• 한국진공학회지
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• 제15권1호
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• pp.97-102
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• 2006

양극 산화된 알루미나 (anodized aluminum oxide : AAO)는 균일하고 일정한 크기의 나노기공 패턴을 지니고 있다. AAO를 이온빔 나노 patterning을 위한 이온조사 시 마스크로서 이용하기 위해 AAO 나노 기공을 통과하는 이온빔의 투과율(AAO에 입사한 이온에 대한 투과이온의 양의 비)을 측정하였다. Al bulk foil을 양극 산화하여 두께가 $4{\mu}m$이고 종횡비(두께와 기공의 지름의 비)가 각각 200:1, 100:1 인 AAO를 Goniometer에 부착하여 500 keV의 $O^{2+}$ 이온빔에 대해 나노기공을 정렬시킨 후, 기울임 각에 따른 투과율을 측정한 결과, 종횡비가 200:1, 100:1 일 때 투과율은 각각 약 $10^{-8},\;10^{-4}$로 거의 이온빔이 투과하지 못하였다. 반면에 $SiO_2$ 위에 증착된 Al 박막으로 양극산화하여 종횡비가 5:1인 AAO의 이온빔 투과율은 0.67로 투과율이 현저히 향상되었다. 높은 종횡비를 갖는 AAO의 경우에는 범과 AAO 기공의 정렬이 쉽지 않은데다 알루미나의 비전도성으로 인한 charge-up 현상으로 인해 이온빔이 극히 투과하기 어렵기 때문이다. 실제로 80 keV의 Co 음이온을 종횡비 5:1인 AAO에 조사시킨 후에는 AAO 나노기공과 동일한 크기의 나노 구조체가 형성됨을 주사전자현미경(scanning electron microscopy: SEM) 관찰을 통하여 확인하였다.

• 한국소성가공학회:학술대회논문집
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• 한국소성가공학회 2007년도 춘계학술대회 논문집
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• pp.368-370
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• 2007

AAO(Anodic Aluminum Oxidation) method has been known that it is practically useful for the fabrication of nano-structures and makes it possible to fabricate the highly ordered nano masters on large surface and even on the 2.5 or 3D surface at low cost comparing to the expensive e-beam lithography or the conventional silicon processing. In this study, by using the multi-step anodizing and etching processes, highly ordered nano patterned master with concave shapes was fabricated. By varying the processing parameters, such as initial matter and chemical conditions; electrical and thermal conditions; time scheduling; and so on, the size and the pitch of the nano pattern can be controlled. Consequently, various alumina/aluminum nano structures can be easily available in any size and shape by optimized anodic oxidation in various aqueous acids. The resulting good filled uniform nano molded structure through hot embossing molding process shows the validity of the fabricated nano pattern masters.

• 대한기계학회:학술대회논문집
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• 대한기계학회 2004년도 춘계학술대회
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• pp.144-149
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• 2004

Porous anodic alumina has been used widely for corrosion protection of aluminum surfaces or as dielectric material in micro-electronics applications. It exhibits a homogeneous morphology of parallel pores which can easily be controlled between 10 and 400nm. It has been applied as a template for fabrication of the nanometerscale composite. In this study, mechanical properties of the AAO structures are measured by the nano indentation method. Nano indentation technique is one of the most effective method to measure the mechanical properties of nano-structures. Basically, hardness and elastic modulus can be obtained by the nano-indentation. Using the nano-indentation method, we investigated the mechanical properties of the AAO structure with different size of nano-holes. In results, we find the hole effect that changes the mechanical properties as size of nano hole.

• 한국세라믹학회지
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• 제51권6호
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• pp.544-548
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• 2014

Aluminum nitride was synthesized using a carbothermal method from mesoporous alumina having a high surface area (> $1,000m^2/g$) as an aluminum source and CNTs (carbon nano tubes) as a carbon source. In this case the mesoporous alumina was used as the starting material instead of ${\alpha}-Al_2O_3$ with the expectation that the mesopores in mesoporous alumina act as channels for N2 gas and elimination of CO generated as by-product. It is also expected that the synthetic temperature should be lower compared to the use of ${\alpha}-Al_2O_3$ as a starting material due to its high surface area. The crystallinity of the produced aluminum nitride was studied by XRD and FT-IR, and the microstructure was investigated by FE-SEM. Also the purity of the aluminum nitride was analyzed through N/O determinator and ICP analysis.

