• 한국진공학회:학술대회논문집
• /
• 한국진공학회 2012년도 제42회 동계 정기 학술대회 초록집
• /
• pp.498-498
• /
• 2012

직류 아크 토치를 이용하여 열플라즈마를 발생시키는 방법은 전극의 구성에 따라 크게 비이송식(non-transferred)과 이송식(transferred)의 2가지 형태로 나눌 수 있다. 1950년대 H. Maecker 등에 의해 이론적 기초가 형성되기 시작한 이송식 아크 플라즈마 발생장치는 처리 대상물질을 전극으로 사용하여 양극에서의 에너지 전달을 직접 이용할 수 있으므로 열효율이 매우 높기 때문에 이를 이용한 고출력 토치에 관한 활발한 연구가 지속되고 있다. 본 연구에서는 대기압 아르곤 자유연소아크 방전에 의해 발생되는 열플라즈마의 열유동 특성을 수치적으로 해석하기 위하여 아크 기둥의 온도, 압력 및 속도 특성을 Navier-Stokes 방정식과 Maxwell 방정식을 연계 계산하였다. 또한 아크-전극 상호작용(arc-electrode interaction) 모델링을 통한 양극(anode)인 처리 대상물질로의 에너지 플럭스 유입을 고려하여 전극 내부의 온도분포를 계산하였다. 해석결과를 검증하기 위하여 음극과 양극 사이 플라즈마 기둥(column)의 중심축 온도는 Haddad & Farmer(1984)의 실험데이터와 비교하였고, 양극으로의 에너지 플럭스 및 온도분포 데이터는 Bini 등(2006)의 실험 및 해석데이터와 비교하여 만족스런 일치를 확인하였다.

• E2M - 전기 전자와 첨단 소재
• /
• 제10권8호
• /
• pp.807-811
• /
• 1997

In this paper we have investigated the removal characteristics of NOx by pulsed corona discharge with a multi-pointplane electrode where a magnetic field is applied in the discharge region. The efficiency of NOx removal was measured and analyzed as a function of pulse frequency gas flow rate NOx initial concentration magnetic flux density. In this result the highest removal efficiency of NOx was obtained at the following operating conditions; the frequency =400[Hz] gas flow =1[$\ell$/min] initial concentration= 400[ppm] and magnetic flux density=0.36[T].

• Journal of Pharmaceutical Investigation
• /
• 제30권2호
• /
• pp.73-83
• /
• 2000

Polyethylene glycol (PEG) is a water soluble, biocompatible, non-toxic polymer and PEGylation is a well established technique for the modification of therapeutic proteins and peptides. PEG-protein drugs have been extensively studies in relation to therapies for various diseases: cancer, inflammation and others. The covalent attachment of PEG to proteins and peptides prolonged plasma half-life, reduced antigenicity and immunogenicity, increased thermal and mechanical stability, and prevented degradation by enzymes. Several chemical groups for general and site specific conjugation have been exploited to activate PEG for amino group, carboxyl group, and cysteine groups. PEGylation of many proteins and peptides have been studied to enhance their properties for the potential uses. Also, the different positional isomers in several PEG-proteins have shown the difference in vivo stability and biological indicating that the site of PEG molecule attachment is one of the important factor to develop PEG-proteins as potential therapeutic agents.

• 한국축산식품학회지
• /
• 제32권5호
• /
• pp.561-570
• /
• 2012

The objective of this study was to evaluate the effects of an atmospheric pressure plasma (APP) jet on L. monocytogenes inactivation, quality characteristics, and genotoxicological safety of cooked egg white and yolk. APP treatment using He gas resulted in a 5 decimal reduction in the number of L. monocytogenes in cooked egg white, whereas that using $He+O_2$, $N_2$, and $N_2+O_2$ decreased the number further, and to undetectable levels. All treatments of cooked egg yolk resulted in undetectable levels of inoculated L. monocytogenes. There were no viable cells of total aerobic bacteria after APP treatment on day 0 while the control showed approximately 3-4 Log CFU/g. On day 7, the numbers of total aerobic bacteria had increased by approximately 3 log cycles in cooked egg white, but there were no viable cells in cooked egg yolk after 2 min of APP jet. APP treatment decreased the $L^*$-values of cooked egg white and yolk significantly on day 0. No significant sensory differences were found among the cooked egg white samples, whereas significant reductions in flavor, taste, and overall acceptability were found in cooked egg yolks treated with APP jets. SOS chromotest did not reveal the presence of genotoxic products following APP treatments of cooked egg white and yolk. Therefore, it can be concluded that APP jets can be used as a non-thermal means to enhance the safety and extend the shelf-life of cooked egg white and yolk.

