• JSTS:Journal of Semiconductor Technology and Science
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• v.13 no.4
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• pp.395-401
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• 2013

In-situ optical emission spectroscopy (OES) is employed for leak detection in plasma etching system. A misprocessing is reported for significantly reduced silicon etch rate with chlorine gas, and OES is used as a supplementary sensor to analyze the gas phase species that reside in the process chamber. Potential cause of misprocessing reaches to chamber O-ring wear out, MFC leaks, and/or leak at gas delivery line, and experiments are performed to funnel down the potential of the cause. While monitoring the plasma chemistry of the process chamber using OES, the emission trace for nitrogen species is observed at the chlorine gas supply. No trace of nitrogen species is found in other than chlorine gas supply, and we found that the amount of chlorine gas is slightly fluctuating. We successfully found the root cause of the reported misprocessing which may jeopardize the quality of thin film processing. Based on a quantitative analysis of the amount of nitrogen observed in the chamber, we conclude that the source of the leak is the fitting of the chlorine mass flow controller with the amount of around 2-5 sccm.

• IEMEK Journal of Embedded Systems and Applications
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• v.17 no.1
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• pp.19-24
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• 2022

Through the development and dissemination of embedded devices, studies that may help patients are rapidly emerging. Recently, as wearable devices have become one of the ways to diagnose diseases in daily life, they are being studied as a way to assist severely ill patients to lead their daily lives. Among them, a method of detecting and giving signals to detect and solve symptoms using acceleration sensors to diagnose Parkinson's disease is being studied, and there is no study to measure and analyze various factors that can affect Parkinson's disease. To solve them, we designed and developed a wearable device, P-Band, with various sensors capable of diagnosing related symptoms, including acceleration sensors capable of diagnosing Parkinson's disease. In this paper, the overall structure of the P-Band and the description and operation method of the measurable sensors are presented. In addition, it was confirmed that the symptoms of Parkinson's patients could be determined complexly through the results measured in actual patients.

• Journal of Sensor Science and Technology
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• v.30 no.6
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• pp.376-380
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• 2021

The accurate detection of hydrogen gas molecules is considered to be important for industrial safety. However, the selective detection of the gas using semiconductive metal oxides (SMOs)-based sensors is challenging. Here, we describe the fabrication of H₂ sensors in which a nanocellulose/graphene oxide (GO) hybrid membrane is attached to SnO₂ nanosheets (NSs). One-dimensional (1D) nanocellulose fibrils are attached to the surface of GO NSs (GONC membrane) by mixing GO and nanocellulose in a solution. The as-prepared GONC membrane is employed as a sacrificial template for SnO₂ NSs as well as a molecular sieving membrane for selective H₂ filtration. The combination of GONC membrane and SnO₂ NSs showed substantial selectivity to hydrogen gas (R_air / R_gas > 10 @ 0.8 % H₂, 100 ℃) with noise level responses to interfering gases (H₂S, CO, CH₃COCH₃, C₂H₅OH, and NO₂). These remarkable sensing results are attributed mainly to the molecular sieving effect of the GONC membrane. These results can facilitate the development of a highly selective H₂ detector using SMO sensors.

• Korean Journal of Materials Research
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• v.18 no.11
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• pp.628-633
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• 2008

ZnO nanopowders were synthesized by the sol-gel method using hydrazine reduction, and their gas responses to 6 gases (200 ppm of $C_2H_5OH$, $CH_3COCH_3$, $H_2$, $C_3H_8$, 100 ppm of CO, and 5 ppm of $NO_2$) were measured at $300\;{\sim}\;400^{\circ}C$. The prepared ZnO nanopowders showed high gas responses to $C_2H_5OH$ and $CH_3COCH_3$ at $400^{\circ}C$. The sensing materials prepared at the compositions of [$ZnCl_2$]:[$N_2H_4$]:[NaOH] = 1:1:1 and 1:2:2 showed particularly high gas responses ($S\;=\;R_a/R_g,\;R_a$ : resistance in air, $R_g$ : resistance in gas) to 200 ppm of $C_2H_5OH$($S\;=\;102.8{\sim}160.7$) and 200 ppm of $CH_3COCH_3$($S\;= 72.6{\sim}166.2$), while they showed low gas responses to $H_2$, $C_3H_8$, CO, and $NO_2$. The reason for high sensitivity to these 2 gases was discussed in relation to the reaction mechanism, oxidation state, surface area, and particle morphology of the sensing materials.

• Korean Journal of Materials Research
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• v.21 no.8
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• pp.468-475
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• 2011

[ $LaMeO_3$ ](Me = Cr, Co) powders were prepared using the polymeric precursor method. The effects of the chelating agent and the polymeric additive on the synthesis of the $LaMeO_3$ perovskite were studied. The samples were synthesized using ethylene glycol (EG) as the solvent, acetyl acetone (AcAc) as the chelating agent, and polyvinylpyrrolidone (PVP) as the polymer additive. The thermal decomposition behavior of the precursor powder was characterized using a thermal analysis (TG-DTA). The crystallization and particle sizes of the $LaMeO_3$ powders were investigated via powder X-ray diffraction (XRD), field emission scanning electron microscopy (FE-SEM), and particle size analyzer, respectively. The as-prepared precursor primarily has $LaMeO_3$ at the optimum condition, i.e. for a molar ratio of both metal-source (a : a) : EG (80a : 80a) : AcAc (8a) inclusive of 1 wt% PVP. When the as-prepared precursor was calcined at $700^{\circ}C$, only a single phase was observed to correspond with the orthorhombic structure of $LaCrO_3$ and the rhombohedral structure of $LaCoO_3$. A solid-electrolyte impedance-metric sensor device composed of $Li_{1.5}Al_{0.5}Ti_{1.5}(PO_4)_3$ as a transducer and $LaMeO_3$ as a receptor has been systematically investigated for the detection of NOx in the range of 20 to 250 ppm at $400^{\circ}C$. The sensor responses were able to divide the component between resistance and capacitance. The impedance-metric sensor for the NO showed higher sensitivity compared with $NO_2$. The responses of the impedance-metric sensor device showed dependence on each value of the NOx concentration.

