• 대한기계학회논문집B
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• 제26권10호
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• pp.1406-1418
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• 2002

The direct simulation Monte Carlo(DSMC) method is employed to calculate the etch rate on Al wafer. The etchant is assumed to be Cl$_2$. The etching process of an Al wafer in a helicon plasma etcher is examined by simulating molecular collisions of reactant and product. The flow field inside a plasma etch reactor is also simulated by the DSMC method fur a chlorine feed gas flow. The surface reaction on the Al wafer is simply modelled by one-step reaction: 3C1$_2$+2Allongrightarrow1 2AIC1$_3$. The gas flow inside the reactor is compared for six different nozzle locations. It is found that the flow field inside the reactor is affected by the nozzle locations. The Cl$_2$ number density on the wafer decreases as the nozzle location moves toward the side of the reactor. Also, the present numerical results show that the nozzle location 1, which is at the top of the reactor chamber, produces a higher etch rate.

• 한국환경보건학회지
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• 제30권3호
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• pp.221-229
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• 2004

We estimated decreasing rate of indoor air pollutants which are PM10 and $NO_2$ by the air cleaner in indoor environment. This study respectively examined concentration of PM10 and $NO_2$ two times in 34 sites located in Seoul and Kyung-gi Do from April to September in 2003. Sectional period was respectively divided for operating the air cleaner and non-operating the air cleaner. Moreover, questionnaire was executed to grasp physical characteristic of objective building and residential characteristic of residents by using method of self-entry. There was a trend that concentration of PM10 and $NO_2$ separated number of residents during operating period respectively decreased among indoor air. According to the existence of smoker in indoor, both concentration of PM10 and $NO_2$ during operating period decreased in each case, and according to existence of pets, both cases decreased concentration of pollutants by operating the air cleaner. We used Monte-Calro simulation to remove uncertainty and identify efficiency of eliminated pollutants such as PM10 and $NO_2$ by the air cleaner. Average efficiency of removal for PM10 and $NO_2$ were 61.84${\pm}$23.04% and 48.67${\pm}$18.03% respectively.

• 전자공학회논문지
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• 제52권8호
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• pp.148-155
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• 2015

Levenberg-Marquardt은 최소자승법 문제의 풀이법으로 잘 알려져 있다. 하지만 이전의 표적기동분석(TMA)의 추적필터의 경우 대부분 Gauss-Newton방법을 사용하고 있으며 Gauss-Newton은 역행열 연산이 요구되어 시스템을 불안정하게 만드는 문제점이 있다. 본 논문에서는 Gauss-Newton의 수치적 불안정성을 해결하기 위해 TMA에 Levenberg-Marquardt을 적용하여 Levenberg-Marquardt이 적용된 표적기동분석 알고리즘의 안정성을 실험으로 보인다. 이를 위해 실험에서는 Monte-Calro 시물레이션을 3개 시나리오에 대하여 수행하였으며 그 결과 Levenberg-Marquardt이 Gauss-Newton에 비하여 표적기동분석 결과인 거리, 침로, 속력의 수렴되는 시간이 빨라졌으며 행렬의 발산빈도가 저하되어 표적기동분석 결과가 안정화되었다.

• 대한방사선기술학회지:방사선기술과학
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• 제43권3호
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• pp.169-176
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• 2020

Interventional radiology is performed under real-time fluoroscopy, and patients are exposed to a wide range of exposures for a long period of time depending on the examination and procedure. However, studies on radiation protection for patients during an intervention are insufficient. This study aims to evaluate the doses exposed during the intervention and the applicability of 3D printing materials. The organ dose for each intervention site was evaluated using a monte carlo simulatio. Also, the dose reduction effect of the critical organs was calculated when using a shielding device using 3D printing materials. As a result, the organ dose distribution for each intervention site showed a lower dose distribution for organs located far from the x-ray tube. It was analyzed that the influence of scattered rays was higher in the superficial organs of the back of the human body where x-rays were incident. The dose reduction effect on the critical organ using the 3D printing shield showed the highest testis among the gonads, and in the case of other organs, the dose reduction effect gradually decreased in the order of the eye, thyroid, breast, and ovary. Accordingly, it is judged that the 3D printed shield will be sufficiently usable as a shielding device for the radiation protection of critical organs.

• 품질경영학회지
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• 제25권3호
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• pp.22-38
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• 1997

In a traditional sequential acceptance sampling plan, it is assumed that the sampled items are independent each other. In this paper, stochastically dependent sequential acceptance sampling plans are dealt when there exists dependency between sampled items. Monte-Calro algorithm is used to find the acceptance and rejection probabilities of a lot. The number of defectives for the test to be accepted and rejected in probability ratio sequential test can be found by using these probabilities. The formula for measures of performance of these sampling plans is developed. Type I and II error probabilities are estimated by simulation. This research can be a, pp.ied to sequential sampling procedures in place of control charts where there is a recognized and necessary dependency during the production processes. Also, dependent multiple acceptance sampling plans can be derived by extending this sequential sampling procedure. As a numerical example, a Markov dependent process model is given, and the characteristics of the sampling plans are examined according to the change of the dependency factor.

