• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2000년도 추계학술대회 논문집
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• pp.838-841
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• 2000

To improve the accuracy of products and improve the product quality, we need to enhance the machining accuracy of the machine tools. To this point of view, measurement and inspection of finished part as well as error analysis of machine tools has been studied for last several decades. OMM(On the Machine Measurement) has been issued to alternate with CMM, pointing out disadvantages of high expenses and lots of setting time in CMM. In this paper, we study 1) the spherical surface manufacturing by volumetric error compensation of machine tool, 2) the system development of OMM without detaching work piece from a bed of machine tool after working. 3) the generation of the finished part profile by On the machine measurement. Furthermore, the output of OMM is compared with that of CMM, and verified the feasibility of the measurement system.

• 한국정밀공학회지
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• 제13권10호
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• pp.71-77
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• 1996

This paper describes the development of on the machine measuring(OMM) system which can directlry measure the three dimensional machined dimensilnal accuracy using scanning probe in milling machine. Two algolithms, continuous path(CP) measurement using UC program and CAD data assisted point to point(PTP) measurement, were developed regarding specification of scanning probe. The OMM system was contructed to verify the developed system suing the proposed algorithm, and actually measured three kinds of machined TV shadow mask molds. The developed system was evaluated it's repeatability and compared with the current measurement system of CMM(Coording Measuring Machine) in terms of relative accuracy and time reduction and productivity increase.

• International Journal of Precision Engineering and Manufacturing
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• 제4권4호
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• pp.57-63
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• 2003

Machining information such as form accuracy and surface roughness is an important factor for manufacturing precise parts. To this regard, OMM (On the Machine Measurement) has been researched for last several decades to alternate CMM (Coordinate Measurement Machine) process. In this research, the OMM system with a laser displacement sensor was developed for measuring form accuracy and surface roughness of the machined workpiece on the machine tool. The surface roughness was estimated comparing the sensory signal with the reference data measured from master specimen. Also, form accuracy was determined from the moving averaged raw data. In addition, the geometric error map constructed beforehand using the geometric errors of the machine tool was used to compensate the obtained form accuracy. The overall performance was compared with CMM result, and verified the feasibility of the measurement system.

• 산업공학
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• 제11권1호
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• pp.199-205
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• 1998

This paper describes the development of on-the-machine measuring(OMM) system which can directly measure the two and three dimensional machined accuracy using a scanning probe in milling machine. Two algorithms, NC program based continuous path(CP) measurement and CAD data assisted point to point(PTP) measurement, are developed for three dimensional measurements, with consideration of the characteristics of the scanning probe. The algorithms are used to develop an auto measuring system. The delveloped system is compared with the CMM (Coordinate Measuring Machine) in terms of accuracy and repeatability. The OMM system is expected to realize measurement time reduction and hence result in high productivity.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2000년도 춘계학술대회 논문집
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• pp.681-686
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• 2000

Machining information such as machined form and surface roughness accuracy is an important factor for manufacturing precise parts. To this regard, OMM(On the Machine Measurement) has been issued for last several decades to alternate with CMM. In this research, measuring system consisting of a laser probe is developed for machined form and surface roughness measurement on the machine tool. The obtained machined form accuracy is compared with reference one defined in CAD model. The measured surface roughness data is compared with measured master surface beforehand. Furthermore, using the pre-defined volumetric error map approach compensates the geometric accuracy of the machine tool. The overall performance is compared with CMM, and verified the feasibility of the measurement system.

• 한국정밀공학회지
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• 제17권7호
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• pp.232-240
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• 2000

Machining information such as machined form and surface roughness accuracy is an important factor for manufacturing precise parts. To this regard, OMM(On the Machine Measurement) has been issued for last several decades to alternate with CMM. In this research, measuring system consisting of a laser probe is developed for machined form and surface roughness measurement on the machine tool. The obtained machined form accuracy is compared with reference one defined in CAD model. The measured surface roughness data is compared with measured master surface beforehand. Furthermore, using the pre-defined volumetric error map approach compensates the geometric accuracy of the machine tool. The overall performance is compared with CMM, and verified the feasibility of the measurement system.

• 한국정밀공학회지
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• 제27권3호
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• pp.27-32
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• 2010

The OMM(On-Machine-Measurement) system has many advantages compare to conventional measurement in the way the time and cost. But, the sensor suitable to OMM system is restrictive use. Touch trigger probe sensor has long time for measurement and non-contact sensor has directional demerit. Because the long mechanical parts such as gear and lead screw for pump, injector and machine tools has big and heavy, unclamp and transferring for measurement in machining process is very difficult. This paper presents a development of ultra miniature eddy current displacement sensor with 3 axes for On-Machine-Measurement system. The accuracy of the sensor is experimentally proved in the grinding machine. In experimental results, the accuracy has under ${\pm}5\;{\mu}m$.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2002년도 춘계학술대회 논문집
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• pp.632-635
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• 2002

In this paper, a general procedure to determine machine tool errors from the on-machine measurement (OMM) data is described. First, a parameterized error model of a machine tool is illustrated by approximating error components as linear function of axis positions, and a modified error model is proposed which includes backlash effects. To determine the unknown model coefficient vectors of the forward and backward error model, an artifact with 8 cutes is made and calibrated on CMM. Then, lower-left and upper-right cube corners are measured with a touch-trigger probe mounted on the machine tool spindle. Measured error data are used to determine the coefficient vectors. The positioning errors in the XY plane at the fixed z position are simulated for the forward and backward error model.

• 한국정밀공학회지
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• 제21권1호
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• pp.40-45
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• 2004

Recently, aspheric optical lenses and mirrors, which are harder to manufacture and measure than the conventional spherical ones, are widely used, particularly in electronic fabrication process. Generally, interferometric optical method is used for the measurement of spherical optical surface. However, the interferometric method for aspheric surface measurement is difficult because it needs a precise null corrector and strict environmental conditions such as constant temperature, humidity and vibrations. We have been studied on the manufacturing of aspheric optics to improve the surface profile accuracy and productivity using a corrective polishing process. For the corrective polishing, a practical method of On-Machine Measurement (OMM) is required. For this purpose, an optical OMM system has been studied using the Shach-Hartmann test, which is very robust to the practical polishing environment. The wavefront has been reconstructed from the measured data using the primary aberration polynomial function by the least squares fitting. The measured result of the OMM system shows that the maximum deviation is less than 200 nm for the one of commercial Fizeau interferometer Wyko 6000.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 1997년도 춘계학술대회 논문집
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• pp.73-77
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• 1997

This paper describes the analysis of measuring error of on the machine measuring(OMM) system which can directly measure the three dimensional machined free surface dimension using scanning probe on milling machine. 21 inch TV shadow mask mould was measured using PTP(point to point)measurement algorithm at pallet clamped and unclamped state on OMM system, and using coordinate measuring machine(CMM) one after another. The OMM system was evaluated probe error, stylus contact error, center shift error, repeatability and so on. Consequencely, the conclusion derived that elastic displacement of pallet had effect on measuring error mainly, and pallet design and setup method would be important.