• 한국전기전자재료학회논문지
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• 제11권3호
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• pp.195-202
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• 1998

The LPCVD system of batch type for the massproduction of semiconductor fabrication has a problem of phosphorous concentration uniformity in the boat. In this paper we study an improvement of the uniformity for phosphorous concentration and sheet resistance. These property was improved by using the nitrogen process and modified long nozzle for gas injection tube in the doped polysilicon deposition system. The phosphorous concentration and its uniformity for polysilicon film are measured by XRF(X-ray Fluorescence) for the conventional process condition and nitrogen process. In conventional process condition, the phosphorous concentration, it uniformity and sheet resistance for polysilicon film are in the range of 3.8~5.4$\times$10\ulcorner atoms/㎤, 17.3% and 59~$\Omega$/ , respectively. For the case of nitrogen process the corresponding measurements exhibited between 4.3~5.3$\times$10\ulcorner atoms/㎤, 10.6% and 58~81$\Omega$/ . We find that in the nitrogen process the uniformity of phosphorous concentration improved compared with conventional process condition, however, the sheet resistance in the up zone of the boat increased about 12 $\Omega$/ . In modified long nozzle, the phosphorous concentration, its uniformity and sheet resistance for polysilicon films are in the range of 4.5~5.1$\times$10\ulcorner atoms/㎤, 5.3% and 60~65$\Omega$/ respectively. Annealing after $N_2$process gives the increment of grain size and the decrement of roughness. Modification of nozzle gives the increment of injection amount of PH$_3$. Both of these suggestion result in the stable phosphorous concentration and sheet resistance. The results obtained in this study are also applicable to process control of batch type system for memory device fabrication.

• 한국환경보건학회지
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• 제34권3호
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• pp.233-239
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• 2008

In order to improve reactor performance of existing sewage treatment plants, the feasibility of enhancing reactor performance by bioaugmentation using EM as bioaugmentation agent and the effects of anoxic: oxic time ratio on reactor performance were investigated. Continuous and intermittent aeration modes were compared under the 6 hr of HRT. Three different types of intermittent aeration modes, that is, 15 min, of anoxic:45 min of oxic, 30 min of anoxic: 30 min of oxic, and 45 min of anoxic: 15 min oxic respectively were chosen as test modes to study the effects of anoxic : oxic time ratios on reactor performance. The optimum anoxic: oxic time ratio was 30 min:30 min when considering simultaneous removal of organic, nitrogen and phosphorus. When applying EM into a continuously aerated reactor under the varying dosing rates of 50-200 ppm, reactor performance in terms of organic and nitrogen removal efficiencies was not improved at all. Nitrogen removal efficiency was increase when the EM dosing rate was increased. However the degree of improvement was slight when the EM was injected above 100 ppm. However optimum phosphorus removal was found at the EM dosing of 200 ppm. Thus it was found that optimum injection concentration of EM is 200 ppm. It is apparent that putting EM into a sewage treatment plant significantly affects the T-N removal efficiency of the reactor by enhancing denitrification efficiency especially in operational conditions of relatively long anoxic periods. To achieve reciprocal condition in a reactor with intermittent aeration it is necessary to enhance the reactor performance by EM injection. In the case of modifying existing continuously aerated reactors into intermittent aerated reactors, it is obvious that operating costs of aeration would be reduced by reducing aeration time when compared with existing conventional sewage treatment plants.

• 한국응용과학기술학회지
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• 제33권4호
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• pp.795-801
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• 2016

본 연구는 응집제로 calcium alginate를 이용한 질산성 질소 처리에 관한 연구이다. 질산성 질소를 제거하기 위한 방법으로는 역삼투법, 이온교환수지법, 전기투석법, 생물학적 방법 등이 있지만 본 연구에서는 응집 침전시키는 방법으로서 질산성 질소를 처리하고자 하였다. 응집제로 이용한 calcium alginate가 킬레이트 결합을 형성하여 질산성 질소를 응집 침전시킬 것으로 예상하고, 응집제의 성분, 응집 반응시간, 응집제의 몰비, 응집제의 주입율에 따라 질산성 질소가 제거되는 경향을 보았다. 또한 FE-SEM과 EDS(Energy Dispersive X-Ray Spectrometer)를 통하여 응집반응 후 침전물의 구조 및 구성성분비를 분석함으로써 질산성 질소가 Calcium-nitro-alginate 형태로 제거되는지를 확인하였다. 그 결과 반응시간은 60분, 응집제의 몰비는 1:1일 때, 응집제의 주입율은 합성폐수의 2 %일 때 질산성 질소의 제거율이 최대 56.7 %로 나타났다.

