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$SiO_2$ Etching in $C_4F_{8}$ Plasma by E-ICP ($C_4F_{8}O_2$ 공정기체와 E-ICP를 이용한 산화막 식각)

  • 송호영;조수범;이종근;오범환;박세근
    • Proceedings of the IEEK Conference
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    • 2001.06b
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    • pp.197-200
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    • 2001
  • Novel Enhanced Inductively Coupled Plasma is applied to etch $SiO_2$. Effect of $O_2$ or Ar addition to $C_{4}F_{8}$ gas is monitored by Optical Emission Spectroscopy and Quadrupole Mass Spectrometer. It is fund that Ar or $O_2$ dilution to $C_{4}F_{8}$ increases F emission intensity and decreases $CF_2$ intensity. However, the ac frequency to the Helmholtz coil decreases the F intensity and thus increases $CF_2$/F ratio. By adjusting the ac frequency, the optimum etch rate and PR to $SiO_2$ selectivity can be obtained in E-lCP.

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Sol-gel Spin-coating of ZnO Co-doped with (F, Ga) as A Transparent Conducting Thin Film ((F, Ga) 코도핑된 ZnO 투명 전도 박막의 솔-젤 제조와 특성)

  • Nam, Gil Mo;Kwon, Myoung Seok
    • Journal of the Semiconductor & Display Technology
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    • v.13 no.1
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    • pp.91-95
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    • 2014
  • (F,Ga) co-doped ZnO thin film on glass substrate was fabricated via a simple non-alkoxide sol-gel spin-coating. Contrary to the F single doped ZnO thin film, the (F,Ga) co-doped thin film showed a significant reduce in electrical resistivity after a second post-heat-treatment in reducing environment. The resulting decrease in electrical resistivity with Ga co-doping is considered to be resulted from the increases both carrier density and mobility. The optical transmittance of the (F,Ga) co-doped thin film in the visible range showed higher transmittance with Ga co-doping compared with F single doped ZnO thin film.

Microwave Dielectric Properties of (1-x)ZnWO4-xTiO2 Ceramics ((1-x)ZnWO4-xTiO2 세라믹스의 마이크로파 유전특성)

  • 윤상옥;김대민;심상흥;강기성
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.16 no.5
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    • pp.397-403
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    • 2003
  • Microwave dielectric properties of (1-x)ZnW $O_4$-xTi $O_2$ ceramic systems were investigated with calcination temperatures and Ti $O_2$ contents. The ZnW $O_4$ ceramic could be suitably sintered at 1075$^{\circ}C$ and showed the dielectric constant of 13.6, quality factor(Q$\times$ $f_{O}$value) of 22,000 and temperature coefficient of resonant frequency($\tau$$_{f}$) of -65$\pm$2ppm/$^{\circ}C$. Increasing the amount of Ti $O_2$ in the range of 0.25 to 0.45 mol, the dielectric constant and $\tau$$_{f}$ increased due to the role of Ti $O_2$ but the quality factor decreased due to the increase of phase boundaries. The 0.7ZnW $O_4$-0.3Ti $O_2$ ceramic showed the dielectric constant of 19.8, qualify factor(Q$\times$ $f_{0}$) of 20,000 and $\tau$$_{f}$ of -3$\pm$1ppm/$^{\circ}C$.>.EX>.>.>.

Influence of Mixtures Composed of $Fe_2O_3$, $MnO_2$, $CaF_2$ and $TiO_2$ as Mineralizers on Mullitization (광화제로서 $Fe_2O_3$, $MnO_2$, $CaF_2$$TiO_2$의 혼합물이 Mullite화에 미치는 영향)

  • 백용혁;최상흘;정창주;박현수
    • Journal of the Korean Ceramic Society
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    • v.15 no.1
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    • pp.9-15
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    • 1978
  • The possiblity of mullitization from the domestic alunite by adding of $Fe_2O_3-MnO_2$, $Fe_2O_3-MnO_2-TiO_2$, $Fe_2O_3-MnO_2-CaF_2$, and $Fe_2O_3-MnO_2-CaF_2-TiO_2$ mixtures as mineralizers was studied at the temperature range between $1, 250^{\circ}C$~$1, 430^{\circ}C$. The modifying method of domestic alunite was performed by calcination, wet ballmilling, and washing with water. The following results were obtained; 1) When added of 3.0% $Fe_2O_3$ plus 1.0-1.5% $MnO_2$ to modified alunite, the appropriate temperature range of mullite-forming was $1, 350^{\circ}C$-$1, 400^{\circ}C$. 2) When added of $TiO_2$ as mineralizer, the mullite-forming temperature was higher than not added. 3) When added of $CaF_2$ as mineralizer, the synthesized mullite was resolve at the temperature above $1, 350^{\circ}C$.

