• Proceedings of the Korean Vacuum Society Conference
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• 2016.02a
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• pp.361.1-361.1
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• 2016

Due to their high sensitivity, fast response, small energy consumption and ease of integration, nanoelectromechanical systems (NEMS) have attracted much interest in various applications such as high speed memory devices, energy harvesting devices, frequency tunable RF receivers, and ultra sensitive mass sensors. Since the device performance of NEMS is closely related with the mechanical and flexural properties of the material in NEMS, analysis of the mechanical and flexural properties such as intrinsic tensile stress and Young's modulus is a crucial factor for designing the NEMS structures. In the present work, the intrinsic mechanical properties of highly stressed silicon nitride (SiN) beams are investigated as a function of the beam length using two different techniques: (i) dynamic flexural measurement using optical interferometry and (ii) quasi-static flexural measurement using atomic force microscopy. The reliability of the results is analysed by comparing the results from the two different measurement techniques. In addition, the mass density, Young's modulus and internal stress of the SiN beams are estimated by combining the techniques, and the prospect of SiN based NEMS for application in high sensitive mass sensors is discussed.

• Journal of the Microelectronics and Packaging Society
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• v.18 no.1
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• pp.49-53
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• 2011

Diamond-like carbon (DLC) films is a metastable form of amorphous carbon containing a significant fraction of Sp3 bond. DLC films have been characterized by a range of attractive mechanical, chemical, tribological, as well as optical and electrical properties. In this study DLC films were prepared by the RF magnetron sputter system on $SiO_2$ substrates using graphite target. The effects of the post annealing temperature on the Property variation of the DLC films were examined. The DLC films were annealed at temperatures ranging from 300 to $500^{\circ}C$ using rapid thermal process equipment in vacuum. The variation of electrical property and surface morphology as a function of annealing treatment was investigated by using a Hall Effect measurement and atomic force microscopy. Raman and X-ray photoelectron spectroscopy analyses revealed a structural change in the DLC films.

• Journal of the Korea Academia-Industrial cooperation Society
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• v.15 no.7
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• pp.4081-4086
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• 2014

Cellulose acetate butyrate (CAB) is a biodegradable resin with excellent optical properties, but it is difficult to apply film process. In this study, an attempt was made to improve the processability of CAB using polyactic acid and the mechanical properties using an impact modifier. Polylacitc acid (PLA)/Cellulose acetate butyrate (CAB) blends with an impact modifier were prepared using a twin screw extruder. The temperature range was $140^{\circ}C$ to $200^{\circ}C$, and the screw speed was fixed to 200 rpm. To evaluate the miscibility of impact modified CAB/PLA, the glass transition behavior and morphology were observed by DSC and FE-SEM. The mechanical properties were investigated by dynamic mechanical analysis (DMA) and a Universal Testing Machine (UTM). In addition, the effect of an impact modifier in the polymer matrix was determined using a notched Izod impact strength tester. Finally, the PLA/CAB/impact modifier 75/25/10 ratio was found to be a compatible system. In the 10wt.% impact modifier, the sample had a 4 times higher izod impact strength than the non-toughening composition.

• Korean Journal of Materials Research
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• v.20 no.11
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• pp.570-574
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• 2010

A diamond-like carbon (DLC) film deposited on a WC disk was investigated to improve disk wear resistance for injection molding of zirconia optical ferrule. The deposition of DLC films was performed using the filtered vacuum arc ion plating (FV-AIP) system with a graphite target. The coating processing was controlled with different deposition times and the other conditions for coating, such as input power, working pressure, substrate temperature, gas flow, and bias voltage, were fixed. The coating layers of DLC were characterized using FE-SEM, AFM, and Raman spectrometry; the mechanical properties were investigated with a scratch tester and a nano-indenter. The friction coefficient of the DLC coated on the WC was obtained using a pin-on-disk, according to the ASTM G163-99. The thickness of DLC films coated for 20 min. and 60 min. was about 750 nm and 300 nm, respectively. The surface roughness of DLC films coated for 60 min. was 5.9 nm. The Raman spectrum revealed that the G peak of DLC film was composed of $sp^3$ amorphous carbon bonds. The critical load (Lc) of DLC film obtained with the scratch tester was 14.6 N. The hardness and elastic modulus of DLC measured with the nano-indenter were 36.9 GPa and 585.5 GPa, respectively. The friction coefficient of DLC coated on WC decreased from 0.2 to 0.01. The wear property of DLC coated on WC was enhanced by a factor of 20.

• Polymer(Korea)
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• v.34 no.5
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• pp.480-484
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• 2010

A series of poly(amic acid)s(PAAs) was prepared by reacting 4,4'-(4,4'-isopropylidenediphenoxy) bis(phthalic anhydride)(BPADA) as the anhydride monomer and 2,2'-bis(trifluoromethyl) benzidine (TFB), bis(3-aminophenyl)sulfone (APS), 4,4'-methylenebis-(2-methylcyclohexylamine) (MMCA), or bis[4-(3-aminophenoxy) phenyl] sulfone (BAPS) as the amine monomer with 5 mol% melamine in N,N-dimethylacetamide (DMAc). Colorless and transparent polyimide (PI) films were obtained by casting the PAAs at various heat treatment temperatures. The thermo-mechanical properties and optical transparency of the PI films were investigated. The thermal properties of the PI films were examined using differential scanning calorimetry (DSC), thermogravimetric analysis (TGA), and thermomechanical analysis (TMA), and their optical transparency were measured by spectrophotometry. The coefficient of thermal expansion (CTE) and yellow index (YI) values of all samples were in the range of $48.53-64.24ppm/^{\circ}C$ and < 3.0, respectively.

