• Proceedings of the Korean Institute of Surface Engineering Conference
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• 2007.04a
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• pp.71-72
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• 2007

In this study, we investigated the fabrication of MLR (multi-layer resist) with a very thin diamond-like carbon (DLC) layer. ArF PR/$SiO_2$/DLC MLR structure was investigated and etching characteristics of the DLC layer was patterned using $SiO_2$ hard-mask by varying the process parameters such as different high-frequency/low-frequency combination ($f_{LF}/f_{HF}$), HF/LF power ratio ($P_{HF}/P_{LF}$), $O_2$ flow and $N_2$ flow rate in $O_2/N_2$/Ar plasmas. The results indicated an increased etch rate of DLC for the higher $f_{LF}/f_{HF}$ combination and for the increased low-frequency power ($P_{LF}$). And the etch rate of DLC was decreased with increasing the $N_2$ flow rate in $O_2/N_2$/Ar plasmas. In order to confirm the application of DLC MLR for the etching process of silicon oxide, the stack of ArF PR/BARC/$SiO_2$/DLC/TEOS/Si was investigated.

• Journal of Environmental Science International
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• v.27 no.2
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• pp.99-107
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• 2018

In order to design the improvement process for T-N removal, the treatment process of Suyoung, Gangbyeon, and Noxan sewage treatment plants (STP) in Busan was anlayzed. Suyoung STP shows a T-N removal efficiency of about 69.8% with MLE(Modified Ludzack ettinger) and A2O+MBR. However, it is necessary to improve the process to maintain over DO of 1 mg/L and is required to install a flow control tank to minimize the rainfall effect. Gangbyun STP shows a about 70.2% T-N removal efficiency with A2O+GFF(gravity fiber filtration). However, in order to improve T-N removal efficiency, it is needed to install MLE process to treat recycle water. Noksan STP shows a T-N removal efficiency of about 71.0% with MLE+Chemical treatment and shows stable T-N concentration in effluent. However, it is required a toxic chemical management process because bad wastewater flows into the STP, also is necessary a process improvement in order to increase internal recycling ratio. Especially, it is required a process improvement to increase HRT of nitrification tank because Suyoung and Gangbyeon STPs shows low nitrification efficiency during winter season.

• Proceedings of the Korean Society Of Semiconductor Equipment Technology
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• 2002.11a
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• pp.14-19
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• 2002

In this study, as Cu diffusion barrier, tantalum nitrides were successfully deposited on Si(100) substrate and SiO2 by plasma assisted atomic layer deposition(PAALD) and thermal ALD, using pentakis (ethylmethlyamino) tantalum (PEMAT) and $NH_3$ as precursors. The TaN films were deposited on $250^{\circ}$C by both method. The growth rates of TaN films were $0.8{\AA}$/cycle for PAALD and $0.75{\AA}$/cycle for thermal ALD. TaN films by PAALD showed good surface morphology and excellent step coverage for the trench with an aspect ratio of h/w - $1.8 : 0.12 \mu\textrm{m}$ but TaN films by thermal ALD showed bad step coverage for the same trench. The density for PAALD TaN was $11g/\textrm{cm}^3$ and one for thermal ALD TaN was $8.3g/\textrm{cm}^3$. TaN films had 3 atomic % carbon impurity and 4 atomic % oxygen impurity for PAALD and 12 atomic % carbon impurity and 9 atomic % oxygen impurity for thermal ALD. The barrier failure for Cu(200nm)/TaN(l0nm)/$SiO_2(85nm)$/Si structure was shown at temperature above $700^{\circ}$C by XRD, Cu etch pit analysis.

• Journal of Korean Society for Atmospheric Environment
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• v.18 no.2
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• pp.161-170
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• 2002

