• Proceedings of the Korean Vacuum Society Conference
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• 2013.02a
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• pp.386-386
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• 2013

반도체 소자의 소형화, 고집적화로 박막의 다층화 및 선폭의 감소 등의 복잡한 제조 공정이 불가피하고, 따라서 공정 중 실리콘 웨이퍼와 금속 박막사이의 확산을 방지하기 위한 많은 연구가 이루어지고 있다. 하지만 현재까지의 연구는 확산방지막의 nano-mechanics 특성 분석에 대한 연구는 전무하다. 본 논문에서 tungsten (W)을 주 물질로, nitrogen (N)을 첨가한 확산방지막을 질소 유량을 2.5, 5, 7.5, 10 sccm으로 변화시켜가면서 rf magnetron sputter 방법으로 tungsten-nitride (W-N) 박막을 증착하였다. 박막의 기본 물성인 증착율, 비저항 및 결정학적 특성을 ${\beta}$-ray, 4-point probe, X-ray diffraction (XRD)를 이용하여 측정하였고, 측정결과 증착 중 질소 유량이 증가할수록 W-N 박막의 비저항은 증가하였고 반대로 증착율과 결정성은 감소하였다. 이는 기존의 연구 결과와 비교하여 일치한 결과로 증착된 박막이 신뢰성을 가짐을 확인하였다. 이후 가장 관심사인 nano-mechanics 특성은 nano-indenter를 이용하여 측정하였다. 측정 결과 시료는 증착 중 질소 유량이 2.5 sccm인 시료를 기준으로 5 sccm 포함된 박막에서 load force-depth 그래프가 급격히 변화하는 경향을 나타내었고, 표면강도(surface hardness)는 10.07 GPa에서 15.55 GPa로 증가하였다. 이후 질소 유량이 7.5 sccm과 10 sccm에서는 12.65 GPa와 12.77 GPa로 질소 유량이 5 sccm 포함된 박막보다 상대적으로 감소하였다. 이는 박막내 결정상으로 존재하는 질소와 비정질 상태로 존재하는 질소의 비율에 의한 것이고, 압축력에 기인하는 스트레스 증가로 판단된다.

• Journal of the Korean Ceramic Society
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• v.56 no.3
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• pp.256-268
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• 2019

In this research, some mechanical properties of Al₂O₃-based composites containing nanoSiC and nanoMgO additives, including elasticity modulus, hardness, and fracture toughness, have been evaluated. Micron-sized Al₂O₃ powders containing 0.08 wt.% nanoMgO particles have been mixed with different volume fractions of nanoSiC particles (2.5 to 15 vol.%). Untreated samples have been sintered by using hot-press technique at temperatures of 1600 to 1750℃. The results show significant increases in the mechanical characteristics with increases in the sintering temperature and amount of nanoSiC particles, with the result that the elasticity modulus, hardness, and fracture toughness were obtained as 426 GPa, 21 GPa, and 4.5 MPa.m^1/2, respectively.

• Proceedings of the Korean Vacuum Society Conference
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• 2014.02a
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• pp.354.2-354.2
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• 2014

최근 반도체 산업의 발전에 따라 반도체 소자 내 배선재료로 사용되던 Aluminium (Al)의 대체물로 Copper (Cu)가 사용되고 있다. Cu는 Al보다 우수한 전도성과 비용이 저렴하다는 장점이 있으나 반도체 기판과의 확산으로 이를 해결해야만 하는 문제점이 있다. 이는 Si와 Cu사이에 확산방지막을 사용하여 해결할 수 있는데 Hafnium Nitride (HfN) 박막은 다른 물질과 비교해 고온에서의 안정성과 낮은 비저항을 가지고 있어 주목을 받고 있다. 본 연구에서는 rf magnetron sputter 방법으로 박막 증착 시에 인가하는 rf power가 박막의 표면 특성에 어떠한 영향을 미치는지 nano-indenter를 사용해 surface hardness와 elastic modulus의 변화를 중심으로 알아보았다. 시료는 rf magnetron sputter로 증착 시 인가하는 plasma power를 60W와 80W로 달리하여 증착하였다. 증착가스는 Ar과 $N_2$를 조절하여 사용하였고 총 유량을 40 sccm 으로 고정하였으며, 이 때 압력은 3mTorr로 유지하였다. 실험결과 plasma power를 80W로 인가하여 증착한 시료의 surface hardness (18.48 GPa)가 60W로 증착한 시료의 surface hardness (12.03 GPa)보다 큰 값을 나타내었다. 이와 마찬가지로 80W로 증착한 시료의 elastic modulus(187.16 GPa)도 60W로 증착한 시료의 탄성계수 (141.15 GPa)보다 큰 값을 나타내었다. 이는 증착 시 인가하는 plasma power의 크기가 증가하면 박막표면에 compressive stress가 생성되어 박막의 surface hardness와 elastic modulus가 상대적으로 높게 측정되는 것으로 생각된다.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2007.11a
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• pp.354-354
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• 2007

Titanium nitride (TiN) thin films are widely used for hard coatings due to their superior hardness. In this paper, we wanted see how the films properties are changed according to DC power. TiN thin films were deposited by direct current (DC) magnetron sputtering method using TiN compound target on silicon substrates. The films structural properties are examined by X-ray Diffractions (XRD) and tribological properties are measured by nano-indentation, nano-scratch tester, nano-stress tester. Especially in DC power of 150 W, the maximum hardness and the minimum residual stress of TiN film exhibited about 25 GPa and 1 GPa, respectively. And also, the critical load of TiN film prepared by magnetron sputtering method were measured over 30 N.