• Proceedings of the Korean Vacuum Society Conference
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• 2014.02a
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• pp.176.2-176.2
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• 2014

In this work, we demonstrated that the fabrication of flexible graphene-based chemical sensor with heaters by soft lithographic patterning method [1]. First, monolayer and multilayer graphene were prepared by thermal chemical vapor deposition transferred onto SiO2 / Si substrate in order to fabrication of patterned-sensor and -heater. Second, patterned-monolayer and multilayer graphene were detached through soft lithography process, which was transferred on top and bottom sides of PET film. Third, Au / Ti (Thickness : 100/30 nm) electrodes were deposited end of the patterned-graphene line by sputtering system. Finally, we measured sensor properties through injection of NO2 and CO2 gas on different temperature with voltage change of graphene heater.

• 한국연소학회:학술대회논문집
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• 2005.10a
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• pp.104-109
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• 2005

This paper describes the effect of the split injection on combustion and emission characteristics in a common rail diesel engine at various operating conditions. The combustion pressures and exhaust emissions such as $NO_x$ and soot were measured at various split injection timings. The experimental apparatus of this study is composed of 4 cylinder engine installed with piezoelectric pressure sensor, EC dynamometer, and exhaust gas analyzer for the measurement of $NO_x$, CO, HC and soot emissions. Results show that the split injection has a great effect on reducing the rapid premixed combustion and $NO_x$ emissions.

• Journal of the Korean Ceramic Society
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• v.40 no.10
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• pp.973-980
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• 2003

The effects of additives in n-type semiconducting SnO$_2$-based gas sensors on oxidizing gases were investigated. The resistivity of SnO$_2$ sensors decreased when exposed to reducing gases, which act as electronic donors. However, the resistivities of the SnO$_2$ sensors increased when exposed to oxidizing gases, which act as electronic accepters. The products formed from the reaction of oxidizing gases ever SnO$_2$-based powders were analyzed by gas chromatography as compared with those formed from the reaction of reducing gases of alcohols. The SnO$_2$ sensors doped with PdCl$_2$ or A1$_2$O$_3$ showed unique dual response patterns toward oxidizing gases of $CH_3$CN and $CH_3$NO$_2$ depending on the operating temperature. The combination of these two sensors along with proper pattern recognition technique could enhance the selectivity for the gases with electron-accepting groups.

• Korean Journal of Materials Research
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• v.10 no.11
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• pp.778-783
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• 2000

Effects of the $Al_2$O$_3$surface protective layer, deposited on the SnO$_2$sensing layer by aerosol flame deposition (AFD) method, on the sensing properties of SnO$_2$thin film ags sensors were investigated.Effects of Pt doping to the $Al_2$O$_3$surface protective layer on the selectivity of CH$_4$ gas were also investigated. 0.3$\mu\textrm{m}$ thick SnO$_2$thin sensing layers on Pt electrodes were prepared by R.F. magnetron sputtering with R.F. power of 50 W, at working pressure of 4mTorr, and at 20$0^{\circ}C$ for 30 min. $Al_2$O$_3$surface protective layers on SnO$_2$layers were prepared by AFD using a diluted aluminum nitrade (Al(NO$_3$).9$H_2O$) solution. The sensitivity of CO gas in the SnO$_2$gas sensor with an $Al_2$O$_3$surface protective layer was significantly decreased. But that of CH$_4$gas remained almost same with pure SnO$_2$gas sensor. This result shows that the selectivity of CH$_4$gas is increased because of the $Al_2$O$_3$surface protective layer. In the case of SnO$_2$gas sensors with Pt-doped $Al_2$O$_3$surface protective layers, low sensing property to CO gas and high sensing property to CH$_4$were observed. This results in the increasing of selectivity of CH$_4$gas selectivity are discussed.

• Journal of Adhesion and Interface
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• v.21 no.2
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• pp.51-57
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• 2020

Recently, there has been growing interest in the study of removal of harmful and hazardous pollutants emitted by industrial activities. In this study, we have developed porous activated carbon fibers prepared by a water vapor activation method and analyzed the adsorptions of the harmful gases with electrochemical responses of activated carbon fibers. To control the uniformity of pore structures, active reaction areas, and active sites, the reaction conditions of activation temperatures were varied from 750 to 850 ℃ with the predetermined reaction time intervals (30 to 240 min). The SO₂ and NO gas adsorptions of activated carbon fibers prepared by various reaction conditions were analyzed and monitored by electrochemical sensor responses. In particular, the activated carbon fibers prepared at the reaction temperature of 850 ℃ and time of 45 min showed the highest specific surface area (1,041.9 ㎡/g) and pore characteristics (0.42 ㎤/g), and excellent adsorption capabilities of SO₂ (1.061 mg/g) and NO (1.210 mg/g) gases, respectively.