• 한국표면공학회지
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• 제50권5호
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• pp.373-379
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• 2017

Dry processes like evaporation and sputtering in vacuum chamber are difficult to make a uniform, large area and high quality film on thin PET substrate because of PET degradation and bad adhesion. On the other hand, wet processes like electro or electroless plating have complex processes and require high environmental cost. In this study, we successfully prepared $2{\mu}m$ Zn/Cu/Ni multilayers coated on $12{\mu}m$ polyethylene terephthalate (PET) substrate by using dry-wet mixing processes. Their surface electric resistances were evaluated around $0.2{\Omega}$ by using 4 probe measurements. Furthermore, their corrosion resistance also evaluated by natural potential test and compared with other wet, dry and mixing process samples.

• 한국전기전자재료학회논문지
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• 제15권4호
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• pp.344-348
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• 2002

As microelectronics technology continues to progress, there is also a continuous demand on highly integration and miniaturization of systems. For example, it is desirable to package several integrated circuits together in multilayer structure, such as multichip modules, to achieve higher levels of compactness and higher performance. Passive components (i.e., capacitors, resistors, and inductors) are very important fort many MCM applications. In addition, the low-temperature co-fired ceramic (LTCC) process has considerable potential for embedding passive components in a small area at a low cost. In this paper, we investigate a method of statistically modeling integrated passive devices from just a small number of test structures. A set of LTCC inductors is fabricated and their scattering parameters (s-parameters) are measured for a range of frequencies from 50MHz to 5GHz. An accurate model for each test structure is obtained by using a building block based modeling methodology and circuit parameter optimization using the HSPICE circuit simulator.

• Advances in materials Research
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• 제7권2호
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• pp.137-148
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• 2018

The present paper is a contribution in characterising end milling process of AISI 52100 ball bearing steel through statistical analyses of variance (ANOVA). The latter has been performed to identify the effect of the cutting parameters on the machined surface roughness and the cutting tool life. Wear measurements have been carried on multilayer coated carbide inserts and the respective surface roughness has been recorded. Taguchi's technique has been adapted to conduct the design experiments in terms of orthogonal arrays according to the cutting parameters (cutting speed, feed rate and depth of cut), the type of coating (TiN, TiCN, TiAlN) and lubricating condition. Regression analyses have conducted to the development of simplified empirical models that can be effectively used to predict surface roughness and tool wear in the present milling process.

• Journal of Welding and Joining
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• 제34권5호
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• pp.26-32
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• 2016

In this study, Hot-wire laser welding (HWLW) without keyhole which deposits filler material by feeding hot wire into the process zone has been performed to increase process performance. From the analysis of High Speed Imaging (HSI), for higher voltage, the process is prone to arc formation and drop transfer, which is disagreeable transfer mode. It is necessary that arc formation and drop (globular) transfer should be avoided by lower voltage. Therefore, continuous wire melting and transfer mode is preferred when adopting this process. The HWLW technique has high potential in terms of performance, precision, robustness and controllability for thick section of narrow gap.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2003년도 하계학술대회 논문집 Vol.4 No.2
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• pp.735-738
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• 2003

Downsizing electronics requires precision position control with an accuracy of sub-micron order, which demands development of ultra-fine displacive devices. Piezoelectric transducer is one of devices transferring electric field energy into mechanical energy and being capable for fine displacement control. The transducer has been widely used as fine Position control device Multilayer piezoelectric actuator, one of typical piezo-transducer, is fabricated by stacking alternatively ceramic and electrode layers several hundred times followed by cofiring process. Electrode material should be tolerable in the firing process maintaining at ceramic-sintering temperatures up to $1100{\sim}1300^{\circ}C$. Ag-Pd can be used as stable electrode material in heat treatment above $960^{\circ}C$. Besides, adding small quantity ceramic powder allow the actuator to be fabricated in a good shape by diminishing shrinkage difference between ceramic and electrode layers, resulting in avoidance of crack and delamination at and/or nearby interface between ceramic an electrode layers. This study presents synthesis of nano-oxide-added Ag/Pd powders and its feasibility to candidate material tolerable at high temperature. The powders were formed in a co-precipitation process of Ag and Pd in nano-oxide-dispersed solution where Ag and Pd precursors are melted in $HNO_3$ acid.

