• 대한전자공학회:학술대회논문집
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• 대한전자공학회 2001년도 하계종합학술대회 논문집(2)
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• pp.197-200
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• 2001

Novel Enhanced Inductively Coupled Plasma is applied to etch $SiO_2$. Effect of $O_2$ or Ar addition to $C_{4}F_{8}$ gas is monitored by Optical Emission Spectroscopy and Quadrupole Mass Spectrometer. It is fund that Ar or $O_2$ dilution to $C_{4}F_{8}$ increases F emission intensity and decreases $CF_2$ intensity. However, the ac frequency to the Helmholtz coil decreases the F intensity and thus increases $CF_2$/F ratio. By adjusting the ac frequency, the optimum etch rate and PR to $SiO_2$ selectivity can be obtained in E-lCP.

• 반도체디스플레이기술학회지
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• 제13권1호
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• pp.91-95
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• 2014

(F,Ga) co-doped ZnO thin film on glass substrate was fabricated via a simple non-alkoxide sol-gel spin-coating. Contrary to the F single doped ZnO thin film, the (F,Ga) co-doped thin film showed a significant reduce in electrical resistivity after a second post-heat-treatment in reducing environment. The resulting decrease in electrical resistivity with Ga co-doping is considered to be resulted from the increases both carrier density and mobility. The optical transmittance of the (F,Ga) co-doped thin film in the visible range showed higher transmittance with Ga co-doping compared with F single doped ZnO thin film.

• 한국전기전자재료학회논문지
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• 제16권5호
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• pp.397-403
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• 2003

Microwave dielectric properties of (1-x)ZnW $O_4$-xTi $O_2$ ceramic systems were investigated with calcination temperatures and Ti $O_2$ contents. The ZnW $O_4$ ceramic could be suitably sintered at 1075$^{\circ}C$ and showed the dielectric constant of 13.6, quality factor(Q$\times$ $f_{O}$value) of 22,000 and temperature coefficient of resonant frequency($\tau$$_{f}$) of -65$\pm$2ppm/$^{\circ}C$. Increasing the amount of Ti $O_2$ in the range of 0.25 to 0.45 mol, the dielectric constant and $\tau$$_{f}$ increased due to the role of Ti $O_2$ but the quality factor decreased due to the increase of phase boundaries. The 0.7ZnW $O_4$-0.3Ti $O_2$ ceramic showed the dielectric constant of 19.8, qualify factor(Q$\times$ $f_{0}$) of 20,000 and $\tau$$_{f}$ of -3$\pm$1ppm/$^{\circ}C$.>.EX>.>.>.

• 한국세라믹학회지
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• 제15권1호
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• pp.9-15
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• 1978

The possiblity of mullitization from the domestic alunite by adding of $Fe_2O_3-MnO_2$, $Fe_2O_3-MnO_2-TiO_2$, $Fe_2O_3-MnO_2-CaF_2$, and $Fe_2O_3-MnO_2-CaF_2-TiO_2$ mixtures as mineralizers was studied at the temperature range between $1, 250^{\circ}C$~$1, 430^{\circ}C$. The modifying method of domestic alunite was performed by calcination, wet ballmilling, and washing with water. The following results were obtained; 1) When added of 3.0% $Fe_2O_3$ plus 1.0-1.5% $MnO_2$ to modified alunite, the appropriate temperature range of mullite-forming was $1, 350^{\circ}C$-$1, 400^{\circ}C$. 2) When added of $TiO_2$ as mineralizer, the mullite-forming temperature was higher than not added. 3) When added of $CaF_2$ as mineralizer, the synthesized mullite was resolve at the temperature above $1, 350^{\circ}C$.

• 호남수학학술지
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• 제1권1호
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• pp.21-25
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• 1979

