• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.11 no.3
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• pp.195-202
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• 1998

The LPCVD system of batch type for the massproduction of semiconductor fabrication has a problem of phosphorous concentration uniformity in the boat. In this paper we study an improvement of the uniformity for phosphorous concentration and sheet resistance. These property was improved by using the nitrogen process and modified long nozzle for gas injection tube in the doped polysilicon deposition system. The phosphorous concentration and its uniformity for polysilicon film are measured by XRF(X-ray Fluorescence) for the conventional process condition and nitrogen process. In conventional process condition, the phosphorous concentration, it uniformity and sheet resistance for polysilicon film are in the range of 3.8~5.4$\times$10\ulcorner atoms/㎤, 17.3% and 59~$\Omega$/ , respectively. For the case of nitrogen process the corresponding measurements exhibited between 4.3~5.3$\times$10\ulcorner atoms/㎤, 10.6% and 58~81$\Omega$/ . We find that in the nitrogen process the uniformity of phosphorous concentration improved compared with conventional process condition, however, the sheet resistance in the up zone of the boat increased about 12 $\Omega$/ . In modified long nozzle, the phosphorous concentration, its uniformity and sheet resistance for polysilicon films are in the range of 4.5~5.1$\times$10\ulcorner atoms/㎤, 5.3% and 60~65$\Omega$/ respectively. Annealing after $N_2$process gives the increment of grain size and the decrement of roughness. Modification of nozzle gives the increment of injection amount of PH$_3$. Both of these suggestion result in the stable phosphorous concentration and sheet resistance. The results obtained in this study are also applicable to process control of batch type system for memory device fabrication.

• Journal of Environmental Health Sciences
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• v.34 no.3
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• pp.233-239
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• 2008

In order to improve reactor performance of existing sewage treatment plants, the feasibility of enhancing reactor performance by bioaugmentation using EM as bioaugmentation agent and the effects of anoxic: oxic time ratio on reactor performance were investigated. Continuous and intermittent aeration modes were compared under the 6 hr of HRT. Three different types of intermittent aeration modes, that is, 15 min, of anoxic:45 min of oxic, 30 min of anoxic: 30 min of oxic, and 45 min of anoxic: 15 min oxic respectively were chosen as test modes to study the effects of anoxic : oxic time ratios on reactor performance. The optimum anoxic: oxic time ratio was 30 min:30 min when considering simultaneous removal of organic, nitrogen and phosphorus. When applying EM into a continuously aerated reactor under the varying dosing rates of 50-200 ppm, reactor performance in terms of organic and nitrogen removal efficiencies was not improved at all. Nitrogen removal efficiency was increase when the EM dosing rate was increased. However the degree of improvement was slight when the EM was injected above 100 ppm. However optimum phosphorus removal was found at the EM dosing of 200 ppm. Thus it was found that optimum injection concentration of EM is 200 ppm. It is apparent that putting EM into a sewage treatment plant significantly affects the T-N removal efficiency of the reactor by enhancing denitrification efficiency especially in operational conditions of relatively long anoxic periods. To achieve reciprocal condition in a reactor with intermittent aeration it is necessary to enhance the reactor performance by EM injection. In the case of modifying existing continuously aerated reactors into intermittent aerated reactors, it is obvious that operating costs of aeration would be reduced by reducing aeration time when compared with existing conventional sewage treatment plants.

• Journal of the Korean Applied Science and Technology
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• v.33 no.4
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• pp.795-801
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• 2016

This study is on the denitrification process using the sodium alginate and $CaCl_2$ as a flocculant. Removal techniques of nitrate nitrogen from waste water are reverse osmosis, ion exchange, electro dialysis and biological method etc. We tried to remove nitrate nitrogen with flocculation and sedimentation method in the present study. Calcium alginate is expected to form a chelate bond with nitrate nitrogen in the solution. So the effects of flocculantt component, flocculation reaction time, molar ratio of the flocculant, flocculant injection rate are studied to determine the best removal rate of nitrate nitrogen. In addition, we tried to determine the nitrate nitrogen removal mechanism by analyzing the structure and component ratio of the configuration after the agglutination precipitate by FE-SEM and EDS. As a result, the nitrate nitrogen removal mechanism is turned out to form calcium-nitro-alginate, and the best mole ratio of flocculating agent is 1 : 1, the injection rate of the flocculant was up to 2%, the removal rate of the nitrate nitrogen to be 56.7% in the synthetic wastewater.

