• 한국반도체및디스플레이장비학회:학술대회논문집
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• 한국반도체및디스플레이장비학회 2007년도 춘계학술대회
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• pp.128-131
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• 2007

As the minimum feature size decrease, control of contamination by nanoparticles is getting more attention in semiconductor process. Cleaning technology which removes nanoparticles is essential to increase yield. A reference wafer on which particles with known size and number are deposited is needed to evaluate the cleaning process. We simulated particle trajectories in the chamber by using FLUENT. Charged monodisperse particles are generated using scanning mobility particle sizer (SMPS) and deposited on the wafer by electrostatic force. The experimental results agreed with the simulation results well. We calculate the particles loss in pipe flow theoretically and compare with the experimental results.

• 한국응용과학기술학회지
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• 제21권4호
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• pp.380-387
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• 2004

The preparation of $CaSO_4$ nanoparticle by vesicles formed spontaneously in cationic OTAC and anionic ADS mixed surfactant solution whose ratio is 0.3/0.7 is investigated. Added electrolytes for preparing nanoparticles reduce vesicle size about 200-300 nm comparing with that of pure vesicle whose size is 700-800 nm by DLS. The core of vesicles has 200 nm size and acts as nanoreactors which same size of monodisperse $CaSO_4$ nanopaticles are formed. Although $CaSO_4$ particles are formed at the outer of vesicles, they are very large and amorphous. The formed particles are identified with XRD analysis after separation due to coinciding with $CaSO_4$ particles.

• 공업화학
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• 제9권6호
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• pp.846-851
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• 1998

w/o 에멀젼 내에서 균일용액침전반응을 진행시켜 산화아연 미세 입자를 제조하는 실험적 연구를 수행하였다. 질산아연 수용액에 hexamethylene tetramine (HMTA)을 침전제로 첨가한 침전액은 유화제 Span 80에 의해 kerosine과 안정한 w/o 에멀젼을 형성하였다. 얻어진 w/o 에멀젼을 HMTA 분해온도 이상($85^{\circ}C$)으로 가열하여 w/o 에멀젼 내에서 균일용액 침전반응을 진행시키면 산화아연 입자들이 제조되는 것을 확인하였다. 이렇게 제조된 산화아연 입자들은 이중분산 (bi-modal distribution)을 갖는 영역이 존재하기도 하였으나, 균일용액침전법에 비하여 높은 초기 아연농도와 높은 수율에서도 입자가 작고 입도분포가 비교적 좁은 산화아연 입자들을 얻을 수 있었다.

• 대한기계학회논문집B
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• 제27권12호
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• pp.1734-1743
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• 2003

Aerosol generator using an electrically heated tube furnace is a stable apparatus to supply nanometer sized aerosols by using the evaporation and condensation processes. Using this method, we can generate highly concentrated polydisperse aerosols with relatively narrow size distribution. In this work, characteristics of particle size distribution, generated from a tube furnace, were experimentally investigated. We evaluated effects of several operation parameters on particle generation: temperature in the tube furnace, air flow rates through the tube, size of boat containing solid sodium chloride(NaCl). As the temperature increased, the geometric mean diameter increased and the total number concentration also increased. Dilution with air affected the size distribution of the particles due to coagulation. A smaller sized boat, which has small surface area to contact with air, brings smaller particles of narrow size distribution in comparison of that of a larger boat. Finally, we changed the electrical mobility diameter of aggregate sodium chloride particles by varying relative humidity of dilution air, and obtained non-aggregate sodium chloride particles, which are easy to generate exact monodisperse particles.

• 한국진공학회지
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• 제7권3호
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• pp.261-266
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• 1998

공정 플라즈마내에서 입자의 거동은 하전되는 입자의 극성과 하전량에 따르게 된다. 따라서 본 연구에서는 플라즈마내에서 입자의 거동을 이해하기 위한 기초 작업으로 입자의 하전 특성을 측정하였다. 본 연구에 사용된 단분산 입자는 직경 0.05$\mu\textrm{m}$, 0.07$\mu\textrm{m}$, 0.1$\mu\textrm{m}$, 0.2$\mu\textrm{m}$ 으로 이들 입자를 DC-공기 플라즈마내에 주입하여 이들의 하전량과 하전 극성 변화를 Faraday Cup을 이용하여 측정하였다. 본 실험에서 입자의 하전량과 하전 극성은 주입 입자 의 크기와 농도 및 플라즈마 발생조건 즉, 반응 압력, 전압 등에 영향을 받음을 알 수 있었 으며 입자 당 103~105의 평균 하전 수를 갖음이 관찰되었다.

