• Journal of the Korean Society for Precision Engineering
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• v.22 no.6 s.171
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• pp.76-82
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• 2005

In this paper, the pole placement controller based on the Robust Internal-loop Compensator (RIC) structure, which has inherent structural equivalence to disturbance observer, is proposed to control a linear positioning system. This controller has the advantage to easily select controller gains by using pole placement without loss of that of original RIC structure. The principal is to construct the pole placement controller for a nominal internal model instead of unknown real plant. Using linear motion experiment showed the effectiveness of the proposed controller.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2003.06a
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• pp.434-437
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• 2003

Evaluation or the patterning accuracy of e-beam lithography machines requires a high precision inspection system that is capable of measuring the true xy-locations of fiducial marks generated by the e-beam machine under test. Fiducial marks are fabricated on a single photo mask over the entire working area in the form of equally spaced two-dimensional grids. In performing the evaluation, the principles of self-calibration enable to determine the deviations of fiducial marks from their nominal xy-locations precisely, not being affected by the motion errors of the inspection system itself. It is. however, the fact that only repeatable motion errors can be eliminated, while random motion errors encountered in probing the locations of fiducial marks are not removed. Even worse, a random error occurring from the measurement of a single mark propagates and affects in determining locations of other marks, which phenomenon in fact limits the ultimate calibration accuracy of e-beam machines. In this paper, we describe an uncertainty analysis that has been made to investigate how random errors affect the final result of self-calibration of e-beam machines when one uses an optical inspection system equipped with high-resolution microscope objectives and a precision xy-stages. The guide of uncertainty analysis recommended by the International Organization for Standardization is faithfully followed along with necessary sensitivity analysis. The uncertainty analysis reveals that among the dominant components of the patterning accuracy of e-beam lithography, the rotationally symmetrical component is most significantly affected by random errors, whose propagation becomes more severe in a cascading manner as the number of fiducial marks increases

• Journal of the Korean Society for Precision Engineering
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• v.32 no.5
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• pp.423-429
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• 2015

Linear motion (LM) ball guides have good accuracy and high efficiency. They are widely applied for precision machinery such as machine tools, semiconductor fabrication machines and robots. However, friction force incurs heat between the balls and grooves. Thermal expansion due to the heat deteriorates stiffness and accuracy of the LM ball guides. For accurate estimation of stiffness and accuracy during the linear motion, friction models of LM ball guides are required. To formulate accurate frictional models of LM ball guides according to load and preload conditions, rolling and viscous frictional analyses have been performed in this paper. Contact loads between balls and grooves are derived from Hertzian contact analysis. Contact angle variation is incorporated for the precision modeling. Viscous friction model is formulated from the shear stress of lubricant and the contact area between balls and grooves. Experiments confirm validity of the developed friction model for various external load and feedrate conditions.

• Transactions of the Korean Society of Machine Tool Engineers
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• v.15 no.4
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• pp.44-48
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• 2006

Recently, demand the ultra precision product which is increasing rapidly is used extensively frontier industry field such as semi-conductor, computer, aerospace, precision machine. Ultra precision processing is the portion that is very needed to NT in the field of mechanical engineering. The latest date, together with radical advancement of electronic and photonics industry, necessity of ultra precision processing is on the increase for the manufacture of various kernel parts those are connected with these industrial fields. Specially, require motion accuracy of high resolution of nm order in stroke of hundreds millimeters according as diameter of processing object great and processing accuracy rises. In this case ,the response speed absolute delay because inertial mass of moving part is very large. Therefore, real time motion error compensation becomes very hardly. In this paper, we used ultra precision cutting unit(UPCU) to cope such problem. a UPCU is designed and tested to obtain sub-micrometer from accuracy in diamond turning of flat surfaces. The thermal growth spindle error is compensated for real time using a UPCU driven by piezoelectric actuator along with a laser encoder displacement sensor.

• Journal of the Korea Institute of Military Science and Technology
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• v.13 no.4
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• pp.708-715
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• 2010

In Strapdown Inertial Navigation System, alignment accuracy is the most important factor to determine the performance of navigation. However by an existing self-alignment method, it takes a long time to acquire the alignment accuracy that we want. So, to attain the desired alignment accuracy in as little as $\bigcirc$ minutes, we have developed the precise multi-position alignment method. In this paper, it is proposed a inertial measurement matching transfer alignment method among alignment methods to minimize the alignment error in a short time. It is based on a mixed velocity-DCM matching method be suitable to the operating environment of vertical launching system. The compensation methods to reduce misalign error, especially azimuth angle error incurred by measurement time-delay error and body flexure error are analyzed and evaluated with simulation. This simulation results are finally confirmed by experimentations using FMS(Flight Motion Simulator) in Lab and the integration test to follow the fire control mission.

