• Title/Summary/Keyword: Molybdenum

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Characteristics of Molybdenum Nitride Diffusion Barrier for Copper Metallization (Cu 금속배선을 위한 Molybdenum Nitride 확산 방지막 특성)

  • Lee, Jeong-Yeop;Park, Jong-Wan
    • Korean Journal of Materials Research
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    • v.6 no.6
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    • pp.626-631
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    • 1996
  • Reactive dc magnetron sputtering 법을 이용하여 증착한 molybdenum mitride 박막의 Cu 확산 방지막 특성을 조사하였다. Cu 확산 방지막으로서 molybdenum nitride 박막의 열적안정성을 관찰하기 위하여 molybdenum nitride 박막 위에 Cu를 evaporation 법으로 증착하고 진공 열처리하였다. Cu/r-Mo2N/si 구조는 $600^{\circ}C$, 30분간 열처리 시까지 안정하였다. 확산 방지막의 파괴는 $650^{\circ}C$, 30분간 열처리 시부터 격자 확산(lattice diffusion)이나 입계(grain boundary)과 결함(defect)을 통한 확산에 의해 나타나기 시작하였고, 이 때 molybdenum silicide과 copper silicide의 형성에 기인된 것으로 생각되었다. 열처리 이후 Cu/r-Mo2N/Si 사이의 상호반응이 증가하였다. 이는 Rutherford backscattering spectrometry, Auger electron spectroscopy 그리고 Nomarski microscopy 등의 분석을 통해 조사되었다.

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Rolling Contact Fatigue Property of Sintered and Carburized Compacts Made of Molybdenum Hybrid-alloyed Steel Powder

  • Unami, Shigeru;Ozaki, Yukiko;Uenosono, Satoshi
    • Proceedings of the Korean Powder Metallurgy Institute Conference
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    • 2006.09a
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    • pp.144-145
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    • 2006
  • A developed molybdenum hybrid-alloyed steel powder is based on a molybdenum prealloyed steel powder to which molybdenum powder particles are diffusion bonded. The sintered compact made of this powder has a finer pore structure than that of the conventional molybdenum prealloyed steel powder, because the ferritic iron phase $({\alpha}-phase)$ with a high diffusion coefficient is formed in the sintering necks where molybdenum is concentrated resulting in enhanced sintering. The rolling contact fatigue strength of the sintered and carburized compacts made of this powder improved by a factor of 3.6 compared with that of the conventional powder due to the fine pore structures.

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Evaluation of Basic Beneficiation Characteristics for Optimizing Molybdenum Ore Flotation Process (몰리브덴광 부유선별 공정 최적화를 위한 기초 선광 특성 평가)

  • Seongsoo Han;Joobeom Seo
    • Resources Recycling
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    • v.33 no.2
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    • pp.37-45
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    • 2024
  • Molybdenum is used in various industries because of its high heat and corrosion resistance. It was selected as a critical mineral in Korea. However, there have been recent challenges in production because of the increased depth and decreased grade of molybdenum veins. Consequently, it is necessary to enhance the effectiveness of the molybdenum beneficiation process. In this study, a basic evaluation of beneficiation characteristics was conducted to enhance the effectiveness of the domestic molybdenum ore beneficiation process. The properties of the beneficiation process were assessed using mineralogical analysis, work index, and flotation kinetics. The results revealed that the allowable particle size of the molybdenum ore for liberation was ~100 ㎛. In addition, the work index was calculated to be 14.57 kWh/t. The operating conditions in the flotation units were achieved by determining the optimal flotation time for each process based on flotation kinetics. Finally, the characteristics of molybdenum ore beneficiation provided in this study can be utilized to diagnose the grinding and flotation processes of large-scale molybdenum beneficiation plants.

Diffusion barrier characteristics of molybdenum nitride films for ultra-large-scale-integrated Cu metallization(II); Effect of deposition conditions on diffusion barrier behavior of molybdenum nitride

  • Lee, Jeong-Joub;Lee, You-Kee;Jeon, Seok-Ryong;Kim, dong-Joon
    • Journal of Korean Vacuum Science & Technology
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    • v.1 no.1
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    • pp.30-37
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    • 1997
  • Interactions of Cu films with Si substrates separated by thin layers of molybdenum and molybdenum nitride were investigated in the viewpoint of diffusion barrier to copper. the diffusion barrier behavior of the layers was studied as functions of deposition and annealing conditions by cross-sectional transmission electron microscopy and Nomarski microscopy. the layers deposited at $N_2$ gas ratios of 0.4 and 0.5 exhibited good diffusion barrier behaviors up to $700^{\circ}C$, mainly due to the phase transformation of molybdenum to $\gamma$-Mo$_2$N phase. The increase in the N gas ratio in deposition elevates the lower limit of barrier failure temperature. Futhermore, amorphous molybdenum nitride films deposited at 20$0^{\circ}C$ and 30$0^{\circ}C$ did not fail, while the crystalline $\gamma$-Mo$_2$N films deposited at 40$0^{\circ}C$ and 50$0^{\circ}C$ showed signs of interlayer interactions between Cu and Si after annealing at 75$0^{\circ}C$ for 30 minutes. Therefore, the amorphous nature of the molybdenum nitride layer enhanced its ability to reduce Cu diffusion and its stability as a diffusion barrier at elevated temperatures.

