• 제목/요약/키워드: Mo-tip FEA

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CRT의 Spot-knocking 공정에 있어서 몰리브텐 팁 전계 방출 소자 냉응극의 고장 형태 분석 (Failure Mode Analysis of Mo-tip EFA Cold-Cathode in CRT Spot-knocking Process)

  • 주병권;김훈;박종원;김남수;김동호;이윤희
    • 대한전기학회논문지:전기물성ㆍ응용부문C
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    • 제50권8호
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    • pp.414-418
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    • 2001
  • Failure modes of Mo-tip FEA were investigated in detail as a preliminary study for the application of Mo-tip FEA to the CRT electron-gun as a cold cathode. It was identified that the destruction of Mo-tip FEA was originated from reflowing of arc-current during the spot-knocking process followed by secondary arc between gate electrode and cathode substrate. In order to prevent Mo-tip FEA from destruction due to arc-current, two kinds of methods were suggested, that is one is to provide the by-pass of the reflow current and the other is to install a current limiter in the path of gate connection line.

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질소가 도핑된 DLC 막의 물성 조사 및 Mo-tip FEA 소자에의 응용 (Investigation of Physical Properties of N-doped DLC Film and Its Application to Mo-tip FEA Devices)

  • 주병권;정재훈;김훈;이윤희;이남양;오명환
    • 대한전기학회논문지:전기물성ㆍ응용부문C
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    • 제48권1호
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    • pp.19-22
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    • 1999
  • N-doped and low-hydrogenated DLC thin films were coated on the Mo-tip FEAs in order to improve the field emission performance and their electrical properties were evaluated. The fabricated devices showed improved field emission performance in terms of turn-on voltage, emission current and current fluctuation. This result might be caused both by the shift of Fermi level toward conduction band by N-doping and by the inherent stability of DLC material. Furthermore, the transconductance of the DLC-coated Mo-tip FEA and electrical conductivity and optical band-gap of the deposited DLC films were investigated.

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몰리브덴 팁 전계 방출 표시 소자의 프릿 실링에 있어서 분위기 기체가 전계 방출 성능에 미치는 영향 (Influence of Ambient Gases on Field Emission Performance in the Frit-sealing Process of Mo-tip Field Emission Display)

  • 주병권;김훈;정재훈;김봉철;정성재;이남양;이윤희;오명환
    • 대한전기학회논문지:전기물성ㆍ응용부문C
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    • 제48권7호
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    • pp.525-529
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    • 1999
  • The influence of ambient gases on field emission performance of Mo-field emitter array(FEA) in the frit-sealing step of field emission display(FED) packaging process was investigated. Mo-tip FEA was mounted on the glass substrate having a surrounded frit(Ferro FX11-137) and fired at $415^{\circ}C$ in the ambient gases of air, $N_2$ and Ar. The Ar gas was proved to be most proper ambient among the used gases through evaluating the turn-on voltage and field emission current of the fired Mo-tip FEA devices. It was confirmed that the Mo surface fired in Ar ambient was less oxidized when compared with another ones annealed in air and Ar ambient by the AFM, XPS, AES and SIMS analysis. Finally, the 3.5 inch-sized Mo-tip FED, which was packaged using frit-sealing process in the Ar ambient, was proposed.

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몰리브덴 팁 전계 방출 소자에 있어서 크롬 게이트 전극 구조의 개선 (Improvement of Geometrical Structure of Cr-Gate Electrode in Mo-tip Field Emitter Array)

  • 주병권;김훈;서상원;이윤희
    • 대한전기학회논문지:전기물성ㆍ응용부문C
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    • 제50권10호
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    • pp.532-535
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    • 2001
  • The sputtering condition of Cr thin film was established in order to get Cr gate electrode having a vertical wall structure for Mo-tip FEA. In case of Mo-tip FEA which had a vertically-etched Cr gate electrode, the field enhancement factor, was relatively increased and so the field emission performance in terms of turn-on voltage, emission current and trans-conductance could be improved when compared with the devices having a tapered gate wall.

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낮은 수소 함유량을 갖는 유사 다이아몬드 박막의 몰리브덴 팁 전계 방출 소자 응용 (Application of Low-hydrogenated Diamond-like Carbon Film to Mo-tip Field Emitter Array)

  • 주병권;정재훈;김훈;이윤희;오명환
    • 대한전기학회논문지:전기물성ㆍ응용부문C
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    • 제48권2호
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    • pp.76-79
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    • 1999
  • Low-hydrogenated DLC films were coated on the Mo-tip FEAs by 'layer-by-layer' process based on the plasma-enhanced CVD method. The hydrogen content in the DLC film deposited by the 'layer-by-layer' process was appeared to be remarkably lowered through SIMS analysis. Also, the low-hydrogenated DLC-coated Mo-tip FEA showed good potentiality for FED applications in terms of turn-on voltage, emission current, emission stability and light emitting uniformity.

