• Title/Summary/Keyword: Nam Hyo-On

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Formation of dense diamond films (조밀한 다이아몬드 막의 합성)

  • Park, Sang-Hyun;Park, Jae-Yoon;Koo, Hyo-Geun
    • Proceedings of the KIEE Conference
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    • 2000.07c
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    • pp.1503-1505
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    • 2000

  • To grow the diamond films by using RF-MW mix-process, at first, diamond seeds were deposited on silicon substrate by RF plasma CVD, and then a diamond layer grown by MW plasma CVD on the seeds. The grain-size of diamond films deposited by using HF-MW mix-process was smaller and denser than those of the MW plasma CVD process. The deposited diamond films were analyzed by scanning electron microscophy, X-ray diffractometer and Raman spectroscopy.

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A study on deposition of diamond thin films by RF plasma CVD (RF플라즈마CVD법에 의한 Diamond 박막의 성장에 관한 연구)

  • Jang, Jae-Deog;Koo, Hyo-Geun;Lee, Chwi-Cung;Park, Sang-Hyun;Kim, Jung-Dal
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 1992.11a
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    • pp.102-105
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    • 1992

  • Using RF plasma CVD the diamond particles and films were deposited on Si and quartz substrate from $CH_4$-$H_2$ mixed gas. The temperature of substrate was uniformly maintained by inserting matal plate between substrate and substrate holder. As a result, the deposited diamond particles were mainly twins. The deposited diamond films were identified by SEM, XRD and Raman spectroscopy.

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