• Journal of the Korean institute of surface engineering
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• v.47 no.6
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• pp.293-296
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• 2014

Fe-Ni has been of great interest because it is known as one of low thermal expansion alloys as various application areas. This alloy was fabricated by electroforming process, and effect of heat treatment on thermal expansion and hardness was investigated. Nano-crystalline structure of 13.3 - 63.5 nm in size was observed in the as-deposited alloy. To investigate the effect of heat treatment on grain growth and mechanical/thermal properties, we conducted hardness and coefficient of thermal expansion (CTE). From this, we confirmed these properties were varied by heat treatment. In this nano-crystalline alloy, we could observe abnormal behavior in thermal expansion between $350-400^{\circ}C$. Additionally, an abrupt change in hardness has also been observed. However, once the grains grow up to micro-sized the mechanical and thermal properties mentioned above were stabilized similar to those of bulk alloys due to heat treatment.

• Proceedings of the Korean Powder Metallurgy Institute Conference
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• 2006.09b
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• pp.1309-1310
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• 2006

High-purity and super-hard nano-polycrystalline diamond has been successfully synthesized by direct conversion from high-purity graphite under static pressures above 15 GPa and temperatures above $2300^{\circ}C$. This paper describes research findings on the formation mechanism of nano-structure and on the contributing factor leading to high hardness.

• Journal of the Korean institute of surface engineering
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• v.43 no.6
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• pp.255-259
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• 2010

In this work, Ni-Co composites incorporated with nano-sized SiC particles in the range of 45-55 nm are prepared by electroplating. The effects of plating duration on the chemical composition, surface morphology, crystalline structures and hardness have been studied. The maximum hardness of Ni-Co-SiC composite coating is approximately 633 Hv at plating duration of 1 h. The hardness is gradually decreased with increasing plating duration, which can be attributed to the growth of crystalline size and the agglomerates of SiC nano-particles. It is therefore explained that the grain refinement of Ni-Co matrix and stable dispersion of SiC particles play an important role for strengthening, which indicate Hall-Petch relation and Orowan model were dominant for hardening of Ni-Co-SiC composite coatings.

• Transactions of Materials Processing
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• v.13 no.1
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• pp.59-64
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• 2004

Nano-scratch tests were performed on PMMA thin films spin-coated on a Si substrate using an atomic force microscopy (AFM) with loads ranging form 10nN to 100nN. At low loads, a ridge pattern was formed on the PMMA thin film surface. No wear particles were observed during the pattern-forming mild wear. At high loads, severe wear by plowing occurred, accompanied by wear particles. The film with the highest hardness showed the highest wear resistance. Friction force generated during the scratching was measured, which was closely related with surface deformation of the film. A simple empirical equation to deduce scratch hardness of the film from a linear fixed-distance scratch test was proposed, and scratching-speed dependency of the scratch hardness was displayed.

• Journal of the Korean institute of surface engineering
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• v.39 no.4
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• pp.160-165
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• 2006

Ni-SiC composite coating layers were prepared by electroplating method and their deposition rate, codeposition of SiC, morphology, surface roughness, hardness, wear and friction properties were investigated. It was found that the deposition rate and the codeposition of SiC in the composite coating layer increased with increasing concentration of SiC in the solution only at the early stage. Both of them reached certain maxima and then decreased with increasing concentration of SiC. Rough surface was obtained with increasing codeposition of SiC, which is probably due to the agglomeration of the SiC particle in the vicinity of surface. Vickers hardness increased with increasing codeposition of SiC and heat treatment at $300^{\circ}C$ in air for 1 hour. Wear volume decreased with increasing codeposition of SiC and friction coefficient increased with increasing codeposition of SiC at the early stage, and it became almost constant. Such wear and friction behaviors are desirable for the practical application.

• Progress in Superconductivity and Cryogenics
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• v.11 no.1
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• pp.1-4
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• 2009

Mechanical and electrical properties of silver stabilizer layer of coated conductor, which as prepared with nano silver paste as starting materials, have been investigated, Nano silver paste was coated on a YBCO film by dip coating process at a diping speed of 20m/min. Coated film was dried in air and heat treated at $400{\sim}700^{\circ}C$ in an oxygen atmosphere. Adhesion strength between YBCO and silver layer was measured by a tape est(ASTM D 3359). Hardness and electrical conductivity of the samples were measured by pencil hardness test (ASTM D 3363) and volume resistance test by LORESTA-GP (MITSHUBISHD, respectively. The sample heat-treated at $500^{\circ}C$ showed poor adhesion 1B, but samples heat treated at higher than $600^{\circ}C$ showed enhanced adhesion of 5B. The silver layer heat-treated at $700^{\circ}C$ showed the high hardness value larger than 9 H, low volume resistance, surface resistance value as well as superior current carrying capacity compared to sputtered silver. SEM observations showed that a dense silver layer was formed with a thickness of about $2{\mu}m$. Dip coated silver layer prepared by using nano silver paste showed superior electrical and mechanical characteristics.