• Journal of the Korean Society for Precision Engineering
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• v.17 no.1
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• pp.129-137
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• 2000

In this paper, a new method of noncontact measurement has been developed for a 3 dimensional topography in semiconductor wafer, implementing a new optical probe based on the precision defocus measurement. The developed technique consists of the new optical probe, precision stages, and the measurement/control system. The basic principle of the technique is to use the reflected slit beam from the specimen surface, and to measure the deviation of the specimen surface. The defocusing distance can be measured by the reflected slit beam, where the defocused image is measured by the proposed optical probe, giving very high resolution. The distance measuring formula has been proposed for the developed probe, using the laws of geometric optics. The precision calibration technique has been applied, giving about 10 nanometer resolution and 72 nanometer of four sigma uncertainty. In order to quantitize the micro pattern in the specimen surface, some efficient analysis algorithms have been developed to analyse the 3D topography pattern and some parameters of the surface. The developed system has been successfully applied to measure the wafer surface, demonstrating the line scanning feature and excellent 3 dimensional measurement capability.

• Transactions of the Korean Society of Mechanical Engineers A
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• v.21 no.11
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• pp.1862-1870
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• 1997

A fast and precise technique to measure 3-dimensional coordinates of an object is proposed. It is essential to take the 3-dimensional measurements of the object in design and inspection. Using this developed system a surface model of a complex shape can be constructed. 3-dimensional world coordinates are projected onto a camera plane by the perspective transformation, which plays an important role in this measurement system. According to the shape of the object two measuring methods are proposed. One is rotation of an object and the other is translation of measuring unit. Measuring speed depending on image processing time is obtained as 200 points per second. Measurement resolution i sexperimented by two parameters among others; the angle between the laser beam plane and the camera, and the distance between the camera and the object. As a result of these experiments, it was found that measurement resolution ranges from 0.3mm to 1.0mm. This constructed surface model could be used in manufacturing tools such as rapid prototyping machine.

• Journal of Institute of Control, Robotics and Systems
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• v.9 no.5
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• pp.368-373
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• 2003

This paper presents a cost-effective 3D foot scanner system that provides the 3-dimensional point cloud foot data to design the custom footwear. To measure the 3-dimensional point cloud data of the foot, a CCD camera, a Non-Gaussian laser line projector and optical triangulation method are employed. Furthermore, the integrated system employs a measurement base, a frame grabber, a CCD moving cart, a stepping motor and a computer. The measurement result is saved as 3D dxf format and it could be converted to 2D essential data fer a shoe design. The experimental results demonstrate that the proposed system have the decent resolution of 1mm which is enough for last and shoe design.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2002.10a
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• pp.128-131
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• 2002

Three Dimensional measuring system using optical interference is greatly needed for semiconductor surface or optical surface. The application of this system are : MEMS product, semiconductor surfaces, optical components, precise machined surface, etc. In this paper, Interferometry based measurement system is introduced, which is nondestructive and noncontact inspection system. This system have relatively many advantage, compared with AFM/STM, SEM, Stylus, etc. The developed system can measure the surface topography with high precision and resolution, and with few seconds. And the associated software algorithm is also developed for the ultra precision 3D measuring surface. Various samples that is measured using this system is showed in the latter of this paper.

• Proceedings of the Korean Society of Machine Tool Engineers Conference
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• 1999.10a
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• pp.170-175
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• 1999

Noncontact measuring methodology of 3-dimensional profile using CCD camera are very attractive because of it's high measuring speed and its's high sensitivity. Especially, when projecting a grid pattern over the object the captured image have 3 dimensional information of the object. Projection moire extract 3-D information with another grid pattern in front of CCD camera. However phase measuring profilometry(PMP) obtain similar results without additional grid pattern. In this paper, new method for grid pattern generation system by polygonal mirror and Laser Diode. This system is applied the projection moire and the PMP.