Total(=wet+dry) atmospheric depositions were collected by filtration-sampling method at 17 sampling sites of the coal-fired power plant area from September 1999 to January 2000. The soluble and insoluble fractions of deposition were also measured to investigate a suitability of simplified collection method for a long-term monitoring of total deposition. In the study, the 50% of sampled soluble fractions showed the electric conductivity (E.C.) of below 50 $\mu$S/cm and the 42% of them showed the lower pH than 5.0. The monthly mean fluxes of water soluble ionic components; S $O_4$$^{2-}$, C $l^{[-10]}$ , N $O_3$$^{[-10]}$ , N $a^{+}$, N $H_4$$^{+}$, $K^{+}$, $Mg^{2+}$, $Ca^{2+}$ were 168.4 kg/k $m^2$.month, 100.5 kg/k $m^2$.month, 88.6kg/k $m^2$.month, 31.3kg/k $m^2$.month, 25.6 kg/k $m^2$.month, 13.3 kg/k $m^2$.month, 8.7 kg/k $m^2$.month, 43.1kg/k $m^2$.month, respectively. The mean ionic concentration of all sample(n=79) was 314 $\mu$eq/ι, with contributions of 24.2% and 23.0% by [nss-C $a^{2+}$] and [nss-S $O_4$$^{2-}$]. The ratio of [N $O_3$$^{[-10]}$ ]/[nss-S $O_4$$^{2-}$] and [N $H_4$-C $a^{2+}$] were found to be 0.52 and 0.68, respectively.espectively.

• Journal of computational fluids engineering
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• v.22 no.1
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• pp.59-66
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• 2017

The guideline of selecting the number of snapshot dataset, $N_s$ in proper orthogonal decomposition(POD) was presented via the analysis of Eigen values based on the singular value decomposition(SVD). In POD, snapshot datasets from the solutions of Euler or Navier-Stokes equations are utilized to SVD and a reduced order model(ROM) is constructed as the combination of Eigen vectors. The ROM is subsequently applied to reconstruct the flowfield data with new set of flow conditions, thereby enhancing the computational efficiency. The overall computational efficiency and accuracy of POD is dependent on the number of snapshot dataset; however, there is no reliable guideline of determining $N_s$. In order to resolve this problem, the order of maximum to minimum Eigen value ratio, O(R) from SVD was analyzed and presented for the decision of $N_s$; in case of steady flow, $N_s$ should be determined to make O(R) be $10^9$. For unsteady flow, $N_s$ should be increased to make O(R) be $10^{11\sim12}$. This strategy of selecting the snapshot dataset was applied to two dimensional NACA0012 airfoil and vortex flow problems including steady and unsteady cases and the numerical accuracies according to $N_s$ and O(R) were discussed.

• Journal of the Korean Chemical Society
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• v.23 no.3
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• pp.161-164
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• 1979

The effect of acidity and the metal surface area of the Pd loaded zeolite catalysts; prepared from $Ca^{2+}-,\;La^{3+}-,\;NH_4^+-$exchanged Y and dealuminated HY was studied for the reaction of n-butane. The amount of strong acid site determined by the temperature programmed desorption of ammonia increased in the order NaY < CaY < LaY. Total amount of acid site decreased with increasing degree of dealumination, but the portion of strong acid site increased with increasing $SiO_2/Al_2O_3$ ratio. The effective metal surface area determined by the CO adsorption technique was large for those zeolite catalysts having strong acidity. It was found that conversion of n-butane was strongly dependent on the acidity and the effective metal surface area of the catalysts. The fact that the conversion of n-butane was proportional to the effective metal surface area suggests that the dehydrogenation by metallic component is the primary step in the reaction of n-butane.

• Korean Membrane Journal
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• v.5 no.1
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• pp.43-53
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• 2003

The selectivity of a gas in the carbon molecular sieve membrane (CMSM) can be expressed as the ratio of the product of the diffusivity and the solubility of two different gases. The diffusivity is also expressed as the product of the entropy and the total energy (kinetic and potential energy) in the nano-sized pore of the membrane. The present study calculates the entropic-energy and selectivity of penetrant gases such as H$_2$, O$_2$, N$_2$, and CO$_2$ from the gas-in-a box theory to physically analyze the diffusivity of penetrant gas in slit-shaped pore of CMSM focusing on the restriction of gas motion based on the size difference between penetrant gas pairs. The contribution of each energy term is converted to entropic term separately. By the conjugated calculation for each entropic-energy, the entropic effects on diffusivity-selectivity for gas pairs such as H$_2$/N$_2$, CO$_2$/N$_2$, and O$_2$/N$_2$ were analyzed within active pore of CMSM. In the activated diffusion domain, the calculated value of entropic-selectivity lies between 9.25 and 111.6 for H$_2$/N$_2$, between 3.36 and 6.0 for CO$_2$/N$_2$, and between 1.25 and 16.94 for O$_2$/N$_2$, respectively. The size decrement of active pore in CMSM had the direct effect on the reduction of translational entropic-energy and the contribution of vibrational entropic-energy for N$_2$, O$_2$, and H$_2$ was almost negligible. However, the vibrational entropic term of CO$_2$ might extravagantly affect on the entropic-selectivity.