• 한국입자에어로졸학회지
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• 제10권1호
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• pp.27-31
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• 2014

A simple bimodal model has been developed to analyze charged particle coagulation by modifying previously suggested bimdal model for evolution of particle generation and growth. In the present model, two monodisperse modes are used and 40 charge nodes are assigned to each mode to account both change of the particle size and charge distribution. In addition, we also implemented the effect of electrostatic dispersion loss in the present model. Based on the developed model, we analyzed coagulation of asymmetric bipolar charged particles by computing evolutions of particle number concentration, geometric mean diameter of particles, charge asymmetric ratio and geometric standard deviation of particle size distribution for various initial charge asymmetric ratios. The number concentration of asymmetric bipolar charged particles decreases faster than that of neutral particles but that does not give faster growth of particles since the electrostatic dispersion loss overwhelms particle growth by coagulation.

• 대한기계학회논문집B
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• 제28권3호
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• pp.315-323
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• 2004

An electrical cascade impactor is a multi-stage impaction device to separate airborne particles into aerodynamic size classes using particle charging and electrical detection techniques. A Faraday cage and an aerosol charger, which are basic components of the electrical cascade impactor, were designed and evaluated in this study. The low-level current response of the Faraday cage was investigated with changing particle size and air flow rate by using sodium chloride (NaCl) particles. The response of the prototype Faraday cage was very similar to that of a commercial aerosol electrometer (TSI model 3068) within ${\pm}$5% for singly-charged particles. The response linearity of the prototype Faraday cage could be extended up to flow rate of 30 L/min. For the performance evaluation of the aerosol charger the monodisperse liquid dioctyl sebacate (DOS) particles, with diameters of 0.1∼0.8$\mu\textrm{m}$, were generated using spraying from an atomizer followed by evaporation-condensation process. Typical performance parameters of the aerosol charger such as P$.$n, wall loss, and elementary charges per particle were evaluated. The performance of the prototype aerosol charger was found to be close to that of the aerosol charger used in an electrical low pressure impactor (ELPI, Dekati).

• 대한기계학회논문집B
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• 제24권6호
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• pp.760-768
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• 2000

Filter efficiency of electrically charged particle in uncharged fibrous filter was measured. In previous studies, the effect of charged particle on filter efficiency was investigated but there was difficulty in measuring of image effect that is appeared at the charged small particle. We could easily measure the image effect with charging small particles by photoelectric charging. The spark discharge aerosol generator and a differential mobility analyzer (DMA) were used to generate sub-micron monodisperse particles (${\leq}200$ nm). The generated particles were charged in photoelectric charging process using ultraviolet lamp and electric field. The filter efficiency of the charged particles, classified by another DMA, was measured in filter tester using a condensation nucleus counter (CNC) as function of particle diameter, particle charge and airflow velocity. It is shown that the filter efficiency increases with increasing charge number of the particle and is affected by particle size and flow velocity. Single fiber filter efficiency mainly depends on image force parameter and peclet number. The peclet number was not considered at previous other papers. We propose a modi fied experimental correlation as function of image force parameter and peclet number.

• 공업화학
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• 제21권1호
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• pp.34-39
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• 2010

${\gamma}-Methacryloxypropyl$이 가진 기능성 그룹으로 silica nanoparticle의 유기변형은 silica의 표면개질로 성공적으로 준비했다. 또한 ethanol 용매에서 AAm을 사용하는 radical 침전중합을 통해서 polyacrylamide를 MPSN nanosphere에 'raft from'방법으로 microsphere가 성공적으로 graft중합되었다. FTIR과 XPS는 ultra-fine silica particle의 표면에서 실리카개질이 공유결합하는 것을 보여주며 SEM분석은 ultra-fine particle과 유기변형된 입자는 각각 25, 30, 35 nm의 크기로 응집작용을 효과적으로 막아주고 나누어줌을 증명할 수 있다는 것을 보여준다.

• 대한기계학회:학술대회논문집
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• 대한기계학회 2007년도 춘계학술대회B
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• pp.3168-3172
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• 2007

As the minimum feature size decreases, control of contamination by nanoparticles is getting more attention in semiconductor process. Cleaning technology which removes nanoparticles is essential to increase yield. A reference wafer on which particles with known size and number are deposited is needed to evaluate the cleaning process. We simulated particle trajectories in the chamber by using FLUENT and designed a particle deposition system which consists of scanning mobility particle sizer (SMPS) and deposition chamber. Charged monodisperse particles are generated using SMPS and deposited on the wafer by electrostatic force. The experimental results agreed with the simulation results well in terms of particle number and deposition area according to particle size, flow rate and deposition voltage.