• Title/Summary/Keyword: O:N ratio

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Effect of Non-lattice Oxygen Concentration and Micro-structure on Resistance Switching Characteristics in Nb-doped HfO2 by DC Magnetron Co-Sputtering

  • Lee, Gyu-Min;Kim, Jong-Gi;Kim, Yeong-Jae;Kim, Jong-Il;Son, Hyeon-Cheol
    • Proceedings of the Korean Vacuum Society Conference
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    • 2014.02a
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    • pp.378.1-378.1
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    • 2014
  • In this study, we investigated that the resistance switching characteristics of Nb-doped HfO2 films with increasing Nb doping concentration. The Nb-doped HfO2 based ReRAM devices with a TiN/Nb-doped HfO2/Pt/Ti/SiO2 were fabricated on Si substrates. The Nb-doped HfO2 films were deposited by reactive dc magnetron co-sputtering at $300^{\circ}C$ and oxygen partial ratio of 60% (Ar: 16sccm, O2: 24sccm). Microstructure of Nb-doped HfO2 films and atomic concentration were investigated by XRD, TEM, and XPS, respectively. The Nb-doped HfO2 films showed set/reset resistance switching behavior at various Nb doping concentrations. The process voltage of forming/set is decreased and whereas the initial current level is increased in doped HfO2 films. However, the switching properties of Nb-doped HfO2 were changed above the specific doping concentration of Nb. The change of resistance switching behavior depending on doping concentration was discussed in terms of concentration of non-lattice oxygen and micro-structure of Nb-doped HfO2.

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Analysis of the Structural Properties for ZnO/Sapphire(0001) Thin Films by In-situ Atmosphere Annealing (In-situ 분위기 Annealing에 따른 ZnO/Sapphire(0001) 박막의 구조적 특성 분석)

  • Wang Min-Sung;Yoo In-Sung;Park Choon-Bae
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.19 no.8
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    • pp.769-774
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    • 2006
  • In this paper the ZnO thin films, which has used spotlight of next generation short wavelength LEDs and semiconductor laser were deposited based on RF magnetron sputtering is described. The temperature at substrate and work pressure, which has implemented in sputtering process of ZnO thin films were settle down at $100^{\circ}C$ and 15 mTorr respectively. The ZnO 5N has used target. The thickness of ZnO thin films was about $1.6{\mu}m$ which was measured by SEM analysis after the sputtering process. Structural properties of ZnO thin films by in-situ and atmosphere annealing were analyzed by XRD. Transformation of grain size and surface roughness were observed by AFM. XPS spectra showed that ZnO thin film had a peak positions corresponding to the $Zn_{2p}$ and the $O_{1s}$. As form above XPS, we confirmed that post-annealing condition changed the atom ratio of Zn/O and microstructure in ZnO thin films.

Solvothermal Preparation of Nanocrystalline TiO2 Using Alcohol-water Mixed Solvent (알코올-물 혼합용액을 이용하는 Solvothermal 법에 의한 나노크기의 TiO2 제조)

  • Lee, Sang Geun;Park, Seong Soo;Hong, Seong Soo;Park, Jong Myung;Lee, Seung Ho;Kim, Dae Sung;Lee, Gun Dae
    • Applied Chemistry for Engineering
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    • v.22 no.6
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    • pp.685-690
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    • 2011
  • In this study, a solvothermal reaction to prepare nanocrystalline titania was carried out using $TiCl_4$ and mixed solvents of alcohol and water. The effects of the type and the composition of alcohol on the crystal structure and agglomeration of final $TiO_2$ products were investigated. The products were characterized by X-ray diffraction (XRD), transmission electron microscopy (TEM) as well as scanning electron microscopy (SEM). In the solvothermal reaction using the n-butanol solutions with different volume ratios of n-butanol/water (100/0, 75/25, 50/50, 25/75, 0/100), the extent of agglomeration of obtained rutile $TiO_2$ was found to change with the volume ratio of n-butanol/water, and the n-butanol/water ratio of 75/25 revealed the best result for the preparation of well-dispersed nanocrystalline $TiO_2$ powders. The crystal phase of $TiO_2$ prepared through the solvothermal reaction changed with the type of alcohol in solvent (alcohol/water = 75/25). $TiO_2$ products obtained with the aqueous solutions of methanol, ethanol and isopropanol have an anatase phase, while that with n-butanol has a rutile phase. The results showed that, in the solvothermal reaction using both $TiCl_4$ as a starting material and the alcohol-water mixed solvents without any other additive, the enhancement of dispersion and control of crystal structure of $TiO_2$ products can be feasible by simply varying the composition and type of alcohol in the mixed solvents.