• 한국전기전자재료학회논문지
• /
• 제16권3호
• /
• pp.247-252
• /
• 2003

In this paper, we made four types of metal particle $Al_2$O$_3$ barrier reactors with and without dielectric of BaTiO$_3$ between metal particle and $Al_2$O$_3$ barrier to investigate NOx removal characteristic and the effect of dielectric on Nox removal. And Nox removal rate is measured when sludge pellets are put at down stream of plasma reactor. Nox removal rate in the reactor with $Al_2$O$_3$ barrier is much better than that in the reactor without $Al_2$O$_3$ barrier, Nox removal rate is not so good in metal particle-Al$_2$O$_3$ barrier reactor with BaTiO$_3$ between metal particle and $Al_2$O$_3$ barrier, however, Nox removal rate is about 40% in metal particle-Al$_2$O$_3$ barrier reactor with TiO$_2$. The most of NO is conversed to NO$_2$ in these kind of reactor. When sludge pellets are put at down stream of plasma reactor, Nox removal rate is greatly improved up to 90%. It indicates that sludge pellets have great effect on the NO$_2$ removal and the improvement of Nox removal rate, however, dielectric materials between metal particle and $Al_2$O$_3$ barrier have not effect. Organic materials included in sludge may react with NO$_2$ and ozone so that Nox removal rate is greatly improved.

• 한국전기전자재료학회:학술대회논문집
• /
• 한국전기전자재료학회 2007년도 하계학술대회 논문집 Vol.8
• /
• pp.111-111
• /
• 2007

Further scaling the semiconductor devices down to low dozens of nanometer needs the extremely shallow depth in junction and the intentional counter-doping in the silicon gate. Conventional ion beam ion implantation has some disadvantages and limitations for the future applications. In order to solve them, therefore, plasma source ion implantation technique has been considered as a promising new method for the high throughputs at low energy and the fabrication of the ultra-shallow junctions. In this paper, we study about the effects of DC bias and base pressure as a process parameter. The diluted mixture gas (5% $PH_3/H_2$) was used as a precursor source and chamber is used for vacuum pressure conditions. After ion doping into the Si wafer(100), the samples were annealed via rapid thermal annealing, of which annealed temperature ranges above the $950^{\circ}C$. The junction depth, calculated at dose level of $1{\times}10^{18}/cm^3$, was measured by secondary ion mass spectroscopy(SIMS) and sheet resistance by contact and non-contact mode. Surface morphology of samples was analyzed by scanning electron microscopy. As a result, we could accomplish the process conditions better than in advance.

• 천문학회보
• /
• 제35권1호
• /
• pp.29.2-29.2
• /
• 2010

The Extreme ultraviolet Imaging Spectrometer (EIS) on board Hinode provide us with excellent imaging spectroscopic data with very good spatial and spectral resolutions, which can be used for detecting Doppler flows in transition region and coronal lines as well as diagnosing plasma properties such as temperature, density, and non-thermal velocity. In this study we have made an EUV-imaging spectroscopic study of the source region of a partial halo coronal mass ejection (CME) that occurred on 2007 July 9 in NOAA 10961. Dopplergrams are obtained before and after the CME eruption using 12 EIS spectral lines (Log T= 4.9~7.2). Major results are summarized as follows. First, it is noted that either red shifts disappeared or blue shifts newly appeared for all spectral lines lower than Log T =6.0. Second, there were significant intensity increases for all wavelengths. Third, there were no significant variations in non-thermal motions for all wavelengths. We found one interesting bright point that newly appeared after the CME eruption. We discuss the implication on the results in terms of the CME eruption.

• 한국대기환경학회지
• /
• 제27권4호
• /
• pp.387-394
• /
• 2011

A study on the removal of sulfur dioxide and nitrogen oxide was carried out using a non-thermal nano-pulse corona discharger at different gas temperatures. Pulse voltage with a high voltage of 50 kV, a pulse rising time of about 100 ns, a full width at half maximum of about 500 ns and a frequency of 1 kHz was applied to a wire-cylinder corona reactor. Ammonia and propylene gases were added into the corona reactor as additives with a static mixer. Ammonia addition had less effect on $SO_2$ reduction at the higher temperature because of the retardation of ammonium sulfate formation. However, propylene addition enhanced NO reduction at higher temperature due to increased gas mixture. $SO_2$ was further removed at the mixed $SO_2$ and NO gas due to increased $NO_2$ by the conversion of NO. The addition of ammonia and propylene gases was more highly dominant for the removal of sulfur dioxide compared to the sole pulse corona without the additives. However, the specific energy density per unit concentration of pulse corona as well as propylene additive was an important factor to remove NO gas. Therefore, the specific energy density per unit concentration of 0.04 Wh/($m^3{\cdot}ppm$) was necessary for the NO removal of more than 80% with the concentration ratio of 2.0 for propylene and NO. Hydrogen peroxide was another alternative additive to remove both $SO_2$ and NO in the nano-pulse corona discharger.