Abelian군(群)의 presheaf에 관한 직적(直積)과 직화(直和)를 Category 입장에서 정의(定義)하고 presheaf $F_{\lambda}\;({\lambda}{\epsilon}{\Lambda})$들의 두 직적(直積)(또는 直和)은 서로 동형적(同型的) 관계(關係)에 있으며, 특히 ${\phi}:X{\rightarrow}Y$가 homeomorphism이라 하고 ${\phi}_*F$를 X상(上)의 presheaf F의 direct image이라 하면 (1) $({\phi}_*F, \;{\phi}_*(f_{\lambda})_{{\lambda}{\epsilon}{\Lambda}})$가 $({\phi}_*F_{\lambda})_{{\lambda}{\epsilon}{\Lambda}}$의 직적(直積)일 때 오직 그때 한하여 $(F,\;(f_{\lambda})_{{\lambda}{\epsilon}{\Lambda}})$는 $(F_{\lambda})_{{\lambda}{\epsilon}{\Lambda}})$의 직적(直積)이다. (2) $({\phi}_*F,\;{\phi}_*(l_{\lambda})_{{\lambda}{\epsilon}{\Lambda}})$가 $({\phi}_*F_{\lambda})_{{\lambda}{\epsilon}{\Lambda}}$의 직화(直和)일 때 오직 그때 한하여 $(F,\;(l_{\lambda})_{{\lambda}{\epsilon}{\Lambda}})$는 $(F_{\lambda})_{{\lambda}{\epsilon}{\Lambda}})$의 직화(直和)이다. Let $(F_{\lambda})_{{\lambda}{\epsilon}{\Lambda}})$ be an indexed set of presheaves of abelian group on topological space X. We can define the cartesian product $$\prod_{{\lambda}{\epsilon}{\Lambda}}\;F_{\lambda}$$ of $(F_{\lambda})_{{\lambda}{\epsilon}{\Lambda}})$ by $$(\prod_{{\lambda}{\epsilon}{\Lambda}}\;F_{\lambda})(U)=\prod_{{\lambda}{\epsilon}{\Lambda}}(F_{\lambda}(U))$$ for U open in X $${\rho}_v^u:\;(\prod_{{\lambda}{\epsilon}{\Lambda}}\;F_{\lambda})(U){\rightarrow}(\prod_{{\lambda}{\epsilon}{\Lambda}}\;F_{\lambda})(V)((s_{\lambda})_{{\lambda}{\epsilon}{\Lambda}}{\rightarrow}(_{\lambda}{\rho}_v^u(s_{\lambda}))_{{\lambda}{\epsilon}{\Lambda}})$$ for $V{\subseteq}U$ open in X where $_{\lambda}{\rho}^U_V$ is a restriction of $F_{\lambda}$, And we have natural presheaf morphisms ${\pi}_{\lambda}$ and ${\iota}_{\lambda}$ such that ${\pi}_{\lambda}(U):\;({\prod}_\;F_{\lambda})(U){\rightarrow}F_{\lambda}(U)((s_{\lambda})_{{\lambda}{\epsilon}{\Lambda}}{\rightarrow}s_{\lambda})$ ${\iota}_{\lambda}(U):\;F_{\lambda}(U){\rightarrow}({\prod}\;F_{\lambda})(U)(s_{\lambda}{\rightarrow}(o,o,{\cdots}\;{\cdots}o,s_{\lambda},o,{\cdots}\;{\cdots}o)$ for $(s_{\lambda}){\epsilon}{\prod}_{\lambda}\;F_{\lambda}(U)$ and $(s_{\lambda}){\epsilon}F_{\lambda}(U)$.

• 대한한방내과학회지
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• 제14권1호
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• pp.129-138
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• 1993

This report on the $T{\acute{o}}u\;f{\bar{e}}ng$ and Migraine comes to conclude, through the study of the Oriental- Western medical references, as follow; 1. First, $T{\acute{o}}u\;f{\bar{e}}ng$ and Migraine had some concurrencies that both the two symptoms have appeared severe and recurrent headache and more often to the female. 2 Many of them e.g. Sensory disturbance, Vertigo, Nausea, Vomiting, Tinnitus etc. in the prodrome and main symptom of $T{\acute{o}}u\;f{\bar{e}}ng$ and Migraine were identical, especially the symptom of the $f{\bar{e}}ng\;t{\acute{a}}n\;t{\acute{o}}u\;t{\grave{o}}ng$ was similar to the prodrome of the Migraine. We could find out the semilarity of the symptoms through that Migraine is proximately set in unilateral, and $Pi{\bar{a}}nT{\acute{o}}u\;f{\bar{e}}ng$ is so called alias $B{\grave{a}}n\;bi{\bar{a}}n\;t{\acute{o}}u\;t{\grave{o}}ng$. 3. The pathogeny of $T{\acute{o}}u\;f{\bar{e}}ng$ include the case of ‘$f{\bar{e}}ng\;xi{\acute{e}}\;r{\grave{u}}\;n{\bar{a}}o$’, the patient feeling weak condition, $T{\acute{a}}n,\;T{\acute{a}}nshi,\;T{\acute{a}}nhu{\breve{o}},\;Y{\grave{u}}q{\grave{i}}$, etc. and, ‘$t{\acute{a}}n\;zhu{\grave{o}}\;sh{\grave{a}}ng\;y{\acute{a}}o$’, ‘$G{\bar{a}}n\;y{\acute{a}}ng\;hu{\grave{a}}\;f{\bar{e}}ng$’. There were variable that $F{\bar{e}}ng,\;Xu{\grave{e}},\;F{\bar{e}}ngr{\grave{a}},\;F{\bar{e}}ngx{\bar{u}},\;Xu{\grave{e}}x{\bar{u}},\;Hu{\check{o}}$ in the left, and $t{\acute{a}}n,\;R{\grave{e}},\;t{\acute{a}}nr{\grave{e}},\;Qir{\acute{a}}$ in the right partial pathogeny. It was referred $Sh{\grave{a}}o\;y{\acute{a}}ng\;j{\bar{i}}ng$, $Ju{\acute{e}}\;y{\bar{i}}n\;j{\bar{i}}ng$, $Y{\acute{a}}ng\;m{\acute{i}}ng\;j{\bar{i}}ng$, $T{\grave{a}}i\;y{\acute{a}}ng\;j{\bar{i}}ng$ in connection with the Meridian system. And otherwise the primary cause of Migraine is still unknown to us. Heredity is probably important, but the mode of transmission is uncertain. Recently, the important assumption is the vasomotor change caused by vasoconstrictors like that norepinephrine, epinephrine, and serotonin etc.

