• Proceedings of the Korean Vacuum Society Conference
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• 2014.02a
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• pp.237.1-237.1
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• 2014

Etching is one of the most important steps in semiconductor manufacturing. In etch process control a critical task is to stop the etch process when the layer to be etched has been removed. If the etch process is allowed to continue beyond this time, the material gets over-etched and the lower layer is partially removed. On the other hand if the etch process is stopped too early, part of the layer to be etched still remains, called under-etched. Endpoint detection (EPD) is used to detect the most accurate time to stop the etch process in order to avoid over or under etch. The goal of this research is to develop a hardware and software system for EPD. The hardware consists of an Optical Plasma Monitor (OPM) sensor which is used to continuously monitor the plasma optical emission intensity during the etch process. The OPM software was developed to acquire and analyze the data to perform EPD. Our EPD algorithm is based on the following theory. As the etch process starts the plasma generated in the vacuum is added with the by-products from the etch reactions on the layer being etched. As the endpoint reaches and the layer gets completely removed the plasma constituents change gradually changing the optical intensity of the plasma. Although the change in optical intensity is not apparent, the difference in the plasma constituents when the endpoint has reached leaves a unique signature in the data gathered. Though not detectable in time domain, this signature could be obscured in the frequency spectrum of the data. By filtering and analysis of the changes in the frequency spectrum before and after the endpoint we could extract this signature. In order to do that, first, the EPD algorithm converts the time series signal into frequency domain. Next the noise in the frequency spectrum is removed to look for the useful frequency constituents of the data. Once these useful frequencies have been selected, they are monitored continuously in time and using a sub-algorithm the endpoint is detected when significant changes are observed in those signals. The experiment consisted of three kinds of etch processes; ashing, SiO2 on Si etch and metal on Si etch to develop and evaluate the EPD system.

• Geophysics and Geophysical Exploration
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• v.20 no.4
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• pp.216-225
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• 2017

Recently, steel casing became an interesting issue when applying controlled-source electromagnetic (EM) method to various fields because effects of steel casing on EM responses are not negligible. This study employed an approach that approximates the steel casing as a series of electric dipole sources in order to develop the numerical algorithm for the efficient simulation of EM responses in the presence of steel casing. After verifying the validity of the developed algorithm, we analyze effects of steel casing on EM responses with the synthetic model simulating geothermal reservoir environment. The analysis showed that the effects of steel casing on EM responses are localized near the casing and increase as the transmitter becomes close to the casing. In addition, through the analysis on the EM responses by the injection of clean water, we confirm that the effects of casing are negligible when interpreting the after-injection data acquired using the transmitter located far enough from the casing. Considering the difference in EM responses between before and after injection in inversion, the effects of the casing can be neglected although after-injection data shows considerable difference due to the close distance between the transmitter and casing. To investigate this kind steel casing effect, the precise analysis on EM responses should be preceded. The algorithm introduced in this study will contribute to the reliable calculations of EM responses distorted by the conductive steel casing.

• Fire Science and Engineering
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• v.32 no.1
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• pp.33-39
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• 2018

When the fire in the high-rise building was not extinguished in its early stage and propagated over its origin, safe egress becomes one of the most important factor to minimize the casualties. Recently fire protection for high-rise building has been reinforced after experiencing the series of disastrous fires. But, we still find many high-rise buildings do not comply with those reinforcement. And also there is a possibility of failure of reinforced fire protection system. Under these situation safe egress guide would be the final layer of protection. In this study existing egress methods were identified and evaluated. According the result of study, priority in egress should be given to the tenants on the floor of fire origin and floors exposed to the risk of fire. Then, the rest of the tenants can be evacuated simultaneously. Floors exposed in fire risk shall be determined by fire tests and/or fire simulations. But, the result of fire monitoring shall override preliminary estimations. Egress time for each algorithm was estimated by egress simulation and the result was compared. There was a little difference in egress time between total egress and phased egress, and a big difference between using stairs only and using elevators and stairs together. to a constant thickness between layers constituting a firefighter's protective clothing should be considered in the future.

