• 제목/요약/키워드: Nano pattern

검색결과 478건 처리시간 0.047초

디지털 프린팅을 위한 전도성 배선에 관한 연구 (Investigation of Conductive Pattern Line for Direct Digital Printing)

  • 김용식;서상훈;이로운;김태훈;박재찬;김태구;정경진;윤관수;박성준;정재우
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2007년도 하계학술대회 논문집 Vol.8
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    • pp.502-502
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    • 2007
  • Current thin film process using memory device fabrication process use expensive processes such as manufacturing of photo mask, coating of photo resist, exposure, development, and etching. However, direct printing technology has the merits about simple and cost effective processes because inks are directly injective without mask. And also, this technology has the advantage about fabrication of fine pattern line on various substrates such as PCB, FCPB, glass, polymer and so on. In this work, we have fabricated the fine and thick metal pattern line for the electronic circuit board using metal ink contains Ag nano-particles. Metal lines are fabricated by two types of printing methods. One is a conventional printing method which is able to quick fabrication of fine pattern line, but has various difficulties about thick and high resolution DPI(Dot per Inch) pattern lines because of bulge and piling up phenomenon. Another(Second) methods is sequential printing method which has a various merits of fabrication for fine, thick and high resolution pattern lines without bulge. In this work, conductivities of metal pattern line are investigated with respect to printing methods and pattern thickness. As a result, conductivity of thick pattern is about several un.

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The association between dietary pattern and depression in middle-aged Korean adults

  • Park, Seon-Joo;Kim, Myung-Sunny;Lee, Hae-Jeung
    • Nutrition Research and Practice
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    • 제13권4호
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    • pp.316-322
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    • 2019
  • BACKGROUND/OBJECTIVES: The association between dietary patterns and depression has been reported but the results have been inconsistent. This study was conducted to investigate the association between dietary patterns and depression in middle-aged Korean adults. SUBJECTS/METHODS: The participants were selected from a community-based cohort, a subset of the Korean Genome and Epidemiology Study. Depression was assessed using the Korean version of the Beck Depression Inventory (BDI) and those with a BDI score ${\geq}16$ were defined as having depression. The subjects' food intakes over the year preceding the survey were estimated by using a validated semi-quantitative food frequency questionnaire. Dietary patterns were identified by using factor analysis. Multiple logistic regression was used to assess the association of dietary pattern with depression. RESULTS: Among 3,388 participants, 448 (13.2%) were identified as having depression. We identified two major dietary patterns: 'Healthy' dietary pattern was characterized by high intakes of vegetables, soybeans, mushroom, seaweeds, white fish, shellfish and fruits and a low intake of white rice. 'Unhealthy' dietary pattern was characterized by high intakes of white rice, meats, ramen, noodles, bread and coffee and a low intake of rice with other grains. Compared with subjects in the lowest quartiles, those in the highest quartiles of the healthy dietary pattern had a significantly lower odds ratio (OR = 0.59, 95% CI: 0.42-0.82, P for trend = 0.0037) after adjusting for potential confounders. In contrast, the unhealthy dietary pattern was negatively associated with depression (OR = 1.65, 95% CI: 1.19-2.28, P for trend = 0.0021). CONCLUSION: This results suggest that a healthy dietary pattern (rich in vegetables, soybeans, mushroom, seaweeds, white fish, shellfish, and fruits) is associated with low risk of depression. Whereas an unhealthy dietary pattern (rich in white rice, meats, ramen, noodles, bread, and coffee) is associated with a high risk of depression in middle-aged Korean adults.

