• 한국진공학회지
• /
• 제10권2호
• /
• pp.201-206
• /
• 2001

본 연구에서는 RF 마그네트론 스퍼터링 방법을 이용하여 저탄소강 기판에 증착시킨 Fe-Ni계 합금 박막의 집합조직 발달을 조사하였다. Fe-Ni 합금 조성은 산업적 응용을 고려하여 인바합금(Invar alloy, Fe-36.5 wt%Ni)과 퍼멀로이(Permalloy, Fe-81 wt%Ni) 두 종류로 선택하였고, 증착시간을 변수로 제작하였다. 이들 합금 박막의 집합조직은 박막에서 전형적으로 나타나는 섬유집합조직(fibre texture)의 형태로 발달하였다. 인바합금 박막에서는 증착 초기에 <110>//ND 섬유집합조직이 발달하지만 증착시간이 증가함에따라 <210>//ND 섬유집합조직으로 변화하였다. 퍼멀로이 박막은 증착초기에 <221>//ND+<311>//ND의 혼합 집합조직을 나타내며 증착시간의 증가와 함께 <210>//ND 섬유집합조직으로 변화하였다. 이러한 집합조직의 변화를 박막의 미세조직의 진화와의 연관성이란 측면에서 고찰하였다.

• 한국자기학회지
• /
• 제11권4호
• /
• pp.163-167
• /
• 2001

DC 마그네트론 스퍼터링법으로 증착된 700 $\AA$의 NiFe 박막을 박막 증착시 형성시킨 자화용이축에 수직한 자기장을 인가하여 열처리한 후 일축 이방성 자기장의 회전을 조사하였다. NiFe 박막은 열처리온도 160 $^{\circ}C$에서 자화용이축과 자화곤란축을 구분할 수 없는 등방적인 상태가 되었고, 열처리온도가 증가함에 따라 다시 일축 이방성을 갖는 상태가 되었다. 열처리 온도가 400 $^{\circ}C$ 이상인 경우에 급격한 보자력의 증가를 보였다. 열처리 온도가 400 $^{\circ}C$인 경우에 XRD 분석과 AES depth profile은 NiFe 박막 내에서 (111) 방향으로 결정성장이 활발히 일어나며 인접한 전극 Au와 상호화산 현상도 광범위하게 일어남을 보여주었다.

• Journal of Magnetics
• /
• 제6권4호
• /
• pp.129-131
• /
• 2001

In order to investigate the effect of the interface on GMR, [NiFe(25 ${\AA}$)/Cu(24${\AA}$)]$_2$/Si thin film was epitaxially grown on HF-treated Si (001) substrate using a DC magnetron sputtering method. Typical GMR effects could be observed in epitaxial film with a weak antiferromagnetic exchange coupling while non epitaxial film showed unsaturated and broad MR curves probably due to inter-diffusion between NiFe and Cu layers. Ferromagnetic resonance (FMR) experiment showed two distinct absorption peaks in all films. Each peak was revealed to come from each NiFe layer with different magnetic property. In FMR measurement very clear interface in epitaxial films could be confirmed by a lower value of line width (ΔH) and higher M$\sub$s/ of epitaxial film than those of non epitaxial films, respectively.

• 한국진공학회지
• /
• 제8권2호
• /
• pp.116-120
• /
• 1999

Fe-Ni alloy thin films with about 3.5 $\mu\textrm{m}$ thickness were successfully grown on Al-killed steel substrates employing DC magnetron sputtering method, and then the4 film properties were characterized. The deposited film exhibited a fibre texture structure with the relationship of ${110}_\textrm{film}//{111}_\textrm{substrate}$. We found that the adhesion between the film and the substrate was fairly good considering no debonding behavior after the thermal cyclic test of 5,000 times from room temperature to $200^{\circ}C$. Also we found that the Fe-Ni alloy deposition induced a significant decrease of thermal expansion in the film processing, a new material system with much lower thermal expansion coefficient which can be applied more as shadow mask materials than an Al-killed steel sheet.

• 한국안광학회지
• /
• 제8권2호
• /
• pp.25-29
• /
• 2003

자외선과 전자파를 동시에 차단하는 선글라스렌즈를 제작하기 위하여 유리가판 위에 자성재료인 페라이트에 Ni를 여러 가지 조성비로 첨가한 니켈페라이트 박막 $Ni_xFe_{3-x}O_4$을 페라이트 도금법으로 제작하였다. 이들은 모두 스피넬 구조의 단일상임을 확인할 수 있었으며 육안으로 관찰할 때 거울면과 같은 광택을 가졌으며, 손톱으로 긁었을 때 흠집이 생기지 않는 강도를 보였다. 니켈페라이트는 400nm 부근에서부터 급격히 투과율이 떨어져 자외선을 차단하는데 효과적인 양상을 보이고 있으며 그 중에서 x = 0.09의 Ni 조성비가 자외선 차단효과가 가장 좋은 깃으로 나타났다. 이는 타사제품과 비교하여 자외선 차단효과는 크게 떨어지지 않으므로, 전자파 차단효과가 있는 $Ni_xFe_{3-x}O_4$ 페라이트를 코팅한 선글라스를 착용함으로서 유해전자파와 자외선을 동시에 차단하는 효과를 얻을 수 있을 것이다.

