• Title/Summary/Keyword: Nano-processing

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Study on Fabrication of Highly Ordered Nano Master by Using Anodic Aluminum Oxidation (AAO를 이용한 나노 마스터 제작에 관한 연구)

  • Kwon, J.T.;Shin, H.G.;Seo, Y.H.;Kim, B.H.
    • Proceedings of the Korean Society for Technology of Plasticity Conference
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    • 2007.10a
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    • pp.162-165
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    • 2007
  • AAO(Anodic Aluminum Oxidation) method has been known that it is practically useful for the fabrication of nano-structures and makes it possible to fabricate the highly ordered nano masters on large surface and even on the 2.5 or 3D surface at low cost comparing to the expensive e-beam lithography or the conventional silicon processing. In this study, by using the multi-step anodizing and etching processes, highly ordered nano patterned master with concave shapes was fabricated. By varying the processing parameters, such as initial matter and chemical conditions; electrical and thermal conditions; time scheduling; and so on, the size and the pitch of the nano pattern can be controlled. Consequently, various alumina/aluminum nano structures can be easily available in any size and shape by optimized anodic oxidation in various aqueous acids. In order to replicate nano patterned master, the resulting good filled uniform nano molded structure through electro-forming process shows the validity of the fabricated nano pattern masters.

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Microstructure of TiO2 sensor electrode on nano block copolymertemplates using an ALD (나노 블록공중합체 템플레이트에 ALD로 제조된 센서용 TiO2 박막의 미세구조 연구)

  • Park, Jong-Sung;Han, Jeung-Jo;Song, Oh-Sung;Jeon, Seung-Min;Kim, Hyeong-Ki
    • Journal of Sensor Science and Technology
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    • v.18 no.3
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    • pp.239-244
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    • 2009
  • We fabricated nano-templates by low temperature BCP(block copolymer) process at 180 $^{\circ}C$, then we deposited 10 nm-thick $TiO_2$ layers with ALD(atomic layer deposition) at low temperature of 150 $^{\circ}C$. Through FE-SEM analysis, we confirmed the successful formation of the groove-type(width of crest : 30 nm, width of trough : 18 nm) and the cylinder-type(diameter : 10 nm, distance between hole : 25 nm) templates. Moreover, after $TiO_2$-ALD processing, we confirmed the deposition of the uniform nano layers of $TiO_2$ on the nano-templates. Through AFM analysis, the pitches of the crest-through(in groove-type) and hole-hole(in cylinder-type) were the same before and after $TiO_2$-ALD processing. In addition, we indirectly determined the existence of the uniform $TiO_2$ layers on nano-templates as the surface roughness decreased drastically. We successfully fabricated nano-template at low temperature and confirmed that the three-dimensional nano-structure for sensor application could be achieved by $TiO_2$-ALD processing at extremely low temperature of 150 $^{\circ}C$.

Effect of dopants(Tri-valent, Penta-valent) on the electrical and optical properties of SnO2 based transparent electrodes

  • Kim, G.W.;Sung, C.H.;Seo, Y.J.;Park, K.Y.;Heo, S.N.;Lee, S.H.;Koo, B.H.
    • Journal of Ceramic Processing Research
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    • v.13 no.spc2
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    • pp.394-397
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    • 2012
  • In this work, we studied the influence of the dopant elements concentration on the properties of SnO2 thin films deposited by pulsed laser deposition. X-ray diffraction (XRD), field emission scanning electron microscopy (FE-SEM), Hall effect measurement and UV-Vis studies were performed to characterize the deposited films. XRD results showed that the films had polycrystalline nature with tetragonal rutile structure. FE-SEM micrographs revealed that the as deposited films composed of dense microstructures with uniform grain size distribution. All the films show n-type conduction and the best transparent conductive oxide (TCO) performance was obtained on 6 wt% Sb2O5 doped SnO2 film prepared at pO2 of 60mtorr and Ts of 500 ℃. Its resitivity, optical transmittance, figure of merit are 7.8 × 10-4 Ω cm, 85% and 1.2 × 10-2 Ω-1, respectively.

Fabrication of Polymer Master with High Aspect Ratio by Using Anodic Aluminum Oxidation (양극산화공정을 이용한 고세장비의 폴리머 마스터 제작)

  • Kwon, J.T.;Shin, H.G.;Seo, Y.H.;Kim, B.H.
    • Proceedings of the Korean Society for Technology of Plasticity Conference
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    • 2008.05a
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    • pp.285-287
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    • 2008
  • AAO(Anodic Aluminum Oxidation) method has been known that it is practically useful for the fabrication of nano-structures and makes it possible to fabricate the highly ordered nano masters on large surface and even on the 2.5 or 3D surface at low cost comparing to the expensive e-beam lithography or the conventional silicon processing. In this study, by using the multi-step anodizing and etching processes, highly ordered nano patterned master with concave shapes was fabricated. By varying the processing parameters, such as initial matter and chemical conditions; electrical and thermal conditions; time scheduling; and so on, the size and the pitch of the nano pattern can be controlled. Consequently, various alumina/aluminum nano structures can be easily available in any size and shape by optimized anodic oxidation in various aqueous acids. In order to replicate nano patterned master, the resulting good filled uniform nano molded structure through electro-forming process shows the validity of the fabricated nano pattern masters.