• 한국진공학회지
• /
• 제18권4호
• /
• pp.296-301
• /
• 2009

ZnO에 대한 박막증착 연구를 위하여 유도결합 플라즈마 원자층박막증착(inductively coupled plasma assisted atomic layer deposition: ICP-ALD) 장치를 제작하고, 장치에 대한 기본 공정조건을 설정하기 위하여 플라즈마를 유도하지 않은 상태에서 p-type Si(100) 기판 위에 ZnO 박막을 증착하는 다양한 실험을 수행하였다. Zn 전구체(precursor)로는 Diethyl zinc [$Zn(C_2H_5)_2$, DEZn]를, 반응가스(reaction gas)로는 $H_2O$를, 캐리어(carrier) 및 퍼지가스(purge gas)로는 Ar을 사용하였다. 기판온도 $150^{\circ}C$에서 DEZn, $H_2O$, Ar의 공급시간을 변화시켜가면서 자기제한적 표면반응(self-limiting surface reaction)에 의한 박막성장조건을 성공적으로 유도하였다. 기판온도를 변화시켜가면서($90{\sim}210^{\circ}C$) 증착실험을 반복하여, 본 장치에 대한 ALD 공정온도(thermal ALD process window)를 확립하고 성장된 ZnO박막에 대한 증착특성, 결정성, 불순물 및 내부조성비등을 조사하였다. ALD 공정온도는 기판온도 $110{\sim}190^{\circ}C$로써 이 구간에서의 박막 평균증착률은 0.29 nm/cycle로 일정하게 나타났다. 기판온도가 높아질수록 결정성이 향상되어 ZnO(002) 피크가 우세하였다. 모든 ALD 공정온도에서 Zn와 O로만 구성된 고순도의 ZnO 박막을 실현하였는데, 온도가 높아질수록 Zn와 O의 비가 1에 근접하며 안정된 hexagonal wurtzite ZnO 구조의 박막이 성장되었다.

• Korean Chemical Engineering Research
• /
• 제45권6호
• /
• pp.656-662
• /
• 2007

고분자 전해질 연료전지 운전에 필요한 수소 공급 장치로서 플라즈마 개질 방법을 이용한 개질기와 일산화탄소 산화반응을 위한 전이 반응기를 설계 및 제작하였다. GlidArc 방전을 이용한 저온플라즈마 개질기는 Ni 촉매를 동시에 사용하여 $CH_4$ 개질함으로서 $H_2$ 선택도를 증대하였다. 개질기의 변수별 연구로서 촉매 온도, 가스 조성비, 전체 가스유량, 전압변화 그리고 개질 특성 및 최적 수소 생산조건을 연구하였으며, 전이반응기의 변수별 연구로서 선택적 산화반응기(PrOx)에 주입되는 공기량, 전이 반응기에 주입되는 수증기량 그리고 온도에 대하여 연구하였다. 플라즈마 개질기에서 최대 수소 생산 조건은 $O_2/C$ 비가 0.64, 가스유량은 14.2 l/min, 촉매 반응기 온도 $672^{\circ}C$ 그리고 유입전력이 1.1 kJ/L일 때 41.1%로 최대 수소 농도를 나타냈다. 그리고 이때의 $CH_4$ 전환율, $H_2$ 수율 그리고 개질기 에너지 밀도는 각각 88.7%, 54%, 35.2%를 나타냈다. 전이 반응기에서 모사된 개질 가스로부터 최대 CO 전환율을 보이는 조건은 2단으로 구성된 PrOx에 주입되는 $O_2/C$ 비가 0.3, HTS에서 주입되는 수증기 주입량 비가 2.8 그리고 HTS, LTS, PrOx I, PrOx II 반응기 온도가 475, 314, 260, $235^{\circ}C$ 일때 가장 높은 CO 전환율을 나타냈다. 플라즈마를 이용한 반응기는 예열 시간은 30분이 소요되었으며, 전이 반응기에서 나오는 최종 개질 가스의 조성은 $H_2$ 38%, CO<10 ppm, $N_2$ 36%, $CO_2$ 21% 그리고 $CH_4$ 4%로 나타냈다.