Laser Direct Ory Etching for $Al_{0.3}Ga_{0.7}As/GaAs$ Multi-layer Structures
($Al_{0.3}Ga_{0.7}As/GaAs$ 다층구조의 레이저 직접 건식에칭)
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- Proceedings of the KIEE Conference
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- 1996.07c
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- pp.1980-1981
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- 1996