• Transactions of the Korean Society of Mechanical Engineers A
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• v.32 no.6
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• pp.459-464
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• 2008

We present a novel microcantilever device with nano-interdigitated electrodes (nano-IDEs) and DNA selective immobilization on the nano-IDEs for biosensing applications. Using the nano-IDEs and cyclic voltammetric methods, we have achieved selective immobilization of DNA with submicrometer spatial resolution on a freestanding microcantilever. $70{\sim}500\;nm$-wide gold (Au) nano-IDEs are fabricated on a low-stress SiNx microcantilever with dimensions of $100{\sim}600\;{\mu}m$ in length, and $15{\sim}60\;{\mu}m$ in width, with a $0.5\;{\mu}m$ thickness using electron beam lithography and bulk micromachining. Streptavidin is selectively deposited on one side of the nano-IDEs using cyclic voltammetry at a scan rate of 0.1 V/s with a range of $-0.2{\sim}0.7\;V$ during $1{\sim}5$ cycles. The selective deposition of dsDNA is confirmed by fluorescence microscopy after labeling with YOYO-1 dye.

• Proceedings of the KIEE Conference
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• 2011.07a
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• pp.1686-1687
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• 2011

A microfabricated chip with in-channel electrochemical cell using interdigitated gold electrode was fabricated for sensitive electrochemical analysis. The gold electrodes were fabricated on glass wafer using thermal evaporator and were covered using PDMS mold containing microchannel for analyte and electrolyte. The active area of each electrode was $250\;{\mu}m{\times}200\;{\mu}m$ with a gap of 200 ${\mu}m$ between the electrodes. Microelectrodes results in maximum amplification of signal, since the signal enhancement effect due to cycling of the reduced and oxidized species strongly depends on the inter electrode distance. Analytes such as methylene blue and guanosine were characterized using the fabricated electrodes and their electrochemical characteristics were compared with conventional bulk electrodes. The device so developed shall find use as disposable electrochemical cell for rapid and sensitive analysis of electroactive species.

• Journal of Mechanical Science and Technology
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• v.20 no.4
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• pp.505-512
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• 2006

This paper presents an integrated multifunctional sensor based on MEMS technology, which can be used or embedded in mobile devices for environmental monitoring. An absolute pressure sensor, a temperature sensor and a humidity sensor are integrated in one silicon chip of which the size is $5mm\times5mm$. The pressure sensor uses a bulk-micromachined diaphragm structure with the piezoresistors. For temperature sensing, a silicon temperature sensor based on the spreading-resistance principle is designed and fabricated. The humidity sensor is a capacitive humidity sensor which has the polyimide film and interdigitated capacitance electrodes. The different piezoresistive orientation is used for the pressure and temperature sensor to avoid the interference between sensors. Each sensor shows good sensor characteristics except for the humidity sensor. However, the linearity and hysteresis of the humidity sensor can be improved by selecting the proper polymer materials and structures.

• JSTS:Journal of Semiconductor Technology and Science
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• v.5 no.1
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• pp.30-37
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• 2005

We present an air bridge type electrode system with tunable electrode distance for detecting electroactive biomolecules. It is known that the narrower gap between electrode fingers, the higher sensitivity in IDA (interdigitated array) electrode. In previous researches on IDA electrode, narrower patterning required much precise and expensive equipment as the gap goes down to nanometer scale. In this paper, an improved method is suggested to replace nano gap pattering with downsizing electrode distance and showed that the patterning can be replaced by thickness control using metal deposition methods, such as electroplating or metal sputtering. The air bridge type electrode was completed by the following procedures: gold patterning for lower electrode, copper electroplating, gold deposition for upper electrode, photoresist patterning for gold film support, and copper etching for space formation. The thickness of copper electroplating is the distance between upper and lower electrodes. Because the growth rate of electroplating is $0.5{\mu}m\;min^{-1}$, the distance is tunable up to hundreds of nanometers. Completed electrodes on the same wafer had $5{\mu}m$ electrode distance. The gaps between fingers are 10, 20, 30, and $40{\mu}m$ and the widths of fingers are 10, 20, 30, 40, and $50{\mu}m$. The air bridge type electrode system showed better sensitivity than planar electrode.

• Journal of the Korean Ceramic Society
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• v.43 no.12 s.295
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• pp.798-804
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• 2006

Co-planar type single chamber solid oxide fuel cell with patterned electrode on a surface of electrolyte has been fabricated by robo-dispensing method and microfluidic lithography. The cells were composed of NiO-GDC-Pd or NiO-SDC cermet anode, $(La_{0.7}Sr_{0.3})_{0.95}MnO_3$ cathode, and yttria stablized zirconia electrolyte. The cell performance at $900^{\circ}C$ was investigated as a function of electrode geometries, such as anode-to-cathode distance, numbers of electrode pairs. Relationship between OCV and I-V characteristics at the optimized operation condition was also studied by DC source meter under the mixed gas condition of methane, air, and nitrogen. An increase of anode-facing-cathode area leads to lower OCV due to intermixing between product gases of anode and cathode, which in turn decreases the oxygen partial pressure difference.

• Current Optics and Photonics
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• v.3 no.1
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• pp.66-71
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• 2019

Application of liquid crystal (LC) materials to a flexible device is challenging because the bending of LC displays easily causes change in thickness of the LC layer and orientation of LCs, resulting in deterioration in a displayed image quality. In this work, we demonstrate a prototype device combining a flexible polymer substrate and an optically isotropic LC-polymer composite in which the device consists of interdigitated in-plane switching electrodes deposited on a flexible colorless polyimide substrate and the composite consisting of nano-sized LC droplets in a polymer matrix. The device can keep good electro-optic characteristics even when it is in a bending state because the LC orientation is not disturbed in both voltage-off and -on states. The proposed device shows a high potential to be applicable for future flexible LC devices.