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ON THE DIRECT PRODUCTS AND SUMS OF PRESHEAVES

  • PARK, WON-SUN
    • Honam Mathematical Journal
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    • v.1 no.1
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    • pp.21-25
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    • 1979
  • Abelian군(群)의 presheaf에 관한 직적(直積)과 직화(直和)를 Category 입장에서 정의(定義)하고 presheaf $F_{\lambda}\;({\lambda}{\epsilon}{\Lambda})$들의 두 직적(直積)(또는 直和)은 서로 동형적(同型的) 관계(關係)에 있으며, 특히 ${\phi}:X{\rightarrow}Y$가 homeomorphism이라 하고 ${\phi}_*F$를 X상(上)의 presheaf F의 direct image이라 하면 (1) $({\phi}_*F, \;{\phi}_*(f_{\lambda})_{{\lambda}{\epsilon}{\Lambda}})$$({\phi}_*F_{\lambda})_{{\lambda}{\epsilon}{\Lambda}}$의 직적(直積)일 때 오직 그때 한하여 $(F,\;(f_{\lambda})_{{\lambda}{\epsilon}{\Lambda}})$$(F_{\lambda})_{{\lambda}{\epsilon}{\Lambda}})$의 직적(直積)이다. (2) $({\phi}_*F,\;{\phi}_*(l_{\lambda})_{{\lambda}{\epsilon}{\Lambda}})$$({\phi}_*F_{\lambda})_{{\lambda}{\epsilon}{\Lambda}}$의 직화(直和)일 때 오직 그때 한하여 $(F,\;(l_{\lambda})_{{\lambda}{\epsilon}{\Lambda}})$$(F_{\lambda})_{{\lambda}{\epsilon}{\Lambda}})$의 직화(直和)이다. Let $(F_{\lambda})_{{\lambda}{\epsilon}{\Lambda}})$ be an indexed set of presheaves of abelian group on topological space X. We can define the cartesian product $$\prod_{{\lambda}{\epsilon}{\Lambda}}\;F_{\lambda}$$ of $(F_{\lambda})_{{\lambda}{\epsilon}{\Lambda}})$ by $$(\prod_{{\lambda}{\epsilon}{\Lambda}}\;F_{\lambda})(U)=\prod_{{\lambda}{\epsilon}{\Lambda}}(F_{\lambda}(U))$$ for U open in X $${\rho}_v^u:\;(\prod_{{\lambda}{\epsilon}{\Lambda}}\;F_{\lambda})(U){\rightarrow}(\prod_{{\lambda}{\epsilon}{\Lambda}}\;F_{\lambda})(V)((s_{\lambda})_{{\lambda}{\epsilon}{\Lambda}}{\rightarrow}(_{\lambda}{\rho}_v^u(s_{\lambda}))_{{\lambda}{\epsilon}{\Lambda}})$$ for $V{\subseteq}U$ open in X where $_{\lambda}{\rho}^U_V$ is a restriction of $F_{\lambda}$, And we have natural presheaf morphisms ${\pi}_{\lambda}$ and ${\iota}_{\lambda}$ such that ${\pi}_{\lambda}(U):\;({\prod}_\;F_{\lambda})(U){\rightarrow}F_{\lambda}(U)((s_{\lambda})_{{\lambda}{\epsilon}{\Lambda}}{\rightarrow}s_{\lambda})$ ${\iota}_{\lambda}(U):\;F_{\lambda}(U){\rightarrow}({\prod}\;F_{\lambda})(U)(s_{\lambda}{\rightarrow}(o,o,{\cdots}\;{\cdots}o,s_{\lambda},o,{\cdots}\;{\cdots}o)$ for $(s_{\lambda}){\epsilon}{\prod}_{\lambda}\;F_{\lambda}(U)$ and $(s_{\lambda}){\epsilon}F_{\lambda}(U)$.