• 한국세라믹학회지
• /
• 제45권12호
• /
• pp.796-801
• /
• 2008

$LaGaO_3$ thin film was prepared on Ni-Fe metal porous substrate by Pulsed Laser Deposition method. By the thermal reduction, the dense $NiO-{Fe_3}{O_4}$ substrate is changed to a porous Ni-Fe metal substrate. The volumetric shrinkage and porosity of the substrate are controlled by the reduction temperature. It was found that a thermal expansion property of the Ni-Fe porous metal substrate is almost the same with that of $LaGaO_3$ based oxide. $LaGaO_3$ based electrolyte films are prepared by the pulsed laser deposition (PLD) method. The film composition is sensitively affected by the deposition temperature. The obtained film is amorphous state after deposition. After post annealing at 1073K in air, the single phase of $LaGaO_3$ perovskite was obtained. Since the thermal expansion coefficient of the film is almost the same with that of LSGM film, the obtained metal support LSGM film cell shows the high tolerance against a thermal shock and after 6 min startup from room temperature, the cell shows the almost theoretical open circuit potential.

• 한국진공학회:학술대회논문집
• /
• 한국진공학회 2009년도 제38회 동계학술대회 초록집
• /
• pp.225-225
• /
• 2010

In this study, the optimum structure of a magnetic thin film inductor was designed for application of DC-DC converters. The $Ni_{81}Fe_{19}$ (at%) alloy was selected as a high-frequency($\geq$ MHz) magnetic thin film core material and deposited on various substrates (bare Si, $SiO_2$ coated Si) using a high vacuum RF magnetron sputtering system. As-deposited NiFe thin films show similar magnetic properties compared to bulk NiFe alloys, indicating that they have a good film quality. The optimum design of solenoid-type magnetic thin film inductors was performed utilizing a Maxwell computer simulator (Ansoft HFSS V7.0 for PC) and parameters obtained from the magnetic properties of magnetic core materials selected. The high-frequency characteristics of the inductance(L) and quality factor(Q) obtained for the designed inductors through simulation agreed well with those obtained by theoretical calculations, confirming that the simulated result is realistic. The optimum structure of high-performance ($Q{\geq}60$, $L\;=\;1{\mu}H$, efficiency${\geq}90%$), high-frequency (${\geq}5MHz$), and solenoid-type magnetic thin film inductors was designed successfully.

• 한국전기전자재료학회:학술대회논문집
• /
• 한국전기전자재료학회 2006년도 하계학술대회 논문집 Vol.7
• /
• pp.557-558
• /
• 2006

The mechanical properties of micro-hardness and internal stress of Ni-Fe alloy thin film made by electrodeposition method have been measured as a function of bath composition and current density. And also the microstructure of $200{\AA}$ Ni-Fi nanowires made using anodic aluminum oxide(AAO) templates by electrodeposition method have been observed by SEM as a function of ultrasonic treatment time and bath composition.

• Metals and materials international
• /
• 제24권6호
• /
• pp.1285-1292
• /
• 2018

Microstructural properties of as-grown and annealed CoCrFeMnNi high entropy alloy (HEA) oxynitride thin films were investigated. The CoCrFeMnNi HEA oxynitride thin film was grown by magnetron sputtering method using an air gas, and annealed under the argon plus air flow for 5 h at $800^{\circ}C$. The as-grown film was homogeneous and uniform composed of nanometer-sized crystalline regions mixed with amorphous-like phase. The crystalline phase in the as-grown film was face centered cubic structure with the lattice constant of 0.4242 nm. Significant microstructural changes were observed after the annealing process. First, it was fully recrystallized and grain growth happened. Second, Ni-rich region was observed in nanometer-scale range. Third, phase change happened and it was determined to be $Fe_3O_4$ spinel structure with the lattice constant of 0.8326 nm. Hardness and Young's modulus of the as-grown film were 4.1 and 150.5 GPa, while those were 9.4 and 156.4 GPa for the annealed film, respectively.

• 한국자기학회:학술대회 개요집
• /
• 한국자기학회 2002년도 춘계연구발표회 논문개요집
• /
• pp.46-47
• /
• 2002