• Proceedings of the Korean Institute of Information and Commucation Sciences Conference
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• 2010.05a
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• pp.535-539
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• 2010

This paper include to study DoA(Direction of Arrival) for radio collection and monitoring system. The direction finding calculated by applying the CVDF (Correlation Vector Direction Finding) algorithm for the five circular dipole antenna over V / UHF band. To improve the accuracy of direction finding by applying CVDF algorithm needs to obtain ideal phase difference each antennas. However, a circular array antenna phase difference pattern may be distorted on a specific frequency band or to particular direction. The effect of installing each array antennas circularly and the effect of the interference of center pole (located in the center of a circular array antenna mount) may make the distortion of phase pattern. If you use an active antenna instead of passive antenna to obtain good sensitivity, you would measure the more distortion. This paper propose how to change combination of antennas to measure the phase in real-time and how to use antenna beam patterns for minimizing the degradation phenomena at applying simple CVDF algorithm and increasing the direction finding capability.

• The KIPS Transactions:PartA
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• v.8A no.4
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• pp.319-330
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• 2001

In virtual memory system, when a process attempts to access a page that is not resident in memory, the system generates and handles a page fault that causes unpredictable delay. So virtual memory system is not appropriate for the real-time system, because it can increase the deadline miss ratio of real-time task. In multimedia system, virtual memory system may degrade the QoS(quality of service) of multimedia application. Furthermore, in general-purpose operating system, whenever a new task is dynamically loaded, virtual memory system suffers from extensive page fault that cause transient overloading state. In this paper, we present efficient overloading control mechanism called RBPFH (Rate-Based Page Fault Handling). A significant feature of the RBPFH algorithm is page fault dispersion that keeps page fault ratio from exceeding available bound by monitoring current system resources. Furthermore, whenever the amount of available system resource is changed, the RBPFH algorithm dynamically adjusts the page fault handling rate. The RBPFH algorithm is implemented in the Linux operating system and its performance measured. The results demonstrate RBPFH\`s superior performance in supporting multimedia applications. Experiment result shows that RBPFH could achieve 10%∼20% reduction in deadline miss ratio and 50%∼60% reduction in average delay.

• Journal of the Institute of Electronics and Information Engineers
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• v.52 no.4
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• pp.156-163
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• 2015

In this paper, we propose an active water level and distance measurement algorithm using a light beam pattern. On behalf of conventional water level gauge types of pressure, float-well, ultrasonic, radar, and others, recently, extensive research for video analysis based water level measurement methods is gradually increasing as an importance of accurate measurement, monitoring convenience, and much more has been emphasized. By turning a reference light beam pattern on bridge or embankment actively, we suggest a new approach that analyzes and processes the projected light beam pattern image obtained from camera device, measures automatically water level and distance between a camera and a bridge or a levee. As contrasted with conventional methods that passively have to analyze captured video information for recognition of a watermark attached on a bridge or specific marker, we actively use the reference light beam pattern suited to the installed bridge environment. So, our method offers a robust water level measurement. The reasons are as follows. At first, our algorithm is effective against unfavorable visual field, pollution or damage of watermark, and so on, and in the next, this is possible to monitor in real-time the portable-based local situation by day and night. Furthermore, our method is not need additional floodlight. Tests are simulated under indoor environment conditions from distance measurement over 0.4-1.4m and height measurement over 13.5-32.5cm.

• Korean Journal of Remote Sensing
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• v.35 no.2
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• pp.337-342
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• 2019

This letter describes the development of WRI (Wildfire Risk Index) using GDAPS (Global Data Assimilation and Prediction System) and satellite data, and its application to the Goseong-Sokcho and Gangneung-Donghae wildfires in April 4, 2019. We made sure that the proposed WRI represented the change of wildfire risk of around March 19 and April 4 very well. Our approach can be a viable option for wildfire risk monitoring, and future works will be necessary for the utilization of GK-2A products and the coupling with the wildfire prediction model of the Korea Forest Service.