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The biblographical study on $T{\acute{o}}u\;f{\bar{e}}ng$ and Migraine -(Comparative study between Oriental and Western Medicine)- (두풍(頭風)과 편두통(Migraine)에 대(對)한 동서의학적(東西醫學的) 문헌고찰(文獻考察))

  • Oh, So-Jeo;Jeong, Ji-Cheon;Lee, Won-Chul
    • The Journal of Internal Korean Medicine
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    • v.14 no.1
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    • pp.129-138
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    • 1993
  • This report on the $T{\acute{o}}u\;f{\bar{e}}ng$ and Migraine comes to conclude, through the study of the Oriental- Western medical references, as follow; 1. First, $T{\acute{o}}u\;f{\bar{e}}ng$ and Migraine had some concurrencies that both the two symptoms have appeared severe and recurrent headache and more often to the female. 2 Many of them e.g. Sensory disturbance, Vertigo, Nausea, Vomiting, Tinnitus etc. in the prodrome and main symptom of $T{\acute{o}}u\;f{\bar{e}}ng$ and Migraine were identical, especially the symptom of the $f{\bar{e}}ng\;t{\acute{a}}n\;t{\acute{o}}u\;t{\grave{o}}ng$ was similar to the prodrome of the Migraine. We could find out the semilarity of the symptoms through that Migraine is proximately set in unilateral, and $Pi{\bar{a}}nT{\acute{o}}u\;f{\bar{e}}ng$ is so called alias $B{\grave{a}}n\;bi{\bar{a}}n\;t{\acute{o}}u\;t{\grave{o}}ng$. 3. The pathogeny of $T{\acute{o}}u\;f{\bar{e}}ng$ include the case of ‘$f{\bar{e}}ng\;xi{\acute{e}}\;r{\grave{u}}\;n{\bar{a}}o$’, the patient feeling weak condition, $T{\acute{a}}n,\;T{\acute{a}}nshi,\;T{\acute{a}}nhu{\breve{o}},\;Y{\grave{u}}q{\grave{i}}$, etc. and, ‘$t{\acute{a}}n\;zhu{\grave{o}}\;sh{\grave{a}}ng\;y{\acute{a}}o$’, ‘$G{\bar{a}}n\;y{\acute{a}}ng\;hu{\grave{a}}\;f{\bar{e}}ng$’. There were variable that $F{\bar{e}}ng,\;Xu{\grave{e}},\;F{\bar{e}}ngr{\grave{a}},\;F{\bar{e}}ngx{\bar{u}},\;Xu{\grave{e}}x{\bar{u}},\;Hu{\check{o}}$ in the left, and $t{\acute{a}}n,\;R{\grave{e}},\;t{\acute{a}}nr{\grave{e}},\;Qir{\acute{a}}$ in the right partial pathogeny. It was referred $Sh{\grave{a}}o\;y{\acute{a}}ng\;j{\bar{i}}ng$, $Ju{\acute{e}}\;y{\bar{i}}n\;j{\bar{i}}ng$, $Y{\acute{a}}ng\;m{\acute{i}}ng\;j{\bar{i}}ng$, $T{\grave{a}}i\;y{\acute{a}}ng\;j{\bar{i}}ng$ in connection with the Meridian system. And otherwise the primary cause of Migraine is still unknown to us. Heredity is probably important, but the mode of transmission is uncertain. Recently, the important assumption is the vasomotor change caused by vasoconstrictors like that norepinephrine, epinephrine, and serotonin etc.

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Characterizations of optical properties and microstructures of composite $MgF_2-TiO_2$ films fabricated by ion assisted deposition (이온 보조 증착에 의해 제작된 $MgF_2-TiO_2$ 혼합 박막의 광학적, 구조적 특성 분석)

  • 성창민;반승일;김형근;김석원;한성홍
    • Korean Journal of Optics and Photonics
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    • v.8 no.5
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    • pp.382-386
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    • 1997
  • The composite $MgF_2$-$TiO_2$ films are fabricated by codeposition from two independent sources. To improve optical and mechanical properties of films, the films are prepared by ion-assisted deposition. Chemical compositions, optical properties and microstructures of the composite films were investigated. The chemical composition rates of Ti:Mg of $MgF_2$-$TiO_2$ composite films are nonlinearly varied according to the relative deposition rate. It is found that the refractive indices of the composite films decrease with increasing $MgF_2$ contents and can be fitted quite well with Drude's formula and that the microstructures of the composite films changes from an amorphous to crystalline with increasing $MgF_2$ mole fractions.

