• 제목/요약/키워드: Nano-Replication

검색결과 59건 처리시간 0.022초

핫엠보싱 공정에서 PMMA의 마이크로/나노 레올로지 특성 (Micro/Nano Rheological Characteristics of PMMA in Hot Embossing Process)

  • 김병희;김광순;반준호;신재구;김헌영
    • 한국소성가공학회:학술대회논문집
    • /
    • 한국소성가공학회 2004년도 춘계학술대회 논문집
    • /
    • pp.259-264
    • /
    • 2004
  • The hot embossing process as a method for the fabrication of polymer is becoming increasingly important because of its simple process, low cost, high replication fidelity and relatively high throughput. In this paper, we carried out experimental studies and numerical simulations in order to understand the viscous flow of polymer film during hot embossing process. As the initial step of quantitating the hot embossing process, simple parametric studies for the embossing conditions have been carried out using high resolution masters which patterned by DRIE process. Under different embossing times and pressures, the viscous flow of PMMA films into micro/nano cavities has been investigated. Also, the viscous flow during the hot embossing process has been simulated by the continuum based FDM analysis considering micro/nano effect, such as surface tension and contact angle.

  • PDF

나노 패턴 장비용 컴플라이언스 스테이지 (Compliant Stage for Nano Patterning Machine)

  • 최기봉;이재종
    • 대한기계학회:학술대회논문집
    • /
    • 대한기계학회 2003년도 춘계학술대회
    • /
    • pp.1065-1068
    • /
    • 2003
  • The nano imprint process is one of the next generation lithography has been mentioned as one of major nanoreplication techniques because it is simple process, low cost, high replication fidelity and relatively high throughput. This process requires a surface contact between a template with patterns and a wafer on a stage. After contact, the vertical moving the template to the wafer causes some directional motions of the stage. Thus the stage must move according to the motions of the template to avoid the damage of the transferred patterns on the wafer. This study is to develop the wafer stage with a passive compliance to overcome the damage. This stage is designed with the concept like that it has a monolithic, symmetry and planar 6-DOF mechanism.

  • PDF

롤투롤 나노 복제 공정을 이용한 이차원 광결정 소자의 제작 (Fabrication of Two-dimensional Photonic Crystal by Roll-to-Roll Nanoreplication)

  • 김영규;변의현;장호영;김석민
    • 한국기계가공학회지
    • /
    • 제12권5호
    • /
    • pp.16-22
    • /
    • 2013
  • A two-dimensional photonic crystal structure was investigated using a roll-to-roll nanoreplication and physical vapor deposition processes for the inexpensive enhanced fluorescence substrate which is not sensitive to the polarization directions of excitation light source. An 8 inch silicon master having nano dot array with a diameter of 200 nm, a height of 100 nm and a pitch of 400 nm was prepared by KrF laser scanning lithography and reactive ion etching processes. A flexible polymer mold was fabricated by flat type UV replication process and a deposition of 10 nm nickel layer as an anti-adhesion layer. A roll mold was prepared by warping the flexible polymer mold on an aluminum roll base and a roll-to-roll UV replication process was carried out using the roll mold. After the deposition of ~ 100 nm $TiO_2$ layer on the replicated nano dot array, a 2 dimensional photonic crystal structure was realized with a resonance wavelength of 635 nm for both p- and s-polarized light sources.

UV 임프린팅 공정을 이용한 금속막 필터제작 (Fabrication of Metallic Nano-Filter Using UV-Imprinting Process)

  • 노철용;이남석;임지석;김석민;강신일
    • 소성∙가공
    • /
    • 제14권5호
    • /
    • pp.473-476
    • /
    • 2005
  • The demand of on-chip total analyzing system with MEMS (micro electro mechanical system) bio/chemical sensor is rapidly increasing. In on-chip total analyzing system, to detect the bio/chemical products with submicron feature size, a filtration system with nano-filter is required. One of the conventional methods to fabricate nano-filter is to use direct patterning or RIE (reactive ion etching). However, those procedures are very costly and are not suitable fur mass production. In this study, we suggested new fabrication method for a nano-filter based on replication process, which is simple and low cost process. After the Si master was fabricated by laser interference lithography and reactive ion etching process, the polymeric mold was replicated by UV-imprint process. Metallic nano-filter was fabricated after removing the polymeric part of metal deposited polymeric mold. Finally, our fabrication method was applied to metallic nano-filter with $1{\mu}m$ pitch size and $0.4{\mu}m$ hole size for bacteria sensor application.