BEHAVIORS OF MOLYBDENUM IN UO2 FUEL MATRIX

  • Ha, Yeong-Keong;Kim, Jong-Goo;Park, Yang-Soon;Park, Soon-Dal;Song, Kyu-Seok
    • Nuclear Engineering and Technology
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    • v.43 no.3
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    • pp.309-316
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    • 2011
  • Molybdenum is the most abundant fission product since its fission yield is equivalent to that of xenon, and it has a very special role in the chemistry of nuclear fuel because it influences the oxygen potential of $UO_2$ fuel. In this study, the distribution of molybdenum in spent $UO_2$ fuel specimens with 33.3, 41.0 and 57.6 GWd/tU burnup was measured by a LA-ICP-MS system and the reproducibility of the measured data was obtained. The Mo distribution was almost constant along the radius of a fuel except an increase at the periphery of the fuel. It showed a drop in reproducibility with relatively high deviation of measured values for the highest burnup fuel. To explain this, the state of molybdenum in a $UO_2$ matrix and its effect on the oxidation behavior of $UO_2$ were investigated. The low reproducibility was explained by the segregation of molybdenum, and the inhibition of oxidation by the molybdenum was also observed.

The Effect of the Acid Precipitate Conditions on the Size Distribution of Molybdenum Trioxide Particle

  • Tang, Jun-Li
    • Proceedings of the Korean Powder Metallurgy Institute Conference
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    • 2006.09a
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    • pp.171-172
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    • 2006
  • The effect of the preparation factors, such as the feeding mode and rate of raw materials, the reaction temperature and the surfactant on the size distribution of molybdenum trioxide particle were investigated by orthogonal test. The optimum conditions for the preparation of $MoO_3$ precursors are as following; opposite feeding fast, reaction temperature of $60^{\circ}C$ and adding dispersant.

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Damage Measurement for Molybdenum Thin Film Using Reflection-Type Digital Holography (반사형 디지털 홀로그래피를 이용한 Molybdenum 박막의 손상 측정)

  • Kim, Kyeong-Suk;Jung, Hyun-Il;Shin, Ju-Yeop;Ma, Hye-Joon;Kwon, Ik-Hwan;Yang, Seung-Pill;Hong, Chung-Ki;Jung, Hyun-Chul
    • Journal of the Korean Society for Nondestructive Testing
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    • v.35 no.2
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    • pp.141-149
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    • 2015
  • In the fabrication of electronic circuits used in electronic products, molybdenum thin films are deposited on semiconductors to prevent oxidation. During the deposition, the presence of a particle or dust at the interface between the thin film and substrate causes the decrease of adhesion, performance, and life cycle. In this study, a damage measurement targeting two kinds of glass substrate, with and without particles, was performed in order to measure the change in the molybdenum thin film deposition area in the presence of a particle. Clean and dirty molybdenum thin film specimens were fabricated and directly deposited on a substrate using the sputtering method, and a reflection-type digital holographic interferometer was configured for measuring the damage. Reflection-type digital holography has several advantages; e.g., the configuration of the interferometer is simple, the measurement range can be varied depending on the magnification of a microscopic lens, and the measuring time is short. The results confirm that reflection-type digital holography is useful for the measurement of the damage and defects of thin films.

Effects of Si and Mo on the Temperature-Dependent Properties of High Si High Mo Ductile Cast Irons (고규소 고몰리브덴 구상흑연주철의 온도 의존 특성에 미치는 규소와 몰리브덴의 영향)

  • Choe, Kyeong-Hwan;Lee, Sang-Mok;Kim, Myung-Ho;Yun, Sang-Weon;Lee, Kyong-Whoan
    • Journal of Korea Foundry Society
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    • v.29 no.6
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    • pp.257-264
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    • 2009
  • The effects of silicon and molybdenum on the temperature-dependent properties of high silicon and high molybdenum ductile cast iron were investigated. Microstructure was composed of ferrite, cell boundary complex carbide, carbide precipitated in the grain and graphite. The number and size of carbide decreased with the increase of silicon content and increased with the increase of molybdenum content, however, the size of cell boundary carbide increased above 0.81wt%Mo. The room temperature tensile strength increased with the increase of silicon and molybdenum contents. That did not increase with the latter with more than 0.8wt%. Meanwhile the high temperature tensile strength showed the similar trend to that of room temperature one, that of the specimen with 0.55wt%Mo was the highest. The $A_1$ transformation temperature increased with the silicon and molybdenum contents, and showed similar tendency with the variation of strength. It was discussed due to the solubility limit of Molybdenum in ferrite, of which value was assumed to be in the vicinity of 0.81wt%Mo. The weight after oxidation at 1,173K showed the result caused by the difference in solubility of molybdenum in the matrix. That and the thickness change after oxidation did not show any consistent trend with the silicon and molybdenum contents.

Novel Method for Stripping of Molybdenum(VI) after Its Extraction with Cyanex 301

  • Saberyan, Kamal;Maragheh, Mohammad Ghannadi;Ganjali, Mohammad Reza
    • Bulletin of the Korean Chemical Society
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    • v.25 no.4
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    • pp.460-465
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    • 2004
  • Hydrofluoric acid has been used as a novel stripping agent for molybdenum(VI) after its extraction with Cyanex 301. In the extraction step, the effects of parameters such as type and initial concentration of acid, type of diluent, extractant concentration, metal concentration and temperature have been studied. In the stripping step, the effects of various stripping agents on stripping efficiency have been investigated. Hydrofluoric acid has been chosen as an effective stripping agent, and the effects of concentration of hydrofluoric acid, stripping time, volume of hydrofluoric acid and the number of stages of stripping have been studied. Molybdenum(VI) has been effectively separated from a large number of elements in binary mixtures, with a very high tolerance limit. Finally, the optimized method has been extended for the analysis of Mo(VI) in spent molybdenum catalysts.