폴리이미드 용량형 습도센서의 전극 패턴에 따른 감습 특성 (Humidity Sensitive Characterization by Electrode Pattern on the Capacitive Humidity Sensor Using Polyimide)

  • 박성백;신훈규;임준우;장상목;권영수
    • 한국전기전자재료학회논문지
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    • 제27권9호
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    • pp.566-570
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    • 2014
  • Electrode pattern effects on the capacitive humidity sensor were investigated. The fabrication of the capacitive humidity sensor was formed with three steps. The bottom electrode was formed on the silicon substrate with Pt/Ti thin layer by using shadow mask and e-beam evaporator. The photo sensitive polyimide was formed on the bottom electrode by using photolithography process as a humidity sensitive thin film. The upper electrode was formed on the polyimide thin film with Pt/Ti thin layer by using e-beam evaporator and lift-off method. Three electrode patterns, such as circle, square, and triangle pattern, were used and changed the sizes to investigate the effects. The capacitances of the sensors were decreased 622 to 584 pF with the area decreament of patterns 250,000 to $196,250{\mu}m^2$. From these results, a capacitive humidity sensor with photo sensitive polyimide is expected to be applied to a high sensitive humidity sensor.

전자빔 리소그래피를 이용한 주사기법에 따른 패턴형상 조정 (Pattern Shape Modulation by Scanning Methods in E-Beam Lithography)

  • 오세규;김승재;김동환;박근;장동영
    • 한국생산제조학회지
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    • 제18권6호
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    • pp.558-564
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    • 2009
  • To aim at obtaining a correct and fine small pattern by an electron beam lithography several conditions and methods affecting a real pattern shape needs to be investigated. A micro/nano sized pattern shape is sometimes dependent on the scanning method. In this work, four types of scanning methods are implemented and their characteristics are investigated. For a $11\times11um$ pattern, a Zigzag scanning method proves a precise pattern generation. The other ways such as SEM scanning and swirl in-out scanning method result in some distorted pattern shape. It is proved that abrupt change in the pattern generation limits to obtaining a fine and small pattern.

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SIL 기반 플라즈모닉 리소그래피에서 주파수 적응형 필터를 이용한 나노간극 제어의 성능향상 (Improving nano gap control using frequency adaptive peak filter in Solid Immersion Lens-based plasmonic lithography)

  • 최국종;임건;박노철
    • 정보저장시스템학회논문집
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    • 제10권1호
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    • pp.1-6
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    • 2014
  • Plasmonic lithography is the latest technique to overcome diffraction limit of previous optical lithography. In the plasmonic lithography, the nano gap between nano metal wave guide and photoresist should be in sub-wavelength region. SIL-based plasmonic lithography is the one of the solutions to maintain small air gap. However, the nano gap control is so sensitive that a little disturbance is able to have a large effect on the nano gap control. So, we analyzed the characteristics of disturbance, and then modified the previous controller to suppress the disturbance. We applied two peak filters which were fixed one and adaptively changeable one. We experimentally confirmed the improvement of the nano gap control, which reduced nano gap error by 30 %. The proposed control will improve the quality of lithography pattern.

금 나노홀 어레이 제작을 위한 집속 이온빔의 공정 최적화 (Optimal Determination of the Fabrication Parameters in Focused Ion Beam for Milling Gold Nano Hole Array)

  • 조은별;권희민;이희선;여종석
    • 한국진공학회지
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    • 제22권5호
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    • pp.262-269
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    • 2013
  • 집속 이온빔 장비는 나노크기의 패턴을 제작하는 한 방법이지만, 정밀한 제작은 쉽지 않다. 그러므로 집속 이온빔 장비로 샘플을 제작할 때 고려해야 하는 공정 조건을 정리하여 초보자도 샘플제작이 가능하도록 도움을 주고자 한다. 본 장비로 원하는 나노크기의 패턴을 제작하기 위해서 집속 이온빔 장비의 공정변수들을 최적화 하는 과정이 중요하다. 가공할 때 고려해야 하는 변수에는 빔 전류량(빔 크기)과 도즈(빔 지속시간)가 있다. 도즈를 결정한 후에 패턴을 제작하는데 걸리는 시간과 패턴의 크기를 고려하여 빔 전류량을 선택하면 된다. 여기서 도즈는 제작하려는 나노크기의 패턴의 금속 두께에 따라 결정이 된다. 이 논문에서 최적화한 1 pA의 빔 전류와 $0.1nC/{\mu}m^2$의 도즈의 공정조건에서 100 nm 두께의 금 박막 위에 타원형의 구멍을 정밀하게 제작할 수 있다.