• Transactions of the Korean Society of Automotive Engineers
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• v.14 no.4
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• pp.26-31
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• 2006

An experimental investigation of an early injection strategy was conducted on a small single cylinder common-rail DI diesel engine to reduce the oxides of nitrogen($NO_x$) emission. The main objectives of this study were to investigate the emissions, performance and combustion characteristics in a diesel engine with early and two-stage injections. The two- stage injection was conducted to reduce the wall-wetting of early injected fuels on the cylinder wall or to promote the ignition of premixed charge. The engine test was performed at conditions of 1500rpm, injection timing ranging from TDC to BTDC $80^{\circ}$. The experimental results show that $NO_x$ emissions were decreased in both cases of early injection and two stage injection compared to the conventional diesel combustion by the near TDC injection. However, soot and products of incomplete products (i.e. HC and CO) are slightly increased. Also, the second injection near TDC promoted the ignition of premixed fuel, therefore, IMEP was increased.

• Transactions of the Korean Society of Mechanical Engineers B
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• v.36 no.2
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• pp.137-143
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• 2012

Currently, in order to meet the reinforced emissions regulations for harmful exhaust gas including carbon dioxide ($CO_2$) as a greenhouse gas, technologies for reducing $CO_2$ emission and fuel consumption are being developed. Gasoline direct injection (GDI) systems have the advantage of improved fuel economy and higher power output than port fuel injection gasoline engine systems. The aim of this study is to examine the performance and emission characteristics of a lean burn GDI engine equipped with spray-guided-type combustion system. Stable lean combustion was achieved with a late fuel injection strategy under a constant operating condition. Further improvement in specific fuel consumption is possible with the introduction of multiple fuel injection strategies, which also increases hydrocarbon (HC) and nitrogen oxide ($NO_x$) emissions and decreases carbon monoxide (CO) emission.

• Transactions of the Korean Society of Automotive Engineers
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• v.21 no.5
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• pp.15-24
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• 2013

Numerical studies were conducted to investigate the internal flow field and combustion characteristics of DISI engine with methanol blended in gasoline. Dual injection was applied and the characteristics were compared to single injection strategy. The amount of the fuel injection was corresponded to air-fuel ratio of each fuel for complete combustion. The preforming model in this study, software STAR-CD was employed for both modeling and solving. The operating speed condition were at 4000 rpm/WOT (Wide open throttle) where the engine was fully warmed. The results of single injection with M28 showed that the uniformity, equivalence ratio, in-cylinder pressure and temperature increased comparing to gasoline (M0). When dual injection was applied, there was no significant change in uniformity and equivalence ratio but the in-cylinder pressure and temperature increased. When M28 fuel and single injection was applied, the CO (Carbon monoxide) and NO (Nitrogen oxides) emission inside the combustion chamber increased approximately 36%, 9% comparing with benchmarking case in cylinder prior to TWC (Three Way Catalytic converter). When dual stage injection was applied, both CO and NO emission amount increased.

• Transactions of the Korean Society of Automotive Engineers
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• v.17 no.5
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• pp.61-66
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• 2009

An experimental investigation was conducted to analyze the effects of biodiesel-ethanol and biodiesel-diesel blended fuels on the characteristics of combustion and exhaust emissions, and size distributions of particulate matter in a single cylinder diesel engine. The three types of test fuel were biodiesel and two blended fuels which were added ethanol and diesel by 20 % volume based fraction into biodiesel, respectively. In this study, the injection rate, combustion pressure, exhaust emissions and size distributions of particulate matter were measured under various injection timings and injection pressures. The experimental results show that biodiesel-ethanol blended fuel has lengthened ignition delay and low combustion pressure in comparison with those of biodiesel and biodiesel-diesel blended fuel even if all fuels indicated similar trends of injection rate under equal injection pressures. In addition, the ethanol blended fuel significantly reduced nitrogen oxidies (NOx) and soot emissions. And then the size distribution of particulate matters shows that blended fuels restrain the formation of particles which were beyond the range of 150nm comparison with biodiesel fuel.