펠티어 소자를 이용한 다공성 나노패턴의 사출에 대한 연구 (Injection molding using porous nano-scale patterned master with Pettier devices)

  • 홍남표;권종태;신홍규;서영호;김병희
    • 한국소성가공학회:학술대회논문집
    • /
    • 한국소성가공학회 2008년도 춘계학술대회 논문집
    • /
    • pp.513-516
    • /
    • 2008
  • We have replicated nanopillar arrays using injection molding process of active heating and cooling method by several peltier devices. The injection melding has a high accuracy ed good reproducibility that are essential for mass production at low cost. Conventional molding processes widely use the water-based mold heating and air cooling methods. However, in case of replication for nano-patterned structures, it caused several defects such as air-flow mark, non-fill, sticking and tearing. In this study, periodic nano-scale patterns are replicated by using injection molding with Peltier devices. Porous nano-scale patterns, which have pore diameter range from 120nm to 150nm, were fabricated by using anodizing process. Periodic nano-pore structures ( $20mm\;{\times}\;20mm$) were used as a mold stamp of injection molding. Finally, PMMA with nanopillar arrays was obtained by injection molding process. By using the Peltier devices, the temperature of locally adiabatic molds can be dramatically controlled and the quality of the molded patterns can be slightly improved.

  • PDF

나노 그래이팅 구조를 갖는 비표지식 바이오센서 성형에 관한 연구 (Replication of label-free biosensor with nano grating structures)

  • 조익현;김병욱;최성우;김경현;성건용;강신일
    • 한국소성가공학회:학술대회논문집
    • /
    • 한국소성가공학회 2009년도 춘계학술대회 논문집
    • /
    • pp.290-293
    • /
    • 2009
  • This paper presents the development of a disposable label-free biosensor for bio molecular interaction analysis. Label-free biosensors have advantages of high performance in sensitivity and short detection time. Among various label-free systems, we introduced biosensor with nano grating structures based on white light source and spectrometer. And to develop high efficiency label-free biosensor, we suggest replicating processes satisfying required specification. We also report a system set-up to evaluate the characteristics of phenomenon shown in this biosensor system.

  • PDF

Cholic Acid Attenuates ER Stress-Induced Cell Death in Coxsackievirus-B3 Infection

  • Han, Jae-Young;Jeong, Hae In;Park, Cheol-Woo;Yoon, Jisoo;Ko, Jaeyoung;Nam, Sang-Jip;Lim, Byung-Kwan
    • Journal of Microbiology and Biotechnology
    • /
    • 제28권1호
    • /
    • pp.109-114
    • /
    • 2018
  • Coxsackievirus Type B3 (CVB3) is an enterovirus that belongs to the Picornaviridae and causes various diseases such as myocarditis and hand-foot-mouth disease. However, an effective antiviral drug is still not developed. In this study, we looked for potential inhibitors of CVB3 replication by examining the survival of CVB3-infected HeLa cells. We detected an antiviral effect by cholic acid and identified it as a candidate inhibitor of CVB3 replication. Cholic acid circulates in the liver and intestines, and it helps the digestion and absorption of lipids in the small intestine. HeLa cells were cultured in 12-well plates and treated with cholic acid (1 and $10{\mu}g/ml$) and $10^6PFU/ml$ of CVB3. After 16 h post-infection, the cells were lysed and subjected to western blot analysis and RT-PCR. The production of the viral capsid protein VP1 was dramatically decreased, and translation initiation factor eIF4G1 cleavage was significantly inhibited by treatment with $10{\mu}g/ml$ cholic acid. Moreover, cholic acid inhibited ERK signaling in CVB3-infected HeLa cells. RT-PCR showed that the amounts of the CVB3 RNA genome and mRNA for the ER stress-related transcription factor ATF4 were significantly reduced. These results showed that cholic acid strongly reduced ER stress and CVB3 proliferation. This compound can be developed as a safe natural therapeutic agent for enterovirus infections.

고온 임프린팅을 통한 알루미늄합금 표면의 마이크로/나노 구조 성형 기술 (Hot Imprinted Hierarchical Micro/Nano Structures on Aluminum Alloy Surfaces)

  • 문인용;이호원;오영석;김세종;김지훈;강성훈
    • 소성∙가공
    • /
    • 제28권5호
    • /
    • pp.239-246
    • /
    • 2019
  • Various surface texturing techniques have been studied because of the effective applicability of micro or nano scale surface patterns. Particularly, the most promising types of patterns include the hierarchical patterns, which consists of micro/nano structures. Different processes such as MEMS, laser machining, micro cutting and micro grinding have been applied in the production of hierarchical patterns on various material surfaces. This study demonstrates the process of hot imprinting to induce the hierarchical patterns on the Al alloy surfaces. Wire electrical discharge machining (WEDM) process was used to imprint molds with micro scale sinusoidal pattern. In addition, the sinusoidal pattern with rough surface morphology was obtained as a result of the discharge craters. Consequently, the hierarchical patterns consisting of the sinusoidal pattern and the discharge craters were prepared on the imprinting mold surface. Hot imprinting process for the Al plates was conducted on the prepared mold, and the replication performance was analyzed. As a result, it was confirmed that the hierarchical patterns of the mold were effectively duplicated on the surface of Al plate.