• 한국자동차공학회논문집
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• 제14권4호
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• pp.26-31
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• 2006

An experimental investigation of an early injection strategy was conducted on a small single cylinder common-rail DI diesel engine to reduce the oxides of nitrogen($NO_x$) emission. The main objectives of this study were to investigate the emissions, performance and combustion characteristics in a diesel engine with early and two-stage injections. The two- stage injection was conducted to reduce the wall-wetting of early injected fuels on the cylinder wall or to promote the ignition of premixed charge. The engine test was performed at conditions of 1500rpm, injection timing ranging from TDC to BTDC $80^{\circ}$. The experimental results show that $NO_x$ emissions were decreased in both cases of early injection and two stage injection compared to the conventional diesel combustion by the near TDC injection. However, soot and products of incomplete products (i.e. HC and CO) are slightly increased. Also, the second injection near TDC promoted the ignition of premixed fuel, therefore, IMEP was increased.

• 대한기계학회논문집B
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• 제36권2호
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• pp.137-143
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• 2012

현재 세계적으로 배출가스 규제 강화와 유가 상승으로 인해 가솔린엔진에서 배출되는 유해 배출 가스 저감기술 및 연비향상 기술 개발이 절실히 요구되고 있다. 가솔린 직접분사(GDI; Gasoline direct injection) 기술은 가솔린 연료를 직접 연소실에 분사하여 정밀한 연소제어를 통해 매우 희박한 혼합기에서도 고효율의 연소가 가능하게 함으로써 연비저감과 고출력을 동시에 만족할 수 있는 효과적인 기술이다. 본 연구에서는 분무유도방식(spray-guided type)을 이용한 GDI 엔진을 개발하여 안정적인 희박연소를 구현하였다. 자주 사용되는 운전영역에서 연료분사시기의 TDC(Top dead center) 인근으로의 지각을 통하여 안정적인 희박연소를 구현하였으며, 다단분사를 적용하여 추가적인 연료소비율의 개선이 가능한 반면 탄화수소(THC)와 질소산화물($NO_x$)의 배출은 증가하고 CO의 배출은 감소되었다.

• 한국자동차공학회논문집
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• 제21권5호
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• pp.15-24
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• 2013

Numerical studies were conducted to investigate the internal flow field and combustion characteristics of DISI engine with methanol blended in gasoline. Dual injection was applied and the characteristics were compared to single injection strategy. The amount of the fuel injection was corresponded to air-fuel ratio of each fuel for complete combustion. The preforming model in this study, software STAR-CD was employed for both modeling and solving. The operating speed condition were at 4000 rpm/WOT (Wide open throttle) where the engine was fully warmed. The results of single injection with M28 showed that the uniformity, equivalence ratio, in-cylinder pressure and temperature increased comparing to gasoline (M0). When dual injection was applied, there was no significant change in uniformity and equivalence ratio but the in-cylinder pressure and temperature increased. When M28 fuel and single injection was applied, the CO (Carbon monoxide) and NO (Nitrogen oxides) emission inside the combustion chamber increased approximately 36%, 9% comparing with benchmarking case in cylinder prior to TWC (Three Way Catalytic converter). When dual stage injection was applied, both CO and NO emission amount increased.