• Transactions of the Korean Society of Automotive Engineers
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• v.16 no.2
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• pp.158-165
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• 2008

The combustion and exhaust emissions characteristics of a liquefied petroleum gas-di-methyl ether compression ignition engine with a variable valve timing device were investigated under various liquefied petroleum gas injection timing conditions. Liquefied petroleum gas was used as the main fuel and was injected directly into the combustion chamber. Di-methyl ether was used as an ignition promoter and was injected into the intake port. Different liquefied petroleum gas injection timings were tested to verify the effects of the mixture homogeneity on the combustion and exhaust emission characteristics of the liquefied petroleum gas-di-methyl ether compression ignition engine. The average charge temperature was calculated to analyze the emission formation. The ringing intensity was used for analysis of knock characteristics. The combustion and exhaust emission characteristics differed significantly depending on the liquefied petroleum gas injection and intake valve open timings. The CO emission increased as the intake valve open and liquefied petroleum gas injection timings were retarded. However, the particulate matter emission decreased and the nitrogen oxide emission increased as the intake valve open timing was retarded in the diffusion combustion regime. Finally, the combustion efficiency decreased as the intake valve open and liquefied petroleum gas injection timings were retarded.

• Transactions of the Korean Society of Mechanical Engineers B
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• v.26 no.4
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• pp.614-621
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• 2002

This study was performed to investigate the behavior of vapor phase of fuel mixtures with different piston bowl shapes(F, B and R-type) in a optically accessible engine. The images of liquid and vapor phases were captured in the motoring engine using exciplex fluorescence method. Fuel was injected into atmospheric nitrogen to prevent quenching phenomenon by oxygen. Injection pressure was 5.1MPa. Two dimensional spray fluorescence image of vapor phase was acquired to analyze spray behaviors and fuel distribution inside of cylinder. Four injection timings were set at BTDC 90$^{\circ}$, 80$^{\circ}$, 70$^{\circ}$, and 60$^{\circ}$. With a fuel injection timing of BTDC 90$^{\circ}$, fuel-rich mixture level in the center region was highest in a B-type piston. With a fuel injection timing of BTDC 60$^{\circ}$, R-type piston was best. R-type piston shape was suitable under enhanced swirl ratio and late injection condition and B-type piston shape was right in a weak swirl ratio. It was found that the piston bowl shape affected the mixture stratification inside of cylinder.

• Proceedings of the KSME Conference
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• 2001.11b
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• pp.915-920
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• 2001

This study was performed to investigate the behavior of vapor phase of fuel mixtures with different piston bowl shapes(F, B, and R-type) in a optically accessible engine. The images of liquid and vapor phases were captured in the motoring engine using exciplex fluorescence method. Fuel was injected into atmospheric nitrogen to prevent quenching phenomenon by oxygen. Injection pressure is 5.1MPa. Two dimensional spray fluorescence image of vapor phases was acquired to analyze spray behaviors and fuel distribution inside of cylinder. Four injection timings were set at BTDC $90^{\circ},\;80^{\circ},\;70^{\circ},\;and\;60^{\circ}$. With a fuel injection timing of BTDC $90^{\circ}$, fuel-rich mixture level in the center region was highest in a B-type piston. With a fuel injection timing of BTDC $60^{\circ}$, R-type piston was best. R-type piston shape was suitable under enhanced swirl ratio and late injection condition and B-type piston shape was right in a weak swirl ratio. It was found that the piston bowl shape affected the mixture stratification inside of cylinder.