• 대한기계학회:학술대회논문집
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• 대한기계학회 2001년도 춘계학술대회논문집B
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• pp.735-740
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• 2001

With the development of micro-technology, the demand for micro actuator is increasing. But, it is difficult to achieve high resolution and long travel range simultaneously with the conventional actuators. So, the noncontact surface actuator was proposed. This actuator can realize high dynamic range and the planar motion without complex cross-axis linear slides. This paper describes a magnetically suspended linear actuator for developing a non-contact surface actuator. The operating principle and the structure of the proposed linear actuator are similar to switched reluctance motor, but the proposed linear actuator utilizes normal force and propulsion force simultaneously. With this characteristic, the system can be simpler than other non-contact surface actuator.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2002년도 추계학술대회 논문집
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• pp.375-378
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• 2002

In this paper, the frequency response separation scheme is proposed for high scanning speed and simple structure of non-contact type of AFM. A self-sensing cantilever is attached on the actuator for detect the atomic force between tip and the media surface. VCM or PZT are used for actuator. This paper presents the method to simplify the actuator structure and the performance of each actuator for non-contact type AFM. Based on the frequency response separation scheme, the only one actuator plays roles 1311owing low frequency surface and modulating self-sensing cantilever tip in contrast with convention non-contact type AFM. 10 ${\mu}{\textrm}{m}$ standard grid sample imaged to verify proposed scheme. This result shows the possibility simplifying the actuator structure and reducing cost of non-contact type AFM.

• 한국정밀공학회지
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• 제18권3호
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• pp.115-121
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• 2001

In micro automation technology, the concurrent realization of a high resolution and a large operating rage has been achieved by a dual actuator, usually called by piggy-back system, conventionally. But, because of its manufacturing cost, the complexity of control, and the limit of overall bandwidth, the contract-free and single servo actuators have been suggested with specific applications. In this paper, we suggest a novel non-contact surface actuator suing combination of the Lorentz force and the magnetized force, and discuss the actuating principles including an analytical approach. Differently from the existing planar system, an operating range of the suggested system can be expanded by an additional attachment of active elements. Therefore, it is estimated to be suitable for the next-generation moving system.

• 한국정밀공학회지
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• 제20권4호
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• pp.76-83
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• 2003

To cope with stringent performance targets requested in many fields spanning the whole range of industry, the driver is necessary to realize large dynamic range as well as nano resolution, manipulate the mover orientation without additional driver, and be suitable for clean environment. As one of those purposes, authors have developed the planar precision stages with the integrated operating principle of levitation and propel. In this paper, we discuss potential of magnetic suspension technology by comparing various features of non-contact planar stages, that is, repulsive type of surface actuator and attractive type of surface actuator.

• Nuclear Engineering and Technology
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• 제55권8호
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• pp.2905-2918
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• 2023

The valve assembly used in nuclear power plants is important safety-related equipment. In the new standard, the physical attributes are measured using a valve diagnosis test, which is used in the expansion to other non-tested valves using a quantitative test-basis methodology. With a motor-operated actuator, the state of stem's lubrication is related to physical attributes such as the stem factor and the friction coefficient. This study analyzed the numerical transient of fluid and solid lubrication with a squeeze film effect due to the loading rate on the stem and the stem nut using the experimental data. The differential equation that governs the motion mechanism of the stem and stem nut is established and analyzed. The flow rate, the fluid and the solid contact forces are calculated with the friction coefficient. Finally, we found that a change in the friction coefficient results from a change of the shear force in the solid contact mode during the interchange process between the solid contact mode and the fluid contact mode. The qualitative understanding of the squeeze film effect is expanded quantitatively for forces, thread surface distance, velocity, and acceleration, with consideration of the metal solid contact and fluid contact.