• 제목/요약/키워드: Monoclinic

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DUV lithography 위상 변위 마스크용 Zr, Hf Oxide의 전자상태 및 천이 상태 연구 (The electronic states and transition state of Zr and Hf oxide as a phase shift maske for DUV lithography)

  • 김성관;김양수;노광수;허성민;최성운;송정민
    • 한국재료학회:학술대회논문집
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    • 한국재료학회 2003년도 추계학술발표강연 및 논문개요집
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    • pp.215-215
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    • 2003
  • 현재 이용되고 있는 위상 변위 마스크, 즉 Cr 계열의 마스크나 MoSiON 마스크는 DUV지역에서 낮은 굴절률을 갖는다. 그 겯과 마스크의 두께가 90 nm 이상이 되고, 웨이퍼에서 패턴 형성 시 에러율이 증가하게 된다. 본 연구에서는 DUV 지역에서 굴절률이 높을 것이라고 예상되는 Zr과 Hf의 oxide를 위상 변위 마스크 물질의 선정하고 각 물질의 전자 상태와 천이 상태를 분석하여 위상변위 마스크로써의 이용가능성을 연구하자 한다. 상온에서 Zr, Hf oxide의 안정한 구조는 cubic 구조와 monoclinic 구조이다. 현재 cubic 구조의 Zr, Hf oxide에 대한 전자 상태는 연구가 많이 되어 있는 반면 monoclinic 구조에서의 전자상태 연구는 미흡하다. 본 연구에서는 monoclinic 구조를 이용하여 Zr, Hf oxide의 클러스터 모델을 제작하였다. 제작된 클러스터 모델에 대하여 DV-X$\alpha$ 계산법을 적용, 기저상태의 전자상태를 계산하였다. 그리고 각 모델에서 Zr L-edge, Hf L-edge 그리고 O K-edge의 천이상태를 연구하여, 기저 상태의 전자상태와 천이상태를 연구하여 광학 성질과의 연관성을 연구하고자 하였다.

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Transmission Electron Microscopy Observation of (202) and (211) Twins in Monoclinic $ZrO_2$ Thin Film

  • Cheol Seong Hwang;Geun Hong Kim;Chang Hwan Chum;Hyeong Joon Kim
    • The Korean Journal of Ceramics
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    • 제1권3호
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    • pp.143-146
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    • 1995
  • Twins along(202) and (211) planes are observed in monoclinic $ZrO_2$ thin film, which is deposited on Si substrate by MOCVD at $350^{\circ}C$ and annealed at $1150^{\circ}C$ for 10 hours in air. These types of twin have not been reported in monoclinic $ZrO_2$. The twins seem to be originated from the two dimensional tensile stresses applied to the $ZrO_2$ thin film due to the different thermal expansions of $ZrO_2$ thin film and Si substrate.

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Triclinic, Monoclinic 및 Orthorhombic Systems에서 Phase Angle 0 또는 $\pi$를 갖는 3종류의 Reflections (Three Kinds of Reflections with Phase Angle 0 or $\pi$ In Triclinic, Monoclinic and Orthorhombic Systems)

  • Kim, Young-Sang;Jaejung Ko;Kang, Sang-Ook;Lee, Young-Joo;Eugene Kang;Shu, Il-Hwang
    • 한국결정학회지
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    • 제14권1호
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    • pp.13-15
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    • 2003
  • For all primitive centric space groups in the triclinic, monoclinic and orthorhombic systems, either phase 0 or π can be allocated to three different kinds of reflections in order to specify the origin at one of the eight centers of symmetry. and the same holds for all primitive acentric space groups belonging to the point group 222. If these phased reflections are used as a basic set, more and more phased reflections with better accuracy could emerge in the process of direct methods.