• 한국공작기계학회:학술대회논문집
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• 한국공작기계학회 2003년도 추계학술대회
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• pp.368-373
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• 2003

A major concern at present is the simultaneous control of transverse thickness profile and flatness in the finishing stages of hot rolling process. The mathematical modeling of hot rolling process has long been recognized to be a desirable approach to investigate rolling operating practice and the design of mill equipment to improve productivity and quality. However, many factors make the mathematical analysis of the rolling process very complex and time-consuming. In order to overcome these problems and to obtain an accurate rolling force, the predicted model of rolling force using neural networks has widely been employed. In this paper, Radial Basis Function Network(RBFN) is applied to improve the accuracy of rolling force prediction in hot rolling mill. In order to verify and analysis the performance of applied neural network, the comparison with the measured rolling force and the predicted results using two different neural networks - RBFN, MLP, has respectively been carried out. The results obtained using RBFN neural network are much more accurate those obtained the MLP.

• 한국공작기계학회논문집
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• 제13권6호
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• pp.29-33
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• 2004

A major concern at present is the simultaneous control of transverse thickness profile and flatness in the finishing stages of hot rolling process. The mathematical modeling of hot rolling process has long been recognized to be a desirable approach to investigate rolling operating practice and the design of mill equipment to improve productivity and quality. However, many factors make the mathematical analysis of the rolling process very complex and time-consuming. In order to overcome these problems and to obtain an accurate rolling force, the predicted model of rolling force using neural networks has widely been employed. In this paper, Radial Basis Function Network(RBFN) is applied to improve the accuracy of rolling force prediction in hot rolling mill. In order to verify and analyze the performance of applied neural network the comparison with the measured rolling force and the predicted results using two different neural networks-RBFN, MLP, has respectively been carried out. The results obtained using RBFN neural network are much more accurate those obtained the MLP.

• 한국세라믹학회지
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• 제39권8호
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• pp.807-811
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• 2002

본 연구에서는 EUVL(Extreme Ultra-Violet Lithography) 공정에서 사용되어지는 Mo/Si 다층박막 마스크 물질의 최적화된 제조공정을 도모하기 위해 Monte Carlo법을 적용한 PVD 공정 시뮬레이터를 사용하여 Mo/Si 다층박막 증착변수에 따른 박막의 형상변화를 분석하였다. 박막의 형상은 가스압력(1∼30 mTorr), 타겟과 기판과의 거리 (1∼30 cm) 및 확산거리(1∼10 nm)에 따라 크게 변함을 알 수 있었으며 가스압력이 낮을수록, 기판과 타겟과의 거리가 멀어질수록 균일한 표면의 박막 형성이 가능할 것으로 예측되었다.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2010년도 제39회 하계학술대회 초록집
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• pp.124-124
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• 2010

Currently, extreme ultraviolet lithography (EUVL) is being investigated for next generation lithography. EUVL is one of competitive lithographic technologies for sub-22nm fabrication of nano-scale Si devices that can possibly replace the conventional photolithography used to make today's microcircuits. Among the core EUVL technologies, mask fabrication is of considerable importance due to the use of new reflective optics having a completely different configuration compared to those of conventional photolithography. Therefore, new materials and new mask fabrication process are required for high performance EUVL mask fabrication. This study investigated the etching properties of SnO2 (Tin Oxide) as a new absorber material for EUVL binary mask. The EUVL mask structure used for etching is SnO2 (absorber layer) / Ru (capping / etch stop layer) / Mo-Si multilayer (reflective layer) / Si (substrate). Since the Ru etch stop layer should not be etched, infinitely high selectivity of SnO2 layer to Ru ESL is required. To obtain infinitely high etch selectivity and very low LER (line edge roughness) values, etch parameters of gas flow ratio, top electrode power, dc self - bias voltage (Vdc), and etch time were varied in inductively coupled Cl2/Ar plasmas. For certain process window, infinitely high etch selectivity of SnO2 to Ru ESL could be obtained by optimizing the process parameters. Etch characteristics were measured by on scanning electron microscopy (SEM) and X-ray photoelectron spectroscopy (XPS) analyses. Detailed mechanisms for ultra-high etch selectivity will be discussed.

• 한국표면공학회:학술대회논문집
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• 한국표면공학회 2007년도 춘계학술발표회 초록집
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• pp.147-148
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• 2007

In this study, the technology to grow oriented nanotube thin film from dip-coated $TiO_2$ using hydrothermal method has been successfully developed. The effects of preparation parameters, such as reaction temperature, duration and post treatment conditions on the film morphologies and the adherence to the substrate, have been examined. A general formation mechanism of oriented titanate nanotube thin film is proposed in terms of the detailed observation of the products via two dimensional surface FESEM studies and HRTEM images. The overall formation of $TiO_2-based$ nanotube thin film can be summarized with three successive steps: (1) $TiO_2$ dissolving and amorphous $Na_2TiO_3$ deposition process; (2) layered $Na_2Ti_3O_7$ formation via spontaneous crystallization and rapid growth process; (3) formation of nanotube thin film via $Na_2Ti_3O_7$ splitting and multilayer scrolling process of (100) planes around the c axis of $Na_2Ti_3O_7$.