• Particle and aerosol research
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• v.12 no.4
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• pp.145-150
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• 2016

During the chemical mechanical planarization (CMP) process, slurry that comprises abrasive particles can directly affect the CMP performance and quality. Mainly, the large particles in the slurry can generate the defects on the wafer. Thus, many kinds of filters have been used in the CMP process to remove unwanted over-sized particles. Among these filters, the point-of-use (POU) filter is used just before the slurry is supplied onto the CMP pad. In the CMP research field, analysis of the POU filter has been relatively exceptional, and previous studies have not focused on the standardized filtration efficiency (FE) or filter performance. Furthermore, conventional evaluation methods of filter performance are not appropriate for POU filters, as the POU filter is not a membrane type, but is instead a depth type roll filter. In order to accurately evaluate the POU filter, slurry FE according to particle size was measured in this study. Additionally, a CMP experiment was conducted with filtered slurry to demonstrate the effects of filtered slurry on CMP performance. Depending on the flow rate and the filter retention size, the FE according to particle size was different. When the small and large particles have different FEs, the total filtration efficiency (TFE) can still have a similar value. For this reason, there is a need to measure the FE with respect to the particle size to verify the effects of the POU filter on the CMP process.

• Membrane and Water Treatment
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• v.10 no.2
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• pp.113-120
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• 2019

To investigate surface properties and interception performances of the new modified PVDF membrane coated with Graphene Oxide (GO) and nano-$TiO_2$ (for short the modified membrane) via the interface polymerization method combined with the pumping suction filtration way, filtration experiments of the modified membrane on Humic Acid (HA) were conducted. Results showed that the contact angle (characterizing the hydrophilicity) of the modified membrane decreased from $80.6{\pm}1.8^{\circ}$ to $38.6{\pm}1.2^{\circ}$. The F element of PVDF membrane surface decreased from 60.91% to 17.79% after covered with GO and $TiO_2$. O/C element mass ratio has a fivefold increase, the percentage of O element on the modified membrane surface increased from 3.83 wt% to 20.87%. The modified membrane surface was packed with hydrophilic polar groups (like -COOH, -OH, C-O, C=O, N-H) and a functional hydrophilic GO-polyamide-$TiO_2$ composite configuration. This configuration provided a rigid network structure for the firm attachment of GO and $TiO_2$ on the surface of the membrane and for a higher flux as well. The total flux attenuation rate of the modified membrane decreased to 35.6% while 51.2% for the original one. The irreversible attenuation rate has dropped 71%. The static interception amount of HA on the modified membrane was $158.6mg/m^2$, a half of that of the original one ($295.0mg/m^2$). The flux recovery rate was increased by 50%. The interception rate of the modified membrane on HA increased by 12% approximately and its filtration cycle was 2-3 times of that of the original membrane.

• Transactions of the Korean Society of Automotive Engineers
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• v.15 no.3
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• pp.153-159
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• 2007

Nano-Particles are influenced on the environmental protection and human health. The relationships between transient vehicle operation and nano-particle emissions are not well-known, especially for diesel passenger vehicles with DPF. In this study, a diesel passenger vehicle was measured on condition of DPF regeneration and no regeneration on a chassis dynamometer test bench. The particulate matter (PM) emission from this vehicle was measured by its number, size and mass measurement. The mass of the total PM was evaluated with the standard gravimetric measurement method while the total number and size concentrations were measured on a NEDC driving cycle using Condensation Particle Counter (CPC) and EEPS. Total number concentration by CPC was $1.5{\times}10^{1l}N/km$, which was 20% of result by EEPS. This means about 80% of total particle emission is consist of volatile and small-sized particles(<22nm). During regeneration, particle emission was $6.2{\times}10^{12}N/km$, was emitted 400 times compared with the emission before regeneration. As for the particle size of $22{\sim}100nm$ was emitted mainly, showing peak value of near 40nm in size. This means regeneration decreased the mean size of particles. Regarding regeneration, PM showed no change while the particle number showed about 6 times difference between before and after regeneration. It seems that the regeneration influences on particle number emissions are related to DPF-fill state and filtration efficiency.

• Journal of Pharmaceutical Investigation
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• v.41 no.4
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• pp.197-204
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• 2011

Delivery of therapeutic protein drugs is a hot issue in the clinical application, because protein drugs have low side effects and highly therapeutic effects compared with chemical drugs. Despite their prominent advantages, protein drugs have high risk for human therapy such as their easy degradation by proteolytic enzymes, renal filtration and immune response. Over the past few decades, a large number of polysaccharides as vehicles for the protein delivery system have been developed to overcome the problems. This review presents the studies on protein delivery based on polysaccharides used as stabilizer and vehicles comprising nano- or microspheres to overcome inherent limitations of therapeutic proteins.