Crystal Structure and Physical Property of Tetragonal-like Epitaxial Bismuth Ferrites Film

  • Nam, Joong-Hee;Biegalski, Michael;Christen, Hans M.;Kim, Byung-Ik
    • 한국자기학회:학술대회 개요집
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    • 한국자기학회 2011년도 임시총회 및 하계학술연구발표회
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    • pp.7-8
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    • 2011
  • Basically, the lattice mismatch between film and substrate can make those BiFeO3(BFO) films distorted with strain structure. BFO phase can be stabilized on LaAlO3(LAO) represents the example of a multiferroic with giant axial ratio. Its crystal structure is not strictly tetragonal, but tetragonal with a slight monoclinic distortion and related to the rotation of the oxygen octahedra. In this study, we show that phases with a tetragonal-like epitaxial BFO films can indeed be ferroelectric and also can be stabilized via epitaxial growth onto LAO. Recent reports on epitaxial BFO films show that the crystal structure changes from nearly rhombohedral ("R-like") to nearly tetragonal("T-like") at strains exceeding approximately -4.5%, with the "T-like" structure being characterized by a highly enhanced c/a ratio. While both the "R-like" and the "T-like" phases are monoclinic, our detailed x-ray diffraction results reveal asymmetry change from MA and MC type, respectively. By applying additional strain or by modifying the unit cell volume of the film by substituting Ba for Bi, the monoclinic distortion in the "T-like" MC phase is reduced, i.e. the system approaches a true tetragonal symmetry. There are two different M-H loops for $Bi_{1-x}Ba_xFeO_{3-{\delta}}$(BBFO) and BFO films on SrTiO3(STO) & LAO substrates. Along with the ferroelectric characterization, these magnetic data indicate that the BFO phase stabilized on LAO represents the first example of a multiferroic with giant axial ratio. However, there is a significant difference between this phase and other predicted ferroelectrics with a giant axial ratio: its crystal structure is not strictly tetragonal, but tetragonal with a slight monoclinic distortion. Therefore, in going from bulk to highly-strained films, a phase sequence of rhombohedral(R)-to-monoclinic ["R-like" MA-to-monoclinic, "T-like" MC-to-tetragonal (T)] is observed. This sequence is otherwise seen only near morphotropic phase boundaries in lead-based solid-solution perovskites (i.e. near a compositionally induced phase instability), where it can be controlled by electric field, temperature, or composition. Our results show that this evolution can occur in a lead-free, stoichiometric material and can be induced by stress alone. Those major results are summarized as follows ; 1) Ba-doping increases the unit cell volume, 2) BBFO on LAO can be fully strained up to x=0.08 as a strain limit (Fig. 1), 3) P(E) & M(H) properties can be tuned by the variation of composition, strain, and film thickness.

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The effect of low temperature aging on the mechanical property & phase stability of Y-TZP ceramics

  • Kim, Hyung-Tae;Han, Jung-Suk;Yang, Jae-Ho;Lee, Jai-Bong;Kim, Sung-Hun
    • The Journal of Advanced Prosthodontics
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    • 제1권3호
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    • pp.113-117
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    • 2009
  • STATEMENT OF PROBLEM. Recently Yttrium-stabilized tetragonal zirconia polycrystal (Y-TZP) has been introduced due to superior flexural strength and fracture toughness compared to other dental ceramic systems. Although zirconia has outstanding mechanical properties, the phenomenon of decrease in the life-time of zirconia resulted from degradation in flexural strength after low temperature aging has been reported. PURPOSE. The objective of this study was to investigate degradation of flexural strength of Y-TZP ceramics after various low temperature aging treatments and to evaluate the phase stability and micro-structural change after aging by using X-ray diffraction analysis and a scanning electron microscope (SEM). MATERIAL AND METHODS. Y-TZP blocks of Vita In-Ceram YZ (Vita Zahnfabrik, Bad $S\ddot{a}ckingen$, Germany) were prepared in 40 mm (length) $\times$ 4 mm (width) $\times$ 3 mm (height) samples. Specimens were artificially aged in distilled water by heat-treatment at a temperature of 75, 100, 125, 150, 175, 200, and $225^{\circ}C$ for 10 hours, in order to induce the phase transformation at the surface. To measure the mechanical property, the specimens were subjected to a four-point bending test using a universal testing machine (Instron model 3365; Instron, Canton, Mass, USA). In addition, X-ray diffraction analysis (DMAX 2500; Rigaku, Tokyo, Japan) and SEM (Hitachi s4700; Jeol Ltd, Tokyo, Japan) were performed to estimate the phase transformation. The statistical analysis was done using SAS 9.1.3 (SAS institute, USA). The flexural strength data of the experimental groups were analyzed by one-way analysis of variance and to detect statistically significant differences ($\alpha$= .05). RESULTS. The mean flexural strength of sintered Vita In-Ceram YZ without autoclaving was 798 MPa. When applied aging temperature at below $125^{\circ}C$ for 10 hours, the flexural strength of Vita In-Ceram YZ increased up to 1,161 MPa. However, at above $150^{\circ}C$, the flexural strength started to decrease. Although low temperature aging caused the tetragonal-to-monoclinic phase transformation related to temperature, the minimum flexural strength was above 700 MPa. CONCLUSION. The monoclinic phase started to appear after aging treatment above $100^{\circ}C$. With the higher aging temperature, the fraction of monoclinic phase increased. The ratio of monoclinic/tetragonal + monoclinic phase reached a plateau value, circa 75% above $175^{\circ}C$. The point of monoclinic concentration at which the flexural strength begins to decrease was between 12% and 54%.