• 한국광학회지
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• 제8권5호
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• pp.382-386
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• 1997

MgF$_{2}$와 TiO$_{2}$를 각각 다른 두 증발원으로부터 동시에 증착시켜 혼합 박막을 제작하였다. 박막의 특성을 개선시키기 위해 이온 보조 증착(IAD)을 하였다. 제작된 MgF$_{2}$-TiO$_{2}$ 혼합 박막의 원소 조성비, 광학적 특성과 결정 구조를 분석하였다. 상대적 증착률을 달리하여 제작된 MgF$_{2}$-TiO$_{2}$ 혼합 박막의 Mg:Ti의 조성비는 비선형적으로 변화하였으며, MgF$_{2}$의 조성비를 상대적으로 증가시킴에 따라 혼합 박막의 굴절률은 감소하였고 Drude 모델을 잘 만족함을 알 수 있었다. 그리고 MgF$_{2}$의 조성비가 증가할수록 비정질인 TiO$_{2}$ 구조 사이에 다결정질인 MgF$_{2}$의 양이 증가하여 결정성을 갖는 박막으로 성장함을 확인하였다.

• 한국표면공학회지
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• 제34권5호
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• pp.403-408
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• 2001

In this work, the cyclic perfluorinated ether (c-C$_4$F$_{8}$O) with very high destructive removal efficiency (DRE) than other alternative gases, such as $C_3$F$_{8}$, c-C$_4$F$_{8}$ and NF$_3$ was used as an alternative process chemical. The plasma cleaning of silicon nitride using gas mixtures of c-C$_4$F$_{8}$O/O$_2$ and c-C$_4$F$_{8}$O/O$_2$+ $N_2$ was investigated in order to evaluate the effects of adding $N_2$ to c-C$_4$F$_{8}$O/O$_2$ on the global warming effects. Under optimum condition, the emitted net perfluorocompounds (PFCs) during cleaning of silicon nitride were quantified and then the effects of additive $N_2$ by obtaining the destructive removal efficiency (DRE) and the million metric tons of carbon equivalent (MMT-CE) were calculated. DRE and MMTCE were obtained by evaluating the volumetric emission using. Fourier transform-infrared spectroscopy (FT-IR). During the cleaning using c-C$_4$F$_{8}$O/O$_2$+$N_2$, DRE values as high as (equation omitted) 98% were obtained and MMTCE values were reduced by as high as 70% compared to the case of $C_2$F$_{6}$O$_2$. Recombination characteristics were indirectly investigated by combining the measurements of species in the chamber using optical emission spectroscopy (OES), before and after the cleaning, in order to understand any correlation between plasma and emission characteristics as well as cleaning rate of silicon nitride.silicon nitride.

• 정보학연구
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• 제1권2호
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• pp.15-24
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• 1998

본 연구에서 살펴본 바와 같이 컨테이너 운송의 경우 보험단보의 공백구간에서 발생하는 위험을 회피하기 위해서는 운송인 책임의 개시와 위험의 이전시기가 일치되어 있는 컨테이너 정형무역거래조건을 이용해야 한다고 사료되어진다.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2003년도 하계학술대회 논문집 Vol.4 No.1
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• pp.139-142
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• 2003

Microwave dielectric properties of $Ca(Li_{1/4}Nb_{3/4})O_3-CaTiO_3$ ceramic systems were investigated with calcination temperatures and amounts of $CaTiO_3$ in the range of 0.2 to 0.4mol. $Ca(Li_{1/4}Nb_{3/4})O_3$ ceramics having orthorhombic crystal structure could be synthesized at $750^{\circ}C$ and sintered well at $1250^{\circ}C$. They showed the dielectric constant of 26, quality factor($Q{\times}f_o$) of 13,000 and temperature coefficient of resonant frequency(${\tau}_f$) of $-49{\pm}2ppm/^{\circ}C$ With adding the $CaTiO_3$ amount the dielectric constant and ${\tau}_f$ increased due to the solute of $CaTiO_3$ but the quality factor decreased. The 0.7$Ca(Li_{1/4}Nb_{3/4})O_3-0.3CaTiO_3$ ceramic showed the dielectric constant of 44, quality factor($Q{\times}f_o$) of 12,000 and ${\tau}_f$ of $-9{\pm}1ppm/^{\circ}C$.