• Journal of Institute of Control, Robotics and Systems
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• v.10 no.11
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• pp.1017-1021
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• 2004

In this paper, a cost-effective integrated 3D system for measuring and sizing foot is proposed. The proposed system employs two CCDs and a laser line projector which are capable of accurately measuring foot. The measurement is based upon the biologically motivated stereo vision principle providing ruggedness against minor system distortions. According to the tolerance, calibration between two different views are implicitly applied. Furthermore, the measurement system employs a measurement base, a frame grabber, a CCD moving cart, a stepping motor and computer. Analysis and design procedure is presented for the calculation of the 3D foot data and the proposed system. Experimental results on the proposed system would verify the concept and system operation.

• Journal of the Korean Society of Manufacturing Technology Engineers
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• v.6 no.4
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• pp.39-45
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• 1997

Shadow moire topography has been used as a noncontact method for measuring the 3-D shapes of objects. The moire fringes are results from the superposition of a master grating and its shadow projected on the surface of an object. But in case of the classical shadow moire method, in general, the resolution is a few tenths of millimeter. It is difficult to use a phase -shifting method in shadow moire because it is impossible to obtain uniform phase shifts on the whole field. But in this study , We introduce a phase-shifting method to improve the resolution of the classical shadow moire method. This method is based on the fact that if the depth of object is much less than the distance between the observer and the master grating, the phase shifts are almost uniform on the whole field area. Finally, we applied this new phase-shifting method to the measurement of the 3-D shape of a coin.

• Journal of Advanced Marine Engineering and Technology
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• v.23 no.2
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• pp.259-269
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• 1999

A new algorithm for measuring 3-D velocity components of high speed flows were developed using a digital image processing technique. The measuring system consists of three CCD cameras an optical instrument called AOM a digital image grabber and a host computer. The images of mov-ing particles arranged spatially on a rotation plate are taken by two or three CCD cameras and are recorderd onto the image grabber or a video tape recoder. The three-dimensionl velocity com-ponents of the particles are automatically obtained by the developed algorithm In order to verify the validity of this technique three-dimensional velocity data sets obtained from a computer simu-lation of a backward facing step flow were used as test data for the algorithm. an uncertainty analysis associated with the present algorithm is systematically evaluated, The present technique is proved to be used as a tookl for the measurement of unsteady three-dimensional fluid flows.

• Journal of the Ergonomics Society of Korea
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• v.33 no.4
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• pp.299-311
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• 2014

Objective: The aim of this study was to develop a method for measuring breast size from three-dimensional (3D) body scan image data. Background: Previous bra studies established reference points by directly contacting the subject's naked skin to determine the boundary of the breast. But some subjects were uncomfortable with these types of measurements. This study examined noncontact methods of extracting breast reference points from 3D body scan data that were collected while subjects were wearing standardized soft bras. Method: 3D body scan data of 32 Korean women were analyzed. The subjects were selected from the Size Korea 2010 study. The breast landmarks were identified by graphic analyses of slicing contour lines on 3D body scan data. Results: Three methods determining bra cup size were compared. The M1 and M2 methods determined cup size by calculating the difference between bust girth and under-bust girth. The M3 method determined bra cup size by measuring breast arc length. Conclusion: The researchers proposed an anthropometric bra cup sizing system with the breast arc length (M3 method). It was measured from the geometrically defined landmarks on the 3D body scan slicing contour lines. The new bra cup size was highly correlated with breast depth. Application: The noncontact measuring method used in this study can be applied to the ergonomic studies measuring sensitive body parts.

• Journal of the Korean Society for Precision Engineering
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• v.17 no.6
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• pp.210-217
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• 2000

Noncontact measuring methodology of 3-dimensional profile using CCD camera are very attractive because of it's high measuring speed and it's high sensitivity. Especially when projecting a grid pattern over the object, the captured image have 3 dimensional information of the object. Projection moire extract 3-D information with another grid pattern in front of CCD camera. However phase measuring profilometry(PMP) obtain similar results without additional grid pattern. In this paper, the projection moire are compared with the PMP mathematically, and it is shown that PMP can generate moire image with simple mathematical computations. Experimental works are also carried out showing the same results. It is shown that using a single gird pattern, moire image can be obtained directly without any mathematical operation when some conditions are satisfied.