단사정계의 비표준공간군을 표준공간군으로 변환 (Transformation from Non-Standard Space Groups to Standard Ones of Monoclinic System)

  • 오미란;김경한;서일환
    • 한국결정학회지
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    • 제7권2호
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    • pp.196-200
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    • 1996
  • 단사정계에서 비표준공간군의 단위포 자료, Miler 지수 그리고 원자좌표들을 표준공간군의 것으로의 변환과정과 그들의 표준편차의 계산과정을 제시하고 computer program화 하였다. 이 program들은 7개 결정계 모두에게 적용할 수 있다.

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졸-겔법에 의한 $MgO-ZrO_2$ 섬유의 제조와 특성 (Preparation of $MgO-ZrO_2$ Fibers by Sol-Gel Method and Their Characterization)

  • 황진명;은희태
    • 한국세라믹학회지
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    • 제31권10호
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    • pp.1147-1158
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    • 1994
  • From Zr(O-nC3H7)4-H2O-C2H5OH-HNO3 starting solutions, MgO-doped stabilized zirconia fibers with varying content of MgO (10~18 mol%) from different MgO sources were fabricated by sol-gel method. The MgO sources used are magnesium nitrate hexahydrate, magnesium acetate tetrahydrate, and magnesium ethylate. The phase transformation studies of a drawn MgO-ZrO2 fiber were carried out using X-ray diffraction, IR spectroscopy, and Raman spectroscopy. The microstructure, tensile strength, and microporosity of fibers were investigated using SEM, tensile strength test, and microporosimeter. Although various MgO sources such as magnesium nitrate, acetate, and ethylate were used, the crystallization behavior of MgO-ZrO2 fibers at different temperatures could be summarized as follows: CubiclongrightarrowMetastable TetragonallongrightarrowMonocliniclongrightarrowCoexistence of Monoclinic and CubiclongrightarrowCubic(trace of monoclinic). At 150$0^{\circ}C$, the phase transformation of MgO-ZrO2 fibers shows the following change depending on the amount of MgO[Mg(NO3)2.6H2O]: At 10 mol%, both monoclinic and cubic phase coexist, at 12 mol%, monoclinic phase decreases rapidly, and then at 14 mol%, only cubic phase remains. When the MgO-ZrO2 fibers containing 12 mol% magnesium nitrate were heated at 80$0^{\circ}C$ for 1hr, average tensile strength of fibers is 4.0 GPa at diameters of 20 to 30 ${\mu}{\textrm}{m}$. As the heat-treatment temperatures increase to 100$0^{\circ}C$ for 1 hr, tensile strength of MgO-ZrO2 fibers decreases rapidly to 0.7 GPa.

