• 한국기계가공학회지
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• 제5권2호
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• pp.22-26
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• 2006

This paper addresses the development of a laser interferometer to measure micro displacement for a micro system. The laser interferometer is able to measure micro displacement during a few micro seconds with non-contact. In order to employ the interferometer, the displacement calibration experiment should be required. For the experiment, a laser probe installed on the optical table with optical devices and a micro stage. The velocity decoding board is also added to calculate doppler shift frequency directly. The output signal is processed by LabView. Finally experiments are found out the relation between displacement and output signal.

• 비파괴검사학회지
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• 제25권5호
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• pp.350-355
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• 2005

광섬유 OTDR (Optical Time Domain Reflectometry) 센서로 사회 기반 구조물의 변위를 측정하기 위한 탐촉자를 개발하였다. 광섬유 OTDR 변위 센서의 외부에서 주어지는 변위에 따라 광손실을 일으키는 굽힘부와 상용 광섬유 커넥터로 구성되었다. 이렇게 구성된 탐촉자는 광커넥터의 양끝에서 반사되는 빛의 신호차이가 커넥터들 사이에서 발생하는 굽힘 변위에 의해서 달라지는 것을 OTDR 센서 본체로 측정하여 변위 변화를 알아낼 수 있도록 하였다. 또한 수 cm의 변위를 일으키는 구조물의 변위를 측정하기 위하여 동일한 단일모드 광섬유에서 이 센서 탐촉자 5개를 직렬형으로 배열하여 사용할 수 있는 다중화된 굽힘 손실형 단일모드 광섬유 변위센서를 제안하고, 이 센서 탐촉자들을 사용하여 다중화 실험을 수행하였다.

• 한국광학회지
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• 제15권5호
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• pp.415-422
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• 2004

교량과 각종 건물을 비롯한 대형 토목 구조물에서 발생하는 수 mm의 변위를 한 개의 광섬유로 간편하게 측정하기 위하여 광커넥터에서 반사가 굽힘 손실에 의하여 변하는 현상을 이용한 새로운 다중화된 광섬유 변위센서를 제안하고 실험하였다. 한 쌍의 광커넥터 양끝에서 반사광의 신호차이가 두 광커넥터 사이에서 발생한 굽힘 변위에 의해서 달라지는 것을 Optical Time Domain Reflectometer로 측정하여 선형으로 그 변화가 측정되는 변위센서를 만들고, 이 센서 4개를 직렬형으로 배열하여 여러 지점의 변위를 동사에 측정이 가능한 다중화 센서 시스템을 구성하고 실험하였다. 그 결과 이 변위센서를 이용하면 4개 지점에서 각각 최대 6 mm까지의 변위를 6%의 오차범위 내에서 0.9942의 선형성을 가지고 변위를 측정할 수 있음을 확인하였다.

• 한국정밀공학회지
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• 제16권2호통권95호
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• pp.74-81
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• 1999

The integrated chip of optical micro-encoder was fabricated and the feasibility as displacement measurement device was confirmed. The geometry of micro-encoder was designed to utilize the optical interference effect on the second order of diffracted beams. The hybrid-type micro-encoder consisted with light emitting diode, photodiode, polyimide wave-guide and micro-lens provides stable micro-encoding results for high speed displacements. The measurement shows the resolution of displacement of 1.00 +/- 0.02 ${\mu}m$ for the grating with scale pitch of 2.0${\mu}m$.

• 대한기계학회:학술대회논문집
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• 대한기계학회 2001년도 춘계학술대회논문집A
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• pp.108-113
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• 2001

Recently, the mechanical structures applied to many industrial products, especially in electronic products, appear to be miniaturized and complicated. This trend makes it difficult to analyze the stress distribution of those mechanical structures and generates new challenges for precise measurement of strain. Therefore, generally most of those cases largely depend on the finite element analysis. But the development of optical metrology which has the capability of non-contact, full-field and precise measurement makes it possible to solve these measuring problems. Among the optical measurement techniques, the electronic speckle pattern interferometry (ESPI) has been developed and considered as one of the most useful tools for measuring displacement and deformation. But the shortage of recognition and difficulties of measurement have limited its industrial applications in spite of its excellent capabilities. Therefore in this study, in order to enhance the industrial application of ESPI, the measurement of in-plane displacement of mechanical structure with ESPI, which is applied to washing machine and cannot be measured by strain gauges, was performed. And the verification of validity of FEA results was also done.