• Journal of the Korea Institute of Information and Communication Engineering
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• v.12 no.12
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• pp.2159-2164
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• 2008

Ubiquitous healthcare system is system that monitors and manages user's health information, and most important in the healthcare system is accuracy of the measured health data. But, the accuracy changes remarkably according to user's motion artifacts in real life. To elevate accuracy of health data, we proposed new algorithm to detect maximum point of pulse wave for heart rate extraction. and the proposed algorithm is to detect maximum points detect of pulse wave in photo-plethysmography signal included motion artifacts by fuzzy inference and multi sub-band filters. In results of experiment to evaluate the performance of the proposed algorithm, we could verify the proposed algorithm extracted maximum point of pulse wave in complex motion artifacts.

• Journal of the Korean Society for Precision Engineering
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• v.28 no.3
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• pp.265-274
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• 2011

This paper presents current state of the prediction simulator of structural characteristics of machinery equipment accuracy. Developed accuracy prediction simulator proceeds and estimates the structural analysis between the designer and simulator through the internet for convenience of designer. 3D CAD model which is input to the accuracy prediction simulator would simplified by the process of removing the small hole, fillet and chamfer. And the structural surface joints would be presented as the spring elements and damping elements for the structural analysis. The structural analysis of machinery equipment joints, containing rotary motion unit, linear motion unit, mounting device and bolted joint, are presented using Finite Element Method and their experiment. Finally, a general method is presented to tune the static stiffness at a rotation joint considering the whole machinery equipment system by interactive use of Finite Element Method and static load experiment.

• The Journal of Korean Institute of Communications and Information Sciences
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• v.24 no.9B
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• pp.1697-1703
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• 1999

In this paper, we propose the fast block matching algorithm with half pel accuracy using the lower bound of mean absolute difference (MAD) at search point of half pel accuracy motion estimation. The proposed method uses the lower bound of MAD at search point of half pel accuracy which calculated from MAD's at search points of integer pel accuracy. We can reduce the computational complexity by executing the block matching operation only at the necessary search point. The points are selected when the lower bound of MAD at that point is smaller than reference MAD of integer pel motion estimation. Experimental results show that the proposed method can reduce the computational complexity considerably and keeping the same performance with conventional method.

• Proceedings of the IEEK Conference
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• 2000.06d
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• pp.43-46
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• 2000

In this paper, we propose a fast adaptive diamond search algorithm(FADS) for block matching motion estimation. Fast motion estimation algorithms reduce the computational complexity by using the UESA (Unimodal Error Search Assumption) that the matching error monotonically increases as the search moves away from the global minimum error. Recently many fast BMAs(Block Matching Algorithms) make use of the fact that the global minimum points in real world video sequences are centered at the position of zero motion. But these BMAs, especially in large motion, are easily trapped into the local minima and result in poor matching accuracy. So, we propose a new motion estimation algorithm using the spatial correlation among the adjacent blocks. We change the origin of search window according to the spatially adjacent motion vectors and their MAE(Mean Absolute Error). The computer simulation shows that the proposed algorithm has almost the same computational complexity with UCBDS(Unrestricted Center-Biased Diamond Search)〔1〕, but enhance PSNR. Moreover, the proposed algorithm gives almost the same PSNR as that of FS(Full Search), even for the large motion case, with half the computational load.

• Proceedings of the IEEK Conference
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• 2005.11a
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• pp.339-342
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• 2005

We present an efficient block-based motion estimation algorithm with motion analysis. The motion analysis determines a size of search pattern and a maximum repeated count of search pattern. In case of large movement in large image, we reduce search points and the local minimum which caused by low performance. The proposed algorithm employs with searching step of 2. The first step determines an initial search point with neighbor block vector and a size of initial search pattern. The second step determines a size of search pattern and a maximum repeated count with motion analysis. We improve motion prediction accuracy while reducing required computational complexity compared to other fast block-based motion estimation algorithms.