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$TlGa_xIn_{1-x}Se_2$ Solid Solution의 광학적 특성 및 상전이에 관한 연구 (Study on Optical Properties and Phase Transition of $TlGa_xIn_{1-x}Se_2$ Solid Solutions)

  • 윤창선;김병호;차덕준
    • 한국진공학회지
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    • 제2권2호
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    • pp.220-226
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    • 1993
  • Bridgman 방법으로 성장된 $TlGa_xIn_{1-x}Se_2$ 단결정의 격자상수와 energy gap의 성분의존성을 조사하였다. $TlGa_xIn_{1-x}Se_2$ solid solution의 불연속 특성이 tetragonal과 monoclinic 구조를 가진 0.25$0.0{\leq}X{\leq}0.25$)로부터 monoclinic 구조($0.65{\leq}X{\leq}1.0$)로 변하는 구조적 상전이가 이 성분영역에서 관측되었다. $TlGaSe_2$ 단결정의 energy gap과 유전상수의 온도의존성으로부터 각각 1차 및 2차 상전이에 상당하는 107 K와 120 K에서 변칙특성을 발견하였다.

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Effects of Mechanically Activated Milling and Calcination Process on the Phase Stability and Particle Morphology of Monoclinic Zirconia Synthesized by Hydrolysis of ZrOCl2 Solution

  • Lee, Young-Geun;Ur, Soon-Chul;Mahmud, Iqbal;Yoon, Man-Soon
    • 한국재료학회지
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    • 제23권10호
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    • pp.543-549
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    • 2013
  • The purpose of this paper was to investigate the effect of a high-energy milling (HEM) process on the particle morphology and the correlation between a thermal treatment and tetragonal/monoclinic nanostructured zirconia powders obtained by a precipitation process. To eliminate chloride residue ions from hydrous zirconia, a modified washing method was used. It was found that the used washing method was effective in removing the chloride from the precipitated gel. In order to investigate the effect of a pre-milling process on the particle morphology of the precipitate, dried $Zr(OH)_4$ was milled using a HEM machine with distilled water. The particle size of the $Zr(OH)_4$ powder exposed to HEM reduced to 100~150 nm, whereas that of fresh $Zr(OH)_4$ powder without a pre-milling process had a large and irregular size of 100 nm~1.5 ${\mu}m$. Additionally, modified heat treatment process was proposed to achieve nano-sized zirconia having a pure monoclinic phase. It was evident that two-step calcining process was effective in perfectly eliminating the tetragonal phase, having a small average particle of ~100 nm with good uniformity compared to the sample calcined by a single-step process, showing a large average particle size of ~300 nm with an irregular particle shape and a broad particle size distribution. The modified method is considered to be a promising process for nano-sized zirconia having a fully monoclinic phase.

3Y-TZP의 기계적 물성에 미치는 영향: (I) 단사정지르코니아의 첨가 (Effect on Mechanical Properties of 3Y-TZP; (I) Addition of Monoclinic Zirconia)

  • 양성구;배경만;조범래;강종봉
    • 한국세라믹학회지
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    • 제42권6호
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    • pp.411-416
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    • 2005
  • Y-TZP(Yttria-stabilized Tetragonal Zirconia Polycrystal) ceramics are of great interest as engineering and structural materials due to their excellent mechanical properties arising from transformation toughening, it is also reported that the 3Y-TZP($3 mol\%$ Yttria-stabilized Tetragonal Zirconia Polycrystal) has the best mechanical properties in Y-TZP ceramics. But to use widely for engineering and structural materials, it remains an important challenge to be able to improve its fracture toughness. In order to produce the 3Y- TZP ceramics showing much better mechanical properties, milling method adding monoclinic zirconia to 3Y-TZP was adopted and the resultant mechanical properties containing apparent density and fracture toughness were measured by using proper techniques. Experimental results showed that the 3Y-TZP specimen containing $33 wt\%$ of monoclinic zirconia, which was sintered at $1450^{\circ}C$, has the highest fracture toughness value of $11.38 MPa{\cdot}m^{1/2}$ which is three times higher than that of normal 3Y-TZP ceramics.