• 한국산학기술학회논문지
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• 제19권11호
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• pp.1-7
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• 2018

마이크로칼럼에서는 전자빔을 스캔하기 위해 초소형화된 정전디플렉터를 사용하는 경우가 많다. 주로 두 개의 8중극 디플렉터(double octupole deflector)를 사용하는 경우가 많은데, 이는 스캔 영역을 넓게 하면서도 전자빔이 대물렌즈를 통과할 때에 광축 근처에 위치하도록 함으로써 수차를 작게 유지할 수 있는 장점이 있기 때문이다. 마이크로칼럼은 최종적으로는 멀티 칼럼 형태로 사용하여 전자빔 장비의 throughput을 높이고자 하는 목적으로 연구가 되고 있는데, 칼럼의 수가 많아지게 되면 각 부품에 연결되는 배선의 수도 함께 증가하게 된다. 이에 따라 정전렌즈, 디플렉터 등의 마이크로칼럼 부품 배선을 진공 챔버 밖에 있는 제어장비와 연결하는 과정에서 실질적인 문제에 봉착하게 된다. 이러한 문제를 완화하기 위하여 렌즈 수를 최소화할 수 있도록 대물렌즈를 제거한 마이크로칼럼 구조를 선택하여, 변형된 4중극 및 8중극 디플렉터의 동작을 전산모사 방법으로 연구하였다. 기본적으로 MEMS 공정을 적용하기 용이한 실리콘 디플렉터 구조에서 각 전극의 크기를 동일하게 하지 않고, 서로 다른 크기의 전극을 교대로 배치하도록 디자인하였다. 8중극과 4중극 디플렉터 각각에서 디플렉터 전압을 인가하는 구동전극의 크기에 변화를 주었을 때 스캔 영역과 디플렉터 중심점에서의 전기장의 변화를 조사하여 비교하였다. 스캔 영역은 디플렉터전압에 따라 선형적으로 비례하였다. 스캔영역과 중심점에서의 전기장 세기 모두 8중극 디플렉터에 비해 4중극 디플렉터에서 더 크게 나타났으며, 전극의 크기에 따라 약 1.3 ~ 2.0 배 큰 것으로 조사되었다.

• 반도체디스플레이기술학회지
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• 제22권3호
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• pp.52-61
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• 2023

We designed a novel ultra-miniaturized microcolumn structure having an stigmator to significantly improve throughput per unit time, which is the biggest disadvantage of microcolumns. We adopted the structure of the stigmator in the form of an electrostatic octupole electrode, and used an electrostatic quadrupole deflector with a relatively simple structure considering the increase in wiring due to the introduction of the stigmator. We have dramatically reduced the effect of astigmatism that occurs when the electron beam probe is scanned to the periphery of the target by introducing the stigmator between the control electrode and the deflector. As our numerical analysis simulation results, the field of view obtained as a result of this study is about 46.3% improved compared to our previous study, and the electron beam probe size of less than 10 nm was achieved in the entire field of view.

• 한국광학회:학술대회논문집
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• 한국광학회 2005년도 하계학술발표회
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• pp.96-97
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• 2005

• 반도체디스플레이기술학회지
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• 제20권4호
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• pp.29-37
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• 2021

A 7 nm technology node using extreme ultraviolet lithography with a wavelength of 13.5 nm has been recently developed and applied to the semiconductor manufacturing process. Furthermore, the development of sub-3 nm technology nodes continues to be required. In this study, design factors of an electrostatic deflector for an ultra-miniaturized microcolumn system that can realize an electron wavelength of below 1.23 nm with an acceleration voltage of above 1 eV were investigated using a three-dimensional simulator. Particularly, the optimal design of the electrostatic octupole floating deflector was derived by optimizing the design elements and improving the driving method of the 1 keV low energy ultra-miniaturized microcolumn deflector. As a result, the entire wide field of view greater than 330 ㎛ at a working distance of 4 mm was realized with an ultra-high-resolution electron beam spot smaller than 10 nm. The results of this study are expected to be a basis technology for realizing a wafer-scale multi-array microcolumn system, which is expected to innovatively improve the throughput per unit time, which is the biggest drawback of electron beam lithography.

• Food Science and Biotechnology
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• 제17권3호
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• pp.501-507
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• 2008

The quantitative structure-activity relationships (QSAR) study of antioxidative anthocyanidins and their glycosides were evaluated using 4 different assays of Trolox equivalent antioxidant capacity (TEAC), superoxide radical ($O_2^{{\cdot}-}$), hydrogen peroxide ($H_2O_2$), and peroxynitrite radical ($ONOO^-$) scavenging with TSAR software. Four models were developed with significant predictive values ($r^2$ and p value), which indicated that the antioxidant activities were mainly governed by the 3-dimensional structural energy (torsional energy), constitutional properties (the number of hydroxyl and methyl groups), and electrostatic properties (heat of formation, and dipole, quadrupole, and octupole components). This QSAR approach could contribute to a better understanding of structural properties of anthocyanidins and their glycosides that are responsible for their antioxidant activities. It might also be useful in predicting the antioxidant activities of other anthocyanins.

• Bulletin of the Korean Chemical Society
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• 제23권9호
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• pp.1253-1309
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• 2002

1,3,5-Tricyano-2,4,6-tris[2-(thiophen-2-yl)vinyl]benzene derivatives have been synthesized as a new type of octupolar nonlinear optical molecules and their linear and nonlinear optical properties were determined. The λmax values increa sed with the conjugation length and as the conjugation bridge was changed from phenyl to thienyl group. For phenyl and thiophene derivatives, the b value increased with conjugation length. In contrast, the $\beta$ values of the thiophene derivatives were much smaller than the corresponding phenyl derivatives.

• 천문학회지
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• 제56권2호
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• pp.187-194
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• 2023

The remote sensing technique of measuring the magnetic field was applied first to sunspots by Hale (1908). Later Babcock (1961) showed that the solar surface magnetic field on a global scale is a dipole in first-order approximation and that this dipole field reverses once every solar cycle. The Wilcox Solar Observatory (WSO) supplies the spherical harmonics coefficients of the solar corona magnetic field of each Carrington Rotation, calculated based on the remotely-sensed photospheric magnetic field of the solar surface. To infer the internal current system producing the global solar coronal magnetic field structure and evolution of the Sun, we calculate the multipole components of the solar magnetic field using the WSO data from 1976 to 2019. The prominent cycle components over the last 4 solar activity cycles are axis-symmetric fields of the dipole and octupole. This implies that the current inversion driving the solar magnetic field reversal originates from the equatorial region and spreads to the whole globe. Thus, a more accurate solar dynamo model must include an explanation of the origin and evolution of such solar internal current dynamics.