• Title/Summary/Keyword: Nanomaterials

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Fabrication of Conducting Polymer Nanomaterials Using Soft Template Method

  • Jang, Jyong-Sik
    • Proceedings of the Polymer Society of Korea Conference
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    • 2006.10a
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    • pp.76-77
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    • 2006

  • Conducting polymers have been attracting considerable attention from both scientific and industrial perspectives by virtue of the beneficial electrical and optical properties originating from their unique ${\pi}-conjugated$ system. Many efforts have been devoted toward fabricating conducting polymer nanomaterials. Of the various synthetic methodologies, soft template method has emerged as a very promising tool in fabricating conducting polymer nanomaterials. For last a few years, our research group has intensively studied the fabrication and application of conducting polymer nanomaterials. In this talk, the recent achievement in the synthetic methodology based on the use of soft templates will be discussed.

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Optimization of Ar Reshape Process for 4H-SiC Trench MOSFET (4H-SiC Trench MOSFET 응용을 위한 Ar Reshape 공정 최적화)

  • Sung, Min-Je;Kang, Min-Jae;Kim, Hong-Ki;Kim, Seong-jun;Lee, Jung-Yoon;Lee, Wonbeom;Lee, Nam-suk;Shin, Hoon-Kyu
    • Journal of IKEEE
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    • v.22 no.4
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    • pp.1234-1237
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    • 2018

  • For 4H-SiC trench MOSFET which can reduce on-resistance and switching losses compared to 4H-SiC planar MOSFET, the optimization study for decrease of sub-trench was carried out. In order to decrease sub-trench, Ar reshape process was used and trench shapes were observed as a function of temperature and process time. As a result, it was confirmed that the process conditions for $1500^{\circ}C$ and 20 min were most effective for the suitable trench profiles. In addition, dry/wet oxidation was performed at the Ar reshaped-samples to observe the oxidation thickness with different crystal orientations.

  • https://doi.org/10.7471/ikeee.2018.22.4.1234 인용 PDF KSCI HTML