• Journal of Surface Science and Engineering
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• v.38 no.4
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• pp.144-149
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• 2005

ZnO films were produced on the Si(100) and sapphire(0001) wafers by RF magnetron sputtering in terms of processing variables such as substrate temperature and RF power. The stress in films was obtained from the Stoney's formula using a laser scanning device. The stress levels in the films showed the range from $\~40$ MPa to $\~-1100$MPa depending on processing variables. The specimens were thermally cycled from R.T. to $250^{\circ}C$ to investigate the stress variation as a function of temperature. SEM was employed to characterize the microstructure of te films. As the substrate temperature increased, the film surface became rougher and the films showed coarser grains. The optical property o the films was studied by PL measurements. At the highest substrate temperature $800^{\circ}C$ the film exhibited sharper UV peaks unlike other conditions.

• Applied Chemistry for Engineering
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• v.10 no.1
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• pp.148-153
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• 1999

In situ composites containing a thermotropic liquid crystalline polymer were prepared by polycondensation of 1,4-bis(p-hydroxy-benzoyloxy)butane with 2-bromoterephthaloyl chloride in a poly(methyl methacrylate) solution. Morphology and mechanical, thermal properties of the composites were examined by differential scanning calorimeter(DSC), dynamic mechanical thermal analyser(DMTA), optical microscope and scanning electron microscope(SEM). The TLCP domains showed nematic phase. The glass transition temperature($T_g$) and mechanical properties of the PMMA in the composites increased with increasing the content of TLCP. The TLCP domains were finely dispersed in the PMMA matrix. The 20 wt % TLCP/PMMA composite prepared by in situ polymerization showed more improved mechanical property with finely well dispersed morphology compared with that prepared by solution blending of the same composition.

• Transactions of the Korean Society of Mechanical Engineers B
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• v.36 no.5
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• pp.517-521
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• 2012

Carbon nanotubes (CNTs) have been regarded as a promising material for the fabrication of flexible conductors such as transparent electrodes, flexible heaters, and transparent speakers. In this study, a multiwalled carbon nanotube (MWCNT) film was deposited on a polyethylene terephthalate (PET) substrate using a spraying technique. MWCNTs were dispersed in water using sodium dodecyl sulfate (SDS). To evaluate the effect of the weight ratio between SDS and MWCNTs on the electromechanical properties of the film, direct tensile tests and optical strain measurement were conducted. It was found that the CNT film hardly affected the mechanical behavior of CNT/PET composite films, while the electrical behavior of the CNT film was strongly affected by the SDS concentration in the CNT film. The electrical resistance of CNT/PET films gradually increased with the strain applied to the PET substrate, even up to a large strain that ruptured the substrate.

• Korean Journal of Air-Conditioning and Refrigeration Engineering
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• v.20 no.1
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• pp.35-41
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• 2008

The radiative heat loss from a receiver of a dish solar collector is numerically investigated. The dish solar collector considered in this paper consists of a receiver and multi-faceted mirrors. In order to investigate the performance comparison of dish solar collectors, six different mirror arrays and four different receivers are considered. A parabolic- shaped perfect mirror of which diameter is 1.40 m is considered as the reference for the mirror arrays. The other mirror arrays which consist of twelve identical parabolic-shaped mirror facets of which diameter are 0.405 m are suggested for comparison. Their reflecting areas, which are 1.545 $m^{2}$, are the same. Four different receiver shapes are a conical, a dome, a cylindrical, and a unicorn type. The radiative properties of the mirror surfaces and the receiver surfaces may vary the thermal performance of the dish solar collector so that various surface properties are considered. In order to calculate the radiative heat loss in the receiver, two kinds of methods are used. The Net Radiation Method that is based on the radiation heat balance on the surface is used to calculate the radiation heat transfer rate from the inside surface of the receiver to the environment. The Monte-Carlo Method that is the statistical approach is adopted to predict the radiation heat transfer rate from the reflector to the receiver. The collector efficiency is defined as the results of the optical efficiency and the receiver efficiency. Based on the calculation, the unicorn type has the best performance in receiver shapes and the STAR has the best performance in mirror arrays except the perfect mirror.

• Journal of the Korea Academia-Industrial cooperation Society
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• v.15 no.4
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• pp.1871-1878
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• 2014

PMMA (Polymethyle-methacrylate) optical components have recently been increasingly used as one of the important part of the high precision equipments. This research presents comparatively the surface preparation of light incident plane, LIP (Light Incident Plane) of LGP (Light Guide Panel) by end milling, high speed shaping, and vibration assisted high speed shaping. From several experiments, the results show that the surface quality was improved in high speed shaping and the vibration assisted HSS show not only decreasing waviness and breakage also raising the straightness property. For applying high speed shaping and vibration assisted HSS, an additional tool post was developed and experimentally used.