Journal of the Korean Society for Precision Engineering (한국정밀공학회지)
- Volume 16 Issue 2 Serial No. 95
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- Pages.74-81
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- 1999
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- 1225-9071(pISSN)
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- 2287-8769(eISSN)
Fabrication of Optical Micro-Encoder Chips for Sub-Micron Displacement Measurements
발광다이오드를 이용한 초정밀 변위 측정용 마이크로 엔코더 칩 제작
- Published : 1999.02.01
Abstract
The integrated chip of optical micro-encoder was fabricated and the feasibility as displacement measurement device was confirmed. The geometry of micro-encoder was designed to utilize the optical interference effect on the second order of diffracted beams. The hybrid-type micro-encoder consisted with light emitting diode, photodiode, polyimide wave-guide and micro-lens provides stable micro-encoding results for high speed displacements. The measurement shows the resolution of displacement of 1.00 +/- 0.02
Keywords