Magnetic Properties of RF Diode Sputtered FeN Multilayer Films (RF Diode 스퍼터 방법으로 증착된 FeN 다층 박막의 자기적 특성)

  • 최연봉;박세익;조순철
    • Journal of the Korean Magnetics Society
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    • v.5 no.1
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    • pp.42-47
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    • 1995
  • FeN thin films for inductive recording heads were sputter deposited using RF diode sputtering mehtod from a pure iron target onto 7059 glass substrates, and their magnetic properties were measured. The magnetic properties were greatly affected by film thickness, gas pressure, sputter power and flow ratio of $N_{2}$ to Ar. Single layer FeN films with their thickness varied from $1,000\;{\AA}$ to $6,000\;{\AA}$ were doposited. 800 W sputter power, 3 mT gas pressure, $N_{2}$ to Ar flow ratio of 6.6 : 100 were the sputtering conditions. Up to 7 layers of FeN films having total thickness of $6,000\;{\AA}$ were deposited using $SiO_{2}$ of $30\;{\AA}$ thickness as intermediate layers and their coercivity and saturation magnetization were measured. The sputtering conditions were the same as those in the single layer films. Easy axis coercivity of the single layer FeN films gradually decreased as their thickness was increased, but for the films with their thicknesses above $3,000\;{\AA}$, the coercivity changed very little. As the number of the FeN layers were increased, the coercivity decreased We estimated the grain size of FeN films from the FWHM (Full Width at Half Maximum) of X-ray diffraction peaks. The grain size steadily decreased from about $200\;{\AA}$ to $120\;{\AA}$ as the number of layers were increased. Minimum hard axis coercivity of 0.4 Oe was obtained when the number of layers was four. Maximum relative permeability was 2,900 when the number of layers was three. The cut off frequeocy of the multilayer films were above 100 MHz.

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Optimum mixture ratio of functional Lindera glauca for culture of oyster mushroom (Pleurotus ostreatus) (느타리버섯 재배를 위한 기능성자원 감태나무(Lindera glauca) 톱밥의 적정 혼합비율)

  • Lee, Chan-Jung;Jhune, Chang-Sung;Cheong, Jong-Chun;Kong, Won-Sik;Park, Gi-Chun;Lee, Jeang-Hun;Shin, Yu-Su
    • Journal of Mushroom
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    • v.10 no.1
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    • pp.9-14
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    • 2012
  • This study was carried out to investigated optimum mixing ratio of Korean natural Lindera glauca for production of functional oyster mushroom. Total nitrogen and carbon source of Lindera glauca was 0.16% and 40.9%, respectively and C/N ratio was 215. Total nitrogen source and pH of substrate mixed with Lindera glauca was 2.8~3.0 and 4.8~5.0, respectively. The contents of $P_2O_5$, CaO, MgO and $Na_2O$ were increased by increasing Lindera glauca, but there was no significant difference in $K_2O$ content. Mycerial growth was faster at Lindera glauca treatments than that of control. Yields of fruiting body was the highest at Lindera glauca 20%, and dimeter and thick of pileus were increased according to increase of Lindera glauca addition ratio. The L value of pileus was the highest at the Lindera glauca 10% during mushroom harvest, but there was no significant difference in the a-value and the b-value.

Thermal Decomposition of Ammonium Salts of Transition Metal Oxyacids. V. Study on the Thermal Decomposition of Ammonium Metavanadate (전위금속의 산소산염의 열분해에 관한 연구 (제5보) Ammonium Metavanadate의 열분해에 따르는 $V_2O_5$의 생성)

  • Il-Hyun Park
    • Journal of the Korean Chemical Society
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    • v.16 no.3
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    • pp.157-165
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    • 1972
  • Thermal decomposition of ammonium metavanadate has been investigated by using the quartz spring balance and differential thermal analysis. It showed that the decomposition of ammonium metavanadate is proceeded at two stages which correspond to $180^{\circ}C-220^{\circ}C$ and $310^{\circ}C-330^{\circ}C$ decomposition temperatures, respectively. Evolved ammonia gas in thermal decomposition has been analyzed quantitatively by titration. And the constituents of gases evolved have been evaluated by gas chromatography and omegatron spectrometer. From these results, it was concluded that the gases evolved in the first step decomposition were $NH_3$ and $H_2O$ with 2:1 ratio and the second step decomposition corresponded to the formation of $NH_3$, $H_2O$ and $N_2O$ which was produced in oxidation of $NH_3$ by $V_2O_5$. The decomposition products were identified by means of X-ray diffraction method. The decomposition product in air was V_2O_5 and the product in vacuum $V_3O_7.$ The kinetics of the thermal decomposition was studied, giving the values of the activation energy of 41.4 kcal/mole and 64.4 (kcal/mole) respectively.