• 한국정밀공학회지
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• 제25권7호
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• pp.87-94
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• 2008

The displacement sensor using optical pickup head is presented. The measuring principle of optical pickup head in focusing direction is adopted to measure displacement. The preliminary tests were carried out to verify the feasibility of the optical pickup head as a displacement sensor and optical pickup head showed about $8\;{\mu}m$ measuring range and 10nm resolution. The methodology to expand measuring range is proposed and proved its validity. The proposed displacement sensors are applied to AFM(Atomic Force Microscope) probe head to measure the deflection of micro-cantilever.

• 한국공작기계학회논문집
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• 제17권6호
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• pp.8-13
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• 2008

At present many research projects on high-speed spindles are being conducted. These projects require a measurement technique which includes heat expansion, vibration and displacement measurement according to angular velocity. This paper presents the development of a measurement system for high-speed spindle displacement. The measurement system is based on $LabView^{(R)}$ and features the following sensors: optical sensor which reacts to the position of a marker on the spindle and enables two Laser Displacement Sensors(LDS). These Laser Displacement Sensors send their data to a DAQ(Data Acquisition Device). It is important that the delay time caused by the response times of the sensors as well as the sampling rate of the DAQ is considered because the spindle revolves at very high speeds.

• 센서학회지
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• 제14권3호
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• pp.169-179
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• 2005

A multiplexed bend loss type single-mode fiber-optic sensor system was prepared to measure the displacement of several cm of the civil engineering structures such as many bridges, tunnels and various buildings. This bend loss type fiber-optic sensor used the signal difference between two reflection signals due to various bend losses generating at a pair of optical connectors by using OTDR (optical time domain reflectometer) for measuring displacements. And the experiments were conducted for showing the measurement feasibility on the range of 10 cm, and the multiplexing experiments were also performed to measure the displacements of 5 measuring positions of an object by setting these 5 fiber-optic sensors on a single mode fiber simultaneously.

• 한국정밀공학회지
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• 제14권10호
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• pp.151-156
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• 1997

A laser measurement system, a modified Michelson interferometer, which can accurately measure high speed length and displacement of servomechanisms by detecting a phase shift in the measurement beam using an optical interference was developed. A frequency stabilized laser source and a 20 fold frequency interpolation and digitizing circuit were applied to the system. The refra- ctive index of the ambient air was calibrated through the Edlens formula. The system achieved a resolution of /40, 16nm, a maximum allow-able measurement speed of 600nm/sec, and a length measure- ment range of 1500 mm. Performance of the system was evaluated on the machining center in short and long length measurements.

• Journal of the Optical Society of Korea
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• 제16권4호
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• pp.372-380
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• 2012

The optical method Digital Speckle Correlation Measurement (DSCM) has been extensively applied due its capability to measure the entire displacement field over a body surface. A formula of displacement measurement errors by the gradient-based DSCM method was derived. The errors were found to explicitly relate to the image grayscale errors consisting of sub-pixel interpolation algorithm errors, image noise, and subset deformation mismatch at each point of the subset. A power-law dependence of the standard deviation of displacement measurement errors on the subset size was established when the subset deformation was rigid body translation and random image noise was dominant and it was confirmed by both the numerical and experimental results. In a gradient-based algorithm the basic assumption is rigid body translation of the interrogated subsets, however, this is in contradiction to the real circumstances where strains exist. Numerical and experimental results also indicated that, subset shape function mismatch was dominant when the order of the assumed subset shape function was lower than that of the actual subset deformation field and the power-law dependence clearly broke down. The power-law relationship further leads to a simple criterion for choosing a suitable subset size, image quality, sub-pixel algorithm, and subset shape function for DSCM.