• Journal of Sensor Science and Technology
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• v.15 no.4
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• pp.277-283
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• 2006

We presented that fabrication process and characteristics of 3 axes flexible tactile sensor available for normal and shear force fabricated using Si micromachining and packaging technologies. The fabrication processes for 3 axes flexible tactile sensor were classified in the fabrication of sensor chips and their packaging on the flexible PCB. The variation rate of resistance was about 2.1 %/N and 0.5 %/N in applying normal and shear force, respectively. The flexibility of fabricated 3 axes flexible tactile sensor array was good enough to place on the finger-tip.

• Korean Journal of Materials Research
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• v.17 no.8
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• pp.433-436
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• 2007

Nano-structured polyaniline have been synthesized by interfacial polymerization method at room temperature. An aqueous solution of aniline in chloroform and another solution of ammonium peroxydisulfate in doping acid were prepared at different times terminated with methanol at room temperature. SEM, UV-vis were used to characterize the polyaniline with regard to their morphology and structure. The diameter and length of polyaniline can be controlled by the reaction time. Nano-structured polyaniline were found to have superior sensitivity for volatile organic compounds(VOCs). As the reaction time to increase from 30minute to 2hours the sensitivity were decreased to VOCs vapors. The sensitivity of Nano-structured polyaniline sensor appeared to VOCs better than the sensitivity of chemical synthesis sensors. The sensitivity of Nano-structured polyaniline sensor improved benzene vapors.

• Korean Journal of Materials Research
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• v.19 no.6
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• pp.325-329
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• 2009

Titanium dioxide thin films were fabricated as hydrogen sensors and its sensing properties were tested. The titanium was deposited on a $SiO_2$/Si substrate by the DC magnetron sputtering method and was oxidized at an optimized temperature of $850^{\circ}C$ in air. The titanium film originally had smooth surface morphology, but the film agglomerated to nano-size grains when the temperature reached oxidation temperature where it formed titanium oxide with a rutile structure. The oxide thin film formed by grains of tens of nanometers size also showed many short cracks and voids between the grains. The response to 1% hydrogen gas was ${\sim}2{\times}10^6$ at the optimum sensing temperature of $200^{\circ}C$, and ${\sim}10^3$ at room temperature. This extremely high sensitivity of the thin film to hydrogen was due partly to the porous structure of the nano-sized sensing particles. Other sensor properties were also examined.

• Proceedings of the Korean Vacuum Society Conference
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• 2014.02a
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• pp.401-401
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• 2014

In this study, graphene, the most attractive material today, has been applied to the wavelength-modulated surface plasmon resonance (SPR) sensor. The optical fiber sensor technology is the most fascinating topic because of its several benefits. In addition to this, the SPR phenomenon enables the detection of biomaterials to be label-free, highly sensitive, and accurate. Therefore, the optical fiber SPR sensor has powerful advantages to detect biomaterials. Meanwhile, Graphene shows superior mechanical, electrical, and optical characteristics, so that it has tremendous potential to be applied to any applications. Especially, grapheme has tighter confinement plasmon and relatively long propagation distances, so that it can enhance the light-matter interactions (F. H. L. Koppens, et al., Nano Lett., 2011). Accordingly, we coated graphene on the optical fiber probe which we fabricated to compose the wavelength-modulated SPR sensor (Figure 1.). The graphene film was synthesized via thermal chemical vapor deposition (CVD) process. Synthesized graphene was transferred on the core exposed region of fiber optic by lift-off method. Detected analytes were biotinylated double cross-over DNA structure (DXB) and Streptavidin (SA) as the ligand-receptor binding model. The preliminary results showed the SPR signal shifts for the DXB and SA binding rather than the concentration change.