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Mixing Behavior and Microstructural Development During Fabrication of Fe Micro-nano-powder Feedstock for Micro-PIM (마이크로 PIM용 Fe 마이크로-나노 복합분말 피드스톡 제조시 혼합거동과 미세구조 변화)

  • You, Woo-Kyung;Lee, Jai-Sung;Ko, Se-Hyun;Lee, Won-Sik
    • Korean Journal of Metals and Materials
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    • v.48 no.7
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    • pp.630-638
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    • 2010
  • The present investigation has been performed on the mixing behavior and microstructural development during fabrication of Fe micro-nano powder feedstock for a micro-powder injection molding process. The mixing experiment using a screw type blender system was conducted to measure the variations of torque and temperature during mixing of Fe powder-binder feedstock with progressive powder loading for various nano-powder compositions up to 25%. It was found that the torque and the temperature required in the mixing of feedstock increased proportionally with increasing cumulative powder loading. Such an increment was larger in the feedstock containing higher content of nano-powder at the same powder loading condition. However, the maximum value was obtained at the nano-powder composition of not 25% but 10%. It was owing to the 'roller bearing effect' of agglomerate type nano-powder acting as lubricant during mixing, consequently leading to the rearrangement of micro-nano powder in the feedstock. It is concluded that the improvement of packing density by rearrangement of nano-powders into interstices of micro-powders is responsible for the maximum powder loading of about 71 vol.% in the nano-powder composition of 25%.

A Power Manager supporting automatic sleep for Sensors in Nano-Q+ (Nano-Q+에서 센서의 자동슬립을 지원하는 전력 매니저)

  • Bokdong Choi;Seongbae Eun
    • Proceedings of the Korea Information Processing Society Conference
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    • 2008.11a
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    • pp.996-997
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    • 2008
  • 배터리를 사용하는 센서노드의 전력 소모를 줄이기 위해 많은 방법들이 제안되어 있다. 본 논문에서는 MCU 및 센서의 전력을 관리하는 전력 매니저를 제안한다. 센서의 타입을 설정하고 제안되어 있는 센서의 추상화를 추가한 매니저를 제안한다. Nano-Q+가 스케줄링할 때 센서의 타입을 판단하여 전원을 관리 할 수 있도록 한다.

Experimental study of filamentation using ultra fast pulse laser in transparent material (극초단 펄스 레이저를 사용한 유리 내부의 필라멘테이션에 대한 실험적 연구)

  • Choi, Won-Suk;Yoon, Ji-Wook;Kim, Joohan;Choi, Jiyeon;Chang, Won-Seok;Kim, Jae-Goo;Choi, Doo-Sun;Whang, Kyoung Hyun;Cho, Sung-Hak
    • Laser Solutions
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    • v.16 no.1
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    • pp.5-9
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    • 2013
  • We have successfully formed filament inside of a transparent soda-lime glass using a Ti:sapphire based femtosecond laser. To make filament form, keeping the laser intensity higher than critical intensity is essential. Also each of the machining parameters plays an important role for the formation of filament. In this paper, we study what parameter can possibly influence for formation of filament, and we introduce an application using filamentation by femtosecond laser for transparent material.

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Effect of nano-carbon addition on color performance of polystyrene superstructure film

  • ZHOU, Ye-min;Wang, Li-li;LI, Xiao-peng;Wang, Xiu-feng;Jiang, Hong-tao
    • Journal of Ceramic Processing Research
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    • v.19 no.6
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    • pp.479-482
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    • 2018
  • Polystyrene superstructure films show faint rainbow color, and this low color saturation limits its wide application. In this paper, polystyrene superstructure films with single bright blue color were prepared by vertical deposition self-assembly method using polystyrene microspheres with average diameter of $310{\pm}10nm$ as raw material. Polystyrene superstructure films were modified by adding nano-carbon powder, and effect of the amount of nano-carbon powde on color performance was studied. The results showed that without addition of nano-carbon powder, the superstructure films showed a faint rainbow color, while with addition of nano-carbon power, the superstructure films exhibited a single bright blue under the same natural light source. Changing the amount of nano-carbon powder addition could adjust color saturation of the film. With increasing the amount of nano-carbon powder addition from 0.008 wt% to 0.01 wt%, color saturation of the superstructure film increased gradually. Further increasing the amount of nano-carbon powder addition to 0.011wt%, color saturation of the superstructure film didn't increase anymore and tended to get dark.