• Proceedings of the Membrane Society of Korea Conference
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• 1995.06a
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• pp.39-50
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• 1995

The membrane processes that are commonly uscd in water and wastewater treatment are reverse osmosis (Ro), ultrafiltration (UF) and microfiltration (MF), which utilize pressure differentials. There is also nano-filtration (NF), or low-pressure reverse osmosis, which is positioned midway between conventional reverse osmosis and ultrafiltration. Reverse osmosis membranes reject dissolved ions, while ultrafiltration can be used to reject relatively larger molecules, such as protein, polysacchalides and so on. Microfiltration is capable of eliminating particles at submicron level. This paper summarizes the characteristics of MSAS process first, as it is the main membrane process applied to wastewater treatment. Two successful examples of the applications, the cases of individual building reuse system and nightsoil treatment, are then shown. The latest trend of new membrane applications, i.e., immersed-type MSAS is also introduced.

• Journal of environmental and Sanitary engineering
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• v.16 no.1
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• pp.40-46
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• 2001

Conventional membrane systems was difficult to treatment for pulp and paper mills waste warter. Technological advances in membrane filtration systems have created opportunity for pulp and paper mills to treat effluent streams in order to meet stricter environmental constraints. "Vibratory Shear Enhanced Processing(VSEP)" developed by new logic international makes if possible to filter effluent streams without the fouling problems exhibited by conventional membrane systems. Various kinds of waste water occurred to and paper mills experiment with "VSEP" set up conventional membrane. The results were as followes : Excepting ultra filter($0.1{\mu}\textrm{m}$ Teflon, C-100, G-50), Nano filter(NTR-7450, DS-5, PVD-1) and reverse osmosis(ACM-4) was treated with very excellent weight of treatment, electric conductivity, removal COD, TDS, turbidity.

• Korean Chemical Engineering Research
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• v.56 no.1
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• pp.56-60
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• 2018

There have been a lot of study to improve the performance of membrane filters as the removal of particulate matter has been of great interest due to the negative effects. Among the membrane fabrication techniques, the electrospinning technique is the most promising because it can produce uniform fibers ranging from nano to micrometer size. The electrospun membranes will greatly improve the filtration performance due to the high ratio of surface area to volume and the high porosity. In the present study, polystyrene (PS) and cellulose acetate (CA) polymers were used to produce the membranes with carbon nanotube (CNT), showing the filtration performances were improved with the optimal amounts of CNT.

• Resources Recycling
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• v.16 no.4
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• pp.40-46
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• 2007

This research constructed property analysis for an high additional value construction materials. We try to utilize by the addition material of soil stabilizer. It was described to the material properties analysis of a sludge. A sample used 4 kinds of filtration cake which occurs by 4 companies and 3 kinds of sludge before filtration. ph of a sludge, a particle analysis and a scanning electron microscope observation were performed. We analyzed on the chemical ingredient by XRF, the phase by XRD, observed and analyzed the thermo-property of the sludge and the amount of the volatile constituent by TG-DTA.

• Membrane Journal
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• v.21 no.2
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• pp.163-170
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• 2011

Membrane fouling control in water treatment may be the main obstacle for wider implementation and lower cost. A novel fluorescent spectroscope sensor device for membrane fouling integrity monitoring has been developed and evaluated in this study. PSf membranes for water treatment has been fabricated with three types of organic fluorescent materials, OB, FP, KCB. The fluorescent signal from membrane surface was analyzed throughout the filtration process. It was found that the fluorescent signal due to the membrane fouling decreased and the developed device is reliable for membrane fouling monitoring.

• Journal of the Korea Academia-Industrial cooperation Society
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• v.14 no.4
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• pp.2027-2036
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• 2013

Comparison of removal performance between reverse osmosis(RO), nanofiltration(NF), electrocoagulation(EC) and electroadsorption(EA) for removal of nitrate and fluoride often exceeded the limits of water quality in small water treatment plants. Removals of nitrate and fluoride were 72-92% and 74-85% in RO, 5-15% and 1% in NF, 99% and 44% in EA equipped with MWCNT coated electrodes, 82% and 77% in EA equipped with Cu-MWCNT electrodes, and 11-46% and 69-99% in EC. Consequently, high removals of both ions were anticipated in RO. Effective removal of both ions are possible for EC, but great production of sludge is a big burden. EA equipped with the MWCNT electrodes showed a great fluctuation in removal efficiency, and electrode stability should be upgraded.