• 한국추진공학회:학술대회논문집
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• 한국추진공학회 2011년도 제37회 추계학술대회논문집
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• pp.523-526
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• 2011

본 연구는 재료물성치의 불확실성을 고려한 구조신뢰성 해석 기법에 대한 내용이다. 설계변수의 확률분포 및 상태한계방정식을 구하고 이에 대한 확률밀도함수와 누적분포함수 계산 시 근사화 기법인 크리깅을 적용하여 구조신뢰성에 대한 계산 및 해석시간을 단축하고자 하였다. 이에 대한 예제로 알루미늄을 소재로 하는 로켓모터케이스의 재료물성치의 분포를 고려한 구조신뢰성 해석을 수행하고 그 결과를 몬테카를로 시뮬레이션과 비교함으로써 제안된 기법에 대한 정확성과 효율성을 판단하고자 한다.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 1997년도 춘계학술대회 논문집
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• pp.154-159
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• 1997

This paper describes the electron transport characteristic in SiH$_4$ gas calculated for range of E/N values from 0.5~300(Td) by the Monte Calro simulation and Boltzmann equation method using a set of electron collision cross sections determined by the authors and the values of electron swarm parameters are obtained for TOF method. The results gained that the value of an electron swarm parameter such as the electron drift velocity, the electron ionization coefficients longitudinal and transverse diffusion coefficients, characteristics energy agree with thee experimental and theoretical for a range of E/N. The electron energy distributions function were analysed in monosilane at EN : 30, 50(Td) for a case of equilibrium region in the mean electron energy. The validity of the results obtained has been confirmed by a TOF method.

• 한국가시화정보학회:학술대회논문집
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• 한국가시화정보학회 2001년도 Proceedings of 2001 Korea-Japan Joint Seminar on Particle Image Velocimetry
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• pp.14-22
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• 2001

The frequency responses on the sub-pixel evaluation technique were investigated using the Monte-calro Simulation technique. The frequency response by the FFT based cross-correlation gives very good results, however, the gain loss does exist for the small displacement, (less than 0.5 pixel). While, the no gain loss is observed in the Direct Cross-correlation, however, the sub-pixel accuracy was limited to be about 0.1 pixel, i.e., it could not detect the small displacement. To detect the higher accurate sub-pixel displacement, the gradient based technique is the best. For the small interrogation area (e.g., 4x4), only the gradient technique can detect the small displacement correctly.

• 대한방사선기술학회지:방사선기술과학
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• 제39권4호
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• pp.595-600
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• 2016

진단방사선 검사 시 환자선량을 감소하기 위한 목적으로 진단용 다엽콜리메이터를 제작하고자 하며, 제작 전 사전연구로서 진단용 다엽콜리메이터에 사용되는 차폐물질 및 차폐효율에 대한 몬테칼로 시뮬레이션을 수행하였다. 몬테칼로 시뮬레이션 코드(MCNPX, LANL, USA)를 이용하여 진단방사선 기기(ReX-650R, Listem, Korea)을 모델링하기 위하여, SRS-78 프로그램을 이용하여 관전압(80, 100, 120 kVp)에 따라 에너지 스펙트럼을 획득하였다. 진단용 다엽콜리메이터의 제작을 위하여 사용된 재료는 SKD-11(탄소 : 1.6%, 규소 : 0.4%, 망간 : 0.6%, 크롬 : 5%, 몰리브덴 : 1%, 바나듐 : 0.3%, 밀도: $7.87g/cm^3$)이며 이를 진단방사선 기기에 진단용 다엽콜리메이터($10{\times}0.5{\times}0.5cm^3$, 좌우 20개씩) 형태로 전산 모사하였다. 진단용 다엽콜리메이터의 차폐효율을 확인하기 위하여 MCNPX 코드의 tally6을 이용하여 에너지별로 차폐효율을 계산하였다. 에너지에 따른 차폐효율은 80 kVp 일 때, 98.3% 차폐되었으며, 100 kVp는 95.7%, 마지막으로 120 kVp는 93.6%가 차폐되는 것을 확인할 수 있었다. 본 연구결과를 기반으로 MLC형태 및, 누설선량에 대한 연구를 진행하여 진단방사선 기기에서 사용 가능한 진단용 다엽콜리메이터 개발에 필요한 정보를 제공할 수 있을 것이라 사료된다.

• 공업화학
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• 제10권2호
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• pp.225-230
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• 1999

Li(DPM)을 원료로 hot wall 수평 관형 반응기를 이용하여 질소-산소 및 아르곤-산소의 분위기에서 $Li_2O$ 고체박막을 LPMOCVD법으로 합성하였다. XRD와 ESCA 분석으로부터 질소-산소 분위기에서는 $Li_2CO_3$막이, 아르곤-산소의 분위기에서는 $Li_2O$막이 성장하였음을 알아냈다. 성막된 산화리튬과 리튬카보네이트는 기판의 실리콘 성분과 반응하여 실리케이트를 형성하였다. 마이크로 trench법과 Monte Carlo 시뮬레이션에 의해 기상반응 속도상수 및 표면반응 속도상수가 얻어졌으며 이를 이용한 성막속도 계산치와 실험치를 비교한 결과 실험조건범위 내에서 잘 일치하였다.