• Journal of the Korean Society for Precision Engineering
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• v.24 no.8 s.197
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• pp.89-96
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• 2007

In this paper, a new air bearing stage with magnetic preload and a linear motor has been developed for the small precision machine systems. The new air bearing stage is unique in the sense that permanent magnets attached bottom of the iron core of table are used not only for preloading air bearings in vertical direction but also for generating thrust force by current of the coil at base. The characteristics of air bearings using porous pads were analyzed with numerical method, and the magnetic circuit model was derived for linear motor for calculating required preload force and thrust force. A prototype of single axis miniature stage with size of $120(W){\times}120(L){\times}50(H)\;mm^3$ was designed and fabricated and examined its performances, vertical stiffness, load capacity, thrust force and positioning resolution.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2002.10a
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• pp.989-992
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• 2002

This paper presents a procedure far design, modeling and analysis of a fine positioning stage. The stage considered here is composed of flexure hinges, piezoelectric actuators and their peripherals. Through a series of analysis, the structural analysis model is simplified as a rigid body(the moving part) and springs (the flexure hinges). An experimental design procedure is applied to determine optimum design variables for flexure hinges. The optimum variables are validated through a numerical test. A sensitivity analysis on the notch positions is also performed to obtain a guideline of fabrication accuracy for the stage.

• Journal of the Korean Society for Precision Engineering
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• v.26 no.8
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• pp.112-118
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• 2009

A pressure rise is generated while air bearing stages are moving in high vacuum environment. This study analyzed this pressure rise phenomenon theoretically and verified it experimentally using two different kinds of stages - linear and rotary air bearing stages. Results indicate that the pressure rise was caused by additional leakage resulting from stage velocity, along with adsorption and outgassing of gas molecules from the guide rail surface. Though tilting of the stage due to acceleration and deceleration reached several micrometers, it had a negligible effect on pressure rise because the tilting time was very short. Therefore, a rotary air bearing stage showed much less pressure rise than a linear stage because the rotary stage theoretically has nothing to do with the above causes. Additional leakage caused by stage velocity was inevitable if the stage had movements, but pressure rise caused by adsorption and outgassing could be suppressed by improving the surface quality to reduce real surface area, and by coating the guide rail surface with titanium nitride (TiN) which has less adhesion probability of gas molecules. The results also indicate that the pressure rise increased when the air bearing stage operated under high vacuum conditions.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2004.11a
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• pp.121-124
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• 2004

In this paper, we address an active vibration control system, which suppresses the vibration engaged by magnetically levitated stage. The stage system consists of a levitating platen with four permanent magnetic linear synchronous motors in parallel. Each motor generates vertical force fer suspension against gravity and propulsion force horizontally as well. This stage can generate six degrees of freedom motion via the vertical and horizontal forces. In the stage system, which represents the settling-time critical system. the motion of the platen vibrates mechanically. We designed an active vibration control system for suppressing vibration due to the stage moving. The command feedforward with inertial feedback algorithm is used fer solving stage system's critical problems. The components of the active vibration control system are accelerometers for detecting stage table's vibrations, a digital controller with high precise signal converters, and electromagnetic actuators.

• Journal of Korean Society of Industrial and Systems Engineering
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• v.18 no.34
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• pp.107-114
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• 1995

The objective of this study is to design a one-stage dynamic prediction model with Kalman state space model. For a model verification, it is compared with EWMA(Exponentially Weighed Moving Average) model. The model designed in this research can be extended to process prevention control and quality monitoring.

• Korean Institute of Interior Design Journal
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• v.19 no.3
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• pp.180-187
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• 2010

The purpose of this study was to examine the application tendency of the western classical style which appears in contemporary performing arts centers. The types of space in performing arts centers were investigated according to the times. There were somewhat fixed stage and auditorium types for each period ; the ancient times had the arena stage and round auditorium, the Renaissance the proscenium stage and the U-shaped auditorium, the Elizabethan period the thrust stage and polygonal auditorium, and the modern times the proscenium and apron stage, the horseshoe and fan type auditorium. Today since the purposes of performance are multiple, a variety of stage types are applied to each performing arts center. They use various spaces and performances of multiple purposes by moving and transforming the stage and auditorium according to the kinds of performance as a variation of the arena and proscenium stage. Recently there appear complex performing arts centers that can plan performing spaces of diverse sizes and forms to fit the functions of a performance in a large building. Since they put on performances in a large space according to the characteristics of the kind of performance, the intentions and goals of the performance are well delivered to the audience.

• 제어로봇시스템학회:학술대회논문집
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• 2004.08a
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• pp.1142-1146
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• 2004

The ultra precision linear stage is an essential device in the fields of MEMS and Bio technology. A piezo electric motor is widely used for its better linear characteristics, faster response time, and smaller size than conventional electro-magnetic actuator. We develop a new inchworm type motor to implement an actuator-integrated a long stroke linear stage which can move fast. To implement a servo system, we use a heterodyne interferometer as a position sensor, and we propose a new measurement technique using I/Q demodulator, and we propose a counting method to measure the position of fast moving object with low cost circuitry. The characteristics of the actuator and servo system are evaluated by measuring its displacement with a commercial laser interferometer.

• International Journal of Precision Engineering and Manufacturing
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• v.6 no.2
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• pp.34-39
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• 2005

The precision stage is an essential device for optic fiber assembly systems, micro machines and semiconductor equipments. A new piezoelectric inchworm type actuator is proposed to implement an actuator-integrated long-stroke linear stage. An in-and-quadrature phase (I/Q) heterodyne interferometer is developed as a feedback sensor of a servo system, and a synchronized counting method is proposed. The proposed measurement system can measure the accurate position of fast moving object with robustness to external sensing noise from actuator vibration. The developed servo stage will be applied to optic fiber device assembly system.

• Proceedings of the Korean Operations and Management Science Society Conference
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• 2002.05a
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• pp.877-884
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• 2002

This paper deals with a multi-stage TSK fuzzy modeling method by using Genetic Programming (GP). Based on the time sequence of sampling data the best structural change points of complex systems are detemined by using GP, and also the moving window is simultaneously introduced to overcome the excessive amount of calculation during the generating procedure of GP tree. Therefore, a multi-stage TSK fuzzy model that attempts to represent a complex problem by decomposing it into multi-stage sub-problems is addressed and its learning algorithm is proposed based on the Radial Basis Function (RBF) network. This approach allows us to determine the model structure and parameters by stages so that the problems ran be simplified.

• The KIPS Transactions:PartB
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• v.9B no.6
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• pp.715-726
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• 2002

In this paper, we construct real-time moving picture encoder based on fractal theory by using general purpose digital signal processors. The constructed encoder is implemented using two fixed-point general DSPs (ADSP2181) and performs image encoding by three stage pipeline structure. In the first pipeline stage, the image grabber acquires image data from NTSC standard image signals and stores digital image into frame memory. In the second stage, the main controller encode image dada using fractal algorithm. The last stage, output controller perform Huffman coding and result the coded data via RS422 port. The performance tests of the constructed encoder shows over 10 frames/sec encoding speed for QCIF data when all the frames are encoded. When we encode the images using the interframe and redundency based on the proposed algorithms, encoding speed increased over 30 frames/sec in average.