• Transactions of the Korean Society of Mechanical Engineers B
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• v.37 no.1
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• pp.19-25
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• 2013

In this study, the mechanical properties of a Ti thin film are measured by a bulge test. In the bulge test, uniform pressure is applied to one side of the film. Measurement of the membrane deflection as a function of the applied pressure allows one to determine the mechanical properties of the film. Ti thin films with thicknesses of 1.0, 1.5, and $2.0{\mu}m$ were deposited on a Si wafer by using an RF magnetron sputtering system. These specimens were annealed at $600^{\circ}C$ for 150, 300, and 600 s to investigate the effect of temperature on the yield stress and mechanical properties of the Ti films. The elastic modulus, residual stress, and yield stress of these membranes are measured by a bulge test. The experimental results suggest that the yield stress is sensitive to the film thickness and annealing time.

• Proceedings of the Korean Vacuum Society Conference
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• 2000.02a
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• pp.128-128
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• 2000

박막의 탄성 특성을 평가하는 방법으로 nano-indentation, Brillouin light scattering measurement, ultrasonic surface wave measurement, bulge test, vibration membrane method 등 여러 가지가 제시되어 왔다. 이러한 방법들은 필름의 두께가 일정 두께 이상이 되어야 정확한 측정이 가능한 방법으로 매우 얇은 박막에서도 탄성특성을 평가할 수 있는 freehang, bridge 방법이 제시되었으며, 이 방법은 간단한 식각 공정을 통해 매우 얇은 박막에도 적용시킬 수 있다는 장점을 가지고 있다. 본 연구에서는 아주 얇은 박막에서도 탄성특성을 평가할 수 있는 freehang 방법을 이용하여 순수한 Diamond-like carbon (DLC) 필름과 Sidl 첨가된 DLC 필름의 탄성 특성을 평가하고자 한다. 실험에서 사용한 필름은 rf-PACVD 장비를 이용하여 증착하였다. 이때 전극과 플라즈마 사이의 바이어스 음전압은 -400 Vb로 합성압력은 10mTorr로 고정하였다. 사용한 반응 가스는 벤젠(C6H6), 그리고 벤젠과 희석된 실렌(SiH4 : H2 = 10 : 90)이며, 희석된 실렌의 첨가량을 조절하여 필름 내에 일정량의 Si을 함유시켰다. 각각의 조건에서 증착시간을 조절하여 필름의 두께를 변화시켰으며, KOH(5.6mol) 용액을 이용하여 습식 식각을 함으로써 freehang을 제작하였다. 이때 식각액에 의한 DLC 필름의 손상은 관찰되지 않았다. 필름의 잔류 응력을 측정하기 위해 200$\pm$10 혹은 100$\pm$5$\mu\textrm{m}$ 두께의 얇은 (100) Si wafer를 5$\times$50 mm2의 strip 형태로 절단하여 사용하였다. 필름의 압축 잔류 응력에 의해 발생한 필름/기판 복합체의 곡률은 laser 반사법과 $\alpha$-step profiler를 이용하여 측정하였으며, 이 결과를 Brenner 등에 유도된 식을 이용하여 잔류 응력을 계산하였다. 또한 제작된 frddhang은 광학 현미경과 전자주사현미경에 의해 관찰되었다. 이렇게 제작된 freehang을 이용하여 필름이 기판에 부착되기 위해 필요한 변형률을 측정하고, 독립적으로 측정된 필름의 잔류 응력을 박막의 응력-변형률 관계식에 적용하여 biaxial elastic modulus, E/(1-v)를 구할 수 있었다. 측정 결과 필름의 잔류 응력과 biaxial elastic modulus는 필름의 두께가 감소함에 따라 감소하는 경향을 나타냈으며, 같은 두께의 필름인 경우, 식각 깊이에 따른 biaxial elastic modulus 의 변화를 통해 최적의 식각 깊이를 알 수 있었다.

• Elastomers and Composites
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• v.45 no.4
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• pp.309-315
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• 2010

The CIIR blends, which is use for shoes outsole, with SSBR, XNBR and KBR were prepared with various mixing ratio. The viscoelastic properties of these blends, such as tensile modulus, rebound resilience, storage modulus, tan${\delta}$, and creep properties were measured. In the rebound resilience measurement, KBR showed the highest value, which means the lowest energy absorption to stress. As SSBR, XNBR and KBR blends with CIIR, the rebound resilience of the mixtures showed tendency to increase in arithmetic average. In the creep measurement, CIIR showed the highest visconse strain to stress, SSBR and KBR showed lower visconse strain. Maximum tan${\delta}$ peak of CIIR, SSBR and XNBR appeared at $-30^{\circ}C$, $5^{\circ}C$ and $0^{\circ}C$ respectively.

• Journal of the Korean Recycled Construction Resources Institute
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• v.10 no.2
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• pp.143-151
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• 2022

In this study the relative dynamic modulus and surface rebound hardness measurement methods were used for comparison to predict the occurrence of frost dam age on the concrete. From the test results, it was observed that the initiation of concrete dam age predicted by surface rebound hardness values was 200 cycles quicker than that of the relative dynamic modulus method in the W/C 70 specimens. In addition, it continuously provided data that showed the frost damage development of concrete surfaces according to increasing freeze-thaw cycles. This indicated that the frost dam age of the concrete could be found from the initial point of its occurrence by the surface rebound hardness measurement method. Similar results were also observed in W/C 60 and 50 specimens. Therefore, it is considered that surface rebound hardness method predicted the freeze-thaw damage well, regardless of water-cement ratio.