• Journal of the Semiconductor & Display Technology
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• v.8 no.4
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• pp.21-24
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• 2009

We investigated a nanoscale inertia sensor based on telescoping carbon nanotubes, using classical molecular dynamics simulations. The position of the telescoping nanotubes is controlled by the centrifugal force exerted by the rotation platform, thus, position shifts are determined by the capacitance between carbon nanotubes and the electrode, and the operating frequency of the carbon nanotube oscillator. This measurement system, tracking oscillations of the carbon nanotube oscillator, can be used as the sensor for numerous types of devices, such as motion detectors, accelerometers and acoustic sensors.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2008.06a
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• pp.63-63
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• 2008

Environmental monitoring sub-system has been developed using gas sensor module, Bluetooth module and PDA phone. The gas sensor module consists of $NO_2or$ CO gas sensor and signal processing chips. Gas sensor is composed of the micro-heater, sensing electrode and sensing material. Metal oxide nano-material was selectively deposited on a substrate with micro-heater and was integrated to the gas sensor module. The change in resistance of the metal oxide nano-material due to exposure of oxidizing or deoxidizing gases is utilized as the principle of this gas sensor operation mechanism. This variation detected in the gas sensor module was transferred to the PDA phone by way of Bluetooth module.

• Korean Journal of Optics and Photonics
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• v.24 no.5
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• pp.251-255
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• 2013

In this paper, the characteristics of a humidity sensor implemented by Mach Zehnder Interferometer (MZI) in a Planar Lightwave Circuit (PLC) have been designed and demonstrated. The humidity outside is detected with polyvinylpyrrolidone (PVP) coated on the etched arm of the MZI. The length of the etched arm is 10 mm and the PVP was coated by dip-coating into the etched region. As the refractive index of the PVP changes with the surrounding humidity, the PVP-coated humidity sensor presented changes in the interferogram depending on RH (Relative Humidity) around the PLC. The measured results show that the proposed humidity sensor works successfully in the range of 30% to 80% of RH.

• IEMEK Journal of Embedded Systems and Applications
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• v.2 no.2
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• pp.76-81
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• 2007

A novel multi-layer type micro gas sensor for $NO_X$ detection was designed and fabricated. Micro platform defined as type II-1 in this article for micro gas sensor was fabricated using the MEMS technology to meet the demanding needs of lower power consumption. Nano composite materials were fabricated with nanosized tin oxide powder and $\underline{m}$ulti-$\underline{w}$all $\underline{c}$arbon $\underline{n}$ano $\underline{t}$ube (MWCNT) to improve sensitivity. We investigated characteristics of fabricated multi-layer type micro gas sensor with $NO_2$ concentration variations at constant 2.2 V. Sensitivity (S) of micro gas sensor were observed to increase from 2.9, to 7.4 and 11.2 as concentrations of $NO_2$ gases increased from 2.4 ppm, to 3.6 ppm and 4.9 ppm. When 2.4 ppm of $NO_2$ gas was applied, response time and recovery time of micro gas sensor were recorded as 101 seconds and 142 seconds, respectively.

• Proceedings of the KIEE Conference
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• 2007.07a
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• pp.1524-1525
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• 2007

A flexible tactile sensor module based on polyimide matrix integrated with sensing elements and pluggable terminals connector was fabricated by polymer micromachining technology for robotic applications. The tactile sensor arrays are composed of $4{\times}4$, $8{\times}8$ and $16{\times}16$ sensing elements connected with pluggable terminals connector, respectively. Especially, both the tactile sensor array and the pluggable terminals are formed in the sensor module during the fabrication process. The fabricated tactile sensor module is measured continuously in the normal force range of $0{\sim}1N$ with tactile sensor auto-evaluation system. The value of resistance is relatively increased linearly with normal force in the overall range. The variation rate of resistance is about 2.0%/N in the range of $0{\sim}0.6N$ and 1.5%/N in the range of $0.6{\sim}1N$. Also, the flexibility of the sensing module is adequate to be placed on any curved surface as cylinder because the matrix consists of polymer and metal thin film.

• Journal of Sensor Science and Technology
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• v.18 no.3
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• pp.226-233
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• 2009

In this study, the optical properties of localized surface plasmon resonance sensor using optical fiber was analyzed as the variation of a size and surface density of gold nano particles on the etched optical fiber surface. It is shown that a size and surface density of gold nano particles on optical fiber surface are controlled by $Na_3$ citrate quantity and pH of gold colloid solution. To measure the sensitivity, peak wavelength of absorbance spectrum was detected as the reflective index of the solution. The sensor sensitivity is linearly dependent on the size and surface densities of gold nano particles from the results of optical experiments.