• 한국분말야금학회:학술대회논문집
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• 한국분말야금학회 2006년도 Extended Abstracts of 2006 POWDER METALLURGY World Congress Part 1
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• pp.516.1-516.1
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• 2006

• 한국전기전자재료학회논문지
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• 제16권9호
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• pp.801-806
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• 2003

In recent years, there has been large interest in the fabrication of the self organized nanoscale structures since not only their potential utilization in electronic, optoelectronic, and magnetic devices but also their fundamental interest such as uniformity and regularization. An attractive candidate of these materials is anodic porous alumina film(Al$_2$O$_3$) which is formed by the anodization of aluminum in an appropriate acid solution. In this study to fabricate the porous alumina film with very uniform and nearly parallel pores the anodization was carried out under constant voltage mode in 0.3M oxalic acid as an electrolyte. The hexagonally ordered arrays with a few $\mu\textrm{m}$ in size two-dimensional polycrystalline structure were obtained of which pore densities were 1.1${\times}$10$\^$10//$\textrm{cm}^2$.

• 한국세라믹학회지
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• 제41권3호
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• pp.242-246
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• 2004

화염분무열분해(FSP) 공정을 이용하여 결정질의 좁은 입도분포를 가지는 $\alpha$-알루미나 나노입자를 제조하였다. 초미분의 액적을 형성시키기 위해 전구체 용액으로서 연료인 등유를 연속상으로 하고 산화제인 알루미늄 질산염 수용액을 분산상으로 하는 유중수적(W/O)형의 마이크로에멀전을 제조하였다 0.5M 농도의 알루미늄 질산염 수용액을 10vol%, 등유 80vol%, 그리고 유용성 유화제 10vol%를 혼합하여 안정한 분산상태를 가지는 마이크로에멀전을 제조한 후, 이류체 노즐 분무기를 사용하여 0.03㎫의 공기 압력으로 분무하여 화염에 직접 노출시켰다. 제조된 생성물은 20에서 30 나노미터의 균일한 크기를 가지는 $\alpha$-알루미나 상으로 확인되었다.

• 한국정밀공학회지
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• 제21권4호
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• pp.186-193
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• 2004

Porous anodic alumina has been used widely for corrosion protection of aluminum surfaces or as dielectric material in micro-electronics applications. It exhibits a homogeneous morphology of parallel pores which can easily be controlled between 10 and 400nm. It has been applied as a template for fabrication of the nanometer-scale composite. In this study, mechanical properties of the AAO structures are measured by the nano indentation method. Nano indentation technique is one of the most effective methods to measure the mechanical properties of nano-structures. Basically, hardness and elastic modulus can be obtained by the nano-indentation. Using the nano-indentation method, we investigated the mechanical properties of the AAO structure with different size of nano-holes. In results, we find the hole effect that changes the mechanical properties as size of nano hole.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2009년도 제38회 동계학술대회 초록집
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• pp.102-102
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• 2010

One or two-dimensional nanostructures such as nanowires or nanomats have been widely uses as building blocks for nanoscale electronic devices. Nanofiber is one of sub-category of nano structures, it is easy to make nano-sized fiber by electrospinning technique. Nanofiber has large surface area as compared with their volume, it could be widely applied to many areas easily. Electrospinning technique is easy to control their structures and morphology safely and cost-effectively. We made nano-rings as a model of one dimensional nanostructures by electrospinning technique. To our knowledge, there were no reports on the preparation and investigation of alumina nano-rings by electrospinning technique. In this study, aluminum oxide nano-rings were produced after electospinning and calcination. The synthesized aluminum oxide nano-rings were characterized by scanning electron microscopy (SEM) to identify the morphology and the diameter of the ring, X-ray diffraction (XRD) to verify the crystallinity of the aluminum oxide, and X-ray photoelectron spectroscopy (XPS) for investigation of the chemical nature of the synthesized nano-rings.

• 한국재료학회지
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• 제22권12호
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• pp.643-649
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• 2012

Coatings composited with alumina and Perfluoro alkoxyalkane (PFA) resin were deposited on stainless steel plate (SUS304) to further improve corrosion resistance. Plate (ca. $10{\mu}m$) and/or nanosize (27~43 nm) alumina used as inorganic additives were mixed in PFA resin to make alumina-fluoro composite coatings. These coatings were deposited on SUS304 plate with wet spray coating and then the film was cured thermally. According to the amount and ratio of the two kinds of alumina having plate morphology and nano size, corrosion resistance of the film was evaluated under strong acids (HF, HCl) and a strong base (NaOH). The film prepared with the addition of 5~10 wt% alumina powders in PFA resin showed corrosion resistance superior to that of pure PFA resin film. However, for the film prepared with alumina content above 10 wt%, the corrosion resistance did not improve with the physical properties, such as surface hardness and adhesion. The film prepared with plate/nanosize (weight ratio = 1/2) alumina especially enhanced the surface hardness and corrosion resistance. This can be explained as showing that the plate and the nanosize alumina dispersed in PFA resin effectively suppressed the penetration of cations and anions due to the long penetration length and fewer defects that accompany the improved surface hardness under a serious environment of 10% HF solution for over 120 hrs.