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Ti-실리사이드를 이용한 새로운 고내구성 전계방출소자의 제작 (Fabrication of New Ti-silicide Field Emitter Array with Long Term Durability)

  • 장지근;백동기;윤진모;임성규;장호정
    • 한국재료학회지
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    • 제8권1호
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    • pp.10-12
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    • 1998
  • Si FEA 로부터 tip의 표면을 Ti금속으로 silicidation한 새로운 2극형 Ti-실리사이드 FEA를 제작하고 이의 전계방출 특성을 Si FEA의 경우와 비교하였다. 양극과 음극간의 거리를 10$\mu\textrm{m}$로 유지하고 $10^{-8}$Torr의 고진공 상태에서 측정한 실리사이드 FEA의 turn-on전압은 약 40V로, 전계방출전류와 정상상태 전류 변동율은 150V의 바이어스 아래에서 약 3x$10^{-2}$ $\mu$A/tip와 0.1%min로 나타났다. Ti-실리사이드 FEA는 Si FEA에 비해 낮은 turn-on 전압, 높은 전계방출전류 및 고내구특성을 나타내었다.

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몰리브덴 팁 전계 방출 소자의 제조 및 다이아몬드 상 카본의 코팅효과 (Fabrication of Mo-tip Field Emitter Array and Diamond-like Carbon Coating Effects)

  • 주병권;정재훈;김훈;이상조;이윤희;차균현;오명환
    • 한국전기전자재료학회논문지
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    • 제11권7호
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    • pp.508-516
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    • 1998
  • Mo-tip field emitter arrays(FEAs) were fabricated by conventional Spindt process and their life time characteristics and failure mode were evaluated. The fabricated Mo-tip FEA could generate at least $0.35\{mu} A/tip$ emission current for about 320 persistently under a constant gate bias of 140 V and was finally destroyed through self-healing mode. Thin diamond-like carbon films were coated on the M-tip by plasma-enhanced CVD and the dependence of emission properties upon the DLC thickness was investigated. By DLC coating, the turn-on voltage and emission current were appeared to be improved whereas the current fluctuation was increased in the DLC thickness range of $0~1,000\{AA}$.

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몰리브덴 팁 전계 방출 소자를 이용한 CRT의 냉음극 전자총의 제조 및 특성 평가 (Fabrication and Characterization of Cold Cathode Electron-gun of CRT using Mo-tip Field Emitter Array)

  • 주병권;김훈;서상원;박종원;이윤희;김남수
    • 대한전기학회논문지:전기물성ㆍ응용부문C
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    • 제50권8호
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    • pp.409-413
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    • 2001
  • In the electron-gun of CRT, the Mo-tip FEA was employed as cold cathode in order to replace the conventional thermal cathode. The Mo-tip FEA was designed and fabricated according to CRT specification and mounted on the electron-gun. It was known that fabricated cold cathode electron-gun showed better performance in terms of maximum emission current and switch-on time when compared with the ones of thermal cathode electron-gun, but some geometrical structures in the inside of electron-gun must be changed to reduce the gate leakage current. Finally, the potential applicability was guaranteed by means of operating the 19 inch-sized LG-color CRT using the fabricated cold cathode electron-gun.

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실리사이드를 이용한 새로운 고내구성 실리콘 전계방출소자의 제작 (Fabrication of New Silicided Si Field Emitter Array with Long Term Stability)

  • 장지근;윤진모;정진철;김민영
    • 한국재료학회지
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    • 제10권2호
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    • pp.124-127
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    • 2000
  • Si FEA로부터 tip의 표면을 Ti 금속으로 silicidation한 새로운 3극형 Ti-silicided Si FEA를 제작하고 이의 전계 방출특성을 조사하였다. 제작된 소자에서 단위 pixel(pixel area : $1000{\mu\textrm{m}}{\times}1000{$\mu\textrm{m}}$, tip array : $200{\mu\textrm{m}}{\times}200{$\mu\textrm{m}}$)을 통해 측정된 전계 방출 특성은 $10^8Torr$의 고진공 상태에서 turn-on 전압이 약 70V로, 아노드 방출전류의 크기와 current degradation이 $V_A=500V,\;V_G=150V$ 바이어스 아래에서 각각 2nA/tip와 0.3%/min로 나타났다. 3극형 Ti-silicided Si FEA의 낮은 turn-on 전압과 높은 전류안정성은 Si tip 표면에 형성된 실리사이드 박막의 열화학적 안정성과 낮은 일함수에 기인하는 것으로 판단된다.

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비정질 실리콘 박막을 이용한 Sodalime-Sodalime 정전 열 접합 및 FEA Packaging 응용 (Sodalime-sodalime Electrostatic Bonding using Amorphous Silicon Interlayer and Its Application to FEA Packging)

  • 주병권;이덕중;최우범;김영조;이남양;오명환
    • 대한전기학회논문지:전기물성ㆍ응용부문C
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    • 제48권9호
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    • pp.656-661
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    • 1999
  • As a fundamental study for FED tubeless packaging, sodalime-sodalime electrostatic bonding was performed by using on the developed bonding mechanism. Thebonding properties of the bonded sodalime-sodalime structure were investigated through SEM and SIMS analyses. Mo-tip FEA was vacuum-packaged by the developed bonding process and the packaged device generated the field emission current.

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