• 한국자동차공학회논문집
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• 제17권5호
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• pp.61-66
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• 2009

An experimental investigation was conducted to analyze the effects of biodiesel-ethanol and biodiesel-diesel blended fuels on the characteristics of combustion and exhaust emissions, and size distributions of particulate matter in a single cylinder diesel engine. The three types of test fuel were biodiesel and two blended fuels which were added ethanol and diesel by 20 % volume based fraction into biodiesel, respectively. In this study, the injection rate, combustion pressure, exhaust emissions and size distributions of particulate matter were measured under various injection timings and injection pressures. The experimental results show that biodiesel-ethanol blended fuel has lengthened ignition delay and low combustion pressure in comparison with those of biodiesel and biodiesel-diesel blended fuel even if all fuels indicated similar trends of injection rate under equal injection pressures. In addition, the ethanol blended fuel significantly reduced nitrogen oxidies (NOx) and soot emissions. And then the size distribution of particulate matters shows that blended fuels restrain the formation of particles which were beyond the range of 150nm comparison with biodiesel fuel.

• 한국자동차공학회논문집
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• 제16권2호
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• pp.158-165
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• 2008

The combustion and exhaust emissions characteristics of a liquefied petroleum gas-di-methyl ether compression ignition engine with a variable valve timing device were investigated under various liquefied petroleum gas injection timing conditions. Liquefied petroleum gas was used as the main fuel and was injected directly into the combustion chamber. Di-methyl ether was used as an ignition promoter and was injected into the intake port. Different liquefied petroleum gas injection timings were tested to verify the effects of the mixture homogeneity on the combustion and exhaust emission characteristics of the liquefied petroleum gas-di-methyl ether compression ignition engine. The average charge temperature was calculated to analyze the emission formation. The ringing intensity was used for analysis of knock characteristics. The combustion and exhaust emission characteristics differed significantly depending on the liquefied petroleum gas injection and intake valve open timings. The CO emission increased as the intake valve open and liquefied petroleum gas injection timings were retarded. However, the particulate matter emission decreased and the nitrogen oxide emission increased as the intake valve open timing was retarded in the diffusion combustion regime. Finally, the combustion efficiency decreased as the intake valve open and liquefied petroleum gas injection timings were retarded.

• 대한기계학회논문집B
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• 제26권4호
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• pp.614-621
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• 2002

This study was performed to investigate the behavior of vapor phase of fuel mixtures with different piston bowl shapes(F, B and R-type) in a optically accessible engine. The images of liquid and vapor phases were captured in the motoring engine using exciplex fluorescence method. Fuel was injected into atmospheric nitrogen to prevent quenching phenomenon by oxygen. Injection pressure was 5.1MPa. Two dimensional spray fluorescence image of vapor phase was acquired to analyze spray behaviors and fuel distribution inside of cylinder. Four injection timings were set at BTDC 90$^{\circ}$, 80$^{\circ}$, 70$^{\circ}$, and 60$^{\circ}$. With a fuel injection timing of BTDC 90$^{\circ}$, fuel-rich mixture level in the center region was highest in a B-type piston. With a fuel injection timing of BTDC 60$^{\circ}$, R-type piston was best. R-type piston shape was suitable under enhanced swirl ratio and late injection condition and B-type piston shape was right in a weak swirl ratio. It was found that the piston bowl shape affected the mixture stratification inside of cylinder.

• 대한기계학회:학술대회논문집
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• 대한기계학회 2001년도 추계학술대회논문집B
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• pp.915-920
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• 2001

This study was performed to investigate the behavior of vapor phase of fuel mixtures with different piston bowl shapes(F, B, and R-type) in a optically accessible engine. The images of liquid and vapor phases were captured in the motoring engine using exciplex fluorescence method. Fuel was injected into atmospheric nitrogen to prevent quenching phenomenon by oxygen. Injection pressure is 5.1MPa. Two dimensional spray fluorescence image of vapor phases was acquired to analyze spray behaviors and fuel distribution inside of cylinder. Four injection timings were set at BTDC $90^{\circ},\;80^{\circ},\;70^{\circ},\;and\;60^{\circ}$. With a fuel injection timing of BTDC $90^{\circ}$, fuel-rich mixture level in the center region was highest in a B-type piston. With a fuel injection timing of BTDC $60^{\circ}$, R-type piston was best. R-type piston shape was suitable under enhanced swirl ratio and late injection condition and B-type piston shape was right in a weak swirl ratio. It was found that the piston bowl shape affected the mixture stratification inside of cylinder.