• Proceedings of the Korean Vacuum Society Conference
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• 2015.08a
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• pp.243.2-243.2
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• 2015

We report a high-performing nanoscale NiO thin film grown by thermal oxidation of sputtered Ni film. The structural, physical, optical and electrical properties of nanoscale NiO were comprehensively investigated. A quality transparent heterojunction (NiO/ZnO) was formed by large-area applicable sputtering deposition method that has an extremely low saturation current of 0.1 nA. Considerable large rectification ratio of more than 1000 was obtained for transparent heterojunction device. Mott-Schottky analyses were applied to develop the interface of NiO and ZnO by establishing energy diagrams. Nanoscale NiO has the accepter carrier concentration of the order of 1018 cm-3. Nanoscale NiO Schottky junction device properties were comprehensively studied using room temperature impedance spectroscopy.

• Membrane Journal
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• v.25 no.2
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• pp.115-122
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• 2015

$SiO_2{\cdot}B_2O_3$ was prepared by trimethylborate (TMB)/tetraethylorthosilicate (TEOS) mole ratio 0.01 at $800^{\circ}C$. PDMS[poly(dimethysiloxane)]-$SiO_2{\cdot}B_2O_3$ composite membranes were prepared by adding porous $SiO_2{\cdot}B_2O_3$ to PDMS. To investigate the characteristics of PDMS-$SiO_2{\cdot}B_2O_3$ composite membrane, we observed PDMS-$SiO_2{\cdot}B_2O_3$ composite membrane using TG-DTA, FT-IR, BET, X-ray, and SEM. PDMS-$SiO_2{\cdot}B_2O_3$ composite membrane was studied on the permeabilities of $H_2$ and $N_2$ and the selectivity ($H_2/N_2$). Following the results of TG-DTA, BET, X-ray, FT-IR, $SiO_2{\cdot}B_2O_3$ was the amorphous porous $SiO_2{\cdot}B_2O_3$ with $247.6868m^2/g$ surface area and $37.7821{\AA}$ the mean of pore diameter. According to the TGA measurements, the thermal stability of PDMS-$SiO_2{\cdot}B_2O_3$ composite membrane was enhanced by inserting $SiO_2{\cdot}B_2O_3$. SEM observation showed that the size of dispersed $SiO_2{\cdot}B_2O_3$ in the PDMS-$SiO_2{\cdot}B_2O_3$ composite membrane was about $1{\mu}m$. The increasing of $SiO_2{\cdot}B_2O_3$ content in PDMS leaded the following results in the gas permeation experiment: the permeability of both $H_2$ and $N_2$ was increased, and the permeability of $H_2$ was higher than $N_2$, but the selectivity($H_2/N_2$) was decreased.

• Journal of Ecology and Environment
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• v.38 no.4
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• pp.505-515
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• 2015

The objectives of this study were to determine the effects of stream nutrient regime, N:P ratios and suspended solids on fish tolerance/trophic compositions and stream ecosystem health, based on multi-metric model, during 2008-2013. Also, stream ecosystem health was evaluated in relation to chlorophyll-a (CHL) as a measure of algal productivity or indicators of trophic state to water chemical parameters. Total number of sampled fish species were 50 and showed a decreasing trend from 2008 to 2013. The minnow of Zacco platypus, based on the catch per unit effort (CPUE), was the most dominant species (25.9%) among the all species. Spatial heterogeneity was evident in the fish tolerance guilds that showed the dominance of sensitive species (89%) in the headwaters (S1) and the dominance of tolerant species (57%) in the urban. These conditions were directly influenced by concentrations of nutrients and organic matter (COD). The N:P ratios, as a barometer of water pollution, had a negative linear function (R² = 0.40, P < 0.01) with CHL, and the ratios had an important role in changes of COD concentration (R² = 0.40, P < 0.01). Under the circumstances, the N:P ratio directly influenced the relative proportions of fish trophic/tolerance compositions. According to the regression analysis of omnivore (O_m) and insectivore sp. (I_n) on total nitrogen and total phosphorus, nitrogen had no significant influences (P > 0.05) to the two compositions, but phosphorus influenced directly the two guilds [slope (a) = -32.3, R² = 0.25, P < 0.01 in the I_n; a = 40.7, R² = 0.19, P < 0.01 in the O_m]. Such water chemistry and fish trophic guilds determined the stream ecosystem health, based on the multi-metric fish model.