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Ferromagnetism of thin films deposited from paramagnetic stainless steel targets by Facing Targets Sputtering

  • Matsushita, N.;Ono, N.;Naoe, M.
    • Proceedings of the Korean Magnestics Society Conference
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    • 1991.05a
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    • pp.73-74
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    • 1991
  • The films with ferromagnetic fine particles dispersed in nonmagnetic matrix, such as $Fe-Al_2O_3$ and Fe-Cu have been studied for use of magnetic recording medium, optically device and sensor. Their magnetic properties depend strongly on structural parameter such as size and volume fraction of ferromagnetic particles. Fe-Cr-Ni alloy sputtered films also have microstructure with ferromagnetic -- b.c.c phase and nonmagnetic f.c.c phase grains. Magnetic properties of these films depend strongly on such a unique structure. These are depend on the ratio in volume of ferromagnetic particles to nonmagnetic ones $V_F/V_N$, the saturation magnetization Ms increased with increase of $V_F/V_N$. The coercivity Hc of the as-deposited films took maximum value of about 200 Oe at adequate $V_F/V_N$ and then Ms and Squareness S were 500 emu/cc and 0.5, respectively.(omitted)

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Stereo Matching Algorithm Based on Fast Guided Image Filtering for 3-Dimensional Video Service (3차원 비디오 서비스를 위한 고속 유도 영상 필터링 기반 스테레오 매칭 알고리즘)

  • Hong, Gwang-Soo;Kim, Byung-Gyu
    • Journal of Digital Contents Society
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    • v.17 no.6
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    • pp.523-529
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    • 2016
  • Stereo matching algorithm is an essential part in computer vision and photography. Accuracy and computational complexity are challenges of stereo matching algorithm. Much research has been devoted to stereo matching based on cost volume filtering of matching costs. Local stereo matching based guided image filtering (GIF) has a computational complexity of O(N), but is still not enough to provide real-time 3-dimensional (3-D) video services. The proposed algorithm concentrates reduction of computational complexity using the concept of fast guided image filter, which increase the speed up to $O(N/\small{s}^2)$ with a sub-sampling ratio $\small{s}$. Experimental results indicated that the proposed algorithm achieves effective local stereo matching as well as a fast execution time for 3-D video service.

Permeation Characteristics of $CO_2/N_2$ Mixture Gases through Plasma Treated Poly (methylpentene) Membrane (플라즈마 처리에 의한 폴리메틸펜텐 막의 $CO_2/N_2$ 혼합가스의 투과특성)

  • Jeong, Sung-Woo;Kwak, Hyun;Bae, Seong-Youl
    • Membrane Journal
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    • v.13 no.2
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    • pp.73-80
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    • 2003
  • Abstract: The surfaces of poly (methylpentene)(PMP) were modified by Af and $NH_3$ plasma treatment, and their effects on permeation characteristics were investigated. The mole ratio of O/C in the surface was increased with Ar plasma treatment and consequently the surface became hydrophilic because of the possible formation of -OH, -COOH and C=O. The surface treated by $NH_3$ plasma also became hydrophilic due to the formation of amine and/or amide groups. The $CO_2$ permeability and its actual selectivity over N_2$ were 182 baller and 6.17 for the optimum condition of Ar-30W-6min, while 144 Baller and 6.13 for that of $NH_3$-30 W-8 min.

Preparation of Microporous Silica Membrane from TEOS-$H_2O$ System and Separation Of $H_2$-$N_2$ Gas Mixture (TEOS-$H_2O$계로부터 다공성 실리카 막의 제조 및 수소-질소 혼합기체의 분리)

  • 강태범;이현경;이용택
    • Membrane Journal
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    • v.10 no.2
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    • pp.55-65
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    • 2000
  • The porous silica membrane was prepared from Si(${OC}_2H_5)_4-H_2O$ system by sol-gel method. To investigate the characteristics of gels and porous silica membrane, we examined gels and porous silica membrane using TG-DTA, X-ray diffractometer, IR spectrophotometer, BET, SEM and TEM. The optimum mole ratio of Si(OC$_2$H$_{5}$)$_4$ : $H_2O$ $C_2$H$_{5}$OH for porous silica membrane was 1 : 4.5 : 4. The porous silica membrane was obtained by heat treatment of the gel above 700 $^{\circ}C$. The specific surface area of sintered gel was 3.8 $m^2$/g to 902.3 $m^2$/g at 100 $^{\circ}C$ to 1100 $^{\circ}C$ The pore size of sintered gel was in the range 20 $\AA$~ 50$\AA$. The particle size of sintered gel was 15 nm to 30 nm at 30$0^{\circ}C$ to 700$^{\circ}C$. The performance of the porous silica membrane was investigated for the separation of $H_2$/$N_2$ gas mixture. Gas separation through porous silica membrane depends upon Knudsen flow and surface flow. The veal separation factor($\alpha$) of $H_2$/$N_2$ was 5.17 at 155.15 cmHg and $25^{\circ}C$. The real separation factor($\alpha$), head separation factor($\beta$), and tail separation factor( $\bar{B}$) increased as the pressure of permeation cell Increased.sed.

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