The Error Source Analysis of Measuring Data of OMM System

OMM 시스템의 측정오차 원인분석 및 대책

This paper describes the analysis of measuring error of on the machine measuring(OMM) system which can directly measure the three dimensional machined free surface dimension using scanning probe on milling machine. 21 inch TV shadow mask mould was measured using PTP(point to point)measurement algorithm at pallet clamped and unclamped state on OMM system, and using coordinate measuring machine(CMM) one after another. The OMM system was evaluated probe error, stylus contact error, center shift error, repeatability and so on. Consequencely, the conclusion derived that elastic displacement of pallet had effect on measuring error mainly, and pallet design and setup method would be important.