine and cannot be measured by strain gauges, was performed. And the verification of validity of FEA results was also done.

• Journal of the Korean Society for Precision Engineering
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• v.25 no.7
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• pp.87-94
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• 2008

The displacement sensor using optical pickup head is presented. The measuring principle of optical pickup head in focusing direction is adopted to measure displacement. The preliminary tests were carried out to verify the feasibility of the optical pickup head as a displacement sensor and optical pickup head showed about $8\;{\mu}m$ measuring range and 10nm resolution. The methodology to expand measuring range is proposed and proved its validity. The proposed displacement sensors are applied to AFM(Atomic Force Microscope) probe head to measure the deflection of micro-cantilever.

• Transactions of the Korean Society of Machine Tool Engineers
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• v.17 no.6
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• pp.8-13
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• 2008

At present many research projects on high-speed spindles are being conducted. These projects require a measurement technique which includes heat expansion, vibration and displacement measurement according to angular velocity. This paper presents the development of a measurement system for high-speed spindle displacement. The measurement system is based on $LabView^{(R)}$ and features the following sensors: optical sensor which reacts to the position of a marker on the spindle and enables two Laser Displacement Sensors(LDS). These Laser Displacement Sensors send their data to a DAQ(Data Acquisition Device). It is important that the delay time caused by the response times of the sensors as well as the sampling rate of the DAQ is considered because the spindle revolves at very high speeds.

• Journal of Sensor Science and Technology
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• v.14 no.3
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• pp.169-179
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• 2005

A multiplexed bend loss type single-mode fiber-optic sensor system was prepared to measure the displacement of several cm of the civil engineering structures such as many bridges, tunnels and various buildings. This bend loss type fiber-optic sensor used the signal difference between two reflection signals due to various bend losses generating at a pair of optical connectors by using OTDR (optical time domain reflectometer) for measuring displacements. And the experiments were conducted for showing the measurement feasibility on the range of 10 cm, and the multiplexing experiments were also performed to measure the displacements of 5 measuring positions of an object by setting these 5 fiber-optic sensors on a single mode fiber simultaneously.

• Journal of the Korean Society for Precision Engineering
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• v.14 no.10
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• pp.151-156
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• 1997

A laser measurement system, a modified Michelson interferometer, which can accurately measure high speed length and displacement of servomechanisms by detecting a phase shift in the measurement beam using an optical interference was developed. A frequency stabilized laser source and a 20 fold frequency interpolation and digitizing circuit were applied to the system. The refra- ctive index of the ambient air was calibrated through the Edlens formula. The system achieved a resolution of /40, 16nm, a maximum allow-able measurement speed of 600nm/sec, and a length measure- ment range of 1500 mm. Performance of the system was evaluated on the machining center in short and long length measurements.

• Journal of the Optical Society of Korea
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• v.16 no.4
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• pp.372-380
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• 2012

The optical method Digital Speckle Correlation Measurement (DSCM) has been extensively applied due its capability to measure the entire displacement field over a body surface. A formula of displacement measurement errors by the gradient-based DSCM method was derived. The errors were found to explicitly relate to the image grayscale errors consisting of sub-pixel interpolation algorithm errors, image noise, and subset deformation mismatch at each point of the subset. A power-law dependence of the standard deviation of displacement measurement errors on the subset size was established when the subset deformation was rigid body translation and random image noise was dominant and it was confirmed by both the numerical and experimental results. In a gradient-based algorithm the basic assumption is rigid body translation of the interrogated subsets, however, this is in contradiction to the real circumstances where strains exist. Numerical and experimental results also indicated that, subset shape function mismatch was dominant when the order of the assumed subset shape function was lower than that of the actual subset deformation field and the power-law dependence clearly broke down. The power-law relationship further leads to a simple criterion for choosing a suitable subset size, image quality, sub-pixel algorithm, and subset shape function for DSCM.