마이크로 렌즈 어레이와 회절격자 레지스트 패턴을 이용한 유기광원(OLED)의 광 추출 효율 향상 (Outcoupling Enhancement of OLED using Microlens Array and Diffractive Grating)

  • 장지향;김경조;김진헌;오민철
    • 한국광학회지
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    • 제18권6호
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    • pp.441-446
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    • 2007
  • OLED 소자는 유리기판과 공기 층의 경계면에서 발생하는 전반사와 ITO-유기층으로 형성되는 광도파로를 따라 진행하는 도파모드 결합으로 인해 내부에서 생성된 빛의 80% 이상이 외부로 추출되지 못하게 된다. 본 연구에서는 마이크로 렌즈 어레이와 회절격자 레지스트 층을 이용하여 소자 내부에서 손실되는 빛을 외부로 추출시킴으로써 OLED의 발광효율을 향상시킨다. 마이크로 렌즈 어레이를 이용하여 유리기판-공기 전반사로 인해 내부에 갇히는 빛을 외부로 출력시키고, ITO 와 유기물 사이에 회절격자 레지스트 층을 삽입하여 ITO-유기층 광도파로에 갇힌 빛들을 수직방향으로 추출될 수 있도록 하였다. 제작된 OLED 소자에 전류밀도 $20mA/cm^2$를 인가한 경우, 마이크로 렌즈 어레이를 적용한 OLED에서 22%의 효율 개선을 얻었고, 회절격자 레지스트 층을 가지는 OLED 의 경우 41%의 효율개선을 얻을 수 있었다.

Two-Dimensional Arrays of Gold Nanoparticles for Plasmonic Nanosensor

  • Sim, Brandon;Monjaraz, Fernando;Lee, Yong-Joong;Park, So-Yeun
    • 한국재료학회지
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    • 제21권10호
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    • pp.525-531
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    • 2011
  • Two dimensional (2D) arrays of noble metal nanoparticles are widely used in the sensing of nanoscale biological and chemical events. Research in this area has sparked considerable interest in many fields owing to the novel optical properties, e.g., the localized surface plasmon resonance, of these metallic nanoarrays. In this paper, we report successes in fabricating 2D arrays of gold nano-islands using nanosphere lithography. The reproducibility and the effectiveness of the nano-patterning method are tested by means of spin coating and capillary force deposition. We found that the capillary force deposition method was more effective for nanospheres with diameters greater than 600 nm, whereas the spin coating method works better for nanospheres with diameters less than 600 nm. The optimal deposition parameters for both methods were reported, showing about 80% reproducibility. In addition, we characterize gold nano-island arrays both geometrically with AFM as well as optically with UV-VIS spectrometry. The AFM images revealed that the obtained nano-arrays formed a hexagonal pattern of truncated tetrahedron nano-islands. The experimental and theoretical values of the geometric parameters were compared. The 2D gold nano-arrays showed strong LSPR in the absorption spectra. As the nano-islands increased in size, the LSPR absorption bands became red-shifted. Linear dependence of the plasmon absorption maximum on the size of the gold nano-islands was identified through the increment in the plasmon absorption maximum rate for a one nanometer increase in the characteristic length of the nano-islands. We found that the 2D gold nano-arrays showed nearly seven-fold higher sensitivity of the absorption spectrum to the size of the nano-islands as compared to colloidal gold nano-particles.

세레이션형 미세 멀티셀 튜브 압출 및 접합강도 평가 (FE analysis of Extrusion Process and Estimation of welding strength for Micro Multi Cell Tube with Serration)

  • 이정민;김병민;조형호;강충길
    • 한국정밀공학회지
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    • 제22권9호
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    • pp.49-59
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    • 2005
  • This paper describes a development of the extrusion process and estimation of the weldability for multi cell tubes used to cooling system of automobiles. A study on extrusion process is performed through the 3D FE simulation in non-steady state and extrusion experimentation. Also, nano-indentation test is employed to estimate the weldability of tubes. Especially, An evaluation of the weldability using the nano-indentation is accomplished as compared with nano-hardness in welded part and in the others. Finally, the pattern of the mandrel defection is investigated according to shapes of the porthole and/or chamber.