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Global Warming Gas Emission during Plasma Cleaning Process of Silicon Nitride Using C-C$_4$F$_8$O Feed Gas with Additive $N_2$

  • Kim, K.J.;Oh, C.H.;Lee, N.-E.;Kim, J.H.;Bae, J.W.;Yeom, G.Y.;Yoon, S.S.
    • Journal of the Korean institute of surface engineering
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    • v.34 no.5
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    • pp.403-408
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    • 2001
  • In this work, the cyclic perfluorinated ether (c-C$_4$F$_{8}$O) with very high destructive removal efficiency (DRE) than other alternative gases, such as $C_3$F$_{8}$, c-C$_4$F$_{8}$ and NF$_3$ was used as an alternative process chemical. The plasma cleaning of silicon nitride using gas mixtures of c-C$_4$F$_{8}$O/O$_2$ and c-C$_4$F$_{8}$O/O$_2$+ $N_2$ was investigated in order to evaluate the effects of adding $N_2$ to c-C$_4$F$_{8}$O/O$_2$ on the global warming effects. Under optimum condition, the emitted net perfluorocompounds (PFCs) during cleaning of silicon nitride were quantified and then the effects of additive $N_2$ by obtaining the destructive removal efficiency (DRE) and the million metric tons of carbon equivalent (MMT-CE) were calculated. DRE and MMTCE were obtained by evaluating the volumetric emission using. Fourier transform-infrared spectroscopy (FT-IR). During the cleaning using c-C$_4$F$_{8}$O/O$_2$+$N_2$, DRE values as high as (equation omitted) 98% were obtained and MMTCE values were reduced by as high as 70% compared to the case of $C_2$F$_{6}$O$_2$. Recombination characteristics were indirectly investigated by combining the measurements of species in the chamber using optical emission spectroscopy (OES), before and after the cleaning, in order to understand any correlation between plasma and emission characteristics as well as cleaning rate of silicon nitride.silicon nitride.

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A Study on the Limitations of Trade Terms in the Situtations of Kobe Earthquake -with a Special Reference to Marine Insurance- (고배대지진에 기인한 정형거래조건의 문제점)

  • 강진욱
    • The Journal of Information Technology
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    • v.1 no.2
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    • pp.15-24
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    • 1998
  • C.I.F. and F.O.B. contracts are the chief terms used in international trade contracts. But, in recently, the multimodal transport which is based on the containerization and the improvement of air transport has been grown gradually, Regardless of theese change in international trade environment, most of the contract of sale is made by C.I.F. and F.O.B. contracts which are based on the traditional port to port transport. In other words, there are some limitation in terms of legal base in which traditional C.I.F. and F.O.B. contract is applied to the changed environment. Especially, problems arised in marine insurance which export by F.O.B. trade terms. Therefore, when the parties of the contracts of sale make an sale contracts by using the container ship and Multimodal Transport, they should use the F.C.A. and C.I.P. contracts Instead of F.O.B. and C.I.F. contracts for the transport of goods. And parties of the contracts of sale need to gain a better understanding of the characteristic of F.C.A. and C.I.P. terms and the problem of the F.C.A. and C.I.P. contracts used in the performance on international multimodal transport.

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Microwave Dielectric Properties $Ca(Li_{1/4}Nb_{3/4})O_3-CaTiO_3$ ceramic systems ($Ca(Li_{1/4}Nb_{3/4})O_3-CaTiO_3$계 세라믹스의 마이크로파 유전특성)

  • Yoon, Sang-Ok;Kim, Dae-Min;Shim, Sang-Heung;Kang, Ki-Sung
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2003.07a
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    • pp.139-142
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    • 2003
  • Microwave dielectric properties of $Ca(Li_{1/4}Nb_{3/4})O_3-CaTiO_3$ ceramic systems were investigated with calcination temperatures and amounts of $CaTiO_3$ in the range of 0.2 to 0.4mol. $Ca(Li_{1/4}Nb_{3/4})O_3$ ceramics having orthorhombic crystal structure could be synthesized at $750^{\circ}C$ and sintered well at $1250^{\circ}C$. They showed the dielectric constant of 26, quality factor($Q{\times}f_o$) of 13,000 and temperature coefficient of resonant frequency(${\tau}_f$) of $-49{\pm}2ppm/^{\circ}C$ With adding the $CaTiO_3$ amount the dielectric constant and ${\tau}_f$ increased due to the solute of $CaTiO_3$ but the quality factor decreased. The 0.7$Ca(Li_{1/4}Nb_{3/4})O_3-0.3CaTiO_3$ ceramic showed the dielectric constant of 44, quality factor($Q{\times}f_o$) of 12,000 and ${\tau}_f$ of $-9{\pm}1ppm/^{\circ}C$.

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