• Journal of the Korean Geotechnical Society
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• v.24 no.5
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• pp.117-127
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• 2008

The volumetric pressure plate extractor (VPPE) was modified for the measurement of shear wave velocity ($V_s$) at various levels of matric suction as well as soil water characteristic curve (SWCC). A non-destructive technique with a pair of bender element (BE) was employed in order to measure the $V_s$ and the corresponding maximum shear modulus ($G_{max}$) of unsaturated soil specimens. Three types of soil were collected from different road construction sites in Korea. For all test soils, the variations in $G_{max}$ with the various levels of water content and matric suction were investigated using the developed apparatus. Compared with the preceding results from the suction-controlled torsional shear (TS) testing system and in-situ seismic tests, the feasibility fur evaluating modulus characteristics of unsaturated compacted soils with the developed VPPE-BE system was assessed. It was confirmed that the newly developed system would be potentially helpful in modeling seasonal variation of modulus.

• Proceedings of the Korean Geotechical Society Conference
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• 2003.03a
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• pp.291-298
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• 2003

The resonant column testing is a laboratory testing method to determine the shear modulus and the material damping factor of soils. The method has been widely used for many applications and its importance has been increased. Since the establishment of the testing method in 1963, the low-technology electronic devices for testing and data acquisition have limited the measurement to the amplitude of the linear spectrum. The limitations of the testing method were also attributed to the assumption of the linear-elastic material in the theory of the resonant column testing and to the use of the wave equation for the dynamic response of the specimen. For the better theoretical formulation of the resonant column testing, this study derived the equation of motion and provided its solution. This study also proposed the improved data reduction and analysis method for the resonant column testing, based on the advanced data acquisition system and the proposed theoretical solution for the resonant column testing system. For the verification of the proposed data reduction and analysis method, the numerical simulation of the resonant column testing was performed by the finite element analysis. Also, a series of resonant column testing were peformed for Joomunjin sand, which verified the feasibility, of the proposed method and showed the limitations of the conventional data reduction and analysis method.

• Proceedings of the Korea Committee for Ocean Resources and Engineering Conference
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• 2004.05a
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• pp.342-346
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• 2004

Recently there has been a great world-wide interest in developing and characterizing new nano-structured materials. These newly developed materials are often prepared in limited quantities and shapes unsuitable for the extensive mechanical testing. The development of depth sensing indentation methods have introduced the advantage of load and depth measurement during the indentation cycle. In the present work, ZnO thin films are prepared on the Glass, GaAs(100), Si(111), and Si(100) substrates at different temperatures by pulsed laser deposition(PLD) method. Because the potential energy in c-axis is law, the films always shaw c-axis orientation at the optimized conditions in spite of the different substrates. Thin films are investigated by X-ray diffractometer and Nano indentation equipment. From these measurements it is possible to get elastic modulus and hardness of ZnO thin films on all substrates.

• Tribology and Lubricants
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• v.28 no.4
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• pp.173-177
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• 2012

We used contact resonance force microscopy (CRFM) technique to determine the quantitative elastic properties of multiple materials integrated on the sub micrometer scale. The CRFM approach measures the frequencies of an AFM cantilever's first two flexural resonances while in contact with a material. The plain strain modulus of an unknown or test material can be obtained by comparing the resonant spectrum of the test material to that of a reference material. In this study we examined the following bumping materials for flip chip by using copper electrode as a reference material: NiP, Solder (Sn-Au-Cu alloy) and under filled epoxy. Data were analyzed by conventional beam dynamics and contact dynamics. The results showed a good agreement (~15% difference) with corresponding values determined by nanoindentaion. These results provide insight into the use of CRFM methods to attain reliable and accurate measurements of elastic properties of materials on the nanoscale.

• Polymer(Korea)
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• v.27 no.3
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• pp.189-194
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• 2003

Interfacial evaluation, damage sensing and cure monitoring of single carbon fiber/thermo setting composite with different curing processes were investigated using electro-micromechanical test. After curing, the residual stress was monitored by measurement of electrical resistance and then compared to various curing processes. In thermal curing case, matrix tensile strength, modulus and interfacial shear strength were higher than those of ultraviolet curing case. The shrinkage measured during thermal curing occurred significantly by matrix shrinkage and residual stress due to the difference in thermal expansion coefficient. The apparent modulus measured in the thermal curing indicated that mechanical and interfacial properties were highly improved. The reaching time to the same stress of thermal curing was faster than that of UV curing case.

• Journal of the Korean Society for Precision Engineering
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• v.26 no.7
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• pp.91-98
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• 2009

A reliable tensile test technique for PDP's barrier rib materials was introduced. A tensile specimen was prepared by punching out of green sheet, curing the specimen in a high temperature furnace, attaching sand paper tabs on each grip ends, and then attaching two strain gages for the strain monitoring and specimen alignment. Preliminary tensile tests were successfully done with the specimens made from ZnO-based lead-free green sheet. The specimens cured at 3 different maximum curing temperatures were tested to demonstrate the applicability of the test method. The Young's modulus was 88 ${\pm}$ 4 GPa regardless of the maximum curing temperature. The ultimate tensile strength was decreased with increasing the temperature. The tensile test method proposed in this study was proven to be reliable, useful and easy to estimate the bulk mechanical properties of barrier rib materials.