• Tunnel and Underground Space
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• v.29 no.4
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• pp.243-261
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• 2019

Microseismic monitoring technologies have been recognized for its superiority over traditional methods and are used in domestic and overseas underground mines. However, the complex gangway layout of underground mines in Korea and the mixed structure of excavated space and rock masses make it difficult to estimate the microseismic propagation and to determine the arrival time of microseismic wave. In this paper, experimental studies were carried out to determine the source location according to various arrival picking methods and dimensional conditions. The arrival picking methods used were FTC (First Threshold Cross), Picking window, AIC (Akaike Information Criterion), and 2-D and 3-D source generation experiments were performed, respectively, under the 2-D sensor array. In each experiment, source location algorithm used iterative method and genetic algorithm. The iterative method was effective when the sensor array and source generation were the same dimension, but it was not suitable to apply when the source generation was higher dimension. On the other hand, in case of source location using RCGA, the higher dimensional source location could be determined, but it took longer time to calculate. The accuracy of the arrival picking methods differed according to the source location algorithms, but picking window method showed high accuracy in overall.

• KSII Transactions on Internet and Information Systems (TIIS)
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• v.15 no.5
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• pp.1666-1689
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• 2021

The red line of Permanent Basic Farmland is the most important part in the "three-line" demarcation of China's national territorial development plan. The scientific and reasonable delineation of the red line is a major strategic measure being taken by China to improve its ability to safeguard the practical interests of farmers and guarantee national food security. The delineation of Permanent Basic Farmland zoning (DPBFZ) is essentially a multi-objective optimization problem. However, the traditional method of demarcation does not take into account the synergistic development goals of conservation of cultivated land utilization, ecological conservation, or urban expansion. Therefore, this research introduces the idea of artificial immune optimization and proposes a multi-objective model of DPBFZ red line delineation based on a clone selection algorithm. This research proposes an objective functional system consisting of these three sub-objectives: optimal quality of cropland, spatially concentrated distribution, and stability of cropland. It also takes into consideration constraints such as the red line of ecological protection, topography, and space for major development projects. The mathematical formal expressions for the objectives and constraints are given in the paper, and a multi-objective optimal decision model with multiple constraints for the DPBFZ problem is constructed based on the clone selection algorithm. An antibody coding scheme was designed according to the spatial pattern of DPBFZ zoning. In addition, the antibody-antigen affinity function, the clone mechanism, and mutation strategy were constructed and improved to solve the DPBFZ problem with a spatial optimization feature. Finally, Tongxu County in Henan province was selected as the study area, and a controlled experiment was set up according to different target preferences. The results show that the model proposed in this paper is operational in the work of delineating DPBFZ. It not only avoids the adverse effects of subjective factors in the delineation process but also provides multiple scenarios DPBFZ layouts for decision makers by adjusting the weighting of the objective function.

• Journal of the Korea Convergence Society
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• v.12 no.8
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• pp.31-37
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• 2021

As the size of buildings increases due to urbanization due to the development of industry, the need to purify the air and maintain a comfortable indoor environment is also increasing. With the development of monitoring technology for refrigeration systems, it has become possible to manage the amount of electricity consumed in buildings. In particular, refrigeration systems account for about 40% of power consumption in commercial buildings. Therefore, in order to develop the refrigeration system failure diagnosis algorithm in this study, the purpose of this study was to understand the structure of the refrigeration system, collect and analyze data generated during the operation of the refrigeration system, and quickly detect and classify failure situations with various types and severity . In particular, in order to improve the classification accuracy of failure types that are difficult to classify, a three-step diagnosis and classification algorithm was developed and proposed. A model based on SVM and LGBM was presented as a classification model suitable for each stage after a number of experiments and hyper-parameter optimization process. In this study, the characteristics affecting failure were preserved as much as possible, and all failure types, including refrigerant-related failures, which had been difficult in previous studies, were derived with excellent results.